TW200618092A - Substrate processor - Google Patents
Substrate processorInfo
- Publication number
- TW200618092A TW200618092A TW094120163A TW94120163A TW200618092A TW 200618092 A TW200618092 A TW 200618092A TW 094120163 A TW094120163 A TW 094120163A TW 94120163 A TW94120163 A TW 94120163A TW 200618092 A TW200618092 A TW 200618092A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- processing liquid
- processing
- constituted
- supplied
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1313—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Abstract
The present invention provides a substrate processing device 10 specifically processes a substrate B carried at a nearly horizontal attitude along a conveyance path 171. The device disposes in series a liquid collection type nozzle device 20 constituted to collect a supplied processing liquid from the substrate B as a processing liquid supply device supplying the specified processing liquid to the carrying substrate B, and an air knife 30 constituted to blow the remaining processing liquid on the substrate B with an air current as a processing removing device removing the processing liquid left on the substrate B, after the processing liquid is supplied are arranged in series along the conveyance path 171 to achieve the solidification of the substrate processing device.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004196045A JP2006019525A (en) | 2004-07-01 | 2004-07-01 | Substrate processing device |
JP2004197047A JP4324517B2 (en) | 2004-07-02 | 2004-07-02 | Substrate processing equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200618092A true TW200618092A (en) | 2006-06-01 |
TWI275141B TWI275141B (en) | 2007-03-01 |
Family
ID=37149957
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094120163A TWI275141B (en) | 2004-07-01 | 2005-06-17 | Substrate processor |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100764683B1 (en) |
TW (1) | TWI275141B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI615208B (en) * | 2015-07-06 | 2018-02-21 | Shibaura Mechatronics Corp | Water jet, substrate processing device and substrate processing method |
CN115254789A (en) * | 2022-08-22 | 2022-11-01 | 赫曼半导体技术(深圳)有限公司 | Wet processing substrate processing device |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4688741B2 (en) * | 2006-06-26 | 2011-05-25 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
KR100854981B1 (en) * | 2007-10-10 | 2008-08-28 | 홍경표 | Wet processing treatment apparatus for manufacturing printed circuit board |
KR102147687B1 (en) * | 2013-08-13 | 2020-08-27 | 세메스 주식회사 | Substrate treating apparatus and transporting method |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3159658B2 (en) | 1996-12-06 | 2001-04-23 | 松下電器産業株式会社 | Method for etching a substrate having a transparent conductive layer |
JP3970567B2 (en) * | 2001-09-17 | 2007-09-05 | アルプス電気株式会社 | Wet processing equipment |
-
2005
- 2005-06-17 TW TW094120163A patent/TWI275141B/en not_active IP Right Cessation
- 2005-07-01 KR KR1020050059085A patent/KR100764683B1/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI615208B (en) * | 2015-07-06 | 2018-02-21 | Shibaura Mechatronics Corp | Water jet, substrate processing device and substrate processing method |
CN115254789A (en) * | 2022-08-22 | 2022-11-01 | 赫曼半导体技术(深圳)有限公司 | Wet processing substrate processing device |
Also Published As
Publication number | Publication date |
---|---|
TWI275141B (en) | 2007-03-01 |
KR100764683B1 (en) | 2007-10-09 |
KR20060049744A (en) | 2006-05-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |