CN104103481A - Unfilled corner detection apparatus for glass substrate, dry etching machine table with the apparatus, and unfilled corner detection method - Google Patents
Unfilled corner detection apparatus for glass substrate, dry etching machine table with the apparatus, and unfilled corner detection method Download PDFInfo
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- CN104103481A CN104103481A CN201310122618.0A CN201310122618A CN104103481A CN 104103481 A CN104103481 A CN 104103481A CN 201310122618 A CN201310122618 A CN 201310122618A CN 104103481 A CN104103481 A CN 104103481A
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- unfilled corner
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Abstract
The invention provides an unfilled corner detection apparatus for a glass substrate, a dry etching machine table with the apparatus, and an unfilled corner detection method. The unfilled corner detection apparatus is used for detecting whether an unfilled corner exists in the glass substrate transmitted to a sample introduction chamber, and comprises two groups of unfilled corner sensors and logic controllers, wherein the two groups of unfilled corner sensors are respectively disposed at the two sides of the sample introduction chamber, each group of unfilled corner sensors comprise signal receiving parts and signal sending parts, the two groups of unfilled corner sensors generate first signals and second signals at the two sides of the glass substrate, the logic controllers can compare whether the first signals and the second signals are the same, and if the first signals and the second signals are different, it is indicated that the unfilled corner exists in the glass substrate.
Description
Technical field
The present invention relates to unfilled corner checkout gear and the unfilled corner detection method of glass substrate, enter the device and method that detects unfilled corner in the process of dry ecthing board especially for glass substrate.
Background technology
Existing dry ecthing board, the for example TEL of the equipment vendor dry ecthing board (DRY etcher) of 4.5 generations, its mode that transmits glass substrate is to transmit arm (Atmosphere Arm, A/A) after glass substrate is taken out by clip, put into load lock chamber, the each reative cell that enters subsequently board, carries out corresponding technique.
As Fig. 1 shows the delivery status of glass substrate in load lock chamber, glass substrate 1 is transmitted arm 2 and is delivered in load lock chamber, is supported by four pins 3.But glass substrate may exist unfilled corner entering before load lock chamber, if exist the glass substrate of unfilled corner to be transported to load lock chamber, probably cannot be supported by pin, thereby cause position skew.
At present whether general dry process board only can exist by being arranged on the simple and easy transducer sensing glass substrate transmitting on arm, but cannot effectively detect whether defectiveness of glass substrate.
Application number is 200410074085.4 to disclose a kind of damage detection device and method of glass base plate edge, and it comprises: determine that glass substrate is completely by the needed time of transducer; Or the pulse of the signal that receives of each transducer counts, and by the fiducial value comparison of the pulse number of this time or counting and reservation, thereby judgement substrate has or not breakage.Although this device can detect the unfilled corner of glass substrate, must could obtain judged result by after transducer completely at whole glass substrate, cause the delay of substrate transportation process, have a strong impact on working (machining) efficiency.
Summary of the invention
The object of the invention is to, a kind of unfilled corner checkout gear and unfilled corner detection method of glass substrate is provided, enter at glass substrate the existence that in the process of board, fast detecting goes out unfilled corner, improve transmission efficiency.
The invention provides a kind of unfilled corner checkout gear, whether there is unfilled corner for detection of the glass substrate that is sent to Sample Room, this unfilled corner checkout gear comprises two groups of unfilled corner transducers and logic controller, these two groups of unfilled corner transducers lay respectively at the both sides of this Sample Room, each group unfilled corner transducer includes signal receiving part and signal transmission unit, these two groups of unfilled corner transducers produce first signal and secondary signal corresponding to the both sides of this glass substrate, this logic controller can compare this first signal and whether secondary signal is identical, if signal difference, represent that this glass substrate exists unfilled corner.
The present invention also provides a kind of dry ecthing board, and it comprises Sample Room, transmits arm and above-mentioned unfilled corner checkout gear.
The present invention also provides a kind of unfilled corner detection method, and it utilizes above-mentioned unfilled corner checkout gear to detect glass substrate and whether has unfilled corner, and it comprises the following steps:
(1) by transmitting arm, this glass substrate is conveyed into this Sample Room;
(2) the unfilled corner transducer of the both sides of this Sample Room produces signal on the both sides of this glass substrate, wherein the unfilled corner transducer of a side produces first signal, the unfilled corner transducer of opposite side produces secondary signal, this unfilled corner transducer just first signal and secondary signal sends to this logic controller, compares this first signal and whether secondary signal is identical by this logic controller; And
(3) if the result that this logic controller is compared is that signal is identical, this transmission arm continues to transmit this glass substrate, if the result that this logic controller is compared is signal difference, this logic controller sends the instruction that makes this transmission arm stop motion.
Unfilled corner checkout gear of the present invention can enter the existence that in the process of Sample Room, fast detecting goes out unfilled corner at glass substrate, and prevent and continue to enter in board with the glass substrate of unfilled corner immediately, avoid entering and in board, causing abnormal transmission with the glass substrate of unfilled corner, it can be found in time and deal with problems, and improves transmission efficiency.
Brief description of the drawings
Fig. 1 is the delivery status schematic diagram of glass substrate in load lock chamber.
Fig. 2 is the schematic diagram with the dry ecthing board of unfilled corner checkout gear of the present invention.
Fig. 3 is the signal being produced by two groups of unfilled corner transducers of unfilled corner checkout gear of the present invention, in this process, unfilled corner do not detected.
Fig. 4 is the signal being produced by two groups of unfilled corner transducers of unfilled corner checkout gear of the present invention, in this process, unfilled corner detected.
Fig. 5 to Fig. 7 is the unfilled corner type schematic diagram that unfilled corner checkout gear of the present invention detects.
Fig. 8 is the schematic diagram of ignoring region and surveyed area that logic controller is shown.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is elaborated.Should be understood that, embodiment described herein only, for description and interpretation the present invention, is not limited to the present invention.
Unfilled corner checkout gear of the present invention comprises unfilled corner transducer 10 and logic controller (not shown).As shown in Figure 2, glass substrate 1 is transferred in load lock chamber 100, chamber door 101 both sides of load lock chamber 100 be respectively provided with one group described in unfilled corner transducer 10, each group is stated unfilled corner transducer 10 and is included signal receiving part 11 and signal transmission unit 12.In the present embodiment, be positioned at chamber door 101 upsides for signal receiving part 11, downside be signal transmission unit 12, certainly, also can carry out position exchange, can receiving and transmitting signal between unfilled corner transducer 10 as long as each is organized.The unfilled corner transducer of the present embodiment is light sensation transducer, and glass substrate 1 is transparent or semitransparent, and therefore, the unfilled corner transducer of light sensation can produce the signal through glass substrate 1.When chamber door 101 by load lock chamber 100 of glass substrate 1, the unfilled corner transducer 10 of both sides produces signal to the both sides of glass substrate 1, if there is unfilled corner on one side in glass substrate 1, the inevitable signal producing from the unfilled corner transducer 10 of another side of signal that the unfilled corner transducer 10 on this limit produces at this unfilled corner place is different, logic controller is compared out two signal differences, and control transmission arm 2 stops.In the present embodiment, the direction of transfer of glass substrate 1 is identical with its length direction, therefore unfilled corner checkout gear can detect the unfilled corner on the long limit of glass substrate 1.
Concrete detecting step is as follows:
First, by transmitting arm 2, glass substrate 1 is conveyed into load lock chamber 100; When chamber door 101 at glass substrate 1 by load lock chamber 100, the unfilled corner transducer 10 of both sides produces signal at any time on the both sides of glass substrate 1, and the signal of both sides is sent to logic controller, for example PLC, whether the signal by the PLC logic comparison left and right sides is consistent, in denotation coordination shown in Fig. 3,4, abscissa represents the sensing time, ordinate represents signal strength signal intensity, Fig. 3 shows the two groups of unfilled corner transducers 1 in left and right, and to produce signal consistent, prove that this process does not detect unfilled corner, transmit arm 2 and continue to transmit glass substrate 1, make it enter load lock chamber 100; Fig. 4 represents that wherein signal fluctuation (for example light intensity signal increase) occurs one group of unfilled corner transducer (the unfilled corner transducer on right side), cause with the signal of another group unfilled corner transducer generation inconsistent, prove that (glass substrate right hand edge) exists unfilled corner, PLC controls and transmits arm 2 stop motion immediately, board sends alarm signal, staff takes out the glass substrate 1 that has unfilled corner from transmitting arm 2, the glass substrate 1 of preventing with unfilled corner enters load lock chamber 100.
According to above-mentioned steps and principle, unfilled corner checkout gear can detect multiple unfilled corner type, there is the unfilled corner that size is different in two drift angle places of example glass substrate as shown in Figure 5, there is the unfilled corner that size is different in three drift angle places as shown in Figure 6, and has one or more unfilled corners on one side as shown in Figure 7.
If owing to transmitting rocking or the placement error of glass substrate of arm, the minor face bearing of trend that causes glass substrate not with the complete level of line direction of both sides unfilled corner transducer 10, there is little deviation in the two, while making glass substrate enter the chamber door 101 of load lock chamber 100, its both sides not enter simultaneously, but there is the small time difference, now, it is different from the signal that opposite side unfilled corner transducer 10 produces that rate is introduced into the signal that the segment glass substrate of chamber door 101 causes the unfilled corner transducer 10 of this side to produce, it is out of service that PLC can make to transmit arm according to the difference of this signal.In order to avoid unfilled corner checkout gear generation error detection as far as possible, the present embodiment further arranges the program of PLC.As shown in Figure 8, suppose to transmit arm 2 and transmit glass substrate 1 with fixed speed V, PLC is set as ignoring the unlike signal producing in 2ms,, with fixed speed V, glass substrate 1 is transmitted to 2ms at transmission arm 2, make in its process that enters load lock chamber 100 distance B 1, PLC ignores the unlike signal producing in this process, can transmission arm 2 not sent and be ceased and desisted order.After this, transmit arm 2 and continue glass substrate 1 to transmit 90ms with fixed speed V, make it at the interior displacement D2 of load lock chamber 100, in this process, PLC carries out the comparison of signal, and controls transmitting arm 2.Finally, transmit arm 2 and continue, with fixed speed V, glass substrate 1 is transmitted to 2ms, move it distance B 3, PLC ignores the unlike signal producing in this process equally, can transmission arm 2 not sent and be ceased and desisted order.That is to say, in figure A1, A3 for ignoring region, the surveyed area that A2 is PLC.Therefore, PLC can ignore glass substrate 1 just entered with leave the process of load lock chamber 100 in the signal that produces different, avoid unfilled corner checkout gear generation error detection.Certainly, above-mentioned time parameter is to set according to the glass substrate of a certain class specification, according to the glass substrate of different size, can design the size of ignoring accordingly region and surveyed area.
General unfilled corner or defect are present in four corner parts mostly, and unfilled corner checkout gear of the present invention can exhaustively detect this common deficiency by milli substantially.For other defect situation, the unfilled corner for example, in the middle of appearing in minor face regional extent, because pin is supported near long limit, therefore, if only there is unfilled corner in minor face regional extent, does not affect the conveying of glass substrate yet.Certainly, also can increase by one group of unfilled corner transducer, detect by same detection mode.For example, be provided with one group of unfilled corner transducer in the centre position of the chamber of load lock chamber door, when the chamber door of glass substrate by load lock chamber, there is sensing signal in door both sides, chamber and middle three groups of unfilled corner transducers altogether simultaneously, by logic controller, three sensing signals are compared, if occur, difference is controlled transmits arm stop motion immediately.Can not only detect like this unfilled corner in minor face regional extent, and more can reduce error by the comparison of three groups of signals.
Unfilled corner checkout gear of the present invention can enter the existence that in the process of load lock chamber, fast detecting goes out unfilled corner at glass substrate, and prevent and continue to enter in board with the glass substrate of unfilled corner immediately, avoid entering and in board, causing abnormal transmission with the glass substrate of unfilled corner, it can be found in time and deal with problems, not as prior art, glass substrate must be conveyed into completely in load lock chamber and just may obtain testing result, therefore the present invention can significantly improve transmission efficiency.And unfilled corner checkout gear of the present invention has the high power that is detected as, particularly the unfilled corner in 5-10mm left and right for width, is detected as power and substantially can reaches 100%.
Although described the present invention with reference to several exemplary embodiments, should be appreciated that term used is explanation and exemplary and nonrestrictive term.Because can specifically implementing in a variety of forms, the present invention do not depart from spirit or the essence of invention, so be to be understood that, above-described embodiment is not limited to any aforesaid details, and explain widely in the spirit and scope that should limit in the claim of enclosing, therefore fall into whole variations in claim or its equivalent scope and remodeling and all should be the claim of enclosing and contain.
Claims (15)
1. a unfilled corner checkout gear, whether there is unfilled corner for detection of the glass substrate that is sent to Sample Room, this unfilled corner checkout gear comprises two groups of unfilled corner transducers and logic controller, these two groups of unfilled corner transducers lay respectively at the both sides of this Sample Room, each group unfilled corner transducer includes signal receiving part and signal transmission unit, these two groups of unfilled corner transducers produce first signal and secondary signal corresponding to the both sides of this glass substrate, this logic controller can compare this first signal and whether secondary signal is identical, if signal difference, represents that this glass substrate exists unfilled corner.
2. unfilled corner checkout gear as claimed in claim 1, wherein: this unfilled corner transducer is light sensation transducer.
3. unfilled corner checkout gear as claimed in claim 2, wherein: this glass substrate is transparent or semitransparent.
4. unfilled corner checkout gear as claimed in claim 3, wherein: the signal strength signal intensity that this unfilled corner transducer has unfilled corner place to produce on this glass substrate is greater than the signal strength signal intensity that this unfilled corner transducer produces without unfilled corner place on this glass substrate, whether this logic controller is identical in order to compare the intensity of this first signal and secondary signal.
5. unfilled corner checkout gear as claimed in claim 4, wherein: these two groups of unfilled corner transducers lay respectively at the both sides of the chamber door of this Sample Room, this glass substrate enters in the process of this Sample Room, contiguous these two groups of unfilled corner transducers in long limit of this glass substrate.
6. unfilled corner checkout gear as claimed in claim 5, wherein: this unfilled corner checkout gear also comprises the 3rd group of unfilled corner transducer, they are between these two groups of unfilled corner transducers, the 3rd group of unfilled corner transducer comprises signal receiving part and signal transmission unit, and produce the 3rd signal corresponding to the 3rd limit of this glass substrate, this logic controller can be compared this first signal, whether secondary signal is identical with the 3rd signal, if there is unlike signal, represents that this glass substrate exists unfilled corner.
7. unfilled corner checkout gear as claimed in claim 6, wherein: the 3rd group of unfilled corner transducer is positioned at the centre position of chamber door.
8. unfilled corner checkout gear as claimed in claim 1, wherein: this logic controller is PLC.
9. a dry ecthing board, it comprises Sample Room, transmits the unfilled corner checkout gear described in any one in arm and claim 1 to 8.
10. dry ecthing board as claimed in claim 9, wherein: if the result that this logic controller is compared is that each signal is identical, this transmission arm continues to transmit this glass substrate, if the result that this logic controller is compared is for existing unlike signal, this logic controller sends the instruction that makes this transmission arm stop motion.
11. dry ecthing boards as claimed in claim 10, wherein: this logic controller be set to have first ignore the period, second ignore the period and detect the period, ignore in the period this first, second, this logic controller is not compared to the first signal receiving and secondary signal, in this detection period, this logic controller is compared to the first signal receiving and secondary signal, and carries out corresponding instruction according to comparison result.
12. dry ecthing boards as claimed in claim 11, wherein: first to ignore the period be the process that is transferred into mobile 2ms this Sample Room from this glass substrate for this, this detection period is this first process of ignoring this glass substrate after the period and being transferred into mobile 90ms after this Sample Room, and second to ignore the period be the process that this glass substrate is transferred into mobile 2ms after this Sample Room after this detection period for this.
13. 1 kinds of unfilled corner detection methods, it utilizes the detection of the unfilled corner checkout gear described in any one glass substrate in claim 1 to 8 whether to have unfilled corner, and it comprises the following steps:
(1) by transmitting arm, this glass substrate is conveyed into this Sample Room;
(2) the unfilled corner transducer of the both sides of this Sample Room produces signal on the both sides of this glass substrate, wherein the unfilled corner transducer of a side produces first signal, the unfilled corner transducer of opposite side produces secondary signal, this unfilled corner transducer just first signal and secondary signal sends to this logic controller, compares this first signal and whether secondary signal is identical by this logic controller; And
(3) if the result that this logic controller is compared is that signal is identical, this transmission arm continues to transmit this glass substrate, if the result that this logic controller is compared is signal difference, this logic controller sends the instruction that makes this transmission arm stop motion.
14. unfilled corner detection methods as claimed in claim 13, wherein: this logic controller be set to have first ignore the period, second ignore the period and detect the period, ignore in the period this first, second, this logic controller is not compared to the first signal receiving and secondary signal, in this detection period, this logic controller is compared to the first signal receiving and secondary signal, and carries out corresponding instruction according to comparison result.
15. unfilled corner detection methods as claimed in claim 13, wherein: first to ignore the period be the process that is transferred into mobile 2ms this Sample Room from this glass substrate for this, this detection period is this first process of ignoring this glass substrate after the period and being transferred into mobile 90ms after this Sample Room, and second to ignore the period be the process that this glass substrate is transferred into mobile 2ms after this Sample Room after this detection period for this.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310122618.0A CN104103481A (en) | 2013-04-10 | 2013-04-10 | Unfilled corner detection apparatus for glass substrate, dry etching machine table with the apparatus, and unfilled corner detection method |
| TW102116242A TWI496234B (en) | 2013-04-10 | 2013-05-07 | A corner detection device for a glass substrate, a dry etching machine having the same, and a low angle detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310122618.0A CN104103481A (en) | 2013-04-10 | 2013-04-10 | Unfilled corner detection apparatus for glass substrate, dry etching machine table with the apparatus, and unfilled corner detection method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104103481A true CN104103481A (en) | 2014-10-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310122618.0A Pending CN104103481A (en) | 2013-04-10 | 2013-04-10 | Unfilled corner detection apparatus for glass substrate, dry etching machine table with the apparatus, and unfilled corner detection method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN104103481A (en) |
| TW (1) | TWI496234B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108535898A (en) * | 2018-04-11 | 2018-09-14 | 蚌埠高华电子股份有限公司 | A kind of LCD raw materials corner detection device based on positioning analysis formula |
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| CN101887103A (en) * | 2010-04-07 | 2010-11-17 | 珠海天威技术开发有限公司 | Chip tester and test method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR101277951B1 (en) * | 2008-04-23 | 2013-06-27 | 엘지디스플레이 주식회사 | Display Device |
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2013
- 2013-04-10 CN CN201310122618.0A patent/CN104103481A/en active Pending
- 2013-05-07 TW TW102116242A patent/TWI496234B/en not_active IP Right Cessation
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5740059A (en) * | 1995-05-18 | 1998-04-14 | Kabushiki Kaisha Toshiba | Method of transporting substrates and apparatus for transporting substrates |
| KR20030043220A (en) * | 2001-11-27 | 2003-06-02 | 엘지.필립스 엘시디 주식회사 | Apparatus for sensing breakage in base glass plate of LCD |
| CN1619299A (en) * | 2003-11-21 | 2005-05-25 | 布鲁克斯自动化机械亚洲株式会社 | Apparatus and method for detecting damage of glass base plate edge |
| CN101026115A (en) * | 2006-02-21 | 2007-08-29 | 大日本网目版制造株式会社 | Appratus for detecting crack of substrate and substrate processing appratus |
| CN101122752A (en) * | 2006-08-10 | 2008-02-13 | 株式会社Orc制作所 | Centering device and exposure device |
| CN101398394A (en) * | 2007-09-28 | 2009-04-01 | 上海华虹Nec电子有限公司 | Silicon chip edge notching detection method and device |
| CN101442018A (en) * | 2007-11-21 | 2009-05-27 | 中芯国际集成电路制造(上海)有限公司 | Detection method for silicon wafer warpage degree |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108535898A (en) * | 2018-04-11 | 2018-09-14 | 蚌埠高华电子股份有限公司 | A kind of LCD raw materials corner detection device based on positioning analysis formula |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201440158A (en) | 2014-10-16 |
| TWI496234B (en) | 2015-08-11 |
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Application publication date: 20141015 |