TW200510700A - Vibration sensor - Google Patents

Vibration sensor

Info

Publication number
TW200510700A
TW200510700A TW093122591A TW93122591A TW200510700A TW 200510700 A TW200510700 A TW 200510700A TW 093122591 A TW093122591 A TW 093122591A TW 93122591 A TW93122591 A TW 93122591A TW 200510700 A TW200510700 A TW 200510700A
Authority
TW
Taiwan
Prior art keywords
vibration
electrode
cone
film surface
film
Prior art date
Application number
TW093122591A
Other languages
English (en)
Other versions
TWI238244B (en
Inventor
Mamoru Yasuda
Yasuo Sugimori
Takahisa Ohtsuji
Original Assignee
Hosiden Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hosiden Corp filed Critical Hosiden Corp
Publication of TW200510700A publication Critical patent/TW200510700A/zh
Application granted granted Critical
Publication of TWI238244B publication Critical patent/TWI238244B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R11/00—Transducers of moving-armature or moving-core type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Geophysics And Detection Of Objects (AREA)
TW093122591A 2003-09-02 2004-07-28 Vibration sensor TWI238244B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003310265A JP4073382B2 (ja) 2003-09-02 2003-09-02 振動センサ

Publications (2)

Publication Number Publication Date
TW200510700A true TW200510700A (en) 2005-03-16
TWI238244B TWI238244B (en) 2005-08-21

Family

ID=34269643

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093122591A TWI238244B (en) 2003-09-02 2004-07-28 Vibration sensor

Country Status (8)

Country Link
US (1) US7430915B2 (zh)
EP (1) EP1662238A1 (zh)
JP (1) JP4073382B2 (zh)
KR (1) KR100613962B1 (zh)
CN (1) CN100473960C (zh)
CA (1) CA2523109A1 (zh)
TW (1) TWI238244B (zh)
WO (1) WO2005024360A1 (zh)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005098727A (ja) * 2003-09-22 2005-04-14 Hosiden Corp 振動センサ
JP2005098726A (ja) * 2003-09-22 2005-04-14 Hosiden Corp 振動センサ
TW200629954A (en) * 2004-11-02 2006-08-16 Hosiden Corp Condenser microphone and method for manufacturing substrate for the same
FR2898683B1 (fr) * 2006-03-14 2008-05-23 Commissariat Energie Atomique Accelerometre triaxial a membrane
DE102006062314A1 (de) * 2006-12-27 2008-07-03 Robert Bosch Gmbh Mehrachsiger mikromechanischer Beschleunigungssensor
JP5034692B2 (ja) * 2007-06-04 2012-09-26 オムロン株式会社 音響センサ
US8334159B1 (en) * 2009-03-30 2012-12-18 Advanced Numicro Systems, Inc. MEMS pressure sensor using capacitive technique
JP5509867B2 (ja) * 2010-01-20 2014-06-04 沖電気工業株式会社 振動センサ
JP6943130B2 (ja) * 2017-10-11 2021-09-29 セイコーエプソン株式会社 Ｍｅｍｓデバイス、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器、および移動体
US10704990B2 (en) * 2018-03-13 2020-07-07 Aktiebolaget Skf Spacer and sensor module for detecting a vibrational behavior of a mechanical component including the spacer
CN208369851U (zh) * 2018-06-29 2019-01-11 深圳市大疆创新科技有限公司 驻极体麦克风、声振检测装置及竞赛遥控车
US11265641B2 (en) * 2018-12-12 2022-03-01 Knowles Electronics, Llc Microelectromechanical systems vibration sensor
CN110375845B (zh) * 2019-07-03 2020-08-25 浙江大学 一种静电平衡型高灵敏度水听器

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3352157A (en) * 1965-06-17 1967-11-14 Henry L B Seegmiller Inertia diaphragm pressure transducer
US4338823A (en) * 1980-08-29 1982-07-13 Aisin Seiki Company, Ltd. Vibration sensor
JPS5979700A (ja) 1982-10-28 1984-05-08 Katsuo Motoi 振動検知装置
JPS60214104A (ja) 1984-04-09 1985-10-26 Mitsubishi Electric Corp 電波レンズ
JPH0748566B2 (ja) * 1989-09-27 1995-05-24 山武ハネウエル株式会社 加速度センサおよびその製造方法
JPH0658949A (ja) 1992-08-07 1994-03-04 Omron Corp 半導体加速度・振動センサ
US5827965A (en) * 1994-06-20 1998-10-27 Sony Corporation Navigation device employing an electret vibration sensor
JPH109944A (ja) * 1996-06-25 1998-01-16 Matsushita Electric Works Ltd 振動センサ
JP3024575B2 (ja) * 1996-12-06 2000-03-21 松下電器産業株式会社 圧力・振動検知装置
JPH11248737A (ja) 1998-02-27 1999-09-17 Omron Corp 静電容量型多軸加速度センサ
JP4586239B2 (ja) * 2000-01-11 2010-11-24 富士電機ホールディングス株式会社 静電容量型半導体センサおよびその製造方法
JP2004085203A (ja) * 2002-08-22 2004-03-18 Star Micronics Co Ltd 静電容量型加速度センサおよびその製造方法
JP2005098727A (ja) * 2003-09-22 2005-04-14 Hosiden Corp 振動センサ
JP2006078444A (ja) * 2004-09-13 2006-03-23 Hosiden Corp 加速度センサ
JP2006084219A (ja) * 2004-09-14 2006-03-30 Hosiden Corp 加速度センサ

Also Published As

Publication number Publication date
WO2005024360A1 (ja) 2005-03-17
EP1662238A1 (en) 2006-05-31
KR100613962B1 (ko) 2006-08-21
US20060137455A1 (en) 2006-06-29
JP2005077326A (ja) 2005-03-24
KR20050025284A (ko) 2005-03-14
CN100473960C (zh) 2009-04-01
CA2523109A1 (en) 2005-03-17
US7430915B2 (en) 2008-10-07
TWI238244B (en) 2005-08-21
JP4073382B2 (ja) 2008-04-09
CN1846121A (zh) 2006-10-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees