TW200606607A - Control system, control method, processing system, computer readable storing medium and computer program - Google Patents

Control system, control method, processing system, computer readable storing medium and computer program

Info

Publication number
TW200606607A
TW200606607A TW094114921A TW94114921A TW200606607A TW 200606607 A TW200606607 A TW 200606607A TW 094114921 A TW094114921 A TW 094114921A TW 94114921 A TW94114921 A TW 94114921A TW 200606607 A TW200606607 A TW 200606607A
Authority
TW
Taiwan
Prior art keywords
storing medium
computer program
processing system
computer readable
control method
Prior art date
Application number
TW094114921A
Other languages
English (en)
Other versions
TWI311697B (zh
Inventor
Kazushi Mori
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200606607A publication Critical patent/TW200606607A/zh
Application granted granted Critical
Publication of TWI311697B publication Critical patent/TWI311697B/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0267—Fault communication, e.g. human machine interface [HMI]
    • G05B23/027—Alarm generation, e.g. communication protocol; Forms of alarm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
TW094114921A 2004-08-11 2005-05-09 Control system, control method, processing system, computer readable storing medium and computer program TW200606607A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004234829 2004-08-11

Publications (2)

Publication Number Publication Date
TW200606607A true TW200606607A (en) 2006-02-16
TWI311697B TWI311697B (zh) 2009-07-01

Family

ID=35839212

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094114921A TW200606607A (en) 2004-08-11 2005-05-09 Control system, control method, processing system, computer readable storing medium and computer program

Country Status (2)

Country Link
TW (1) TW200606607A (zh)
WO (1) WO2006016436A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4504400B2 (ja) * 2007-06-29 2010-07-14 東京エレクトロン株式会社 群管理システム、半導体製造装置、情報処理方法、およびプログラム
JP2012156296A (ja) * 2011-01-26 2012-08-16 Disco Abrasive Syst Ltd 監視システム
JP5715546B2 (ja) * 2011-10-27 2015-05-07 東京エレクトロン株式会社 基板処理装置及び基板処理方法並びに基板処理プログラムを記憶したコンピュータ読み取り可能な記憶媒体
JP5870405B2 (ja) * 2012-02-28 2016-03-01 株式会社ダイフク 物品搬送設備
US20190265676A1 (en) * 2018-02-28 2019-08-29 Mitsubishi Electric Corporation Systems and methods for implementing feedback for factory automated devices

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10240341A (ja) * 1997-02-28 1998-09-11 Toshiba Corp アラーム監視ディジタル制御装置
JPH11118592A (ja) * 1997-10-15 1999-04-30 Hitachi Ltd 機器異常診断装置およびそれを搭載したプラント装置
JP2002312021A (ja) * 2001-04-13 2002-10-25 Mitsubishi Electric Corp 半導体製造装置の管理システム
JP3920206B2 (ja) * 2002-12-09 2007-05-30 東京エレクトロン株式会社 制御システム

Also Published As

Publication number Publication date
TWI311697B (zh) 2009-07-01
WO2006016436A1 (ja) 2006-02-16

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