CN103217816A - Detecting method of array base plate and detecting table and detecting device thereof - Google Patents
Detecting method of array base plate and detecting table and detecting device thereof Download PDFInfo
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- CN103217816A CN103217816A CN2013101123856A CN201310112385A CN103217816A CN 103217816 A CN103217816 A CN 103217816A CN 2013101123856 A CN2013101123856 A CN 2013101123856A CN 201310112385 A CN201310112385 A CN 201310112385A CN 103217816 A CN103217816 A CN 103217816A
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- 238000000034 method Methods 0.000 title abstract description 8
- 238000001514 detection method Methods 0.000 claims abstract description 74
- 230000007547 defect Effects 0.000 claims abstract description 21
- 230000002159 abnormal effect Effects 0.000 claims abstract description 17
- 238000012790 confirmation Methods 0.000 claims description 66
- 238000012360 testing method Methods 0.000 claims description 24
- 230000005856 abnormality Effects 0.000 claims description 11
- 238000003491 array Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 238000006467 substitution reaction Methods 0.000 claims description 6
- 238000012423 maintenance Methods 0.000 claims description 2
- 230000002950 deficient Effects 0.000 description 17
- 239000000428 dust Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
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Abstract
The invention discloses a detecting method of an array base plate. The method comprises the following steps of detecting the detecting device by a confirming part; and determining whether or not the status of the detecting device is normal according to a detecting result, and, if yes, detecting the array base plate to be detected by the detecting device. The invention further discloses a detecting table of the array base plate and a detecting device of the array base plate. Before the defect detection is carried out on each piece or each batch of array base plate(s), the detecting device firstly confirms whether or not the status of the detecting device is normal by the confirming part, so that the detection of the detecting device in abnormal status to the array base plate can be avoided, the existence of flaws of the array base plate can be exactly determined, and the detecting efficiency to the array base plate can be improved.
Description
Technical field
The present invention relates to liquid crystal panel detection technique field, specially refer to a kind of detection method, monitor station and checkout equipment of array base palte of liquid crystal panel.
Background technology
When array base palte is carried out defects detection, existing design is normally simulated TFT-LCD to the situation after organizing by pick-up unit, when detecting, pick-up unit is installed in the array base palte top of being detected, and motion detection device comes the defective of detection arrays substrate.But, owing to need the distance arrays substrate very near during the defective by pick-up unit detection arrays substrate, like this, when on pick-up unit itself or the array base palte dust being arranged, in the process that pick-up unit moves above array base palte, as dust attached to very likely array base palte and pick-up unit being caused damage on the pick-up unit and along with pick-up unit just moves; And owing to can not determine before detection whether the state of pick-up unit is normal, therefore, even note abnormalities in detection, the problem that also can't judge pick-up unit self still is that array base palte exists defective, thereby causes the detection efficiency of array base palte lower.
Summary of the invention
Detection method, monitor station and the checkout equipment of fundamental purpose of the present invention for a kind of array base palte is provided is intended to avoid the pick-up unit of abnormal state to treat the detection arrays substrate and detects, and improves the detection efficiency of array base palte.
The invention provides a kind of detection method of array base palte, comprising:
By confirmation unit pick-up unit is detected;
Whether the state of judging pick-up unit according to testing result is normal, if then by this pick-up unit array base palte to be detected is detected.
Preferably, carry out described by confirmation unit pick-up unit is detected before, also comprise:
At least one confirmation unit is set on monitor station.
Preferably, described confirmation unit is the identical pixel cell of pixel cell structure of at least one described array base palte to be detected.
Preferably, describedly judge according to testing result whether the state of pick-up unit normally comprises:
When the testing result to described confirmation unit when being no abnormal, judge that then the state of described pick-up unit is normal;
When to the testing result of described confirmation unit when noting abnormalities, then judge the abnormal state of described pick-up unit.
Preferably, carry out described when to the testing result of confirmation unit when noting abnormalities, then judge after the abnormal state of described pick-up unit, also comprise:
Pick-up unit is keeped in repair, and by the pick-up unit after the confirmation unit detection maintenance.
Preferably, carry out described when to the testing result of confirmation unit when noting abnormalities, then judge after the abnormal state of described pick-up unit, also comprise:
Substitution detector more, and detect pick-up unit after changing by confirmation unit.
The present invention also provides a kind of monitor station, and this monitor station comprises detection zone and at least one confirmation unit that is used to put an array base palte to be detected.
Preferably, described array base palte to be detected has some pixel cells, and described confirmation unit is the identical pixel cell of pixel cell structure at least one and array base palte to be detected, and this confirmation unit zero defect.
Preferably, described confirmation unit is arranged on a side of described detection zone.
The present invention further provides a kind of checkout equipment, this checkout equipment comprises and is used to treat the pick-up unit that the detection arrays substrate detects, and also comprises monitor station, and this monitor station comprises detection zone and at least one confirmation unit that is used to put an array base palte to be detected; Whether described confirmation unit to detect the state of described pick-up unit before detecting normal if being used for treating the detection arrays substrate at pick-up unit.
The present invention is at first detected pick-up unit by confirmation unit before array base palte to be detected is carried out defects detection, and judges according to testing result whether the state of pick-up unit is normal; When just often, just array base palte to be detected is carried out defects detection by pick-up unit; As undesired, but then hard stop is further confirmed pick-up unit and is keeped in repair, or substitution detector more.Before each sheet or each batch array base palte is carried out defects detection, make pick-up unit confirm by confirmation unit whether the state of pick-up unit is normal earlier, thereby can avoid the pick-up unit of abnormal state that array base palte is detected, and then can judge exactly whether array base palte exists defective, has improved the detection efficiency to array base palte.
Description of drawings
Fig. 1 is the schematic flow sheet of detection method first embodiment of array base palte of the present invention;
Fig. 2 is the schematic flow sheet of detection method second embodiment of array base palte of the present invention;
Normally whether the state that Fig. 3 judges pick-up unit for the detection method of array base palte of the present invention schematic flow sheet;
Fig. 4 is the schematic flow sheet of monitor station preferred embodiment of the present invention.
The realization of the object of the invention, functional characteristics and advantage will be in conjunction with the embodiments, are described further with reference to accompanying drawing.
Embodiment
Should be appreciated that specific embodiment described herein only in order to explanation the present invention, and be not used in qualification the present invention.
With reference to Fig. 1, Fig. 1 is the schematic flow sheet of detection method first embodiment of array base palte of the present invention.
The detection method of the array base palte that present embodiment provided comprises:
Step S10 is detected pick-up unit by confirmation unit;
Step S20 judges according to testing result whether the state of pick-up unit is normal; If, execution in step S21 then;
Step S21 is detected array base palte to be detected by this pick-up unit.
To before being placed on array base palte to be detected on the monitor station and carrying out defects detection, set at least one confirmation unit on this monitor station at first the state of pick-up unit is detected, thereby whether the state of judging pick-up unit is normal at pick-up unit.In the present embodiment, this confirmation unit is at least one and the identical pixel cell of pixel cell structure of array base palte to be detected, guarantees that its state is qualified, does not promptly have any defective.Before pick-up unit carries out defects detection to array base palte to be detected, at first pick-up unit is aligned in confirmation unit, and it is detected by pick-up unit.After confirmation unit is detected, because this confirmation unit does not have any defective, therefore, can whether normal according to the state of the testing result of confirmation unit being judged pick-up unit.State as pick-up unit is normal, then by this pick-up unit array base palte to be detected is carried out defects detection.
Please in the lump with reference to Fig. 3, whether normally Fig. 3 is the state of judging pick-up unit in the detection method of array base palte of the present invention schematic flow sheet.
In the present embodiment, step S20 specifically comprises:
Step S201 when the testing result to confirmation unit when being no abnormal, judges that then the state of pick-up unit is normal; Execution in step S21;
Step S202, when to the testing result of confirmation unit when noting abnormalities, then judge the abnormal state of pick-up unit.
When confirmation unit is detected, because confirmation unit does not have any defective, when being no abnormal as testing result, the state of then judging pick-up unit is normal, can further carry out defects detection by pick-up unit to array base palte to be detected this moment, be about to pick-up unit and move to array base palte top to be detected, and pick-up unit is moved above array base palte, array base palte is carried out defects detection, like this, as noting abnormalities in the testing process, because the pick-up unit state is normal, then can judge is that array base palte exists defective, and writes down the position of this defective; And as testing result when noting abnormalities; because confirmation unit does not have any defective; the state that then can judge pick-up unit is improper; but this moment is hard stop just; pick-up unit is further confirmed and keeped in repair; and do not proceed array base palte to be detected is carried out the flow process of defects detection, perhaps substitution detector more, then to keep in repair the back or change after pick-up unit carry out above-mentioned steps S10 to step S21.
The embodiment of the invention before array base palte to be detected is carried out defects detection, is at first detected pick-up unit by confirmation unit, and judges according to testing result whether the state of pick-up unit is normal; When just often, just array base palte to be detected is carried out defects detection by pick-up unit; As undesired, but then hard stop is further confirmed pick-up unit and is keeped in repair, or substitution detector more.Before each sheet or each batch array base palte is carried out defects detection, make pick-up unit confirm by confirmation unit whether the state of pick-up unit is normal earlier, thereby can avoid the pick-up unit of abnormal state that array base palte is detected, and then can judge exactly whether array base palte exists defective, has improved the detection efficiency to array base palte.
With reference to Fig. 2, Fig. 2 is the schematic flow sheet of detection method second embodiment of array base palte of the present invention.
Based on the foregoing description, before execution in step S10, the detection method of array base palte of the present invention also comprises:
Step S30 is provided with at least one confirmation unit on monitor station.
Flawless confirmation unit is set on monitor station, and this confirmation unit is at least one and the identical pixel cell of pixel cell structure of array base palte to be detected, guarantees that its state is qualified, does not promptly have any defective.In the present embodiment, this confirmation unit is arranged on a side of the detection zone that is used to put array base palte to be detected on the monitor station, and pick-up unit at first passed through this confirmation unit before array base palte to be detected is detected, the state of pick-up unit is confirmed; And confirmation unit quantity is set at least one, also can be set to identical with the quantity of the detection head of pick-up unit.
One side of the detection zone on monitor station, at least one flawless confirmation unit is set, make pick-up unit before array base palte to be detected is detected, at first pass through this confirmation unit, its state is confirmed, thereby the pick-up unit that can avoid abnormal state is treated the detection arrays substrate and is detected, and then can judge exactly whether array base palte exists defective, has improved the detection efficiency to array base palte.
The present invention also provides a kind of checkout equipment, and this checkout equipment comprises pick-up unit and monitor station, and this pick-up unit is used to detect array base palte to be detected.
With reference to Fig. 4, Fig. 4 is the structural representation of monitor station preferred embodiment of the present invention.
The monitor station that present embodiment provided has detection zone 10, and this detection zone 10 is used for putting array base palte to be detected thereon, and in a side of detection zone 10, also is provided with confirmation unit 20, confirms by the state of 20 pairs of pick-up units of this confirmation unit.In the present embodiment, monitor station has three confirmation units 20, certainly in other embodiments, its quantity is set to one or more, also can be set to identical with the quantity of pick-up unit, with its side that is arranged on detection zone 10, make pick-up unit before the array base palte to be detected that is opposite to detection zone 10 detects, at first pass through this confirmation unit 20, with convenient the state of pick-up unit is confirmed.In the present embodiment, this confirmation unit 20 is at least an identical pixel cell of pixel cell structure with array base palte to be detected, and guarantees that its state is qualified, does not promptly have any defective.Before array base palte to be detected being carried out defects detection by pick-up unit, at first with pick-up unit to confirmation unit set on monitor station 20, and it is detected, to confirm the state of pick-up unit.
After confirmation unit 20 is detected, because these confirmation unit 20 no any defectives, therefore, can whether normal according to the state of the testing result of confirmation unit 20 being judged pick-up unit.State as pick-up unit is normal, just array base palte to be detected is carried out defects detection by it, be about to pick-up unit and move to the array base palte top to be detected that is seated in detection zone 10 on the monitor station, and pick-up unit is moved along the length direction of array base palte, array base palte is carried out defects detection.Like this, as noting abnormalities in the testing process, can judge is to have defective on the array base palte.
The embodiment of the invention to being placed in before array base palte to be detected on the detection zone 10 carries out defects detection, is at first detected by 20 pairs of pick-up units of confirmation unit, and judges according to testing result whether the state of pick-up unit is normal; When just often, just array base palte to be detected is detected by pick-up unit; As unusually, but then hard stop is further confirmed pick-up unit and is keeped in repair, perhaps substitution detector more.Before each sheet or each batch array base palte is carried out defects detection, all make pick-up unit confirm by confirmation unit 20 whether the state of pick-up unit is normal earlier, thereby the pick-up unit that can avoid abnormal state is treated the detection arrays substrate and is detected, and then can judge exactly whether array base palte exists defective, has improved the detection efficiency to array base palte.
The above only is the preferred embodiments of the present invention; be not so limit claim of the present invention; every equivalent structure or equivalent flow process conversion that utilizes instructions of the present invention and accompanying drawing content to be done; or directly or indirectly be used in other relevant technical fields, all in like manner be included in scope of patent protection of the present invention.
Claims (10)
1. the detection method of an array base palte is characterized in that, comprising:
By confirmation unit pick-up unit is detected;
Whether the state of judging pick-up unit according to testing result is normal, if then by this pick-up unit array base palte to be detected is detected.
2. the detection method of array base palte according to claim 1 is characterized in that, carry out described by confirmation unit pick-up unit is detected before, also comprise:
At least one confirmation unit is set on monitor station.
3. the detection method of array base palte according to claim 2 is characterized in that, described confirmation unit is the identical pixel cell of pixel cell structure of at least one described array base palte to be detected.
4. according to the detection method of each described array base palte in the claim 1 to 3, it is characterized in that describedly judge according to testing result whether the state of pick-up unit normally comprises:
When the testing result to described confirmation unit when being no abnormal, judge that then the state of described pick-up unit is normal;
When to the testing result of described confirmation unit when noting abnormalities, then judge the abnormal state of described pick-up unit.
5. the detection method of array base palte according to claim 4 is characterized in that, carry out described when to the testing result of confirmation unit when noting abnormalities, then judge after the abnormal state of described pick-up unit, also comprise:
Pick-up unit is keeped in repair, and by the pick-up unit after the confirmation unit detection maintenance.
6. the detection method of array base palte according to claim 4 is characterized in that, carry out described when to the testing result of confirmation unit when noting abnormalities, then judge after the abnormal state of described pick-up unit, also comprise:
Substitution detector more, and detect pick-up unit after changing by confirmation unit.
7. a monitor station is characterized in that, this monitor station comprises detection zone and at least one confirmation unit that is used to put an array base palte to be detected.
8. monitor station according to claim 7, described array base palte to be detected has some pixel cells, it is characterized in that, and described confirmation unit is the identical pixel cell of pixel cell structure at least one and array base palte to be detected, and this confirmation unit zero defect.
9. according to claim 7 or 8 described monitor stations, it is characterized in that described confirmation unit is arranged on a side of described detection zone.
10. checkout equipment, it is characterized in that, this checkout equipment comprises and is used to treat the pick-up unit that the detection arrays substrate detects, comprise also as each described monitor station in the claim 7 to 9 whether described confirmation unit to detect the state of described pick-up unit before detecting normal if being used for treating the detection arrays substrate at pick-up unit.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310112385.6A CN103217816B (en) | 2013-04-01 | 2013-04-01 | The detection method of array base palte, monitor station and checkout equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310112385.6A CN103217816B (en) | 2013-04-01 | 2013-04-01 | The detection method of array base palte, monitor station and checkout equipment |
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| CN103217816B CN103217816B (en) | 2016-01-20 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105204196A (en) * | 2015-10-13 | 2015-12-30 | 武汉华星光电技术有限公司 | Substrate sampling method |
| CN108982552A (en) * | 2017-06-01 | 2018-12-11 | 群创光电股份有限公司 | Optical detection device and its operating method |
| CN110597106A (en) * | 2019-08-15 | 2019-12-20 | 浙江工业大学之江学院 | Detection line automatic control module, system and product detection line thereof |
| CN112730434A (en) * | 2020-12-26 | 2021-04-30 | 深圳市磐锋精密技术有限公司 | Data monitoring method applied to AOI detection |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112730434B (en) * | 2020-12-26 | 2021-10-29 | 深圳市磐锋精密技术有限公司 | Data monitoring method applied to AOI detection |
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| CN103217816B (en) | 2016-01-20 |
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