TW200603684A - Apparatus and method for fast arc extinction with early shunting of arc current in plasma - Google Patents

Apparatus and method for fast arc extinction with early shunting of arc current in plasma

Info

Publication number
TW200603684A
TW200603684A TW094119791A TW94119791A TW200603684A TW 200603684 A TW200603684 A TW 200603684A TW 094119791 A TW094119791 A TW 094119791A TW 94119791 A TW94119791 A TW 94119791A TW 200603684 A TW200603684 A TW 200603684A
Authority
TW
Taiwan
Prior art keywords
plasma
arc
current
power supply
diverting means
Prior art date
Application number
TW094119791A
Other languages
English (en)
Inventor
Milan Ilic
Kalyan N C Siddabattula
Andrey B Malinin
Original Assignee
Advanced Energy Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Energy Ind Inc filed Critical Advanced Energy Ind Inc
Publication of TW200603684A publication Critical patent/TW200603684A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32944—Arc detection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K10/00—Welding or cutting by means of a plasma
    • B23K10/006—Control circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Arc Welding Control (AREA)
TW094119791A 2004-07-02 2005-06-15 Apparatus and method for fast arc extinction with early shunting of arc current in plasma TW200603684A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/884,119 US6943317B1 (en) 2004-07-02 2004-07-02 Apparatus and method for fast arc extinction with early shunting of arc current in plasma

Publications (1)

Publication Number Publication Date
TW200603684A true TW200603684A (en) 2006-01-16

Family

ID=34912794

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094119791A TW200603684A (en) 2004-07-02 2005-06-15 Apparatus and method for fast arc extinction with early shunting of arc current in plasma

Country Status (7)

Country Link
US (1) US6943317B1 (zh)
EP (1) EP1765540B1 (zh)
JP (1) JP4624414B2 (zh)
KR (1) KR101136836B1 (zh)
CN (1) CN100569427C (zh)
TW (1) TW200603684A (zh)
WO (1) WO2006014212A2 (zh)

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US7081598B2 (en) * 2004-08-24 2006-07-25 Advanced Energy Industries, Inc. DC-DC converter with over-voltage protection circuit
US7305311B2 (en) * 2005-04-22 2007-12-04 Advanced Energy Industries, Inc. Arc detection and handling in radio frequency power applications
ATE421791T1 (de) * 2005-12-22 2009-02-15 Huettinger Elektronik Gmbh Verfahren und vorrichtung zur arcerkennung in einem plasmaprozess
US7514935B2 (en) * 2006-09-13 2009-04-07 Advanced Energy Industries, Inc. System and method for managing power supplied to a plasma chamber
EP1926122B1 (de) 2006-11-23 2009-11-11 HÜTTINGER Elektronik GmbH + Co. KG Verfahren zum Erkennen einer Bogenentladung in einem Plasmaprozess und Bogenentladungserkennungsvorrichtung
US7795817B2 (en) * 2006-11-24 2010-09-14 Huettinger Elektronik Gmbh + Co. Kg Controlled plasma power supply
EP1928009B1 (de) * 2006-11-28 2013-04-10 HÜTTINGER Elektronik GmbH + Co. KG Bogenentladungs-Erkennungseinrichtung, Plasma-Leistungsversorgung und Verfahren zum Erkennen von Bogenentladungen
DE502006009308D1 (de) * 2006-12-14 2011-05-26 Huettinger Elektronik Gmbh Bogenentladungs-Erkennungseinrichtung, Plasma-Leistungsversorgung und Verfahren zum Erkennen von Bogenentladungen
US8217299B2 (en) * 2007-02-22 2012-07-10 Advanced Energy Industries, Inc. Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch
EP1978542B1 (de) 2007-03-08 2010-12-29 HÜTTINGER Elektronik GmbH + Co. KG Verfahren und Vorrichtung zum Unterdrücken von Bogenentladungen beim Betreiben eines Plasmaprozesses
EP1995818A1 (en) * 2007-05-12 2008-11-26 Huettinger Electronic Sp. z o. o Circuit and method for reducing electrical energy stored in a lead inductance for fast extinction of plasma arcs
US20090160573A1 (en) * 2007-12-19 2009-06-25 Illinois Tool Works, Inc. GFCI-Compatible Circuit for Plasma Cutting System
US8289029B2 (en) * 2008-02-14 2012-10-16 Mks Instruments, Inc. Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events
KR101638463B1 (ko) * 2008-02-25 2016-07-11 스몰텍 에이비 나노구조 프로세싱을 위한 도전성 보조층의 증착과 선택적 제거
US8044594B2 (en) * 2008-07-31 2011-10-25 Advanced Energy Industries, Inc. Power supply ignition system and method
US8395078B2 (en) * 2008-12-05 2013-03-12 Advanced Energy Industries, Inc Arc recovery with over-voltage protection for plasma-chamber power supplies
EP2790205B1 (en) 2009-02-17 2018-04-04 Solvix GmbH A power supply device for plasma processing
US11978611B2 (en) * 2009-05-01 2024-05-07 Advanced Energy Industries, Inc. Apparatus with switches to produce a waveform
DE102010031568B4 (de) 2010-07-20 2014-12-11 TRUMPF Hüttinger GmbH + Co. KG Arclöschanordnung und Verfahren zum Löschen von Arcs
US8552665B2 (en) 2010-08-20 2013-10-08 Advanced Energy Industries, Inc. Proactive arc management of a plasma load
KR101140254B1 (ko) * 2010-08-27 2012-04-26 (주) 이이시스 순시적인 아크 검출기능을 갖는 아크 검출 회로 및 이를 이용한 대기압 플라즈마 생성용 전원 공급 장치
US9263241B2 (en) 2011-05-10 2016-02-16 Advanced Energy Industries, Inc. Current threshold response mode for arc management
US9279722B2 (en) 2012-04-30 2016-03-08 Agilent Technologies, Inc. Optical emission system including dichroic beam combiner
WO2014094738A2 (de) 2012-12-18 2014-06-26 TRUMPF Hüttinger GmbH + Co. KG Arclöschverfahren und leistungsversorgungssystem mit einem leistungswandler
CN111327035B (zh) * 2018-12-17 2022-04-19 安徽伟创电力科技有限公司 一种消弧柜的高速开关装置

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Also Published As

Publication number Publication date
JP4624414B2 (ja) 2011-02-02
CN101076425A (zh) 2007-11-21
KR20070027641A (ko) 2007-03-09
CN100569427C (zh) 2009-12-16
JP2008505446A (ja) 2008-02-21
WO2006014212A3 (en) 2006-08-24
KR101136836B1 (ko) 2012-04-20
WO2006014212A2 (en) 2006-02-09
EP1765540B1 (en) 2012-08-01
EP1765540A4 (en) 2009-12-09
US6943317B1 (en) 2005-09-13
EP1765540A2 (en) 2007-03-28

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