KR20040086558A - Vibration control apparatus - Google Patents

Abstract

PURPOSE: A vibration controlling apparatus is provided to reduce a vibration without being affected by an operation of an actuator by using a counter-force processor capable of placing a force in a direction to eliminate the vibration with respect to a structure. CONSTITUTION: A vibration controlling apparatus suppresses a vibration by using a counter force generated by operating an actuator formed on a structure. The vibration controlling apparatus includes a counter-force(42) capable of placing a force with respect to the structure. A static portion of the counter force processor is fixed on a base by using a support member(36). The structure is joined with the base by using an anti-vibration member(32A,32B). The weight of the structure is larger than that of the actuator.

Description

Vibration control apparatus

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration control device, and more particularly, to a vibration control device for driving a moving part such as a linear motor mover formed on a structure.

Generally, movable parts, such as a linear motor mover, are used for positioning of a stage, etc., and high positioning precision is calculated | required with the request of refinement | miniaturization of a process size. The structure on which this stage is placed is fixed to the floor through vibration damping means in order to damp vibrations from the floor when the performance is achieved, and thus the movable part is driven in a very unstable state. When receiving and driving, reaction force of the same magnitude as the driving force is generated in the direction opposite to the driving direction. In the state where this reaction force exists, the structure vibrates and the vibration is transmitted to the stage, so that the positioning of the stage cannot be performed with high accuracy. Therefore, in order to accurately perform positioning of the stage, it is necessary to perform reaction force processing for canceling reaction force.

1 shows a schematic diagram of a conventional vibration control apparatus. As shown in FIG. 1, the vibration control apparatus 10 is comprised by the drive apparatus 17, the control apparatus 20, and the integral compensator 25 roughly. The drive device 17 is roughly comprised by the actuator 11, the target 15, the displacement sensor 16, the acceleration sensor 19, and the bottom plate 18. As shown in FIG.

The actuator 11 has a pair of linear motors 12 and 13, and each of the linear motors 12 and 13 includes a linear motor mover 12a and 13a having a permanent magnet and a linear motor having a coil. It consists of stators 12b and 13b, and the linear motor movers 12a and 13a are formed through the connecting plate 14. The linear motor movers 12a and 13a move to a predetermined position so as to position the target 15. The target 15 is formed in the linear motor mover 12a. The displacement sensor 16 measures the detection surface of the target 15 and outputs the measurement result to the position compensator 22. The acceleration sensor 19 is attached to the bottom plate 18 supporting the linear motor stators 12b and 13b. The acceleration sensor 19 measures vibration of the structure and the floor, and outputs the measurement result to the integral compensator 25.

The control apparatus 20 is comprised by the position compensator 22, the current amplifier 21, the induction voltage calculator 26, and the gain compensator 24 roughly. The control apparatus 20 performs appropriate arithmetic processing based on the vibration value input to the integral compensator 25 and the displacement value from the displacement sensor 16, and excites the current amplifier 21, By passing a current through the coils of the linear motor stators 12b and 13b, the linear motor movers 12a and 13a are positioned at predetermined positions (see Patent Document 1, for example).

[Patent Document 1]

Japanese Patent Publication No. 2003-9494

However, since the conventional vibration control apparatus uses the linear motor movers 12a and 13a used for positioning, when reacting, the influence of the driving of the linear motor movers 12a and 13a is affected. In this case, sufficient reaction force treatment cannot be performed, and vibration of the structure cannot be sufficiently suppressed. Therefore, there is a problem that positioning cannot be performed with high accuracy. In addition, the conventional vibration control device requires a displacement sensor 16, an acceleration sensor 19, an induction voltage calculator 26, and an integral compensator 25, so that the cost of the vibration control device increases and the device itself There was a problem of getting bigger.

Accordingly, the present invention has been made in view of the above circumstances, and it is possible to perform the reaction processing against the reaction force generated when the movable portion is driven in a simple configuration, sufficiently suppress the vibration of the structure, and perform the positioning of the movable portion with high accuracy. An object of the present invention is to provide a vibration control device.

1 is a schematic diagram of a conventional vibration control device.

2 is a schematic diagram of a vibration control device according to an embodiment of the present invention.

FIG. 3 is a schematic diagram of the reaction force actuator from the I direction shown in FIG. 2.

4 is a view showing the position of the drive stage with respect to the base when the drive stage is driven and stopped.

Explanation of symbols on the main parts of the drawings

10: vibration control device

11: actuator

12, 13: linear motor

12a, 13a: linear motor mover

12b, 13b: Linear Motor Stator

14: connecting plate

15: target

16: displacement sensor

17 drive device

18: bottom plate

19: acceleration sensor

20: controller

21: current amplifier

22: position compensator

24: Gain Compensator

25: integral compensator

26: induction voltage calculator

31: floor

32A, 32B: vibration damping means

33: base

33A, 35A: center of gravity

35 drive stage

35B, 38B: Location

36 support member

37: linear motor stator

38: linear motor mover

41: movable device

42: reaction force actuator

43 control means

44: gain compensator

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, this invention is characterized by taking each means described next.

In a first aspect of the invention, there is provided a vibration control device for suppressing vibration by reaction force generated by driving a movable portion formed on a structure, the reaction force processing means being capable of applying a force to the structure in a direction for canceling the reaction force. And the fixed side of the reaction means is fixed to the floor via a support member, and the structure is engaged with the floor via vibration damping means. have.

According to the above invention, the reaction force treatment can be solved without being influenced by the driving of the movable part by providing the reaction force treatment means capable of applying a force to the structure in the direction of canceling the reaction force.

In the invention of claim 2, the weight of the structure is larger than the weight of the movable portion, and can be solved by the vibration control device according to claim 1.

According to the said invention, by making the weight of a structure larger than the weight of a movable part, the force required in order to cancel reaction force can be produced with small acceleration.

In the invention according to claim 3, the reaction force processing means includes a reaction force processing actuator and a control means, wherein the control means generates a drive signal based only on a driving command, and generates a drive signal to the reaction force processing actuator and the movable part. The vibration control device according to claim 1 or 2 can be solved by outputting the same drive signal to control the reaction force processing actuator and the movable part.

According to the above invention, the control means generates a drive signal only based on a drive command, and outputs the same drive signal to the reaction force actuator and the movable part to perform control, thereby performing control based on a plurality of conventional sensors. The structure of the reaction force processing means can be simplified as compared with the case where there is.

In the invention of the fourth aspect, the first distance in the vertical direction from the first position to which the force is applied when the movable portion is driven to the center of the movable portion is driven, and the reaction force processing actuator is driven from the first position. It is possible to solve the problem by the vibration control device according to claim 3 or 4, wherein the second distance with respect to the vertical direction to the second position to which the force is applied is equalized.

According to the said invention, a 1st position by making the 1st distance with respect to the perpendicular direction from a 1st position to the center of a movable part equal to a 2nd distance with respect to the perpendicular direction from a 1st position to a said 2nd position is made the same. The moment acting on and the moment acting on the second position can be canceled out.

<Example>

Next, embodiments of the present invention will be described with reference to the drawings. FIG. 2 is a schematic diagram of a vibration control device according to an embodiment of the present invention, and FIG. 3 is a schematic diagram of a reaction force actuator from the I direction shown in FIG. The Y1 and Y2 directions shown in FIG. 2 represent the vertical direction, and the X1 and X2 directions represent the directions orthogonal to the Y1 and Y2 directions. With reference to FIG. 2, the structure of the vibration control apparatus 30 which is an Example of this invention is demonstrated. As shown in FIG. 2, the vibration control device 30 is roughly the movable device 41, the support member 36, the reaction force actuator 42, the control means 43, and the gain compensator 44. It is comprised by).

First, with reference to FIG. 2, the structure of the movable apparatus 41 is demonstrated. The movable apparatus 41 is comprised by the damping means 32A, 32B, the base 33, and the drive stage 35 roughly. The base 33 which is a structure is provided with the protrusion part 34, and is fixed on the bottom 31 via the damping means 32A, 32B. The damping means 32A is for damping vibrations in the Y1 and Y2 directions from the bottom, and the damping means 32B is for damping vibrations in the X1 and X2 directions from the floor. The damping means 32A and 32B are passive damping devices having a passive damping function by a combination of a spring and a dash pot. This passive vibration damping device has various forms, such as a combination of a spring and a dash port by a plate-shaped and coil-shaped spring material, or a combination of an air spring and a dash port, and a rubber material alone.

On the base 33, the drive stage 35 which is a movable part provided with the linear motor which is not shown in figure is formed in the state which can move to X1, X2 direction. 35A shown in the same figure shows the position of the center of gravity of the drive stage 35 which is a movable part (hereafter, center 35A), and 35B which is a 1st position is a force at the time of driving the drive stage 35 which is a movable part. This applied position (hereinafter, referred to as position 35B) is shown. In addition, H1 which is the 1st distance shown in the same figure has shown the distance (hence distance H1) with respect to the perpendicular direction (Y1, Y2 direction) from the center 35A to the position 35B.

The reaction force processing means is constituted by the reaction force processing actuator 42, the control means 43, and the gain compensator 44. First, with reference to FIGS. 2-3, the reaction force actuator 42 is demonstrated. In addition, 38B which is the 2nd position shown in the same figure shows the position (hereafter, 38B) to which a force is applied when energizing the coil of the linear motor stator 37 and driving the linear motor mover 38. FIG. In addition, H2 which is a 2nd distance has shown the distance (hence distance H2) with respect to the perpendicular direction from the position 38B to the position 35B. The reaction force processing actuator 42 is comprised by the linear motor stator 37 and the linear motor mover 38 substantially, if it is. When the driving stage 35 is driven, the reaction force processing actuator 42 directly pushes the base 33 in the driving direction to cancel the reaction force generated in the direction opposite to the driving direction to suppress the vibration of the structure. It is for. The linear motor stator 37 is formed on the upper side in FIG. 2 of the support member 36 formed integrally with the bottom 31. The linear motor mover 38 is formed in the linear motor stator 37 in a state capable of being driven with respect to the linear motor stator 37. The linear motor stator 37 and the linear motor mover 38 have a distance H2 with respect to the vertical direction (Y1, Y2 direction) from the position 38B to the position 35B with the distance H1. It is formed at the same position.

In order to cancel the reaction force, the moment (hereinafter referred to as M1) of the drive stage 35 and the moment (hereinafter referred to as M2) of the base 33 may cancel each other. Here, in the configuration in which the distance H2 is equal to the distance H1, the moment (hereinafter, M1) of the drive stage 35 and the moment (hereinafter, hereinafter) of the drive stage 35 when the drive stage 35 is driven. , The relationship between M2) will be described. In addition, 33A shown in FIG. 2 has shown the center of gravity of the base 33 (hereafter, center 33A) of the structure 33, and H3 is the vertical direction Y1, Y2 from the position 35B to the center 33A. Direction (hereinafter, referred to as distance H3). The force acting on the left side in the figure is a positive value, and the force acting on the right side in the figure is a negative value. F1 is a driving force (hereinafter referred to as driving force F1) generated when the driving stage 35 is driven, -F1 is a reaction force (hereinafter referred to as reaction force (-F1)) generated when the driving stage 35 is driven, F2 is The driving force (hereinafter, the driving force for reaction force processing F2) for performing reaction force processing by the reaction force processing actuator 42 is shown.

The moment (hereinafter, M1) of the drive stage 35 is shown in Equation 1 below, and the moment (hereinafter, M2) of the base 33 is shown in Equation 2 below.

Since the driving stage 35 is influenced by the driving force F1 when the driving stage 35 is driven, the moment M1 is expressed by the above expression (1). Since the base 33 is influenced by the reaction force (-F1) generated when the drive stage 35 is driven and the reaction force F2 for reaction force processing by the reaction force actuator 42, the moment M2 is It is represented by Equation 2 above. Since the reaction force driving force F2 applies a force having the same magnitude as the driving force F1 to the base 33, a relationship of F1 = F2 is established. Therefore, by substituting F1 into F2 of Equation 2, Equation 2 can be expressed as Equation 3 below.

In order to react reaction force (-F1), the moment M1 and the moment M2 may mutually cancel each other, and the relationship shown by following formula (4) may be established. That is, when the result of subtracting Equation 2 from Equation 1 is 0, reaction force (-F1) may be reacted.

Substituting Equation 1 and Equation 2 into Equation 4 results in Equation 5 below, and it can be seen that reaction force (-F1) can be reacted when H1 = H2.

Therefore, as described above, the reaction force actuator 42 is formed at a position in the vertical direction (Y1, Y2 direction) such that the relationship of H1 = H2 is established, thereby generating when the drive stage 35 drives. The reaction force (-F1) can be subjected to the reaction force by the reaction force treatment actuator 42.

Equation 6 below is an expression for expressing the force. F is force, m is mass (weight), and a is acceleration.

Also, in general, the weight of the vibration control device 30 base 33 is considerably heavy compared to the weight of the drive stage 35. When F is constant from the above expression (6), the larger the m, the smaller the required acceleration a may be. Therefore, by applying a small acceleration to the base 33, the reaction force processing actuator 42 can perform reaction force processing of reaction force (-F1), and can suppress the vibration of the base 33. FIG.

Next, with reference to FIG. 2, the control means 43 is demonstrated. The control means 43 is connected to the drive stage 35 and the gain compensator 44 in a state capable of outputting the same drive signal. The control means 43 generates a drive signal based only on a drive command, outputs the same drive signal to the reaction force processing actuator 42 and the drive stage 35, and generates the reaction force actuator 42 and the drive stage 35. Is for controlling the driving of The gain compensator 44 is for compensating the drive signal from the control means 43, the compensated drive signal is output to the linear motor stator 37, and the linear motor stator 37 is based on the compensated drive signal. The linear motor mover 38 is driven.

Thus, by providing the control means 43 which generate | occur | produces a drive signal only based on a drive command, the displacement sensor 16, the acceleration sensor 19, and the induction voltage calculator 26 which were necessary in the conventional vibration control apparatus shown in FIG. And the integral compensator 25 are eliminated, so that the structure of the vibration control device 30 can be simplified compared with the conventional vibration control device. Therefore, the size of the vibration control device 30 can be made smaller than that of the conventional vibration control device.

As described above, in the driving direction of the driving stage 35, the reaction force actuator 42 which directly presses the base 33 to perform the reaction process is positioned in the vertical direction (Y1, Y2 direction) where H1 = H2. In this case, the reaction force (-F1) generated when the drive stage 35 is driven is sufficiently influenced by the reaction force actuator 42, thereby sufficiently suppressing the vibration of the structure and driving the reaction force. The positioning of the stage 35 can be performed with high precision.

(Evaluation of vibration)

Next, the evaluation result of the vibration which this inventor performed using the vibration control apparatus 30 is demonstrated. Fig. 4 is a diagram showing the position of the drive stage when the drive stage is driven and stopped with respect to the base. The curve D shown in the figure shows the drive stage 35 when the base 33 is referred to, using the vibration control device 30 in which the difference between the distance H1 and the distance H2 described above is 70 mm. It shows the position of. Curve E shown in the figure shows the position of the drive stage 35 when the base 33 is referred to, using the vibration control device 30 having the same distance H1 and distance H2 as described above. It is shown. 4 denotes a time zone (hereinafter referred to as time zone T1) while the drive stage 35 is being driven, T2 denotes a time (hereinafter referred to as time T2) when the drive stage 35 is stopped, T3 represents the time zone (hereinafter, time zone T3) after the drive stage 35 stops. In addition, the position of the drive stage 35 has shown the advancing direction of the drive stage 35 with a positive value, and has shown the direction opposite to the advancing direction of the drive stage 35 with a negative value.

As shown in FIG. 4, when there is a difference between the distance H1 and the distance H2, in the time zone T3, as shown in the curve D, the position of the driving stage 35 is the base 33. It can be seen that the vibration is generated in the base 33 from the positive or negative value with respect to. On the other hand, in the case of the present embodiment configuration in which the distance H1 and the distance H2 are the same, in the time zone T3, the position of the drive stage 35 as shown by the curve E vibrates with respect to the base 33. You can see that it is positioned at 0 instead. Therefore, it turns out that the vibration of the base 33 is fully suppressed.

From the above evaluation, as described in the previous embodiment, the reaction force actuator 42 which pushes the base 33 directly to perform the reaction force is provided at the position in the vertical direction (Y1, Y2 direction) where H1 = H2. As a result, vibration of the base 33 can be suppressed, and the driving stage 35 can be positioned at a predetermined position with high accuracy.

As mentioned above, although preferred embodiment of this invention was described above, this invention is not limited to this specific embodiment, A various deformation | transformation and a change are possible in the range of the summary of this invention described in a claim. In the present embodiment, the driving stage 35 is described as being movable in the X1 and X2 directions in FIG. 2, but in the same plane as the X1 and X2 directions, the direction perpendicular to the X1 and X2 directions or Y1, The same results as in the present embodiment can be obtained by using the reaction force processing means described in this embodiment in the vibration control device having the drive stage driving in the Y2 direction. The reaction force actuator 42 is not limited to the linear motor, and a mechanism using an air pressure or hydraulic ring or other motor may be used.

According to the invention of claim 1, by providing a reaction force processing means capable of applying a force to the structure in the direction of canceling reaction force, reaction force processing can be performed without being influenced by the driving of the movable portion.

According to the invention of Claim 2, by making the weight of a structure larger than the weight of a movable part, the force required in order to cancel reaction force can be produced with a small acceleration.

According to the invention of claim 3, the control means generates a drive signal only based on a drive command, and outputs the same drive signal to the reaction force actuator and the movable part to perform control. Compared to the case where control is performed, the structure of the reaction force processing means can be simplified.

According to the invention of claim 4, by making the first distance in the vertical direction from the first position to the center of the movable part equal to the second distance in the vertical direction from the first position to the second position, The moment acting at the first position and the moment acting at the second position can be canceled.

Claims (4)

A vibration control device for suppressing vibration by reaction force generated by driving a movable portion formed on a structure, A reaction force processing means capable of applying a force to the structure in a direction of canceling the reaction force, The fixed side of the reaction means is fixed to the floor via a supporting member, And said structure is engaged with the floor via vibration damping means. The method of claim 1, The weight of the said structure is larger than the weight of a movable part, The vibration control apparatus characterized by the above-mentioned. The method according to claim 1 or 2, The reaction force processing means includes a reaction force processing actuator and a control means, The control means generates a drive signal based only on a drive command, And the same reaction signal is output to the reaction force actuator and the movable part to control the reaction force actuator and the movable part. The method of claim 3, A first distance in a vertical direction from a first position to which a force is applied when the movable portion is driven to a center of the movable portion, And a second distance in the vertical direction from the first position to a second position to which a force is applied when the reaction force actuator is driven.