JPH0810565B2 - Linear illumination device and line image sensor inspection device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear illumination device for linearly illuminating an object, and further to a device for illuminating a line image sensor with such a linear illumination device to inspect the characteristics of the line image sensor. .

[0002]

2. Description of the Related Art In the inspection process in the manufacturing process of a line image sensor, the signal output of the line image sensor when the line image sensor is illuminated is monitored to determine whether it has reached a preset pass level standard. There is a characteristic inspection work to do.

FIG. 2 shows a conventional line image sensor inspection device for performing such characteristic inspection.

The line image sensor inspection device shown in FIG. 2 includes a halogen bulb 14 which is supplied with power from a power supply device 17 to illuminate a line image sensor 15 provided on a work 8 and a large number of identical line image sensors 15. A probe 9 for taking out a signal from the terminal row 13 of the arranged work 8, an isolation amplifier 10 connected to the probe 9, a signal processing unit 11, and a computer 12.
And a drive system (not shown) for positioning the probe 9 at a portion of the terminal row 13 corresponding to each line image sensor. In this example, each line image sensor 15 has a large number of individual phototransistors arranged in a line.

In the inspection of the image sensor, the probe 9 is positioned on the terminal row 13 to which the line image sensor 15 to be measured is connected, the power supply unit 17 is operated, and the light 16 from the halogen bulb 14 is irradiated on the sensor surface. Let Then, the output signal of each phototransistor of the line image sensor is taken out from the terminal array 13 via the probe 9,
While preventing noise from being mixed by the isolation amplifier 10, the signal processing unit 11 performs A / D conversion and converts into predetermined signal data, and then the computer 12 outputs the output of each phototransistor to a preset pass level standard. Is inspected, and if so, the line image sensor to be inspected is determined to be passed.

[0006]

In this conventional line image sensor inspection apparatus, the halogen bulb 14 illuminates a wide area around the line image sensor 15 and illuminates an unnecessary portion, which is inefficient. In addition, the line image sensor which is not measured on the same work 8 is also irradiated with light, which has an adverse effect on the sensor.

Further, when the work 8 is provided with a photoelectric conversion element in a circuit other than the line image sensor, the photoelectric conversion element is unnecessarily irradiated with light,
In some cases, the line image sensor could not be inspected. In such a case, it is necessary to apply a light-shielding mask to the photoelectric conversion elements other than the line image sensor, which complicates the manufacturing process of the line image sensor and increases the cost.

[0008]

A linear illumination device of the present invention is a bundled optical fiber that receives light from a light source from a tip and emits it from a linearly arranged end, and the bundled optical fiber. A slit connected to the end of the diffuser through a diffuser plate, and a rod lens which is provided along the slit and is emitted from the end of the bundled optical fibers and linearly converges the light passing through the diffuser plate and the slit. It is equipped with an array.

The line image sensor inspection device of the present invention contacts a linear illumination device for illuminating a line image sensor on a work and a terminal to which an output signal of each sensor constituting the line image sensor on the work is transmitted. And a measuring unit that inputs a signal from the probe and measures the output of each sensor.

[0010]

Next, the present invention will be described with reference to the drawings.

FIG. 1 is a diagram showing a line image sensor inspection apparatus according to an embodiment of the present invention. FIG. 1 (a) shows a vertical section of a linear illumination device and a constituent block of a measurement circuit for measuring the output of the line image sensor. FIG. 1B is a side sectional view of the linear lighting device.

Light from a light source composed of a power supply device 1 and a halogen bulb 2 connected to the power supply device 1 is received by an optical fiber 3 which is a bundle of a large number, and the ends of these optical fibers 3 are linearly arranged. . A linear illumination device is one in which a diffuser plate 5 and a slit 6 are fixed to the end of the optical fiber 3, a rod lens array 7 is arranged below the slit 6, and these are integrated in a housing 4. . Below this linear illumination device, there is a work 8 on which a large number of identical line image sensors 15 are arranged. The probe 9 probes the terminal row 13 of the work 8. This probing is performed by a drive system and a control system (not shown). Be implemented. The signal line from the probe 9 is an isolation amplifier 10 for noise suppression.
It is connected to the signal processing unit 11 via, and is further connected to a computer.

Next, the operation of this embodiment will be described.
First, the probe 9 is positioned on the terminal row 13 connected to the line image sensor 15 to be measured, and the power supply device 1 is operated. The light from the halogen bulb 2 is converted into linear light by the optical fiber 3, emitted from the end of the optical fiber, and passes through the diffuser plate 5, so that unevenness in the amount of light caused by the nonuniformity of the material of the optical fiber 3 or the like occurs. It is eliminated and smoothed. Next, the light passing through the slit 6 is focused on the line image sensor 15 on the surface to be measured of the work 8 after passing through the rod lens array 7. At this time, since the distance from the lower surface of the slit 6 to the upper surface of the rod lens array 7 and the distance from the lower surface of the rod lens array 7 to 7-78 are both equal to the focal length of the rod lens array 7, they are connected to the surface to be measured. The width Δ of the imaged linear spot is equal to the width of the slit 6.

Next, the output signals of the respective sensors of the line image sensor 15 are taken out from the terminal array 13 via the probe 9, and the isolation amplifier 10 prevents noise from entering, while the signal processing section 11 determines a predetermined value. After conversion into signal data, the computer 12 determines whether the output of each sensor has reached a preset pass level standard.

The computer 12 can determine that the line image sensor is non-defective when the output of each sensor is within a predetermined range between the maximum value and the minimum value. It can also be output as is.

Further, the linear illumination device can be used not only for the line image inspection device but also for illuminating the original when the original is read by the facsimile apparatus using the line image sensor.

[0017]

As described above, in the linear lighting device of the present invention, the light from the light source is converted into a linear light source by the bundled optical fiber, and further, the light is passed through the diffuser, the slit and the rod lens. Therefore, it is possible to illuminate an object uniformly and accurately in a linear shape.

Further, in the line image sensor inspection apparatus of the present invention, the line image sensor is illuminated by using the above-mentioned linear illumination device, so that the illumination can be limited to only the line image sensor to be inspected. Therefore, since the adjacent line image sensor is not irradiated with light when not inspected, deterioration of the sensor due to irradiation of light for a long time can be prevented. Further, since it is not necessary to mask the work provided with the line image sensor, the manufacturing process of the work can be simplified.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of an exemplary embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of a conventional line image sensor inspection device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Power supply device 2 Halogen bulb 3 Optical fiber 4 Housing 5 Diffusing plate 6 Slit plate 7 Rod lens array 8 Work 9 Probe 10 Isolation amplifier 11 Signal processing means 12 Measuring means 13 Terminal row 14 Halogen bulb 15 Line image sensor 16 Light 17 Power supply

Claims (3)

[Claims] 1. A bundled optical fiber that takes in light from a light source from a tip and emits it from a linearly arranged end, and a slit connected to the end of the bundled optical fiber through a diffusion plate. A linear illuminator including a rod lens array which is provided along the slit and linearly converges the light emitted from the end of the bundled optical fibers and passing through the diffuser plate and the slit. . 2. The linear illumination device according to claim 1, wherein the distance between the slit and the rod lens array is equal to the focal length of the rod lens array. 3. A bundled optical fiber that takes in light from a light source from a tip and emits it from a linearly arranged end, and a slit connected to the end of the bundled optical fiber via a diffusion plate. A rod lens array which is provided along the slit and converges the light emitted from the end of the bundled optical fibers and passing through the diffuser plate and the slit to a line image sensor provided in a work shape, and the work shape. Of the line image sensor, including a probe that contacts a terminal to which an output signal of each sensor is transmitted, and a measuring unit that inputs a signal from the probe and measures an output of each sensor. Image sensor inspection device.