TW200602629A - Light source device for inspection - Google Patents

Light source device for inspection

Info

Publication number
TW200602629A
TW200602629A TW094116158A TW94116158A TW200602629A TW 200602629 A TW200602629 A TW 200602629A TW 094116158 A TW094116158 A TW 094116158A TW 94116158 A TW94116158 A TW 94116158A TW 200602629 A TW200602629 A TW 200602629A
Authority
TW
Taiwan
Prior art keywords
source device
inspection
light
light source
distribution
Prior art date
Application number
TW094116158A
Other languages
Chinese (zh)
Inventor
Masahiro Ishibashi
Naomichi Chida
Yasushi Ichizawa
Mamoru Takahashi
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Publication of TW200602629A publication Critical patent/TW200602629A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/11—Monitoring and controlling the scan
    • G01N2201/115—Optical equalisation of scan intensity

Abstract

A light source device for inspection that emits predetermined light onto a light receiving element to be inspected. The light source device for inspection includes a plurality of optical systems capable of making the illumination distribution of the outgoing light from a light emission portion uniform and dividing the target illumination range to be illuminated. According to the present invention, we can obtain a spectral distribution without missing part and a uniform illumination distribution. Also, it is possible to switch the quantity of light or colors at high speed. Thus, we can realize a compact light source device for inspection which has a long lifetime without requiring maintenance.
TW094116158A 2004-07-13 2005-05-18 Light source device for inspection TW200602629A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004205526 2004-07-13
JP2004338318A JP4631408B2 (en) 2004-07-13 2004-11-24 Light source device for inspection

Publications (1)

Publication Number Publication Date
TW200602629A true TW200602629A (en) 2006-01-16

Family

ID=36030693

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094116158A TW200602629A (en) 2004-07-13 2005-05-18 Light source device for inspection

Country Status (3)

Country Link
JP (1) JP4631408B2 (en)
KR (2) KR100737366B1 (en)
TW (1) TW200602629A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111238641A (en) * 2019-11-20 2020-06-05 四川极智朗润科技有限公司 Multispectral imaging device and method for color wheel light splitting and imaging based on white light illumination

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101813559B (en) * 2010-04-30 2011-11-09 大连工业大学 System for detecting planar illumination of mobile light emitting diode (LED) light source
KR101418781B1 (en) * 2014-01-16 2014-07-11 에스피오주식회사 Illumination Uniformalizing Apparatus in High Resolution Optical System

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225540A (en) 1983-06-06 1984-12-18 Sharp Corp Method for inspecting area image sensor
JPH0290645A (en) * 1988-09-28 1990-03-30 Hitachi Ltd Inspection of image sensor and inspecting device which is used for that
JPH0553354U (en) * 1991-12-11 1993-07-13 三菱レイヨン株式会社 Line light source device
JP3114410B2 (en) * 1993-02-17 2000-12-04 富士電機株式会社 Image sensor test method
JPH0810565B2 (en) * 1993-03-11 1996-01-31 日本電気株式会社 Linear illumination device and line image sensor inspection device
JP3385082B2 (en) * 1993-12-13 2003-03-10 ペンタックス株式会社 Aspherical surface measuring device
JP3106986B2 (en) * 1996-05-02 2000-11-06 株式会社パトライト LED illuminator
JPH10269802A (en) * 1997-03-24 1998-10-09 Sony Corp Lighting system and image display unit
JP4203685B2 (en) * 1998-11-10 2009-01-07 株式会社ニコン Inspection device
JP2002181659A (en) * 2000-12-14 2002-06-26 Sharp Corp Light source device
JP2002214072A (en) * 2001-01-15 2002-07-31 Nikon Corp Light irradiation device and inspection device using the same
JP2002230522A (en) * 2001-02-06 2002-08-16 Mitsubishi Rayon Co Ltd Device and method for detecting defect of subject of inspection
JP3657526B2 (en) * 2001-04-09 2005-06-08 シャープ株式会社 Light source device for image sensor inspection and image sensor inspection method
JP2003043411A (en) * 2001-08-03 2003-02-13 Kyocera Corp Illumination optical system
JP2003302702A (en) * 2002-04-11 2003-10-24 Mitsubishi Electric Corp Projection type display
JP4175069B2 (en) * 2002-10-03 2008-11-05 セイコーエプソン株式会社 Rod integrator and projector
JP2004287368A (en) * 2003-01-27 2004-10-14 Tokyo Electron Ltd Inspecting device
JP2005070021A (en) * 2003-08-28 2005-03-17 Yokogawa Electric Corp Light source device for inspection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111238641A (en) * 2019-11-20 2020-06-05 四川极智朗润科技有限公司 Multispectral imaging device and method for color wheel light splitting and imaging based on white light illumination

Also Published As

Publication number Publication date
KR100737366B1 (en) 2007-07-09
KR100749434B1 (en) 2007-08-14
KR20060046383A (en) 2006-05-17
JP4631408B2 (en) 2011-02-16
KR20070043744A (en) 2007-04-25
JP2006053121A (en) 2006-02-23

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