TW200636841A - Cleaning device and cleaning method - Google Patents
Cleaning device and cleaning methodInfo
- Publication number
- TW200636841A TW200636841A TW095110619A TW95110619A TW200636841A TW 200636841 A TW200636841 A TW 200636841A TW 095110619 A TW095110619 A TW 095110619A TW 95110619 A TW95110619 A TW 95110619A TW 200636841 A TW200636841 A TW 200636841A
- Authority
- TW
- Taiwan
- Prior art keywords
- cleaning
- target object
- opening
- side wall
- wafer
- Prior art date
Links
- 238000004140 cleaning Methods 0.000 title abstract 8
- 238000000034 method Methods 0.000 title 1
- 239000012530 fluid Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005104614 | 2005-03-31 | ||
JP2005216217 | 2005-07-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200636841A true TW200636841A (en) | 2006-10-16 |
Family
ID=36190753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095110619A TW200636841A (en) | 2005-03-31 | 2006-03-28 | Cleaning device and cleaning method |
Country Status (5)
Country | Link |
---|---|
US (1) | US20060219257A1 (zh) |
EP (1) | EP1708249A2 (zh) |
KR (1) | KR100710505B1 (zh) |
SG (1) | SG126125A1 (zh) |
TW (1) | TW200636841A (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105478391A (zh) * | 2015-12-31 | 2016-04-13 | 上海新阳半导体材料股份有限公司 | 晶圆清洁设备 |
PT3309279T (pt) * | 2016-10-14 | 2020-09-08 | Atotech Deutschland Gmbh | Método, aparelho de processamento de substrato do tipo bolacha e sua utilização |
JP6818607B2 (ja) * | 2017-03-27 | 2021-01-20 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP6974087B2 (ja) * | 2017-09-14 | 2021-12-01 | 株式会社ディスコ | 切削装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5158616A (en) * | 1988-07-22 | 1992-10-27 | Tokyo Electron Limited | Apparatus for cleaning a substrate |
KR100254653B1 (ko) * | 1991-10-04 | 2000-05-01 | 월터 알란 이. | 대상물을 처리하는 방법 |
KR0129712Y1 (ko) * | 1995-10-06 | 1999-02-01 | 문정환 | 반도체 제조 장치의 회전 도포 장치 |
JPH10135171A (ja) * | 1996-10-29 | 1998-05-22 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
DE69835988T2 (de) * | 1997-08-18 | 2007-06-21 | Tokyo Electron Ltd. | Doppelseitenreinigungsmaschine für ein Substrat |
US20010013355A1 (en) * | 1998-10-14 | 2001-08-16 | Busnaina Ahmed A. | Fast single-article megasonic cleaning process for single-sided or dual-sided cleaning |
JP3739225B2 (ja) * | 1998-12-22 | 2006-01-25 | 大日本スクリーン製造株式会社 | 基板処理装置 |
US6799583B2 (en) * | 1999-05-13 | 2004-10-05 | Suraj Puri | Methods for cleaning microelectronic substrates using ultradilute cleaning liquids |
JP2002093765A (ja) * | 2000-09-20 | 2002-03-29 | Kaijo Corp | 基板洗浄方法および基板洗浄装置 |
JP2002353181A (ja) * | 2001-05-30 | 2002-12-06 | Ses Co Ltd | 枚葉式基板洗浄方法および枚葉式基板洗浄装置 |
US6726848B2 (en) * | 2001-12-07 | 2004-04-27 | Scp Global Technologies, Inc. | Apparatus and method for single substrate processing |
-
2006
- 2006-03-21 EP EP06111436A patent/EP1708249A2/en not_active Withdrawn
- 2006-03-23 US US11/387,268 patent/US20060219257A1/en not_active Abandoned
- 2006-03-28 TW TW095110619A patent/TW200636841A/zh unknown
- 2006-03-29 SG SG200602095A patent/SG126125A1/en unknown
- 2006-03-30 KR KR1020060028745A patent/KR100710505B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR100710505B1 (ko) | 2007-04-23 |
SG126125A1 (en) | 2006-10-30 |
US20060219257A1 (en) | 2006-10-05 |
KR20060105540A (ko) | 2006-10-11 |
EP1708249A2 (en) | 2006-10-04 |
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