JP5834121B1 - Processing equipment - Google Patents

Processing equipment Download PDF

Info

Publication number
JP5834121B1
JP5834121B1 JP2014170146A JP2014170146A JP5834121B1 JP 5834121 B1 JP5834121 B1 JP 5834121B1 JP 2014170146 A JP2014170146 A JP 2014170146A JP 2014170146 A JP2014170146 A JP 2014170146A JP 5834121 B1 JP5834121 B1 JP 5834121B1
Authority
JP
Japan
Prior art keywords
main body
apparatus main
direction
body
moving body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014170146A
Other languages
Japanese (ja)
Other versions
JP2016045753A (en
Inventor
一朗 新家
一朗 新家
Original Assignee
株式会社ソディック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社ソディック filed Critical 株式会社ソディック
Priority to JP2014170146A priority Critical patent/JP5834121B1/en
Application granted granted Critical
Publication of JP5834121B1 publication Critical patent/JP5834121B1/en
Publication of JP2016045753A publication Critical patent/JP2016045753A/en
Application status is Active legal-status Critical

Links

Abstract

In a processing apparatus including a moving body and an apparatus main body that movably supports the moving body in a horizontal direction, vibration of the apparatus main body caused by a force acting on the apparatus main body according to an external force applied to the moving body is suppressed. . In a processing apparatus, a moving body, an apparatus main body that supports the moving body in a first direction parallel to the horizontal direction, and one of the apparatus main body and the moving body are provided. The first driving means 12 for moving the moving body 10 in the first direction by applying a thrust to the moving body 10 in the first direction at the first action point Ey, and the thrust applied to the moving body 10 In accordance with an external force acting on the apparatus main body 9 in response to an external force associated with the processing of the workpiece W, the apparatus includes a first support mechanism 4 that supports the apparatus main body 9 so as to be movable in the first direction. The first action point Ey, the center of gravity Gb of the apparatus main body 9 and the center of gravity Gm of the moving body 10 are configured to coincide with each other. [Selection] Figure 1

Description

  The present invention relates to a processing apparatus including a moving body and an apparatus main body that supports the moving body so as to be movable in the horizontal direction.

  Like metal processing equipment, transport equipment, inspection equipment, measuring equipment, and semiconductor manufacturing equipment, the mobile body is supported by the equipment body so that it can move in the horizontal direction, and thrust is applied to the mobile body by the drive unit provided in the equipment body. A moving device is known that reciprocates a moving body in the horizontal direction. In such a moving apparatus, the reaction force of the thrust applied to the moving body may act on the apparatus main body and cause vibration of the apparatus main body.

  In order to solve the above problem, Patent Document 1 discloses a stage platen (first stage) that supports an XY stage (first moving body) and an XY stage movably in an XY plane in an exposure apparatus used for manufacturing a semiconductor element. 2 moving body), a first driving means for driving the XY stage in a predetermined direction parallel to the XY plane, and a second driving means for driving the stage surface plate in the XY plane. A technique has been proposed in which a stage surface plate is supported in a plane so as to be movable, and a stage surface plate is moved in a direction opposite to the XY stage in synchronization with the control of the XY stage by a second driving unit. In other words, according to the technique described in Patent Document 1, the second driving means reverses the external force corresponding to the reaction force of the thrust of the XY stage in the direction of the reaction force at the timing when the reaction force is generated. By giving to the stage surface plate in the direction, the reaction force on the stage surface plate is canceled, and the apparatus main body that supports the exposure mechanism and the like through the stage surface plate is suppressed from being vibrated.

JP 2001-195130 A

  Here, in a processing apparatus such as a machine tool, the moving body such as the XY stage includes not only a thrust by the first or second driving means but also a tool and a workpiece along with the processing of the workpiece. A force acting between the two is further applied. However, the technique described in Patent Document 1 calculates a value obtained by multiplying the target displacement amount of the XY stage by the inverse ratio of the mass of the XY stage and the mass of the stage surface plate, and this value is calculated as the target displacement amount of the stage surface plate. As described above, the stage surface plate is feedforward controlled. That is, the technique described in Patent Literature 1 is based on only the target displacement amount of the XY stage on the premise that an external force such as a force acting between the tool and the workpiece is not applied to the XY stage. The stage surface plate is controlled to estimate the reaction force accompanying the movement of the stage and cancel the estimated reaction force. For this reason, it cannot be said that the method of Patent Document 1 is suitable for a high-precision machining apparatus that is affected by an external force such as a force acting between a tool and a workpiece.

  In view of the above circumstances, an object of the present invention is to provide not only a thrust for moving a moving body but also a workpiece to be processed in a processing apparatus including a moving body and an apparatus main body that supports the moving body in a horizontal direction. To propose a processing apparatus that can suppress vibration of the apparatus main body caused by external force acting on the apparatus main body in accordance with thrust and external force applied to the moving body even when external force is applied due to processing of the object. .

  In order to solve the above problems, a processing apparatus of the present invention includes a moving body, an apparatus main body that supports the moving body in a first direction parallel to the horizontal direction, the apparatus main body, and the moving body. A first driving means provided on one of them for moving the moving body in the first direction by applying a thrust to the moving body in the first direction at a first operating point; One of the apparatus main body and the movable body holds a workpiece, and the other of the apparatus main body and the movable body holds a tool at a machining position with respect to the workpiece, and is driven by the first driving unit. A processing apparatus for processing the workpiece while relatively moving the workpiece and the tool, and corresponding to the thrust applied to the moving body and the external force accompanying the processing of the workpiece applied to the moving body In response to external forces acting on the device body. And a first support mechanism for supporting the apparatus main body so as to be movable in the first direction, the height of the first action point, the center of gravity of the apparatus main body, and the center of gravity of the movable body in the vertical direction. Are configured to match each other.

  In the processing apparatus according to the present invention, the moving body may have a holding unit that holds one of the workpiece and the tool, and a second direction parallel to a horizontal direction perpendicular to the first direction. A second support mechanism for movably supporting the holding portion; and applying a thrust in the second direction to the holding portion at a second operating point to move the holding portion in the second direction. The first support mechanism further acts on the apparatus main body corresponding to the thrust applied to the moving body and the external force accompanying the processing of the workpiece applied to the moving body. The apparatus main body is movably supported in the first direction and the second direction in accordance with an external force, and the first action point, the second action point, and the apparatus body in the vertical direction. The center of gravity of the moving body and the center of gravity of the moving body It is preferably configured to match the.

  The above-mentioned “centroid of the moving body” means the center of gravity of the moving body including each component provided in the moving body. For example, the center of gravity of the moving object means the center of gravity of the moving object including the workpiece when the moving object holds the workpiece, and the center of gravity of the moving object including the tool when the moving object holds the tool. Means. Similarly, the center of gravity of the moving body means the center of gravity of the moving body including the attached components when the components of the first driving means or the second driving means are attached to the moving body. In addition, when calculating the center of gravity of the moving body, among the constituent elements constituting the moving body, those constituent elements whose mass is so small that they can be ignored relative to the mass of the moving body do not include such constituent elements. You may calculate the gravity center of a moving body.

  Similarly, “the center of gravity of the apparatus main body” means the center of gravity of the apparatus main body including each component included in the apparatus main body. For example, the center of gravity of the apparatus main body means the center of gravity of the apparatus main body including the workpiece when the apparatus main body holds the workpiece, and the center of gravity of the apparatus main body including the tool when the apparatus main body holds the tool. Means. Similarly, the center of gravity of the apparatus main body means the center of gravity of the apparatus main body including the attached components when the components of the first driving means or the second driving means are attached to the apparatus main body. In addition, when calculating the center of gravity of the apparatus main body, among the constituent elements constituting the apparatus main body, the constituent elements whose mass is so small that they can be ignored with respect to the mass of the apparatus main body are not included. The center of gravity of the apparatus main body may be calculated.

  Further, according to the external force acting on the apparatus main body corresponding to the thrust applied to the moving body and the external force accompanying the processing of the workpiece applied to the moving body, the apparatus main body is moved to the first body. The first support mechanism that supports the device main body so as to be movable in a direction is configured to smoothly move the device main body in the first direction without being affected by the frictional force according to the external force acting on the device main body. As long as it supports the apparatus main body, it may be configured in any manner. Similarly, “the first support mechanism is responsive to the external force acting on the apparatus main body corresponding to the thrust applied to the movable body and the external force accompanying the processing of the workpiece applied to the movable body. "The apparatus main body is movably supported in the first direction and the second direction" means that the apparatus main body can be smoothly moved without being affected by frictional force according to the external force acting on the apparatus main body. As long as it is movable in the first direction and the second direction, it may be configured in any manner. The “external force acting on the apparatus main body corresponding to the thrust applied to the moving body and the external force accompanying the processing of the workpiece applied to the moving body” means that the external force acting on the apparatus main body is applied to the moving body. Including a reaction force acting on the apparatus main body corresponding to the thrust and an external force acting on the apparatus main body corresponding to the external force applied to the moving body via the work piece or tool as the work piece is processed. means. Note that, for example, the first support mechanism may be configured by a single member, may be configured by a plurality of members, or may be configured by a support surface with sufficiently reduced frictional force, such as mirror-finished. In such a case, the first support mechanism may be constituted by such a support surface.

  The above-mentioned “the first action point, the center of gravity of the apparatus main body, and the height of the center of gravity of the movable body coincide with each other” is not limited to exact coincidence, but the size of the processing apparatus and the required processing Depending on the accuracy, the height of the first action point, the center of gravity of the apparatus main body, and the height of the center of gravity of the moving body in the vertical direction may be considered to be substantially the same. Similarly, “the heights of the first action point, the second action point, the center of gravity of the apparatus main body, and the center of gravity of the moving body in the vertical direction are not limited to exact matching”. Depending on the size of the processing device and the required processing accuracy, the height of the first action point, the second action point, the center of gravity of the device main body, and the center of gravity of the movable body in the vertical direction can be considered to be substantially the same. If it is. For example, in a processing apparatus having a processing apparatus height of about 1.5 m and a processing apparatus weight of about 1.5 t, the height of the center of gravity of the apparatus main body and the moving body is within a range about 10 mm apart in the vertical direction. Then, it can be considered that the heights of the centers of gravity of the apparatus main body and the moving body coincide.

  In the processing apparatus according to the present invention, it is preferable that the processing apparatus further includes a position correcting unit that moves the apparatus main body to the predetermined position when the apparatus main body is displaced from a predetermined position in the first direction.

  In the above-described case, the position correction means may change the displacement of the position of the apparatus body from the predetermined position to an elastic force so that the position energy increases as the displacement of the position from the predetermined position increases. It can be converted into the potential energy based on gravity or magnetism, and the apparatus main body can be moved to the predetermined position by the potential energy.

  The above-mentioned “converting the displacement of the position of the apparatus main body from the predetermined position into the positional energy based on the elastic force” means that the displacement of the position of the apparatus main body from the predetermined position is the expansion and contraction of the elastic body. This means that it can be converted into potential energy by For example, the position correcting means is constituted by a spring connected to the apparatus main body in the horizontal direction so that the spring does not expand and contract at a predetermined position of the apparatus main body, and the spring expands and contracts more greatly as the apparatus main body moves away from the predetermined position. It is conceivable that the displacement of the position of the apparatus main body in the horizontal direction is converted into the potential energy based on the elastic force by arranging a spring in the spring.

  The above-mentioned “converting the displacement of the position of the apparatus main body from the predetermined position into the potential energy based on gravity” refers to the displacement of the position of the apparatus main body from the predetermined position in the vertical direction of the apparatus main body (gravity ) Means that it can be converted as a displacement in height. For example, the position correcting means is configured by a support surface that is gently inclined so that the height in the vertical direction gradually increases in a direction away from a predetermined position, and the apparatus main body is supported by the support surface. It is conceivable to convert the displacement of the horizontal position of the apparatus body into potential energy based on gravity.

  Further, “converting the displacement of the position of the apparatus main body from the predetermined position into the potential energy based on magnetism” means that the displacement of the position of the apparatus main body from the predetermined position is a force that is attracted by magnetic force or It means that it can be converted into potential energy based on retreating force. For example, the position correcting means is composed of a magnet provided below the apparatus main body and a magnet provided at a position of the member that supports the apparatus main body so as to oppose the magnet. The displacement of the horizontal position of the device main body is converted into magnetic potential energy by making the force to be attracted the strongest and the force with which the magnets attract each other the weakest as the device main body moves away from a predetermined position. It is possible.

  Further, the position correcting means is configured to move the apparatus main body to the predetermined position during a period in which the processing apparatus is not being processed, and auxiliary driving means for moving the apparatus main body in the first direction. Auxiliary control means for controlling the auxiliary drive means may be provided.

  The “period in which machining is not performed in the machining apparatus” means a period in which the workpiece is not machined with a tool. For example, as a period during which a workpiece is not processed by a tool, a desired processing for a workpiece is performed between each partial processing step when a plurality of partial processing steps are performed intermittently. After the end, it may be possible to start a desired processing for the workpiece.

  According to the processing apparatus of the present invention, the movable body, the apparatus main body that movably supports the movable body in the first direction parallel to the horizontal direction, the apparatus main body, and the movable body are provided on one of the first and second sections. The first driving means for moving the moving body in the first direction by applying a thrust to the moving body in the first direction at the point of action, and the processing of the workpiece applied to the moving body and the thrust applied to the moving body And a first support mechanism for movably supporting the apparatus main body in a first direction in response to an external force acting on the apparatus main body in response to an external force accompanying the first action point and the apparatus main body in the vertical direction. The center of gravity of the moving body and the center of gravity of the moving body are configured to coincide with each other.

  By supporting the apparatus main body movably in a first direction parallel to the horizontal direction, the apparatus main body has a first force corresponding to the thrust applied to the moving body and the external force applied to the workpiece applied to the moving body. The vibration of the apparatus main body can be suppressed by moving the apparatus main body in the first direction according to the external force acting in the direction. In addition, since the height of the center of gravity of the first working point and the apparatus main body coincide with each other in the vertical direction, an external force is applied to the apparatus main body at a position eccentric in the vertical direction from the center of gravity of the apparatus main body. Generation of rotational torque about an axis that includes the center of gravity and is parallel to the horizontal direction can be suitably reduced. In addition, since the first action point and the height of the center of gravity of the moving body coincide with each other in the vertical direction, thrust is applied to the moving body at a position eccentric from the center of gravity of the moving body in the vertical direction. Generation of rotational torque about an axis that includes the center of gravity and is parallel to the horizontal direction can be suitably reduced.

  Therefore, in a machining apparatus in which a force that acts between the tool and the work piece is applied as an external force to the moving body that moves in the horizontal direction as well as a thrust force for moving the moving body, Thus, it is possible to suppress vibration of the apparatus main body caused by an external force acting on the apparatus main body.

The front view of the stationary state of the processing apparatus which is 1st Embodiment Side view of the processing apparatus of FIG. The front view of the movement state of the processing apparatus of FIG. Side view of the processing apparatus of FIG. Functional block diagram showing a control unit of the machining apparatus of the first to fifth embodiments The conceptual diagram which shows the modification of the processing apparatus of 1st Embodiment. Side view of processing apparatus according to second embodiment Side view of the processing apparatus according to the third embodiment The side view of the processing apparatus which is 4th Embodiment The side view of the processing apparatus which is 5th Embodiment

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 is a front view of a processing apparatus 1 according to a first embodiment of a moving apparatus of the present invention in a stationary state, FIG. 2 is a side view of the processing apparatus of FIG. 1, and FIG. 3 is a moving state of the processing apparatus of FIG. FIG. 4 is a side view of the processing apparatus of FIG. 3, and FIG. 5 is a functional block diagram showing a control unit of the processing apparatus of the first to fifth embodiments. In each figure, structures unnecessary for explanation are omitted as appropriate.

  The processing apparatus 1 processes a workpiece W placed on a movable body 10 configured to be horizontally movable with a tool C (rotary cutting tool) attached to the lower end of the Z-axis head 6 of the apparatus main body 9. Device.

  The processing apparatus 1 includes a moving body 10 that holds a workpiece W, an apparatus main body 9 that holds the tool C at a desired processing position with respect to the workpiece W, and supports the moving body 10 so as to be movable in the Y-axis direction. From the cross linear guide 4 (first support mechanism) that supports the apparatus main body 9 movably in the X-axis direction and the Y-axis direction, the pedestal portion 5 on which the cross linear guide 4 is installed on the upper surface, and the control unit 8 It is configured. Moreover, the base part 5 is installed on the floor surface.

The apparatus main body 9 is obtained by removing the constituent elements constituting the moving body 10 (moving body) from among the constituent elements supported by the cross linear guide 4 so as to be movable in the horizontal direction. Here, the apparatus main body 9 is installed on the pedestal portion 5 through the cross linear guide 4 so as to be movable in the horizontal direction, the column 3 standing on the bed 2, and the side of the column 3. The Z-axis head 6 and the tool C attached to the lower end of the Z-axis head 6 and a Y-axis guide mechanism 13 for supporting the movable body 10 movably in the Y-axis direction will be described in detail later. Among the components that are fixed to the bed 2, the guide rail 13 b that is fixed to the bed 2 and the components that constitute the Y-axis linear motor 12 that gives the moving body 10 thrust in the Y-axis direction are components fixed to the bed 2. Among a certain stator 12b and a Y-axis linear scale (not shown) for measuring the position of the moving body 10 in the Y-axis direction, a scale that is a part fixed to the bed 2 and the bed 2 side of the cross linear guide 4 Fixed mover It is al configuration.

  The moving body 10 holds the workpiece W and is supported by the apparatus main body 9 so as to be movable in the first direction (Y-axis direction), and is first driven by predetermined driving means (Y-axis linear motor) for processing. Is moved in the first direction (Y-axis direction) by being supplied with thrust in the direction (Y-axis direction). Here, the moving body 10 includes a workpiece W, an X-axis movement table 11 (holding unit) that holds the workpiece W, and an X-axis guide that supports the X-axis movement table 11 so as to be movable in the X-axis direction. A mechanism 15 (second support mechanism), an X-axis linear motor 14 that gives thrust to move the X-axis moving table 11 in the X-axis direction, an X-axis guide mechanism 15 and an X-axis linear motor 14 are supported, and a bed 2 and a Y-axis moving table 16 supported so as to be movable in the Y-axis direction via the Y-axis guide mechanism 13, and a Y-axis for supporting the movable body 10 movably in the Y-axis direction, as will be described in detail later. Of the parts constituting the guide mechanism 13, the bearing 13a, which is a part fixed to the moving body 10, and among the parts constituting the Y-axis linear motor 12 that gives the moving body 10 thrust in the Y-axis direction, the moving body 10 It is a part fixed to And the movable element 12a, among the Y-axis linear scale (not shown) for measuring the position of the Y-axis direction of the moving body 10, and an optical sensor is a fixed part to the moving body 10.

  The Y-axis guide mechanism 13 is provided on the upper surface of the bed 2 and guides the movable body 10 so as to be movable in the Y-axis direction with little influence from friction. The Y-axis guide mechanism 13 includes a bearing 13a attached to the moving body 10 and a guide rail 13b on which the bearing 13a travels. The guide rail 13b is fixed on the bed 2.

  The Y-axis linear motor 12 is provided on the bed 2 and moves the moving body 10 in the Y-axis direction by applying thrust to the moving body 10 in the Y-axis direction at the first action point Ey. The Y-axis linear motor 12 includes a mover 12a having a primary excitation coil and a stator 12b having a plurality of secondary permanent magnets arranged at a predetermined pitch on a traveling surface on which the mover 12a travels. ing. The stator 12b is fixed to a support portion 21 erected from the bed 2 at a position facing the mover 12a.

  The Y-axis linear motor 12 can supply thrust in the Y-axis direction to the moving body 10 at the first action point Ey by exciting the primary side exciting coil of the mover 12a. When a thrust is supplied to the moving body 10, a reaction force corresponding to the thrust supplied to the moving body 10 acts on the apparatus main body 9 via the stator 12b at the first action point Ey.

In the present embodiment, two Y-axis linear motors 12 are provided at positions facing each other across the moving body 10 in the X-axis direction, which is a direction orthogonal to the Y-axis direction. The moving body 10 is configured to supply thrust in the Y-axis direction. Thus, when two Y-axis linear motors 12 are arranged, it is suitable for driving the moving body 10 stably. In addition, it is not limited to this structure, One side of the Y-axis linear motor in the said embodiment can also be abbreviate | omitted.

The X-axis guide mechanism 15 is provided on the Y-axis movement table 16, and guides the X-axis movement table 11 so as to be movable in the X-axis direction with almost no influence of friction. The X-axis guide mechanism 15 includes a bearing 15a attached to the X-axis moving table 11 and a guide rail 15b on which the bearing 15a travels. The guide rail 15b is fixed on the Y-axis moving table 16. The structure of the X-axis guide mechanism 15 is the same as that of the Y-axis guide mechanism 13.

  The X-axis linear motor 14 is provided on the Y-axis movement table 16 and applies a thrust in the X-axis direction to the X-axis movement table 11 at the second action point Ex, thereby moving the X-axis movement table 11 in the X-axis direction. It is to be moved. The X-axis linear motor 14 includes a mover 14a attached to the X-axis moving table 11 and a stator 14b on which the mover 14a travels. The stator 14b is fixed to the Y-axis moving table 16 at a position facing the mover 14a. The structure of the X-axis linear motor 14 is the same as that of the Y-axis linear motor 12.

  The X-axis linear motor 14 can supply thrust in the X-axis direction to the X-axis moving table 11 at the second action point Ex by exciting the primary excitation coil of the mover 14a. When thrust is supplied to the X-axis movement table 11, a reaction force corresponding to the thrust in the X-axis direction acts on the Y-axis movement table 16 via the stator 14b at the second action point Ex. The reaction force acts on the apparatus main body 9 via the first action point Ey.

  The Z-axis head 6 has a Z-axis head body 61 having a tool C at the lower end, a Z-axis guide mechanism 62 for guiding the movement of the Z-axis head body 61 in the Z-axis direction, and the Z-axis head body 61 moved in the Z-axis direction. A Z-axis linear motor 63 (see FIG. 5) is provided to provide the thrust to be generated. The Z-axis guide mechanism 62 has the same structure as the Y-axis guide mechanism 13 and the X-axis guide mechanism 15, and the Z-axis linear motor 63 has the same structure as the Y-axis linear motor 12 and the X-axis linear motor 14. is there.

  Further, the machining apparatus 1 is linear for measuring the positional relationship between the workpiece W held by the movable body 10 and the tool C held by the apparatus main body in each of the X, Y, and Z axis directions. A scale (position measuring means) is provided (not shown in FIGS. 1 to 4, see FIG. 5). The Y-axis linear scale 12S includes a scale attached to the bed 2 in parallel with the stator 12b, and an optical sensor attached to the moving body 10 so that the scale can be read. The X-axis linear scale 14S includes a scale attached to the Y-axis movement table 16 in parallel with the stator 14b, and an optical sensor attached to the X-axis movement table 11 so that the scale can be read. The Z-axis linear scale 63S includes a scale attached to the Z-axis head main body 61 in parallel with the stator of the Z-axis linear motor, and an optical sensor attached to the column 3 so that the scale can be read. In addition, as each measuring means, you may use arbitrary alternative means, such as magnetic sensors, such as a Hall element which can read a magnescale and a magnescale.

  The cross linear guide 4 supports the apparatus main body 9 so as to be movable in the X-axis direction and the Y-axis direction in accordance with an external force acting on the apparatus main body 9. In addition, the cross linear guide 4 is a linear guide having a guide rail and a bearing connected in a single axial direction so as to be orthogonal to each other. A bearing of one linear guide is attached to the lower surface of the bed 2, and a pedestal portion 5. A bearing of the other linear guide is attached to the upper surface. Any configuration may be adopted in place of the cross linear guide as long as the device main body 9 can be movably supported in a horizontal plane according to an external force acting on the device main body 9. As an example, the bed 2 may be supported so as to be movable in the horizontal direction by an arbitrary configuration on the installation surface while omitting the pedestal portion 5.

  As shown in FIG. 5, the control unit 8 includes a movement instruction receiving unit 81 and a linear motor control unit 82. The movement instruction receiving unit 81 receives a movement instruction from a user via the operation panel and outputs a movement command corresponding to the movement instruction to the linear motor control unit 82. The linear motor control unit 82 controls drive currents output to the X-axis linear motor 14, the Y-axis linear motor 12, and the Z-axis linear motor 63 in accordance with the movement command. In this embodiment, two Y-axis linear motors 12 are provided, and a Y-axis control unit 86, a Y-axis output unit 88, and a Y-axis linear scale 12S are provided for each Y-axis linear motor 12. The structures and operations of the Y-axis control unit 86, the Y-axis output unit 88, and the Y-axis linear scale 12S for each Y-axis linear motor 12 are the same. For this reason, in FIG. 5, illustration of one Y-axis linear motor 12, the Y-axis control part 86 corresponding to this, the Y-axis output part 88, and the Y-axis linear scale 12S is abbreviate | omitted.

  The linear motor control unit 82 includes an X axis control unit 84, a Y axis control unit 85, a Z axis control unit 86, an X axis output unit 87, a Y axis output unit 88, and a Z axis output unit 89. The X-axis control unit 84, the Y-axis control unit 85, and the Z-axis control unit 86 are calculated based on the movement commands and information detected by the X-axis linear scale 14S, the Y-axis linear scale 12S, and the Z-axis linear scale 63S. Commands to the X-axis output unit 87, the Y-axis output unit 88, and the Z-axis output unit 89 based on the position information and speed information of the movers of the X-axis linear motor 14, the Y-axis linear motor 12, and the Z-axis linear motor 63 Each value (control amount) is output. The X-axis output unit 87, the Y-axis output unit 88, and the Z-axis output unit 89 are each X-axis linear based on the command values output from the X-axis control unit 84, the Y-axis control unit 85, and the Z-axis control unit 86. Drive currents are output to the motor 14, the Y-axis linear motor 12, and the Z-axis linear motor 63, respectively. Note that the auxiliary control unit 83, the auxiliary driving unit 7D1, and the auxiliary sensor 7D2 in FIG. 5 are not essential in the first to fourth embodiments, and are configured in a fifth embodiment to be described later. This will be described in the fifth embodiment.

  Here, the processing apparatus 1 is configured such that, in the vertical direction, the center of gravity Gb of the apparatus main body 9, the center of gravity Gm of the moving body 10, and the heights of the first and second action points Ex and Ey coincide.

  Matching the vertical height of the center of gravity Gm of the moving body, the center of gravity Gb of the apparatus main body, and the first action point Ey (or the second action point Ex) is not limited to exact matching. Depending on the size of the apparatus 1 and the required processing accuracy, the height of the first action point Ey (or the second action point Ex), the center of gravity of the apparatus main body 9 and the center of gravity of the movable body 10 in the vertical direction is substantial. Anything can be considered as long as it matches. For example, in the case of a machining apparatus having a vertical height of about 1.5 m and a mass of about 1.5 t, the center of gravity of the apparatus body, the center of gravity of the moving body, and the first action point (or the second action point) If the difference in height in the vertical direction is within about 10 mm, the center of gravity of the apparatus body, the center of gravity of the moving body, and the height in the vertical direction of the first action point (or the second action point) substantially match. Can be considered. In the processing apparatus 1, the vertical height of the center of gravity Gm of the moving body, the center of gravity Gb of the apparatus main body, and the first action point Ey (or the second action point Ex) is substantially matched. If present, the moving body 10 and the apparatus main body 9 may have arbitrary structures.

  Note that when calculating the center of gravity of the moving body 10 and the apparatus main body 9, the elements constituting the moving body 10 and the apparatus main body 9 are selectively selected as appropriate according to the influence that contributes to the center of gravity of the moving body 10 and the apparatus main body 9. May be used. For example, in the above example, the device main body 9 includes components fixed to the bed 2 side among the components constituting the Y-axis guide mechanism 13, the Y-axis linear motor 12, the Y-axis linear scale 12S, and the cross linear guide 4. However, if the mass of these parts is negligibly small relative to the mass of the apparatus main body 9, the center of gravity Gb of the apparatus main body 9 may be calculated assuming that these parts are not included. Further, among the components constituting the Y-axis guide mechanism 13, the Y-axis linear motor 12, and the Y-axis linear scale 12S, the parts fixed to the Y-axis movement table are included in the moving body 10. If the mass of the part is negligibly small with respect to the mass of the moving body 10, the center of gravity Gm of the moving body 10 may be calculated as not including these parts.

  The operation of the above processing apparatus will be described. In the processing apparatus 1, when the X-axis linear motor 14, the Y-axis linear motor 12, and the Z-axis linear motor 63 are driven by the control unit 8, the X-axis direction is set on the X-axis moving table 11 that holds the workpiece W. The thrust in the Y-axis direction is supplied, and the X-axis moving table 11 moves in the XY plane with respect to the tool C held on the apparatus main body 9, and the Z-axis head main body 61 holding the tool C moves in the Z-axis direction. The thrust is supplied, and the tool C moves in the Z-axis direction. The workpiece W is processed by moving the workpiece W and the tool C while moving the workpiece W and the tool C in response to a series of movement instructions for performing desired machining on the workpiece W. To be implemented. Further, for the movement of the moving body 10, the thrust in the X-axis direction and the thrust in the Y-axis direction are applied to the moving body 10, and the reaction force of these propulsive forces acts on the apparatus body 9 as an external force. Further, as the workpiece W is machined, a force acting between the tool C and the workpiece W is applied to the movable body 10 via the workpiece W, and further, the apparatus main body via the movable body 10. 9 acts as an external force.

  According to the present processing apparatus 1, the center of gravity Gm of the moving body 10 and the height of the first action point Ey are configured to coincide with each other in the vertical direction. For example, as shown in FIGS. 1 to 4, the center of gravity Gm of the moving body 10 and the first action point Ey are moved to different positions on the XY plane according to the machining process, but always in the vertical direction. The heights are the same.

  If the center of gravity Gm of the moving body 10 and the height of the first action point Ey are different in the vertical direction, if an external force in the Y-axis direction is applied to the moving body 10 at the first action point Ey, the moving body Causes of vibration due to the generation of rotational torque about the rotational axis that includes the center of gravity Gm of the moving body 10 and is parallel to the X axis according to the vertical eccentricity between the center of gravity Gm of 10 and the first action point Ey There is a possibility. However, when an external force in the Y-axis direction is applied to the moving body 10 at the first action point Ey arranged substantially at the same height as the center of gravity Gm of the moving body 10 as in the present embodiment. The generation of the rotational torque as described above is suppressed, and the generation of the vibration of the moving body 10 can be prevented.

  Furthermore, in this embodiment, it is comprised so that the gravity center Gm of the mobile body 10 and the height of the 2nd action point Ex may correspond in a perpendicular direction. For this reason, since the external force in the X-axis direction is applied to the moving body 10 at the second action point Ex disposed substantially at the same height as the center of gravity Gm of the moving body 10, the center of gravity Gm of the moving body 10. The generation of rotational torque about the rotation axis parallel to the Y axis is suppressed, and the generation of vibration of the moving body 10 can be suppressed very effectively.

  Moreover, according to this processing apparatus 1, it is comprised so that the height of the 1st action point Ey and the gravity center Gb of the apparatus main body 9 may correspond in a perpendicular direction. For example, as shown in FIGS. 1 to 4, the center of gravity Gb of the apparatus main body 9 and the first action point Ey are moved to different positions on the XY plane according to the machining process, but always in the vertical direction. The heights are the same. In the processing apparatus 1, the center of gravity Gb of the apparatus main body is slightly displaced in the vertical direction by the movement of the Z-axis head 6 in the Z direction, but the displacement is almost negligible.

  If the height of the center of gravity Gb of the apparatus main body 9 differs from the height of the first action point Ey in the vertical direction, if an external force is applied to the apparatus body 9 at the first action point Ey, the center of gravity Gb of the apparatus body 9 According to the vertical eccentricity between the first action point Ey and the first action point Ey, there is a possibility that a rotational torque including the center of gravity Gb of the apparatus main body 9 and centering on the rotation axis parallel to the X axis is generated, causing vibration. There is. However, when an external force is applied to the apparatus main body 9 at the first action point Ey arranged substantially at the same height as the center of gravity Gb of the apparatus main body 9 as in the present embodiment. The generation of rotational torque as described above is suppressed, and the occurrence of vibration of the apparatus main body 9 can be prevented. For this reason, generation | occurrence | production of the vibration of the moving body 10 supported by the apparatus main body 9 is also suppressed.

  Furthermore, in the present embodiment, the height of the center of gravity Gm of the apparatus main body 9, the first action point Ey, and the second action point Ex is matched in the vertical direction. For this reason, an external force in the X-axis direction acts on the apparatus main body 9 at the first action point Ey arranged at the same height in the vertical direction substantially with the second action point Ex and the center of gravity Gm of the apparatus main body 9. . Therefore, the generation of rotational torque about the rotation axis that includes the center of gravity Gb of the apparatus main body 9 and is parallel to the Y axis is suppressed, and the generation of vibration of the apparatus main body 9 can be effectively suppressed.

  In order to further enhance the above effect, it is preferable that the center of gravity of the movable body 10 or the apparatus main body 9 is configured to be adjustable by loading a desired weight on the movable body 10 or the apparatus main body 9. For example, in order to adjust the center of gravity Gm of the moving body 10 in the vertical direction, the center of gravity Gm of the moving body 10 is set to the height of the center of gravity Gb of the apparatus body 9 in the vertical direction with a plurality of weights loaded on the moving body 10. Match. The plurality of weights are selected so as to have a mass comparable to the mass of the workpiece W or the tool C that may be loaded on the moving body 10. Then, when a load such as the workpiece W or the tool C is mounted on the moving body 10, a weight having the same mass as that of the load may be removed from the moving body 10. The adjustment method described above can be applied not only to the moving body 10 but also to the apparatus main body 9. The center of gravity Gb of the apparatus main body 9 may be adjusted in the vertical direction. Thus, when the center of gravity Gb, Gm of the apparatus main body 9 and / or the moving body 10 is adjustable in the vertical direction, the center of gravity Gb, Gm of the apparatus main body 9 and / or the moving body 10 in the vertical direction and the first The height of the action point Ey or the second action point Ex can be more accurately matched.

Furthermore, according to the present processing apparatus 1, the apparatus main body 9 is supported so as to be movable in the X-axis direction and the Y-axis direction with respect to the pedestal portion 5. In the equations (1) to (3), the mass Mb of the apparatus body, the mass Mm of the moving body, the acceleration abx in the X-axis direction of the apparatus body 9, the acceleration aby in the Y-axis direction, and the acceleration amx in the X-axis direction of the moving body 10 The relationship between the acceleration amy in the Y-axis direction, the X component Fx of the external force F applied to the moving body 10, and the Y component Fy of the external force F applied to the moving body 10 is shown. As shown in the equations (1) to (3), when external forces Fx and Fy are supplied to the moving body 10, reaction forces -Fx and -Fy corresponding to the external force F supplied to the moving body 10 are changed to the main body of the apparatus. Acts on 9
Fx = Mm × amx, Fy = Mm × amy (1)
−Fx = Mb × abx, −Fy = Mb × aby (2)
abx = Mm / Mb × amx, aby = Mm / Mb × amy... (3)

  According to this processing apparatus 1, since the apparatus main body 9 is supported so as to be movable in the X-axis direction and the Y-axis direction with respect to the pedestal portion 5, the apparatus main body 9 is always synchronized with the reaction forces -Fx and -Fy. Then, in the same direction as the reaction force -Fx, -Fy, the moving body 10 moves with accelerations amb, aby obtained by multiplying the accelerations amx, amy of the moving body 10 by the reciprocal Mm / Mb of the mass ratio. Accordingly, it is possible to suppress occurrence of horizontal vibration in the apparatus main body 9 due to the reaction forces −Fx and −Fy in the horizontal direction. Further, along with this, the occurrence of vibration of the moving body 10 supported by the apparatus main body 9 is also suppressed.

  In the processing apparatus 1, the external force acting on the apparatus main body 9 is not only a reaction force against the thrust for moving the moving body 10 (reaction force by driving), but also the workpiece W and the tool C along with the processing. Since external force acting in the middle (external force due to processing) is also included, by making the apparatus main body 9 movable, not only vibration due to reaction force due to driving but also vibration due to external force due to processing It can suppress suitably.

  According to the present processing apparatus 1, the first working point Ey (and the second working point Ex), the center of gravity Gm of the moving body 10 and the center of gravity Gb of the apparatus body 9 in the vertical direction are made to coincide with each other, thereby rotating torque. The forces in the x, y, and z directions accompanying the above are sufficiently suppressed from acting on the apparatus main body 9 and the moving body 10, and the external force acting on the apparatus main body 9 (reaction force and driving due to the driving of the moving body 10) By horizontally moving the apparatus main body 9 by an external force including an external force, vibrations of the apparatus main body 9 and the moving body 10 can be suppressed very suitably. As a result, the workpiece W can be processed at high speed and with high accuracy. Further, as described above, the height in the vertical direction of the first action point Ey (and the second action point Ex) of the processing apparatus 1, the center of gravity Gm of the moving body 10, and the center of gravity Gb of the apparatus main body 9 are matched. In the case where the apparatus main body 9 is supported so as to be movable in the horizontal direction, there is no need to provide additional control means for preventing vibration due to reaction force that actively acts on the apparatus main body 9, and the structure of the apparatus is complicated. Manufacturing cost can be reduced.

  On the other hand, for example, according to the method described in Patent Document 1, a value obtained by multiplying the target displacement amount of the XY stage by the inverse ratio of the mass of the XY stage and the mass of the stage surface plate is calculated, and this value is calculated. The stage surface plate is feedforward controlled as the target displacement of the surface plate. In this case, control according to the target position for controlling the linear motor in the X and Y directions is only performed, and control according to external force other than thrust applied to the stage surface plate is not performed. In addition, it is difficult to drive the stage surface plate with the timing completely synchronized with the actual movement of the XY stage depending on the calculation time for calculating the command position. In addition, it is not preferable to provide a driving unit and a control unit for driving the stage surface plate because the manufacturing cost is increased.

  The present invention is not limited to the above-described embodiment. In the processing apparatus 1, only the uniaxial direction parallel to the horizontal direction (for example, one of the X-axis direction and the Y-axis direction) is the first action point in the uniaxial direction. And the center of gravity Gm of the moving body 10 and the center of gravity Gb of the apparatus main body 9 are configured to coincide with each other in the vertical direction, and the apparatus main body 9 may be supported movably only in the uniaxial direction. . Also in this case, the vibration of the moving body 10 and the apparatus main body 9 can be suitably suppressed by moving the apparatus main body 9 according to the external force acting on the apparatus main body 9 in the uniaxial direction. Further, it is possible to suppress the generation of rotational torque in the apparatus main body 9 due to the external force acting on the apparatus main body 9 in the uniaxial direction at the first action point, and it is possible to suitably suppress the vibration of the apparatus main body 9. . Moreover, generation | occurrence | production of a rotational torque can be suppressed in the mobile body 10 with the external force which acts on the mobile body 10 in the said uniaxial direction in a 1st action point, and the vibration of the mobile body 10 can be suppressed suitably.

  Without being limited to the first embodiment, the machining apparatus 1 is configured such that one of the apparatus main body 9 and the moving body 10 holds the workpiece W, and the other holds the tool C at a machining position with respect to the workpiece W. If the workpiece W and the tool C are moved by an arbitrary driving means, the moving body 10 holds the tool C and the apparatus main body 9 holds the workpiece W. You may comprise as follows. FIG. 6 shows an example in which the moving body 10 holds the tool C and the apparatus main body 9 holds the workpiece W as a modification of the processing apparatus 1 of the first embodiment. The processing apparatus 1 in FIG. 6 has the same configuration as the processing apparatus 1 of the first embodiment except that the moving body 10 holds the tool C and the apparatus main body 9 holds the workpiece W. Therefore, the same reference numerals are given to the configuration of the processing apparatus 1 common to the first embodiment, and the description thereof is omitted.

  By the way, according to the processing apparatus 1 in the first embodiment, since the apparatus main body 9 is supported so as to be movable in the horizontal direction, the thrust applied to the moving body 10 and the workpiece W applied to the moving body 10 are processed. While the apparatus main body 9 repeatedly moves according to the external force acting on the apparatus main body 9 in response to the accompanying external force, the apparatus main body 9 is gradually displaced from a predetermined position due to the influence of minute friction or the like. May end up. When such a displacement occurs, it is not preferable from the viewpoint of downsizing the installation space of the processing apparatus 1 and the burden of maintenance labor for correcting the displacement of the apparatus main body 9. Therefore, as the second to fifth embodiments, the processing apparatus 1 in the first embodiment moves the apparatus main body 9 to a predetermined position when the apparatus main body 9 is displaced from the predetermined position in the horizontal direction. An example in which correction means 7 is further provided will be described.

  The second to fifth embodiments are different from the first embodiment in that the machining apparatus 1 further includes a position correcting means 7, and the other configurations and operations of the machining apparatus 1 are the first implementation. It is common with the form. FIGS. 7-10 is a side view which shows the outline of the processing apparatus 1 concerning 2nd-5th embodiment. Hereinafter, in the description of the second to fifth embodiments, the same reference numerals are given to the configuration of the processing apparatus 1 common to the first embodiment, the description thereof is omitted, and the differences from the first embodiment are mainly described. Explained.

  In the second embodiment, the position correcting means 7 converts the displacement of the position of the apparatus main body 9 from a predetermined position into a positional energy based on elastic force, and the apparatus main body 9 is a reference that is a predetermined position by the positional energy. It is moved to a position. Here, the position correcting means 7 comprises a spring 7 connected horizontally to the side surface of the bed 2. The spring 7 is arranged so that the spring 7 is not expanded and contracted at the reference position of the apparatus main body 9 and the spring 7 is expanded and contracted more greatly as the apparatus main body 9 is separated from the reference position.

  The spring constant of the spring 7 is set so that the natural frequency is sufficiently smaller than the frequency of the reciprocating motion for processing the device main body 9. For example, the spring constant is preferably set to be as low as possible at 2 Hz or less. According to the second embodiment, when the apparatus main body 9 is displaced from the reference position, the spring 7 is elastically deformed in accordance with the displacement in the horizontal direction of the bed 2 so that the bed 2 is moved to the reference position by elastic energy. To supply elastic force.

  The position correcting means 7 converts the displacement of the position of the apparatus main body 9 from the reference position into positional energy, and the apparatus main body 9 is brought to the reference position at a sufficiently lower speed than the speed of the apparatus main body 9 due to processing by the position energy. When configured to move, even if the apparatus main body 9 is gradually displaced from the reference position, the apparatus main body 9 can be moved to the reference position by the position correcting means 7 so as not to adversely affect the processing. Further, since it is not necessary to supply additional energy such as electric power to correct the position, energy saving is high. Further, as shown in the second embodiment, the position correcting means 7 is constituted by a spring 7 that is horizontally connected to the apparatus main body 9, and the displacement of the position of the apparatus main body 9 from a predetermined position is based on the elastic force. When converted into potential energy and the apparatus main body 9 is moved to a reference position which is a predetermined position by the position energy, the displacement of the apparatus main body from the reference position can be corrected with a simple configuration.

  Further, as a third embodiment, the position correction means 7 converts the displacement of the position of the apparatus main body 9 from the reference position to the position energy based on gravity, and moves the apparatus main body to a predetermined position by the position energy. An example will be described. Here, the position correcting means 7 is the support surface 7 of the pedestal portion 5 that supports the apparatus main body 9, and is gently inclined so that the height in the vertical direction gradually increases toward the direction away from the reference position. The support surface 7 is configured.

  Further, the support surface 7 is configured to have a gentle inclination that moves the apparatus main body at a speed sufficiently slower than the reciprocating speed for processing the apparatus main body. According to the third embodiment, when the device main body 9 is displaced from the reference position, the center of gravity of the device main body 9 is displaced in the vertical direction, so that the gravity of the device main body 9 is caused by the potential energy corresponding to the amount of displacement. 9 is moved to the reference position.

  As shown in the third embodiment, when the position correcting means 7 is constituted by the support surface 7 that is gently inclined so that the height in the vertical direction gradually increases in the direction away from the reference position. Since it is not necessary to supply additional energy such as electric power to correct the position, energy saving is high, and the displacement of the apparatus main body from the reference position can be corrected with a simple configuration. Moreover, since it is not necessary to increase the number of parts, an increase in manufacturing cost can be suppressed.

  Further, as the fourth embodiment, the position correcting means 7 converts the displacement of the position of the apparatus main body 9 from the reference position into the positional energy based on magnetism, and moves the apparatus main body to a predetermined position by the positional energy. An example will be described. Here, the position correcting means 7 is a pair of magnetic bodies 7C1 attached to each other at positions facing each other on the lower surface of the bed 2 and the upper surface of the pedestal portion 5 with the apparatus main body 9 positioned at the reference position. , 7C2. That is, the magnetic bodies 7C1 and 7C2 are arranged such that the distance is minimum at the reference position and the distance is increased as the apparatus main body 9 is moved away from the reference position.

  Further, as each magnetic body constituting the position correcting means 7, a magnetic body acting with a small magnetic force that does not affect the reciprocating motion for processing the apparatus main body is selected. According to the fourth embodiment, the mutual forces of the magnetic bodies 7C1 and 7C2 act so that the apparatus main body 9 is moved to the reference position.

  As shown in the fourth embodiment, the position correcting means 7 are attached to each other at positions facing each other on the lower surface of the bed 2 and the upper surface of the pedestal portion 5 with the apparatus main body 9 positioned at the reference position. In the case where the apparatus is composed of magnetic materials that meet each other, the displacement of the apparatus main body from the reference position can be corrected with a simple structure.

  Further, the position correcting means 7 in the fourth embodiment may be replaced with, for example, a force of magnetic force, as long as it converts the potential energy based on magnetism and moves the apparatus main body to a predetermined position by the potential energy. It is also possible to use the power of retreating. Or you may utilize both the force with which magnetic force attracts, and the force with which a magnet retreats.

  For example, the position correcting means 7 can be composed of four pairs of magnetic bodies that retreat from each other. The four pairs of magnetic bodies have a pair of outer peripheral surfaces on both sides in the X direction of the apparatus main body 9 and positions facing the outer peripheral surfaces, and outer peripheral surfaces on both sides in the Y direction and positions facing the outer peripheral surfaces. It arrange | positions so that a magnetic body may oppose. In addition, each pair of magnetic bodies forms any one pair of magnetic bodies when the apparatus main body 9 is positioned at the reference position, and the retreating forces do not substantially act on each other, and when the apparatus main body 9 is displaced from the reference position. The magnetic bodies are arranged so as to be spaced apart from each other by a predetermined distance so that the distances between the magnetic bodies approach each other and the retreating forces act between the pair of magnetic bodies. When configured in this way, the force with which the four magnetic bodies retreat from each other at the reference position of the apparatus main body 9 hardly acts, and when the apparatus main body 9 moves away from the reference position, one of the four sets of magnetic bodies As the distance between the magnetic bodies becomes smaller, the force with which the magnetic bodies retreat from each other acts to move the apparatus main body 9 to the reference position.

  As described above, when the apparatus main body 9 is displaced from the reference position, the position correcting means 7 is arranged so that a force retreating to the apparatus main body 9 acts so as to move the apparatus main body 9 to the reference position. In the case of being constituted by one or more pairs of magnetic bodies, the displacement of the apparatus main body 9 from the reference position can be corrected with a relatively simple configuration.

  Each pair of magnetic bodies constituting the position correcting means 7 may be constituted by a pair of permanent magnets, or may be constituted by a combination of a temporary magnet such as iron and a permanent magnet. When each magnetic body constituting the position correcting means 7 is constituted by a permanent magnet, it is not necessary to supply additional energy such as electric power to correct the position, so energy saving is high, and the reference position can be obtained by a simple configuration. It is possible to correct the displacement of the main body of the apparatus. When each magnetic body constituting the position correcting means 7 is constituted by a temporary magnet, it is preferable because a magnetic force can be applied to the apparatus main body 9 at a desired timing.

  Further, as the fifth embodiment, the position correcting means 7 is assisted to move the apparatus main body 9 to the reference position during the period when the apparatus main body 9 is moved to the reference position and the auxiliary drive means 7D for moving the apparatus main body 9 to the reference position. An example constituted by an auxiliary control unit 83 that controls the driving means 7D will be described. As shown in FIG. 5, here, it is assumed that the control unit 8 also has the function of the auxiliary control unit 83. In the fifth embodiment, the auxiliary driving means 7D is composed of an auxiliary driving unit 7D1 and an auxiliary sensor 7D2. The four auxiliary driving means are arranged at a predetermined distance from the apparatus main body 9 at positions facing the outer peripheral surfaces on both sides in the X direction of the apparatus main body 9 and positions facing the outer peripheral surfaces on both sides in the Y direction. Is done. Then, the auxiliary control unit 83 determines a period in which the processing is not performed based on the information from the movement instruction receiving unit 81, and in the period in which the processing is not performed, based on the information of the auxiliary sensor 7D2, the device When the main body 9 is displaced from the reference position to the auxiliary drive unit 7D1 side by more than a predetermined threshold, a motor (not shown) that constitutes the auxiliary drive unit 7D1 is controlled so that the auxiliary drive unit 7D1 does not move horizontally. By pressing the illustrated rod against the side of the apparatus main body, the apparatus main body is moved to the reference position.

  As in the fifth embodiment, the position correction means 7 is assisted to move the apparatus main body 9 to the reference position during the period when the apparatus main body 9 is moved to the reference position and the auxiliary drive means 7D that moves the apparatus main body 9 to the reference position. When configured by the auxiliary control unit 83 that controls the driving unit 7D, the displacement of the apparatus main body 9 from the reference position can be corrected at a desired timing that does not affect the machining process.

 The present invention described above can be implemented in various other forms without departing from the spirit and essential features of the present invention. Accordingly, the examples described herein are illustrative and should not be construed as limiting.

DESCRIPTION OF SYMBOLS 1 Processing apparatus 2 Bed 3 Column 4 Cross linear guide (1st support mechanism)
5 Pedestal part 6 Z-axis head 7 Position correcting means 8 Control part (auxiliary control means)
9 Device body 10 Moving body 11 X-axis moving table (holding unit)
12 Y-axis linear motor (first driving means)
13 Y-axis guide mechanism 14 X-axis linear motor (second drive means)
15 X-axis guide mechanism (second support mechanism)
16 Y-axis movement table C Tool Ex Second action point Ey First action point Gb Center of gravity Gm of apparatus main body Center of gravity W of moving body Workpiece

Claims (5)

  1. An apparatus body including a bed and a column standing on the bed;
    A movable body supported on the bed so as to be movable in a first direction parallel to the horizontal direction ;
    A first one that is provided on one of the apparatus main body and the movable body and moves the movable body in the first direction by applying a thrust to the movable body in the first direction at a first action point. Driving means,
    One of the apparatus main body and the movable body holds a workpiece, and the other of the apparatus main body and the movable body holds a tool at a machining position with respect to the workpiece, and the first driving means. A processing apparatus for processing the workpiece while relatively moving the workpiece and the tool,
    The apparatus main body can be moved in the first direction in response to an external force acting on the apparatus main body corresponding to the thrust applied to the movable body and the external force accompanying the processing of the workpiece applied to the movable body. A first support mechanism for supporting the
    A processing apparatus characterized in that the height of the first action point, the center of gravity of the apparatus main body, and the center of gravity of the movable body coincide with each other in the vertical direction.
  2. The movable body movably supports the holding portion that holds one of the workpiece or the tool and a holding portion that is movable in a second direction parallel to a horizontal direction orthogonal to the first direction. A second support mechanism; and a second driving means for moving the holding portion in the second direction by applying a thrust in the second direction to the holding portion at a second operating point;
    The first support mechanism is configured to change the device main body according to an external force acting on the device main body corresponding to the thrust applied to the movable body and the external force accompanying the processing of the workpiece applied to the movable body. It is movably supported in the first direction and the second direction,
    2. The first action point, the second action point, the center of gravity of the apparatus main body, and the height of the center of gravity of the movable body are aligned with each other in the vertical direction. Processing equipment.
  3.   The processing apparatus according to claim 1, further comprising a position correcting unit that moves the apparatus main body to the predetermined position when the apparatus main body is displaced from a predetermined position in the first direction. .
  4.   The position correcting means converts the displacement of the position of the apparatus main body from the predetermined position into position energy based on elastic force, gravity or magnetism, and moves the apparatus main body to the predetermined position by the position energy. The processing apparatus according to claim 3, wherein the processing apparatus is one.
  5.   The position correcting means moves the apparatus main body in the first direction, and the auxiliary drive means moves the apparatus main body to the predetermined position during a period when the processing apparatus is not performing processing. The processing apparatus according to claim 3, further comprising auxiliary control means for controlling the drive means.
JP2014170146A 2014-08-25 2014-08-25 Processing equipment Active JP5834121B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014170146A JP5834121B1 (en) 2014-08-25 2014-08-25 Processing equipment

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014170146A JP5834121B1 (en) 2014-08-25 2014-08-25 Processing equipment
CN201510303194.7A CN106181448B (en) 2014-08-25 2015-06-05 Processing unit (plant)

Publications (2)

Publication Number Publication Date
JP5834121B1 true JP5834121B1 (en) 2015-12-16
JP2016045753A JP2016045753A (en) 2016-04-04

Family

ID=54874370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014170146A Active JP5834121B1 (en) 2014-08-25 2014-08-25 Processing equipment

Country Status (2)

Country Link
JP (1) JP5834121B1 (en)
CN (1) CN106181448B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6423839B2 (en) * 2016-09-26 2018-11-14 ファナック株式会社 Drive device having mechanical vibration suppression function and system having mechanical vibration suppression function

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH094677A (en) * 1995-06-15 1997-01-07 Nikon Corp Vibration preventing method
JPH09264379A (en) * 1996-03-28 1997-10-07 Ishikawajima Harima Heavy Ind Co Ltd Vibration damping device
JPH1182506A (en) * 1997-09-04 1999-03-26 Thk Kk Three dimensional guide device
JPH11190786A (en) * 1997-12-26 1999-07-13 Canon Inc Stage, aligner employing it and fabrication of device
JP2000130496A (en) * 1998-10-23 2000-05-12 Ishikawajima Harima Heavy Ind Co Ltd Vibration dumping device for spherical tank
JP2001269827A (en) * 2000-03-28 2001-10-02 Toyoda Mach Works Ltd Vertical machine tool
JP3278069B2 (en) * 1991-12-25 2002-04-30 カヤバ工業株式会社 Electro-hydraulic servo mechanism
JP2003291040A (en) * 2002-04-02 2003-10-14 Thk Co Ltd Finishing machine
JP2004302639A (en) * 2003-03-28 2004-10-28 Sumitomo Heavy Ind Ltd Vibration controller
JP2005142501A (en) * 2003-11-10 2005-06-02 Canon Inc Stage apparatus, aligner, and method of manufacturing device
JP2008249122A (en) * 2007-03-30 2008-10-16 Kitakyushu Foundation For The Advancement Of Industry Science & Technology Vibration damping device
JP2012161896A (en) * 2011-02-09 2012-08-30 Sodick Co Ltd Movement device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3318795B2 (en) * 1993-10-08 2002-08-26 ソニー・プレシジョン・テクノロジー株式会社 Displacement detector
JP3814453B2 (en) * 2000-01-11 2006-08-30 キヤノン株式会社 Positioning apparatus, semiconductor exposure apparatus, and device manufacturing method
WO2003015139A1 (en) * 2001-08-08 2003-02-20 Nikon Corporation Stage system, exposure device, and method of manufacturing device
US7502103B2 (en) * 2006-05-31 2009-03-10 Asml Netherlands B.V. Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
JP5638247B2 (en) * 2010-01-04 2014-12-10 Dmg森精機株式会社 Machine tools

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3278069B2 (en) * 1991-12-25 2002-04-30 カヤバ工業株式会社 Electro-hydraulic servo mechanism
JPH094677A (en) * 1995-06-15 1997-01-07 Nikon Corp Vibration preventing method
JPH09264379A (en) * 1996-03-28 1997-10-07 Ishikawajima Harima Heavy Ind Co Ltd Vibration damping device
JPH1182506A (en) * 1997-09-04 1999-03-26 Thk Kk Three dimensional guide device
JPH11190786A (en) * 1997-12-26 1999-07-13 Canon Inc Stage, aligner employing it and fabrication of device
JP2000130496A (en) * 1998-10-23 2000-05-12 Ishikawajima Harima Heavy Ind Co Ltd Vibration dumping device for spherical tank
JP2001269827A (en) * 2000-03-28 2001-10-02 Toyoda Mach Works Ltd Vertical machine tool
JP2003291040A (en) * 2002-04-02 2003-10-14 Thk Co Ltd Finishing machine
JP2004302639A (en) * 2003-03-28 2004-10-28 Sumitomo Heavy Ind Ltd Vibration controller
JP2005142501A (en) * 2003-11-10 2005-06-02 Canon Inc Stage apparatus, aligner, and method of manufacturing device
JP2008249122A (en) * 2007-03-30 2008-10-16 Kitakyushu Foundation For The Advancement Of Industry Science & Technology Vibration damping device
JP2012161896A (en) * 2011-02-09 2012-08-30 Sodick Co Ltd Movement device

Also Published As

Publication number Publication date
CN106181448B (en) 2018-04-06
CN106181448A (en) 2016-12-07
JP2016045753A (en) 2016-04-04

Similar Documents

Publication Publication Date Title
US7239161B2 (en) Gantry-type XY stage
US7036408B2 (en) Lenslathe with vibration cancelling arrangement
CN1086975C (en) Symmetrical multi-axis linear motor machine tool
US9144869B2 (en) Machine motion trajectory measuring device, numerically controlled machine tool, and machine motion trajectory measuring method
US7293337B2 (en) Machining apparatus
Altintas et al. Machine tool feed drives
US5939852A (en) Stage feeding device
US6296093B1 (en) Vibration-damped machine and control method therefor
Rakuff et al. Design and testing of a long-range, precision fast tool servo system for diamond turning
JP5892732B2 (en) Method and device for compensating for temperature dependent position changes in machine tools
JP5293977B2 (en) Crane steady rest control method and steady rest control apparatus
JP2822809B2 (en) Position control method and a position control device
Hoque et al. Development of a three-axis active vibration isolator using zero-power control
US6992407B2 (en) Precision machining stage equipment
CN101323049B (en) Linear friction welding apparatus and method
Kim et al. Design and precision construction of novel magnetic-levitation-based multi-axis nanoscale positioning systems
US8138693B2 (en) Vibration isolation control system
JP4787771B2 (en) Printed circuit board processing machine and its drilling method
CN101922995B (en) Three-shaft six-motion freedom vibration test device of electric hammer type
Shinno et al. A newly developed linear motor-driven aerostatic XY planar motion table system for nano-machining
ES2248367T3 (en) Machine tool and handling device adapted to be mounted in a machine of that type.
US7372231B2 (en) Movable body position control device and stage device using the movable body position control device
CN100492177C (en) System for balancing and positioning work table of photoetching device
DE60306923T2 (en) Response transmission system
KR100852876B1 (en) Stage device

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150928

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20151027

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20151030

R150 Certificate of patent or registration of utility model

Ref document number: 5834121

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250