TW200517649A - Device and method for detecting broken edge of glass substrate - Google Patents

Device and method for detecting broken edge of glass substrate

Info

Publication number
TW200517649A
TW200517649A TW093124826A TW93124826A TW200517649A TW 200517649 A TW200517649 A TW 200517649A TW 093124826 A TW093124826 A TW 093124826A TW 93124826 A TW93124826 A TW 93124826A TW 200517649 A TW200517649 A TW 200517649A
Authority
TW
Taiwan
Prior art keywords
glass substrate
broken edge
detecting
detecting broken
pulses
Prior art date
Application number
TW093124826A
Other languages
Chinese (zh)
Other versions
TWI255915B (en
Inventor
Young-Nam Kil
Hong-Suk Heo
Original Assignee
Brooks Automation Asia Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Asia Ltd filed Critical Brooks Automation Asia Ltd
Publication of TW200517649A publication Critical patent/TW200517649A/en
Application granted granted Critical
Publication of TWI255915B publication Critical patent/TWI255915B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention provides a device and method for detecting the broken edge of glass substrate using the minimum limit of photo sensor in the production line of flat panel display when the glass substrate is moving. The device for detecting broken edge of glass substrate is configured on the lower portion or the upper portion of the moving position for the glass substrate. When the glass substrate is passing above or under at least two sensors, the present invention can calculate the number of pulses from the signal received by each sensor, and compare the determined time period and the calculated number of pulses with the default reference value, so as to determine if the glass substrate is damaged or not.
TW093124826A 2003-11-21 2004-08-18 Device and method for detecting broken edge of glass substrate TWI255915B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020030082999A KR100583701B1 (en) 2003-11-21 2003-11-21 Device and method for detecting broken edge of glass substrate

Publications (2)

Publication Number Publication Date
TW200517649A true TW200517649A (en) 2005-06-01
TWI255915B TWI255915B (en) 2006-06-01

Family

ID=34737838

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093124826A TWI255915B (en) 2003-11-21 2004-08-18 Device and method for detecting broken edge of glass substrate

Country Status (4)

Country Link
JP (1) JP2005156539A (en)
KR (1) KR100583701B1 (en)
CN (1) CN1619299A (en)
TW (1) TWI255915B (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4808510B2 (en) * 2006-02-21 2011-11-02 大日本スクリーン製造株式会社 Substrate crack detection device and substrate processing device
JP4808509B2 (en) * 2006-02-21 2011-11-02 大日本スクリーン製造株式会社 Substrate crack detection device and substrate processing device
KR100775024B1 (en) * 2006-06-07 2007-11-08 주식회사 케이씨텍 Device for testing edge of glass substrate and method thereof
CN103364413A (en) * 2012-04-10 2013-10-23 北京兆维电子(集团)有限责任公司 Identifier detection and product grading control system and method
CN103376062B (en) * 2012-04-20 2015-12-02 洛阳北方玻璃技术股份有限公司 Long method surveyed by a kind of glass
CN102854832A (en) * 2012-07-26 2013-01-02 蚌埠玻璃工业设计研究院 Electrical control device for detection bridge in sheet glass cold end cutting area
CN104103481A (en) * 2013-04-10 2014-10-15 上海和辉光电有限公司 Unfilled corner detection apparatus for glass substrate, dry etching machine table with the apparatus, and unfilled corner detection method
CN103471512B (en) * 2013-09-06 2016-08-17 中国建材国际工程集团有限公司 A kind of glass plate width detecting system based on machine vision
US9983452B2 (en) 2014-07-15 2018-05-29 Huawei Technologies Co., Ltd. Method for detecting substrate crack, substrate, and detection circuit
CN105319219B (en) * 2014-07-23 2019-05-14 塞米西斯科株式会社 Bad inspection system and method
CN107131832B (en) * 2016-02-29 2019-07-09 深圳市升瑞科仪光电有限公司 LCD glass edging effect detection method and device
CN105572144B (en) * 2016-03-07 2018-11-20 凌云光技术集团有限责任公司 Glass corner image collecting device and system
CN107153071A (en) * 2017-04-25 2017-09-12 武汉华星光电技术有限公司 The detection means and detection method of a kind of glass substrate
CN107219233A (en) * 2017-05-22 2017-09-29 武汉华星光电技术有限公司 A kind of device and method for detecting glass substrate breakage and crackle
CN108226228B (en) * 2018-01-29 2021-02-05 京东方科技集团股份有限公司 Substrate to be detected, method and equipment for detecting glass breakage
WO2020060772A1 (en) * 2018-09-19 2020-03-26 Corning Incorporated Methods of measuring a size of edge defects of glass sheets using an edge defect gauge and corresponding edge defect gauge
CN109283714A (en) * 2018-11-12 2019-01-29 成都中电熊猫显示科技有限公司 The detection method and detection device of bolster breakage in liquid crystal display panel crimping
CN111964549B (en) * 2020-07-08 2022-06-17 航天科工防御技术研究试验中心 Detection method for judging defect of large-volume monolithic capacitor
CN114441556A (en) * 2021-12-28 2022-05-06 蚌埠中光电科技有限公司 Online nondestructive detection and alarm system for substrate glass transmission process
CN115855963A (en) * 2023-02-28 2023-03-28 青岛融合光电科技有限公司 Glass detection device and detection method
CN116626034A (en) * 2023-05-09 2023-08-22 彩虹（合肥）液晶玻璃有限公司 Automatic detection mechanism for edges around glass substrate

Also Published As

Publication number Publication date
TWI255915B (en) 2006-06-01
KR20050083200A (en) 2005-08-26
KR100583701B1 (en) 2006-06-08
CN1619299A (en) 2005-05-25
JP2005156539A (en) 2005-06-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees