TW200604556A - Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device - Google Patents

Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device

Info

Publication number
TW200604556A
TW200604556A TW094116335A TW94116335A TW200604556A TW 200604556 A TW200604556 A TW 200604556A TW 094116335 A TW094116335 A TW 094116335A TW 94116335 A TW94116335 A TW 94116335A TW 200604556 A TW200604556 A TW 200604556A
Authority
TW
Taiwan
Prior art keywords
proof mass
seismometer
suspension plate
suspension
flexural elements
Prior art date
Application number
TW094116335A
Other languages
English (en)
Other versions
TWI368045B (en
Inventor
William Thomas Pike
Ian Standley
Richard Syms
Original Assignee
William Thomas Pike
Ian Standley
Richard Syms
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by William Thomas Pike, Ian Standley, Richard Syms filed Critical William Thomas Pike
Publication of TW200604556A publication Critical patent/TW200604556A/zh
Application granted granted Critical
Publication of TWI368045B publication Critical patent/TWI368045B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/181—Geophones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Remote Sensing (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Geology (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Geophysics (AREA)
  • Electromagnetism (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Micromachines (AREA)
  • Vibration Prevention Devices (AREA)
TW094116335A 2004-05-21 2005-05-19 Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device TWI368045B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/851,029 US7036374B2 (en) 2002-01-25 2004-05-21 Micro-machined suspension plate with integral proof mass for use in a seismometer or other device

Publications (2)

Publication Number Publication Date
TW200604556A true TW200604556A (en) 2006-02-01
TWI368045B TWI368045B (en) 2012-07-11

Family

ID=36282981

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094116335A TWI368045B (en) 2004-05-21 2005-05-19 Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device

Country Status (7)

Country Link
US (1) US7036374B2 (zh)
EP (1) EP1754082B1 (zh)
JP (3) JP4782114B2 (zh)
CN (1) CN101014879B (zh)
CA (1) CA2564680C (zh)
TW (1) TWI368045B (zh)
WO (1) WO2006059231A2 (zh)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7870788B2 (en) * 2002-01-25 2011-01-18 Kinemetrics, Inc. Fabrication process and package design for use in a micro-machined seismometer or other device
US7036374B2 (en) * 2002-01-25 2006-05-02 William Thomas Pike Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
CA2569295C (en) * 2006-11-28 2014-04-29 Nanometrics Inc. Seismic sensor
US8065915B2 (en) * 2008-10-08 2011-11-29 Honeywell International Inc. MEMS accelerometer
CA2658143C (en) * 2009-03-06 2013-06-04 Nanometrics Inc. Force-feedback seismometer
US8661901B2 (en) * 2009-03-19 2014-03-04 Hewlett-Packard Development Company, L.P. Three phase capacitance-based sensing
EP2430757B1 (en) 2009-05-13 2020-01-01 Synaptics Incorporated Capacitive sensor device
US8307710B2 (en) * 2009-07-09 2012-11-13 Honeywell International Inc. Translational mass in-plane MEMS accelerometer
DE102011076555B4 (de) * 2011-05-26 2019-11-07 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Dämpfungseinrichtung
CN103596874A (zh) 2011-06-28 2014-02-19 惠普发展公司，有限责任合伙企业 平面外移动限制结构
FR3011334B1 (fr) * 2013-09-27 2017-06-09 Centre Nat Rech Scient Capteur sismique
US10161956B2 (en) * 2016-04-25 2018-12-25 Honeywell International Inc. Reducing bias in an accelerometer via a pole piece
US10078097B2 (en) 2016-06-01 2018-09-18 Sonion Nederland B.V. Vibration or acceleration sensor applying squeeze film damping
EP3702322A1 (en) * 2016-12-30 2020-09-02 Sonion Nederland B.V. Micro-electromechanical transducer
CN109188021B (zh) * 2018-08-30 2020-06-16 太原理工大学 低频微加速度传感器的多孔弹簧悬臂敏感结构
IT201900016091A1 (it) * 2019-09-11 2021-03-11 Ima Spa Apparato e metodo per neutralizzare elettricità statica presente sulla superficie di contenitori e/o vassoi portacontenitori.
CN113296144B (zh) * 2020-02-24 2024-05-24 防灾科技学院 一种阻尼调零的地震计

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4280206A (en) 1978-03-15 1981-07-21 National Research Development Corporation Seismometers
US4586260A (en) 1984-05-29 1986-05-06 The L. S. Starrett Company Capacitive displacement measuring instrument
US4879508A (en) 1986-04-04 1989-11-07 Mitutoyo Corporation Capacitance-type measuring device for absolute measurement of positions
US5153494A (en) 1990-04-06 1992-10-06 International Business Machines Corp. Ultrafast electro-dynamic x, y and theta positioning stage
JP3135721B2 (ja) * 1992-11-20 2001-02-19 キヤノン株式会社 励振動型光検出角速度センサ
DE4400127C2 (de) 1994-01-05 2003-08-14 Bosch Gmbh Robert Kapazitiver Beschleunigungssensor und Verfahren zu seiner Herstellung
US5524488A (en) 1994-01-24 1996-06-11 Alliedsignal Inc. Flux control groove
US5447068A (en) 1994-03-31 1995-09-05 Ford Motor Company Digital capacitive accelerometer
WO1996010185A1 (fr) 1994-06-27 1996-04-04 Sergei Feodosievich Konovalov Accelerometre a compensation
US5834864A (en) 1995-09-13 1998-11-10 Hewlett Packard Company Magnetic micro-mover
JPH1090299A (ja) 1996-09-12 1998-04-10 Mitsubishi Electric Corp 静電容量式加速度センサ
JP3278363B2 (ja) 1996-11-18 2002-04-30 三菱電機株式会社 半導体加速度センサ
FR2764706B1 (fr) 1997-06-17 1999-07-09 Commissariat Energie Atomique Accelerometre miniaturise du type a compensation par ressort de l'effet de la pesanteur et son procede de fabrication
US6065341A (en) * 1998-02-18 2000-05-23 Denso Corporation Semiconductor physical quantity sensor with stopper portion
DE19817357B4 (de) * 1998-04-18 2008-10-30 Robert Bosch Gmbh Mikromechanisches Bauelement
US6196067B1 (en) 1998-05-05 2001-03-06 California Institute Of Technology Silicon micromachined accelerometer/seismometer and method of making the same
US6105427A (en) 1998-07-31 2000-08-22 Litton Systems, Inc. Micro-mechanical semiconductor accelerometer
US6308569B1 (en) 1999-07-30 2001-10-30 Litton Systems, Inc. Micro-mechanical inertial sensors
EP1083430B1 (en) * 1999-09-10 2006-07-26 STMicroelectronics S.r.l. Semiconductor integrated inertial sensor with calibration microactuator
JP2002013931A (ja) * 2000-06-29 2002-01-18 Matsushita Electric Ind Co Ltd 角速度・加速度センサの梁構造
DE10038761A1 (de) * 2000-08-09 2002-02-21 Bosch Gmbh Robert Beschleunigungssensor
US6481286B1 (en) 2000-08-30 2002-11-19 The Charles Stark Draper Laboratory, Inc. Reentrant microwave resonant cavity accelerometer
JP3512004B2 (ja) * 2000-12-20 2004-03-29 トヨタ自動車株式会社 力学量検出装置
DE10118340A1 (de) * 2001-04-12 2002-10-24 Bosch Gmbh Robert Vorrichtung zur Messung einer Beschleunigung und/oder einer Drehrate
US6776042B2 (en) * 2002-01-25 2004-08-17 Kinemetrics, Inc. Micro-machined accelerometer
US7036374B2 (en) * 2002-01-25 2006-05-02 William Thomas Pike Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
JP2003344445A (ja) * 2002-05-24 2003-12-03 Mitsubishi Electric Corp 慣性力センサ
FR2840906B1 (fr) 2002-06-12 2004-07-16 Commissariat Energie Atomique Derives de per(3,6-anhydro) cyclodextrines, leur preparation et leur utilisation pour separer des ions, notamment des anions a base de chrome et de manganese

Also Published As

Publication number Publication date
JP2014059303A (ja) 2014-04-03
EP1754082B1 (en) 2013-03-27
US7036374B2 (en) 2006-05-02
CA2564680C (en) 2014-04-01
WO2006059231A2 (en) 2006-06-08
TWI368045B (en) 2012-07-11
US20050097959A1 (en) 2005-05-12
JP2011185943A (ja) 2011-09-22
JP5699269B2 (ja) 2015-04-08
JP2008500547A (ja) 2008-01-10
WO2006059231A3 (en) 2006-08-24
JP4782114B2 (ja) 2011-09-28
CN101014879A (zh) 2007-08-08
JP5453599B2 (ja) 2014-03-26
CA2564680A1 (en) 2006-06-08
EP1754082A2 (en) 2007-02-21
CN101014879B (zh) 2010-05-05

Similar Documents

Publication Publication Date Title
TW200604556A (en) Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device
FR2885610B1 (fr) Dispositif d'elinguage d'une piece avec compensation d'effort et systeme de levage le comprenant
CN106594172A (zh) 具有准零刚度的半主动控制型垂直隔振器
CN102619926B (zh) 稳定型减震装置
KR100331934B1 (ko) 자기스프링을구비한진동기구
WO2006110766A3 (en) Goggles
EA200800765A1 (ru) Тренажер с вибропоглощающей опорой
CN203740816U (zh) 一种电梯辅助减震装置
WO2012027803A3 (en) Weighing module with integrated horizontal and vertical overload protection
MY131485A (en) Device for attenuating vibrations on an elevator car
CN201851571U (zh) 一种磁力减震器
ATE371124T1 (de) Schwingungsämpfer
ATE344587T1 (de) Schwimmende lagerung eines plasmaschirms
ITMI20020230A1 (it) Dispositivo e procedimento per l'ammortizzamento di urti o vibrazioniparticolarmente per una bicicletta
TW200714783A (en) Damping wall panel
CN109722983A (zh) 粘滞阻尼器及桥梁
CN205502827U (zh) 一种带回转拉簧结构的缓冲器
CN103142332A (zh) 一种助力型外骨骼用背架髋部两级联结装置
US20160290454A1 (en) A mechanical force generator and related kinematic chains
JP2006348996A (ja) 衝撃ダンパー
CN213511834U (zh) 一种使用寿命长的弹簧
CN214799769U (zh) 一种学校多媒体教学的音响安装的抗震支架
CN103835384A (zh) 质量调谐减振装置
CN206410720U (zh) 一种电容式在线粮食水分仪上的减震封闭式电极罩
CN207337320U (zh) 一种计算机硬盘用安全防护装置