CN107219233A - A kind of device and method for detecting glass substrate breakage and crackle - Google Patents
A kind of device and method for detecting glass substrate breakage and crackle Download PDFInfo
- Publication number
- CN107219233A CN107219233A CN201710361701.1A CN201710361701A CN107219233A CN 107219233 A CN107219233 A CN 107219233A CN 201710361701 A CN201710361701 A CN 201710361701A CN 107219233 A CN107219233 A CN 107219233A
- Authority
- CN
- China
- Prior art keywords
- glass substrate
- light source
- crackle
- light
- machining cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
A kind of device for detecting glass substrate breakage and crackle, including, photoinduction system, glass substrate machining cell and the control photoinduction system and the central control system of glass substrate machining cell;Wherein, the photoinduction system is arranged on glass substrate machining cell porch, and glass substrate contacts photoinduction system when entering glass substrate machining cell, and signal is fed back to central control system by photoinduction system.It is detected whether region has crackle or breakage by detecting just no energy variation that transmitter sends to judge glass substrate, and stops the operation of glass substrate machining cell, effectively eliminates the broken glass substrate of crackle, improve the process rate of product.
Description
Technical field
The present invention be applied to liquid crystal panel production process in a kind of detection glass substrate breakage and crackle device and
Method.
Background technology
In process of production, glass substrate needs the processing procedure such as be coated, expose, developing, toast liquid crystal panel, due to passing through
The equipment crossed is more, and production procedure is long, easily causes the rupture of glass substrate corner and crackle, if do not found in time, can flow into
Process contamination equipment, causes equipment damage afterwards, and is difficult to find the true cause for causing rupture.
The content of the invention
In order to avoid glass substrate, corner rupture and seminess are difficult to be found to cause rupture in process of production
Phenomenon occur, a kind of device and method for detecting glass substrate breakage and crackle is set, the process rate of glass substrate is improved.
A kind of device for detecting glass substrate breakage and crackle, it is characterised in that including photoinduction system, glass substrate
Machining cell and the control photoinduction system and the central control system of glass substrate machining cell;
Wherein, the photoinduction system is arranged on glass substrate machining cell porch, and glass substrate enters glass substrate
Machining cell time induction system is sensed, and induced signal is fed back into central control system.
Described detection glass substrate breakage and the device of crackle, wherein, the photoinduction system includes light source emitter
And light source receiver, the light source emitter and light source receiver are arranged in pairs in glass substrate machining cell porch glass base
Plate by region both sides up and down, light source emitter transmitting light pass through glass substrate after received by light source receiver.
Described detection glass substrate breakage and the device of crackle, wherein, the light source emitter and light source receiver are set
Put and be located at the upper-lower position on glass substrate side to be detected in glass substrate machining cell porch, the glass substrate side to be measured is
Parallel to two sides of the glass substrate direction of motion.
Described detection glass substrate breakage and the device of crackle, wherein, the light source emitter can send infrared ray,
The light source receiver can detect that infrared energy changes.
Described detection glass substrate breakage and the device of crackle, wherein, the glass substrate is transported to by mechanical arm
Glass substrate machining cell, the light source emitter and light source receiver to be multipair, and avoid the mechanical arm just above and below
Orientation is installed.
Described detection glass substrate breakage and the device of crackle, wherein, the mechanical arm includes three support glass
The support arm of substrate, the support arm width is no more than 3cm.
Described detection glass substrate breakage and the device of crackle, wherein, the energy of the light of the light source emitter transmitting
It is adjustable.
A kind of method for detecting glass substrate breakage and crackle, comprises the following steps:
Step 1: central control system control light source emitter sends light, light source receiver receives light and by original luminous energy
Amount information M1 feeds back to central control system;
Step 2: glass substrate enters glass substrate machining cell and worn between light source emitter and light source receiver
Cross, the luminous energy information M2 that light source receiver is received during normal glass substrate is passed through feeds back to central control system;
Step 3: when glass substrate edge has crackle, the light of light source emitter transmitting passes through the place for having crackle, now
The luminous energy information M3 that light source receiver is received feeds back to central control system;
Step 4: central control system is to light energy information M2 and light energy information M3 processing.
Described detection glass substrate breakage and the method for crackle, wherein, in step 4, central control system passes through contrast
The whether equal operations for judging whether to stop glass substrate machining cell of light energy information M2 and M3.
Described detection glass substrate breakage and the method for crackle, wherein, the light energy information M2 and light energy information
M3 is identical, and the glass substrate machining cell is continued to run with, and the light energy information M2 is different with light energy information M3, center control
System control glass substrate machining cell processed is out of service.
The present invention has advantages below:Light source emitter and light source is set to receive in glass substrate machining cell porch
Device, is detected whether region has crackle or broken by detecting just no energy variation that transmitter sends to judge glass substrate
Damage, and stop the operation of glass substrate machining cell, effectively eliminate the broken glass substrate of crackle, the processing procedure for improving product is good
Rate.
In two side upper-lower positions parallel to the glass substrate direction of motion, light source emitter and light source receiver, one are set
The broken glass substrate of crackle can be excluded comprehensively.
Multipair light source emitter and light source receiver is set not only to crush the high glass substrate side of incidence in crackle
Detect that glass substrate whether there is flaw, can also detect whether there is crackle Fragmentation Phenomena in glass substrate middle position at edge
Generation, comprehensively exclude crackle crushing basal plates.
Brief description of the drawings
The invention will be described in more detail below based on embodiments and refering to the accompanying drawings.Wherein:
Fig. 1 is the device front view of present invention detection glass substrate breakage and crackle;
Fig. 2 is the device top view of present invention detection glass substrate breakage and crackle.
In the accompanying drawings, identical part uses identical reference.Accompanying drawing is not according to actual ratio.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in figure 1, be a kind of front view for the device for detecting glass substrate breakage and crackle of the present invention, including:Light sensation
Answer system (not drawn out in figure), glass substrate machining cell 1 and control the photoinduction system and glass substrate work sheet
The central control system (not drawn out in figure) of member 1;Wherein, the photoinduction system is arranged on glass substrate machining cell 1 and entered
At mouthful, glass substrate 2 contacts photoinduction system when entering glass substrate machining cell 1, during photoinduction system feeds back to signal
Entreat control system.The photoinduction system includes, and light source emitter 4, light source receiver 5, the light source emitter 4 and light source connect
Receive device 5 and be arranged in pairs in up and down both sides of the porch glass substrate 2 of glass substrate machining cell 1 by region, light source emitter 4
The light of transmitting is received after passing through glass substrate 2 by light source receiver 5.
Wherein, the bearing glass substrate 2 of mechanical arm 3 enters glass substrate machining cell 1, the light source emitter 4 and light
Source receiver 5 is vertically opposite should to be separately positioned on glass substrate machining cell porch glass substrate by up and down the two of region
Side, and the upper-lower position just to mechanical arm is avoided, the light that light source emitter 4 is launched is received through after glass substrate 3 by light source
Device 5 is received.
As shown in Fig. 2 be the device top view that the present invention detects glass substrate breakage and crackle, in one embodiment,
The light source emitter 4 and light source receiver 5 are arranged on the porch of glass substrate machining cell 2 positioned at glass substrate side to be detected
Upper-lower position.The glass substrate is to be measured while for two parallel to the glass substrate direction of motion.The direction of arrow is in figure
The glass substrate direction of motion.
Described detection glass substrate breakage and the device of crackle, wherein, the light source emitter is that can send infrared ray
Equipment, the light source receiver for detection infrared energy equipment.
In one embodiment, the light source emitter and light source receiver are multipair, are separately positioned on glass substrate and add
Work order member porch glass substrate and avoids the upper-lower position just to mechanical arm by the both sides up and down in region.
Described detection glass substrate breakage and the device of crackle, wherein, the mechanical arm 3 includes three support glass
The support arm of substrate:First support arm 31, the second support arm 32 and the 3rd support arm 33, the support arm width are no more than
3cm。
Described detection glass substrate breakage and the device of crackle, wherein, the energy of the light of the light source emitter transmitting
It is adjustable.
A kind of method for detecting glass substrate breakage and crackle, comprises the following steps:
Step 1: central control system control light source emitter sends light, light source receiver receives light and by original luminous energy
Amount information M1 feeds back to central control system;
Step 2: glass substrate enters glass substrate machining cell and worn between light source emitter and light source receiver
Cross, the luminous energy information M2 that light source receiver is received during normal glass substrate is passed through feeds back to central control system;
Step 3: when glass substrate edge has crackle, the light of light source emitter transmitting passes through the place for having crackle, now
The luminous energy information M3 that light source receiver is received feeds back to central control system;
Step 4: central control system is to light energy information M2 and light energy information M3 processing.
Described detection glass substrate breakage and the method for crackle, wherein, in step 4, central control system passes through contrast
The whether equal operations for judging whether to stop glass substrate machining cell of light energy information M2 and M3.
Described detection glass substrate breakage and the method for crackle, wherein, the light energy information M2 and light energy information
M3 is identical, and the glass substrate machining cell is continued to run with, and the light energy information M2 is different with light energy information M3, center control
System control glass substrate machining cell processed is out of service.
When glass is in mechanical arm when picking and placeing, glass edge touches the light that light source emitter is sent, if glass edge
Edge has crackle or breakage, and light passes through glass substrate, and energy can change, and equipment alarm simultaneously stops.If glass substrate side
Edge flawless or breakage, light will not be changed through glass substrate energy, and process equipment is then normally run.
With the method for this detection glass substrate breakage and crackle so that every glass substrate can all carry out crackle and rupture
Check, do not result in missing inspection;When having checked crackle, equipment energy and alarm simultaneously stop, it is ensured that detection promptness;It will not say
The glass for having crackle is flowed into lower process apparatus, reduces the risk of equipment pollution;Exception can be found and locked in time, and is helped
Clear it is true because.
Light source emitter and light source receiver are set in glass substrate machining cell porch, by detecting that transmitter is sent
Just no energy variation be detected whether region has crackle or breakage to judge glass substrate, and stop glass substrate work sheet
Member operation, effectively eliminates the broken glass substrate of crackle, improves the process rate of product.
In two side upper-lower positions parallel to the glass substrate direction of motion, light source emitter and light source receiver, one are set
The broken glass substrate of crackle can be excluded comprehensively.
Multipair light source emitter and light source receiver is set not only to crush the high glass substrate side of incidence in crackle
Detect that glass substrate whether there is flaw, can also detect whether there is crackle Fragmentation Phenomena in glass substrate middle position at edge
Generation, comprehensively exclude crackle crushing basal plates.
Although by reference to preferred embodiment, invention has been described, is not departing from the situation of the scope of the present invention
Under, various improvement can be carried out to it and part therein can be replaced with equivalent.Especially, as long as in the absence of structure punching
Prominent, the every technical characteristic being previously mentioned in each embodiment can combine in any way.The invention is not limited in text
Disclosed in specific embodiment, but all technical schemes including falling within the scope of the appended claims.
Claims (10)
1. a kind of device for detecting glass substrate breakage and crackle, it is characterised in that including photoinduction system, glass substrate add
Work order member and the control photoinduction system and the central control system of glass substrate machining cell;
Wherein, the photoinduction system is arranged on glass substrate machining cell porch, and glass substrate is processed into glass substrate
Unit time induction system is sensed, and induced signal is fed back into central control system.
2. the device of detection glass substrate breakage according to claim 1 and crackle, it is characterised in that the photoinduction system
System includes light source emitter and light source receiver, and the light source emitter and light source receiver are arranged in pairs in glass substrate processing
Unit porch glass substrate by region both sides up and down, light source emitter transmitting light pass through glass substrate after connect by light source
Device is received to receive.
3. the device of detection glass substrate breakage according to claim 2 and crackle, it is characterised in that the light source transmitting
Device and light source receiver are arranged on the upper-lower position that glass substrate machining cell porch is located at glass substrate side to be detected, described
Glass substrate is to be measured while for two parallel to the glass substrate direction of motion.
4. the device of detection glass substrate breakage according to claim 2 and crackle, it is characterised in that the light source transmitting
Device can send infrared ray, and the light source receiver can detect that infrared energy changes.
5. the device of detection glass substrate breakage according to claim 2 and crackle, it is characterised in that the glass substrate
Glass substrate machining cell is transported to by mechanical arm, the light source emitter and light source receiver are multipair, and avoid described
The positive upper and lower position of mechanical arm is set.
6. the device of detection glass substrate breakage according to claim 5 and crackle, it is characterised in that the mechanical arm
Include the support arm of three support glass substrates, the support arm width is no more than 3cm.
7. the device of detection glass substrate breakage according to claim 2 and crackle, it is characterised in that the light source transmitting
The energy of the light of device transmitting can adjust.
8. a kind of method for detecting glass substrate breakage and crackle, it is characterised in that comprise the following steps:
Step 1: central control system control light source emitter sends light, light source receiver receives light and believes original light energy
Breath M1 feeds back to central control system;
Step 2: glass substrate enters glass substrate machining cell and passed through between light source emitter and light source receiver, light
The luminous energy information M2 that source receiver is received during normal glass substrate is passed through feeds back to central control system;
Step 3: when glass substrate edge has crackle, the light of light source emitter transmitting passes through the place for having crackle, now light source
The luminous energy information M3 that receiver is received feeds back to central control system;
Step 4: central control system is to light energy information M2 and light energy information M3 processing.
9. the method for detection glass substrate breakage according to claim 8 and crackle, it is characterised in that in step 4, in
Centre control system is by contrasting the whether equal operation for judging whether to stop glass substrate machining cell of light energy information M2 and M3.
10. the method for detection glass substrate breakage according to claim 9 and crackle, it is characterised in that the light energy
Information M2 is identical with light energy information M3, and the glass substrate machining cell is continued to run with, the light energy information M2 and luminous energy
Measure information M3 different, central control system control glass substrate machining cell is out of service.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710361701.1A CN107219233A (en) | 2017-05-22 | 2017-05-22 | A kind of device and method for detecting glass substrate breakage and crackle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710361701.1A CN107219233A (en) | 2017-05-22 | 2017-05-22 | A kind of device and method for detecting glass substrate breakage and crackle |
Publications (1)
Publication Number | Publication Date |
---|---|
CN107219233A true CN107219233A (en) | 2017-09-29 |
Family
ID=59945090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710361701.1A Pending CN107219233A (en) | 2017-05-22 | 2017-05-22 | A kind of device and method for detecting glass substrate breakage and crackle |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN107219233A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108445653A (en) * | 2018-03-27 | 2018-08-24 | 武汉华星光电技术有限公司 | Transmission device for transmitting substrate and its control method |
CN109283714A (en) * | 2018-11-12 | 2019-01-29 | 成都中电熊猫显示科技有限公司 | The detection method and detection device of bolster breakage in liquid crystal display panel crimping |
CN109879593A (en) * | 2019-04-23 | 2019-06-14 | 蚌埠中光电科技有限公司 | A kind of glass tape crackle warning device |
CN110434122A (en) * | 2019-09-06 | 2019-11-12 | 中建材(蚌埠)光电材料有限公司 | A kind of glass detection dust-extraction unit with induction identification function |
CN110767563A (en) * | 2019-10-25 | 2020-02-07 | 上海华力集成电路制造有限公司 | Method for detecting wafer integrity and RTP machine |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1619299A (en) * | 2003-11-21 | 2005-05-25 | 布鲁克斯自动化机械亚洲株式会社 | Apparatus and method for detecting damage of glass base plate edge |
CN203259481U (en) * | 2013-04-24 | 2013-10-30 | 合肥京东方光电科技有限公司 | Glass substrate detecting device |
CN104142352A (en) * | 2013-05-10 | 2014-11-12 | 上海和辉光电有限公司 | Glass detection apparatus |
-
2017
- 2017-05-22 CN CN201710361701.1A patent/CN107219233A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1619299A (en) * | 2003-11-21 | 2005-05-25 | 布鲁克斯自动化机械亚洲株式会社 | Apparatus and method for detecting damage of glass base plate edge |
CN203259481U (en) * | 2013-04-24 | 2013-10-30 | 合肥京东方光电科技有限公司 | Glass substrate detecting device |
CN104142352A (en) * | 2013-05-10 | 2014-11-12 | 上海和辉光电有限公司 | Glass detection apparatus |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108445653A (en) * | 2018-03-27 | 2018-08-24 | 武汉华星光电技术有限公司 | Transmission device for transmitting substrate and its control method |
CN108445653B (en) * | 2018-03-27 | 2021-01-15 | 武汉华星光电技术有限公司 | Transfer apparatus for transferring substrate and control method thereof |
CN109283714A (en) * | 2018-11-12 | 2019-01-29 | 成都中电熊猫显示科技有限公司 | The detection method and detection device of bolster breakage in liquid crystal display panel crimping |
CN109879593A (en) * | 2019-04-23 | 2019-06-14 | 蚌埠中光电科技有限公司 | A kind of glass tape crackle warning device |
CN110434122A (en) * | 2019-09-06 | 2019-11-12 | 中建材(蚌埠)光电材料有限公司 | A kind of glass detection dust-extraction unit with induction identification function |
CN110767563A (en) * | 2019-10-25 | 2020-02-07 | 上海华力集成电路制造有限公司 | Method for detecting wafer integrity and RTP machine |
CN110767563B (en) * | 2019-10-25 | 2022-05-27 | 上海华力集成电路制造有限公司 | Method for detecting wafer integrity and RTP machine |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107219233A (en) | A kind of device and method for detecting glass substrate breakage and crackle | |
CN104609137B (en) | Glass substrate conveying device | |
CN204843467U (en) | Automatic dress LED machine | |
US20160026948A1 (en) | System for managing production of glass substrates and method for managing production of glass substrates | |
TW201443425A (en) | Device for glass sheet detection | |
WO2016169171A1 (en) | Detection device and detection method of display panel circuit | |
CN103969266A (en) | Transmission detection device and method thereof | |
CN107093566A (en) | A kind of silicon chip automatic detection sorting device and its control method | |
JP2008070324A (en) | Warpage detector of plate-like body, and its method | |
CN103217816A (en) | Detecting method of array base plate and detecting table and detecting device thereof | |
CN211330315U (en) | Device for chip testing, sorting and stacking detection | |
CN108519390B (en) | Glass substrate detection device | |
CN102590223A (en) | Quality detecting device for bottle body plug adding | |
TWI484160B (en) | A substrate detection device and method | |
CA2856527C (en) | Device and method for processing anode plate for electrolysis | |
CN205344152U (en) | Laser marking detects and alarm device | |
CN202632063U (en) | Automatic optic inspection control system | |
CN205067386U (en) | Glass surface defect automatic checkout device | |
CN207114443U (en) | A kind of core-spun yarn steel defect detection means | |
CN206945570U (en) | The structure of on-line checking original sheet glass impurity | |
CN202210197U (en) | Detection unit and detection device of liquid crystal display (LCD) panel | |
KR101360008B1 (en) | Apparatus for detecting a foreign substance on an interleaving paper to be inserted between glass substrates | |
CN207882269U (en) | Textile metallic detection device | |
CN202471606U (en) | Bottle plugging quality detecting device | |
CN106353973A (en) | Mask scratch prevention system and exposure system |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170929 |
|
WD01 | Invention patent application deemed withdrawn after publication |