TW200602629A - Light source device for inspection - Google Patents

Light source device for inspection

Info

Publication number
TW200602629A
TW200602629A TW094116158A TW94116158A TW200602629A TW 200602629 A TW200602629 A TW 200602629A TW 094116158 A TW094116158 A TW 094116158A TW 94116158 A TW94116158 A TW 94116158A TW 200602629 A TW200602629 A TW 200602629A
Authority
TW
Taiwan
Prior art keywords
source device
inspection
light
light source
distribution
Prior art date
Application number
TW094116158A
Other languages
English (en)
Chinese (zh)
Inventor
Masahiro Ishibashi
Naomichi Chida
Yasushi Ichizawa
Mamoru Takahashi
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Publication of TW200602629A publication Critical patent/TW200602629A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/11—Monitoring and controlling the scan
    • G01N2201/115—Optical equalisation of scan intensity

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW094116158A 2004-07-13 2005-05-18 Light source device for inspection TW200602629A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004205526 2004-07-13
JP2004338318A JP4631408B2 (ja) 2004-07-13 2004-11-24 検査用光源装置

Publications (1)

Publication Number Publication Date
TW200602629A true TW200602629A (en) 2006-01-16

Family

ID=36030693

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094116158A TW200602629A (en) 2004-07-13 2005-05-18 Light source device for inspection

Country Status (3)

Country Link
JP (1) JP4631408B2 (ja)
KR (2) KR100737366B1 (ja)
TW (1) TW200602629A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111238641A (zh) * 2019-11-20 2020-06-05 四川极智朗润科技有限公司 一种基于白光照明的色轮分光及成像的多光谱成像装置及方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101813559B (zh) * 2010-04-30 2011-11-09 大连工业大学 移动式led光源平面照度检测系统
KR101418781B1 (ko) * 2014-01-16 2014-07-11 에스피오주식회사 고해상도 광학계에서의 조명 균일화 장치

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225540A (ja) 1983-06-06 1984-12-18 Sharp Corp エリアイメ−ジセンサの検査方法
JPH0290645A (ja) * 1988-09-28 1990-03-30 Hitachi Ltd 撮像素子の検査方法及びそれに使用する検査装置
JPH0553354U (ja) * 1991-12-11 1993-07-13 三菱レイヨン株式会社 ライン状光源装置
JP3114410B2 (ja) * 1993-02-17 2000-12-04 富士電機株式会社 イメージセンサの試験方法
JPH0810565B2 (ja) * 1993-03-11 1996-01-31 日本電気株式会社 線状照明装置及びラインイメージセンサ検査装置
JP3385082B2 (ja) * 1993-12-13 2003-03-10 ペンタックス株式会社 非球面測定装置
JP3106986B2 (ja) * 1996-05-02 2000-11-06 株式会社パトライト Ｌｅｄ照明器
JPH10269802A (ja) * 1997-03-24 1998-10-09 Sony Corp 照明装置および映像表示装置
JP4203685B2 (ja) * 1998-11-10 2009-01-07 株式会社ニコン 検査装置
JP2002181659A (ja) * 2000-12-14 2002-06-26 Sharp Corp 光源装置
JP2002214072A (ja) * 2001-01-15 2002-07-31 Nikon Corp 光照射装置およびこの光照射装置を用いた検査装置
JP2002230522A (ja) * 2001-02-06 2002-08-16 Mitsubishi Rayon Co Ltd 被検査対象物の欠陥検出装置及び欠陥検査方法
JP3657526B2 (ja) * 2001-04-09 2005-06-08 シャープ株式会社 画像センサ検査用光源装置及び画像センサ検査方法
JP2003043411A (ja) * 2001-08-03 2003-02-13 Kyocera Corp 照明光学系
JP2003302702A (ja) * 2002-04-11 2003-10-24 Mitsubishi Electric Corp 投写型表示装置
JP4175069B2 (ja) * 2002-10-03 2008-11-05 セイコーエプソン株式会社 ロッドインテグレータ及びプロジェクタ
JP2004287368A (ja) * 2003-01-27 2004-10-14 Tokyo Electron Ltd 検査装置
JP2005070021A (ja) * 2003-08-28 2005-03-17 Yokogawa Electric Corp 検査用光源装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111238641A (zh) * 2019-11-20 2020-06-05 四川极智朗润科技有限公司 一种基于白光照明的色轮分光及成像的多光谱成像装置及方法

Also Published As

Publication number Publication date
JP2006053121A (ja) 2006-02-23
JP4631408B2 (ja) 2011-02-16
KR100737366B1 (ko) 2007-07-09
KR20070043744A (ko) 2007-04-25
KR100749434B1 (ko) 2007-08-14
KR20060046383A (ko) 2006-05-17

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