TW200503384A - Vibration controller - Google Patents

Vibration controller

Info

Publication number
TW200503384A
TW200503384A TW093108389A TW93108389A TW200503384A TW 200503384 A TW200503384 A TW 200503384A TW 093108389 A TW093108389 A TW 093108389A TW 93108389 A TW93108389 A TW 93108389A TW 200503384 A TW200503384 A TW 200503384A
Authority
TW
Taiwan
Prior art keywords
driving
linear motor
unit
movable parts
floor
Prior art date
Application number
TW093108389A
Other languages
Chinese (zh)
Other versions
TWI234333B (en
Inventor
Makoto Kaneko
Yoshiyuki Tomita
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Publication of TW200503384A publication Critical patent/TW200503384A/en
Application granted granted Critical
Publication of TWI234333B publication Critical patent/TWI234333B/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
    • G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H02K11/215—Magnetic effect devices, e.g. Hall-effect or magneto-resistive elements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

The present invention relates to a vibration controller for driving those movable parts, such as linear motor and other movable components, formed on a structural unit. It has a simple structure to deal with the counter forces generated during the driving of the movable parts and aims to limit the vibrations of the structural unit and provide excellent precision in the positioning of the movable parts. Two vibration limiters (32A, 32B) are installed between a base (33) and the floor (31). A reaction actuator (42), consisting of a linear motor stator (37) and a linear motor moving unit (38), is installed at a position in the same distance (H1, H2) to a supporting unit (36), formed in one unit with the floor (31), along two vertical directions (y1, y2). A control mean (45) outputs an unique driving signal to control the reaction actuator (42) via a driving loader (35) and a gain compensator (44).
TW093108389A 2003-03-28 2004-03-26 Vibration control device TWI234333B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003092300A JP4095480B2 (en) 2003-03-28 2003-03-28 Vibration control device

Publications (2)

Publication Number Publication Date
TW200503384A true TW200503384A (en) 2005-01-16
TWI234333B TWI234333B (en) 2005-06-11

Family

ID=33405440

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093108389A TWI234333B (en) 2003-03-28 2004-03-26 Vibration control device

Country Status (4)

Country Link
JP (1) JP4095480B2 (en)
KR (1) KR100541171B1 (en)
CN (1) CN100344053C (en)
TW (1) TWI234333B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI459162B (en) * 2010-12-20 2014-11-01 Mitsubishi Electric Corp Motor control unit

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI340967B (en) 2005-12-29 2011-04-21 Ind Tech Res Inst Apparatus of dynamic anti-vibration for storage device
US8117628B2 (en) 2005-12-29 2012-02-14 Industrial Technology Research Institute Apparatus of dynamic anti-vibration for storage device
JP2007188251A (en) * 2006-01-12 2007-07-26 Sumitomo Heavy Ind Ltd Stage apparatus
JP2009033058A (en) * 2007-07-30 2009-02-12 Sumitomo Heavy Ind Ltd Reaction force processing apparatus
CN101996915B (en) * 2009-08-13 2012-11-07 威控自动化机械股份有限公司 Driving device and die bonder
JP5821581B2 (en) * 2011-12-02 2015-11-24 株式会社島津製作所 Endurance test equipment
CN104678711B (en) * 2013-11-26 2017-06-27 上海微电子装备有限公司 Sports platform counter-force canceller
JP5834121B1 (en) * 2014-08-25 2015-12-16 株式会社ソディック Processing equipment
JP6231457B2 (en) * 2014-10-23 2017-11-15 ファナック株式会社 Vibration isolator and positioning device equipped with robot
EP3376289A1 (en) * 2017-03-17 2018-09-19 ASML Netherlands B.V. Stage system and metrology tool
CN110647183B (en) * 2019-10-16 2021-10-01 广东工业大学 Vibration reduction method, device and equipment for high-precision positioning platform
CN114035626B (en) * 2021-11-12 2022-10-04 中国科学院长春光学精密机械与物理研究所 Vibration control device and control method thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2211671Y (en) * 1994-11-11 1995-11-01 宋海州 Linear vibrating motor with moveable core
CN2307399Y (en) * 1997-08-05 1999-02-10 董成宝 Magnetic vibrator linear electric motor
JP2003009494A (en) * 2001-06-21 2003-01-10 Canon Inc Active damper, aligner and method for manufacturing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI459162B (en) * 2010-12-20 2014-11-01 Mitsubishi Electric Corp Motor control unit

Also Published As

Publication number Publication date
KR20040086558A (en) 2004-10-11
JP4095480B2 (en) 2008-06-04
KR100541171B1 (en) 2006-01-11
TWI234333B (en) 2005-06-11
CN1538600A (en) 2004-10-20
JP2004302639A (en) 2004-10-28
CN100344053C (en) 2007-10-17

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees