TW200600829A - Optical system, exposure device, and exposure method - Google Patents

Optical system, exposure device, and exposure method

Info

Publication number
TW200600829A
TW200600829A TW094116057A TW94116057A TW200600829A TW 200600829 A TW200600829 A TW 200600829A TW 094116057 A TW094116057 A TW 094116057A TW 94116057 A TW94116057 A TW 94116057A TW 200600829 A TW200600829 A TW 200600829A
Authority
TW
Taiwan
Prior art keywords
optical system
phase difference
light
polarization
exposure
Prior art date
Application number
TW094116057A
Other languages
English (en)
Inventor
Yasuhiro Omura
Haruhisa Iida
Takeshi Tsuda
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of TW200600829A publication Critical patent/TW200600829A/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0892—Catadioptric systems specially adapted for the UV
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70566—Polarisation control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
TW094116057A 2004-06-16 2005-05-18 Optical system, exposure device, and exposure method TW200600829A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004178777 2004-06-16
JP2004332531 2004-11-17

Publications (1)

Publication Number Publication Date
TW200600829A true TW200600829A (en) 2006-01-01

Family

ID=35509840

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094116057A TW200600829A (en) 2004-06-16 2005-05-18 Optical system, exposure device, and exposure method

Country Status (5)

Country Link
EP (1) EP1767978A4 (zh)
JP (1) JPWO2005124420A1 (zh)
KR (1) KR101244994B1 (zh)
TW (1) TW200600829A (zh)
WO (1) WO2005124420A1 (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4612849B2 (ja) * 2005-03-01 2011-01-12 キヤノン株式会社 露光方法、露光装置及びデバイス製造方法
JP5588176B2 (ja) * 2006-12-28 2014-09-10 カール・ツァイス・エスエムティー・ゲーエムベーハー 傾斜偏向ミラーを有する反射屈折投影対物器械、投影露光装置、投影露光方法、及びミラー
US7872731B2 (en) * 2007-04-20 2011-01-18 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
DE102007043958B4 (de) 2007-09-14 2011-08-25 Carl Zeiss SMT GmbH, 73447 Beleuchtungseinrichtung einer mikrolithographischen Projektionsbelichtungsanlage
DE102007054731A1 (de) 2007-11-14 2009-05-20 Carl Zeiss Smt Ag Optisches Element zur Reflexion von UV-Strahlung, Herstellungsverfahren dafür und Projektionsbelichtungsanlage damit
DE102009022034A1 (de) * 2009-05-20 2010-12-02 Layertec Gmbh Optisches Bauelement mit hoher Formstabilität, seine Herstellung und Verwendung
JP2012004465A (ja) 2010-06-19 2012-01-05 Nikon Corp 照明光学系、露光装置、およびデバイス製造方法
KR101146619B1 (ko) * 2010-11-22 2012-05-14 한국전광(주) 가시광선과 적외선 영역을 동시에 충족하는 고반사율 거울
JP5534276B2 (ja) * 2013-08-23 2014-06-25 株式会社ニコン 照明光学系、露光装置、およびデバイス製造方法
WO2023186325A1 (en) * 2022-04-01 2023-10-05 SLM Solutions Group AG Method of operating an irradiation system, irradiation system and apparatus for producing a three-dimensional work piece

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3340424A1 (de) * 1983-11-09 1985-05-15 Brown, Boveri & Cie Ag, 6800 Mannheim Elektrochemische speicherzelle
JPS60181704A (ja) * 1984-02-29 1985-09-17 Canon Inc 真空紫外用反射ミラー
JPH0590128A (ja) * 1991-06-13 1993-04-09 Nikon Corp 露光装置
JPH06124873A (ja) * 1992-10-09 1994-05-06 Canon Inc 液浸式投影露光装置
JP3747566B2 (ja) * 1997-04-23 2006-02-22 株式会社ニコン 液浸型露光装置
JPH11311704A (ja) * 1998-02-26 1999-11-09 Nikon Corp 紫外光用ミラー
WO1999049504A1 (fr) * 1998-03-26 1999-09-30 Nikon Corporation Procede et systeme d'exposition par projection
US7301605B2 (en) * 2000-03-03 2007-11-27 Nikon Corporation Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices
JP3678120B2 (ja) 2000-06-06 2005-08-03 ウシオ電機株式会社 偏光光照射装置
DE10124474A1 (de) * 2001-05-19 2002-11-21 Zeiss Carl Mikrolithographisches Belichtungsverfahren sowie Projektionsobjektiv zur Durchführung des Verfahrens
US6831731B2 (en) * 2001-06-28 2004-12-14 Nikon Corporation Projection optical system and an exposure apparatus with the projection optical system

Also Published As

Publication number Publication date
JPWO2005124420A1 (ja) 2008-04-17
EP1767978A1 (en) 2007-03-28
KR101244994B1 (ko) 2013-03-18
EP1767978A4 (en) 2010-07-07
KR20070026784A (ko) 2007-03-08
WO2005124420A1 (ja) 2005-12-29

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