CN107219233A - A kind of device and method for detecting glass substrate breakage and crackle - Google Patents

A kind of device and method for detecting glass substrate breakage and crackle Download PDF

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Publication number
CN107219233A
CN107219233A CN201710361701.1A CN201710361701A CN107219233A CN 107219233 A CN107219233 A CN 107219233A CN 201710361701 A CN201710361701 A CN 201710361701A CN 107219233 A CN107219233 A CN 107219233A
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CN
China
Prior art keywords
glass substrate
light source
crackle
light
machining cell
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Pending
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CN201710361701.1A
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Chinese (zh)
Inventor
龚冰
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Wuhan China Star Optoelectronics Technology Co Ltd
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Wuhan China Star Optoelectronics Technology Co Ltd
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Priority to CN201710361701.1A priority Critical patent/CN107219233A/en
Publication of CN107219233A publication Critical patent/CN107219233A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513Liquid crystal panels

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

A kind of device for detecting glass substrate breakage and crackle, including, photoinduction system, glass substrate machining cell and the control photoinduction system and the central control system of glass substrate machining cell;Wherein, the photoinduction system is arranged on glass substrate machining cell porch, and glass substrate contacts photoinduction system when entering glass substrate machining cell, and signal is fed back to central control system by photoinduction system.It is detected whether region has crackle or breakage by detecting just no energy variation that transmitter sends to judge glass substrate, and stops the operation of glass substrate machining cell, effectively eliminates the broken glass substrate of crackle, improve the process rate of product.

Description

A kind of device and method for detecting glass substrate breakage and crackle
Technical field
The present invention be applied to liquid crystal panel production process in a kind of detection glass substrate breakage and crackle device and Method.
Background technology
In process of production, glass substrate needs the processing procedure such as be coated, expose, developing, toast liquid crystal panel, due to passing through The equipment crossed is more, and production procedure is long, easily causes the rupture of glass substrate corner and crackle, if do not found in time, can flow into Process contamination equipment, causes equipment damage afterwards, and is difficult to find the true cause for causing rupture.
The content of the invention
In order to avoid glass substrate, corner rupture and seminess are difficult to be found to cause rupture in process of production Phenomenon occur, a kind of device and method for detecting glass substrate breakage and crackle is set, the process rate of glass substrate is improved.
A kind of device for detecting glass substrate breakage and crackle, it is characterised in that including photoinduction system, glass substrate Machining cell and the control photoinduction system and the central control system of glass substrate machining cell;
Wherein, the photoinduction system is arranged on glass substrate machining cell porch, and glass substrate enters glass substrate Machining cell time induction system is sensed, and induced signal is fed back into central control system.
Described detection glass substrate breakage and the device of crackle, wherein, the photoinduction system includes light source emitter And light source receiver, the light source emitter and light source receiver are arranged in pairs in glass substrate machining cell porch glass base Plate by region both sides up and down, light source emitter transmitting light pass through glass substrate after received by light source receiver.
Described detection glass substrate breakage and the device of crackle, wherein, the light source emitter and light source receiver are set Put and be located at the upper-lower position on glass substrate side to be detected in glass substrate machining cell porch, the glass substrate side to be measured is Parallel to two sides of the glass substrate direction of motion.
Described detection glass substrate breakage and the device of crackle, wherein, the light source emitter can send infrared ray, The light source receiver can detect that infrared energy changes.
Described detection glass substrate breakage and the device of crackle, wherein, the glass substrate is transported to by mechanical arm Glass substrate machining cell, the light source emitter and light source receiver to be multipair, and avoid the mechanical arm just above and below Orientation is installed.
Described detection glass substrate breakage and the device of crackle, wherein, the mechanical arm includes three support glass The support arm of substrate, the support arm width is no more than 3cm.
Described detection glass substrate breakage and the device of crackle, wherein, the energy of the light of the light source emitter transmitting It is adjustable.
A kind of method for detecting glass substrate breakage and crackle, comprises the following steps:
Step 1: central control system control light source emitter sends light, light source receiver receives light and by original luminous energy Amount information M1 feeds back to central control system;
Step 2: glass substrate enters glass substrate machining cell and worn between light source emitter and light source receiver Cross, the luminous energy information M2 that light source receiver is received during normal glass substrate is passed through feeds back to central control system;
Step 3: when glass substrate edge has crackle, the light of light source emitter transmitting passes through the place for having crackle, now The luminous energy information M3 that light source receiver is received feeds back to central control system;
Step 4: central control system is to light energy information M2 and light energy information M3 processing.
Described detection glass substrate breakage and the method for crackle, wherein, in step 4, central control system passes through contrast The whether equal operations for judging whether to stop glass substrate machining cell of light energy information M2 and M3.
Described detection glass substrate breakage and the method for crackle, wherein, the light energy information M2 and light energy information M3 is identical, and the glass substrate machining cell is continued to run with, and the light energy information M2 is different with light energy information M3, center control System control glass substrate machining cell processed is out of service.
The present invention has advantages below:Light source emitter and light source is set to receive in glass substrate machining cell porch Device, is detected whether region has crackle or broken by detecting just no energy variation that transmitter sends to judge glass substrate Damage, and stop the operation of glass substrate machining cell, effectively eliminate the broken glass substrate of crackle, the processing procedure for improving product is good Rate.
In two side upper-lower positions parallel to the glass substrate direction of motion, light source emitter and light source receiver, one are set The broken glass substrate of crackle can be excluded comprehensively.
Multipair light source emitter and light source receiver is set not only to crush the high glass substrate side of incidence in crackle Detect that glass substrate whether there is flaw, can also detect whether there is crackle Fragmentation Phenomena in glass substrate middle position at edge Generation, comprehensively exclude crackle crushing basal plates.
Brief description of the drawings
The invention will be described in more detail below based on embodiments and refering to the accompanying drawings.Wherein:
Fig. 1 is the device front view of present invention detection glass substrate breakage and crackle;
Fig. 2 is the device top view of present invention detection glass substrate breakage and crackle.
In the accompanying drawings, identical part uses identical reference.Accompanying drawing is not according to actual ratio.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in figure 1, be a kind of front view for the device for detecting glass substrate breakage and crackle of the present invention, including:Light sensation Answer system (not drawn out in figure), glass substrate machining cell 1 and control the photoinduction system and glass substrate work sheet The central control system (not drawn out in figure) of member 1;Wherein, the photoinduction system is arranged on glass substrate machining cell 1 and entered At mouthful, glass substrate 2 contacts photoinduction system when entering glass substrate machining cell 1, during photoinduction system feeds back to signal Entreat control system.The photoinduction system includes, and light source emitter 4, light source receiver 5, the light source emitter 4 and light source connect Receive device 5 and be arranged in pairs in up and down both sides of the porch glass substrate 2 of glass substrate machining cell 1 by region, light source emitter 4 The light of transmitting is received after passing through glass substrate 2 by light source receiver 5.
Wherein, the bearing glass substrate 2 of mechanical arm 3 enters glass substrate machining cell 1, the light source emitter 4 and light Source receiver 5 is vertically opposite should to be separately positioned on glass substrate machining cell porch glass substrate by up and down the two of region Side, and the upper-lower position just to mechanical arm is avoided, the light that light source emitter 4 is launched is received through after glass substrate 3 by light source Device 5 is received.
As shown in Fig. 2 be the device top view that the present invention detects glass substrate breakage and crackle, in one embodiment, The light source emitter 4 and light source receiver 5 are arranged on the porch of glass substrate machining cell 2 positioned at glass substrate side to be detected Upper-lower position.The glass substrate is to be measured while for two parallel to the glass substrate direction of motion.The direction of arrow is in figure The glass substrate direction of motion.
Described detection glass substrate breakage and the device of crackle, wherein, the light source emitter is that can send infrared ray Equipment, the light source receiver for detection infrared energy equipment.
In one embodiment, the light source emitter and light source receiver are multipair, are separately positioned on glass substrate and add Work order member porch glass substrate and avoids the upper-lower position just to mechanical arm by the both sides up and down in region.
Described detection glass substrate breakage and the device of crackle, wherein, the mechanical arm 3 includes three support glass The support arm of substrate:First support arm 31, the second support arm 32 and the 3rd support arm 33, the support arm width are no more than 3cm。
Described detection glass substrate breakage and the device of crackle, wherein, the energy of the light of the light source emitter transmitting It is adjustable.
A kind of method for detecting glass substrate breakage and crackle, comprises the following steps:
Step 1: central control system control light source emitter sends light, light source receiver receives light and by original luminous energy Amount information M1 feeds back to central control system;
Step 2: glass substrate enters glass substrate machining cell and worn between light source emitter and light source receiver Cross, the luminous energy information M2 that light source receiver is received during normal glass substrate is passed through feeds back to central control system;
Step 3: when glass substrate edge has crackle, the light of light source emitter transmitting passes through the place for having crackle, now The luminous energy information M3 that light source receiver is received feeds back to central control system;
Step 4: central control system is to light energy information M2 and light energy information M3 processing.
Described detection glass substrate breakage and the method for crackle, wherein, in step 4, central control system passes through contrast The whether equal operations for judging whether to stop glass substrate machining cell of light energy information M2 and M3.
Described detection glass substrate breakage and the method for crackle, wherein, the light energy information M2 and light energy information M3 is identical, and the glass substrate machining cell is continued to run with, and the light energy information M2 is different with light energy information M3, center control System control glass substrate machining cell processed is out of service.
When glass is in mechanical arm when picking and placeing, glass edge touches the light that light source emitter is sent, if glass edge Edge has crackle or breakage, and light passes through glass substrate, and energy can change, and equipment alarm simultaneously stops.If glass substrate side Edge flawless or breakage, light will not be changed through glass substrate energy, and process equipment is then normally run.
With the method for this detection glass substrate breakage and crackle so that every glass substrate can all carry out crackle and rupture Check, do not result in missing inspection;When having checked crackle, equipment energy and alarm simultaneously stop, it is ensured that detection promptness;It will not say The glass for having crackle is flowed into lower process apparatus, reduces the risk of equipment pollution;Exception can be found and locked in time, and is helped Clear it is true because.
Light source emitter and light source receiver are set in glass substrate machining cell porch, by detecting that transmitter is sent Just no energy variation be detected whether region has crackle or breakage to judge glass substrate, and stop glass substrate work sheet Member operation, effectively eliminates the broken glass substrate of crackle, improves the process rate of product.
In two side upper-lower positions parallel to the glass substrate direction of motion, light source emitter and light source receiver, one are set The broken glass substrate of crackle can be excluded comprehensively.
Multipair light source emitter and light source receiver is set not only to crush the high glass substrate side of incidence in crackle Detect that glass substrate whether there is flaw, can also detect whether there is crackle Fragmentation Phenomena in glass substrate middle position at edge Generation, comprehensively exclude crackle crushing basal plates.
Although by reference to preferred embodiment, invention has been described, is not departing from the situation of the scope of the present invention Under, various improvement can be carried out to it and part therein can be replaced with equivalent.Especially, as long as in the absence of structure punching Prominent, the every technical characteristic being previously mentioned in each embodiment can combine in any way.The invention is not limited in text Disclosed in specific embodiment, but all technical schemes including falling within the scope of the appended claims.

Claims (10)

1. a kind of device for detecting glass substrate breakage and crackle, it is characterised in that including photoinduction system, glass substrate add Work order member and the control photoinduction system and the central control system of glass substrate machining cell;
Wherein, the photoinduction system is arranged on glass substrate machining cell porch, and glass substrate is processed into glass substrate Unit time induction system is sensed, and induced signal is fed back into central control system.
2. the device of detection glass substrate breakage according to claim 1 and crackle, it is characterised in that the photoinduction system System includes light source emitter and light source receiver, and the light source emitter and light source receiver are arranged in pairs in glass substrate processing Unit porch glass substrate by region both sides up and down, light source emitter transmitting light pass through glass substrate after connect by light source Device is received to receive.
3. the device of detection glass substrate breakage according to claim 2 and crackle, it is characterised in that the light source transmitting Device and light source receiver are arranged on the upper-lower position that glass substrate machining cell porch is located at glass substrate side to be detected, described Glass substrate is to be measured while for two parallel to the glass substrate direction of motion.
4. the device of detection glass substrate breakage according to claim 2 and crackle, it is characterised in that the light source transmitting Device can send infrared ray, and the light source receiver can detect that infrared energy changes.
5. the device of detection glass substrate breakage according to claim 2 and crackle, it is characterised in that the glass substrate Glass substrate machining cell is transported to by mechanical arm, the light source emitter and light source receiver are multipair, and avoid described The positive upper and lower position of mechanical arm is set.
6. the device of detection glass substrate breakage according to claim 5 and crackle, it is characterised in that the mechanical arm Include the support arm of three support glass substrates, the support arm width is no more than 3cm.
7. the device of detection glass substrate breakage according to claim 2 and crackle, it is characterised in that the light source transmitting The energy of the light of device transmitting can adjust.
8. a kind of method for detecting glass substrate breakage and crackle, it is characterised in that comprise the following steps:
Step 1: central control system control light source emitter sends light, light source receiver receives light and believes original light energy Breath M1 feeds back to central control system;
Step 2: glass substrate enters glass substrate machining cell and passed through between light source emitter and light source receiver, light The luminous energy information M2 that source receiver is received during normal glass substrate is passed through feeds back to central control system;
Step 3: when glass substrate edge has crackle, the light of light source emitter transmitting passes through the place for having crackle, now light source The luminous energy information M3 that receiver is received feeds back to central control system;
Step 4: central control system is to light energy information M2 and light energy information M3 processing.
9. the method for detection glass substrate breakage according to claim 8 and crackle, it is characterised in that in step 4, in Centre control system is by contrasting the whether equal operation for judging whether to stop glass substrate machining cell of light energy information M2 and M3.
10. the method for detection glass substrate breakage according to claim 9 and crackle, it is characterised in that the light energy Information M2 is identical with light energy information M3, and the glass substrate machining cell is continued to run with, the light energy information M2 and luminous energy Measure information M3 different, central control system control glass substrate machining cell is out of service.
CN201710361701.1A 2017-05-22 2017-05-22 A kind of device and method for detecting glass substrate breakage and crackle Pending CN107219233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710361701.1A CN107219233A (en) 2017-05-22 2017-05-22 A kind of device and method for detecting glass substrate breakage and crackle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710361701.1A CN107219233A (en) 2017-05-22 2017-05-22 A kind of device and method for detecting glass substrate breakage and crackle

Publications (1)

Publication Number Publication Date
CN107219233A true CN107219233A (en) 2017-09-29

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108445653A (en) * 2018-03-27 2018-08-24 武汉华星光电技术有限公司 Transmission device for transmitting substrate and its control method
CN109283714A (en) * 2018-11-12 2019-01-29 成都中电熊猫显示科技有限公司 The detection method and detection device of bolster breakage in liquid crystal display panel crimping
CN109879593A (en) * 2019-04-23 2019-06-14 蚌埠中光电科技有限公司 A kind of glass tape crackle warning device
CN110434122A (en) * 2019-09-06 2019-11-12 中建材(蚌埠)光电材料有限公司 A kind of glass detection dust-extraction unit with induction identification function
CN110767563A (en) * 2019-10-25 2020-02-07 上海华力集成电路制造有限公司 Method for detecting wafer integrity and RTP machine

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1619299A (en) * 2003-11-21 2005-05-25 布鲁克斯自动化机械亚洲株式会社 Apparatus and method for detecting damage of glass base plate edge
CN203259481U (en) * 2013-04-24 2013-10-30 合肥京东方光电科技有限公司 Glass substrate detecting device
CN104142352A (en) * 2013-05-10 2014-11-12 上海和辉光电有限公司 Glass detection apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1619299A (en) * 2003-11-21 2005-05-25 布鲁克斯自动化机械亚洲株式会社 Apparatus and method for detecting damage of glass base plate edge
CN203259481U (en) * 2013-04-24 2013-10-30 合肥京东方光电科技有限公司 Glass substrate detecting device
CN104142352A (en) * 2013-05-10 2014-11-12 上海和辉光电有限公司 Glass detection apparatus

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108445653A (en) * 2018-03-27 2018-08-24 武汉华星光电技术有限公司 Transmission device for transmitting substrate and its control method
CN108445653B (en) * 2018-03-27 2021-01-15 武汉华星光电技术有限公司 Transfer apparatus for transferring substrate and control method thereof
CN109283714A (en) * 2018-11-12 2019-01-29 成都中电熊猫显示科技有限公司 The detection method and detection device of bolster breakage in liquid crystal display panel crimping
CN109879593A (en) * 2019-04-23 2019-06-14 蚌埠中光电科技有限公司 A kind of glass tape crackle warning device
CN110434122A (en) * 2019-09-06 2019-11-12 中建材(蚌埠)光电材料有限公司 A kind of glass detection dust-extraction unit with induction identification function
CN110767563A (en) * 2019-10-25 2020-02-07 上海华力集成电路制造有限公司 Method for detecting wafer integrity and RTP machine
CN110767563B (en) * 2019-10-25 2022-05-27 上海华力集成电路制造有限公司 Method for detecting wafer integrity and RTP machine

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Application publication date: 20170929

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