JPH0290645A - Inspection of image sensor and inspecting device which is used for that - Google Patents

Abstract

PURPOSE: To bring closer an image sensor to a state after the sensor is sealed and moreover, to make possible the inspection of the image sensor having little variability by a method wherein light emitted from a light source is scattered and the scattered light is turned into a light close to a uniform light and is irradiated on the image sensor to inspect.

CONSTITUTION: Light irradiated from an LED 7 reaches a frosted glass 10 and is made to pass through the glass 10. At this time, the light emitted from the LED strikes on the interior of a luminous part main body 6 as well, but an irregular reflection is not caused because a discharge machining is performed on the surface of the interior. The light made to pass through the glass 10 becomes an almost uniform light as being scattered sufficiently by the glass 10 and reaches a SELFOC lens 4. Even here, even if the light strikes on the interior of the lens 4, the light is absorbed by the surface, on which a discharge machining is performed, of the lens 4. The angle of the light made to pass through the lens 4 is spread by about 20° and the light is released. As this light becomes an almost uniform light, the light becomes the optimum light for the inspection of an image sensor which is an object. This light is irradiated on the image sensor 1a formed on a wafer 1 and as the result, a current which is made to flow through the sensor 1a is detected by probes 2. Thereby, the inspection of the image sensor is executed.

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