WO2009041307A1 - 光学系のアライメント装置および方法 - Google Patents

光学系のアライメント装置および方法 Download PDF

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Publication number
WO2009041307A1
WO2009041307A1 PCT/JP2008/066649 JP2008066649W WO2009041307A1 WO 2009041307 A1 WO2009041307 A1 WO 2009041307A1 JP 2008066649 W JP2008066649 W JP 2008066649W WO 2009041307 A1 WO2009041307 A1 WO 2009041307A1
Authority
WO
WIPO (PCT)
Prior art keywords
mirror
sub
optical system
alignment device
rear side
Prior art date
Application number
PCT/JP2008/066649
Other languages
English (en)
French (fr)
Inventor
Kenta Sudo
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007246440A external-priority patent/JP5170521B2/ja
Priority claimed from JP2007296306A external-priority patent/JP5170525B2/ja
Application filed by Nikon Corporation filed Critical Nikon Corporation
Priority to EP08834606A priority Critical patent/EP2192433B1/en
Publication of WO2009041307A1 publication Critical patent/WO2009041307A1/ja
Priority to US12/730,673 priority patent/US8085400B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S3/00—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received
    • G01S3/78—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received using electromagnetic waves other than radio waves
    • G01S3/782—Systems for determining direction or deviation from predetermined direction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G01S7/4812—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver transmitted and received beams following a coaxial path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497—Means for monitoring or calibrating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/02—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors
    • G02B23/06—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors having a focussing action, e.g. parabolic mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1824—Manual alignment
    • G02B7/1825—Manual alignment made by screws, e.g. for laser mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Optics & Photonics (AREA)
  • Astronomy & Astrophysics (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

光軸（ＡＸ）に沿って対向するように配置された主鏡（２１）と副鏡（２２）とを有する光学系において主鏡と副鏡とを位置合わせするためのアライメント装置。副鏡の表側の面に形成されて光学系の使用光を反射し且つアライメント光を透過させるダイクロイック膜（４）と、副鏡の裏側に形成されてアライメント光を反射する裏側反射面（５）と、ダイクロイック膜（４）、裏側反射面（５）、及び主鏡（２１）の反射面を介したアライメント光に基づいて主鏡と副鏡との位置ずれを検出する検出系（６，７，８）とを備えている。
PCT/JP2008/066649 2007-09-25 2008-09-16 光学系のアライメント装置および方法 WO2009041307A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP08834606A EP2192433B1 (en) 2007-09-25 2008-09-16 Alignment device and method for optical system
US12/730,673 US8085400B2 (en) 2007-09-25 2010-03-24 Alignment device and method for optical system

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007246440A JP5170521B2 (ja) 2007-09-25 2007-09-25 光学系のアライメント装置および方法
JP2007-246440 2007-09-25
JP2007296306A JP5170525B2 (ja) 2007-11-15 2007-11-15 光学系のアライメント装置および方法
JP2007-296306 2007-11-15

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/730,673 Continuation US8085400B2 (en) 2007-09-25 2010-03-24 Alignment device and method for optical system

Publications (1)

Publication Number Publication Date
WO2009041307A1 true WO2009041307A1 (ja) 2009-04-02

Family

ID=40511194

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/066649 WO2009041307A1 (ja) 2007-09-25 2008-09-16 光学系のアライメント装置および方法

Country Status (3)

Country Link
US (1) US8085400B2 (ja)
EP (1) EP2192433B1 (ja)
WO (1) WO2009041307A1 (ja)

Families Citing this family (9)

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Publication number Priority date Publication date Assignee Title
TWI472893B (zh) * 2011-07-27 2015-02-11 Nat Applied Res Laboratories 光學控制系統及其方法
US10145944B1 (en) 2014-05-02 2018-12-04 Kla-Tencor Corporation System and method for LADAR-based optic alignment and characterization
CN105629431B (zh) * 2014-11-05 2018-07-27 北京航天计量测试技术研究所 一种卡塞格林抛物面主镜的光轴确定方法
US10133043B1 (en) * 2016-09-05 2018-11-20 Telelens LLC. Compact telephoto lens camera suitable for use in smart phones and similar devices, and methods of using same
FR3074306B1 (fr) * 2017-11-28 2020-06-12 Thales Instrument d'observation comportant un autocollimateur a miroir monte sur viseur d'etoiles
US10725157B1 (en) * 2019-04-05 2020-07-28 Rockwell Automation Technologies, Inc. Industrial safety sensor
CN110989128A (zh) * 2019-11-26 2020-04-10 天津津航技术物理研究所 一种基于光学自定心技术的反射镜装调工装及装调方法
CN112596257B (zh) * 2020-12-30 2021-09-10 中国科学院长春光学精密机械与物理研究所 离轴反射式光学镜头的光轴校准方法
CN114739640B (zh) * 2022-04-12 2022-12-30 中国科学院光电技术研究所 一种望远镜主次镜实时对准检测系统

Citations (5)

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Publication number Priority date Publication date Assignee Title
JPH06337355A (ja) * 1993-05-31 1994-12-06 Canon Inc 光通信光学装置
JP2000121724A (ja) 1998-10-16 2000-04-28 Mitsubishi Electric Corp レーザレーダ装置
JP2002318157A (ja) * 2001-04-24 2002-10-31 Nec Corp 電磁波検出装置
WO2003027621A2 (en) * 2001-09-28 2003-04-03 Raytheon Company High-power beam control with wavefront correction utilizing phase conjugation and adaptive optics
US20060279838A1 (en) 2004-08-11 2006-12-14 Agency For Defense Development Large telescopic optical system with null alignment optics

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US2401706A (en) * 1943-03-13 1946-06-04 Eastman Kodak Co Range finder
US3326619A (en) * 1963-10-07 1967-06-20 Philco Ford Corp Gyro stabilized sight system utilizing a mirror with front and back reflecting surfaces
US3471237A (en) * 1966-02-15 1969-10-07 Barnes Eng Co Method of alignment of concave parabolic reflective optics
US4146329A (en) * 1977-09-14 1979-03-27 The United States Of America As Represented By The Secretary Of The Navy Autoalignment system for high power laser
JP3120885B2 (ja) * 1991-01-22 2000-12-25 旭光学工業株式会社 鏡面の測定装置
US5347387A (en) * 1992-03-24 1994-09-13 Rice Robert C Self-aligning optical transceiver
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Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06337355A (ja) * 1993-05-31 1994-12-06 Canon Inc 光通信光学装置
JP2000121724A (ja) 1998-10-16 2000-04-28 Mitsubishi Electric Corp レーザレーダ装置
JP2002318157A (ja) * 2001-04-24 2002-10-31 Nec Corp 電磁波検出装置
WO2003027621A2 (en) * 2001-09-28 2003-04-03 Raytheon Company High-power beam control with wavefront correction utilizing phase conjugation and adaptive optics
US20060279838A1 (en) 2004-08-11 2006-12-14 Agency For Defense Development Large telescopic optical system with null alignment optics

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2192433A4 *

Also Published As

Publication number Publication date
US8085400B2 (en) 2011-12-27
US20100177315A1 (en) 2010-07-15
EP2192433A4 (en) 2011-03-23
EP2192433A1 (en) 2010-06-02
EP2192433B1 (en) 2012-12-26

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