TW200501185A - Fluid-based switches and methods for producing the same - Google Patents

Fluid-based switches and methods for producing the same

Info

Publication number
TW200501185A
TW200501185A TW092135810A TW92135810A TW200501185A TW 200501185 A TW200501185 A TW 200501185A TW 092135810 A TW092135810 A TW 092135810A TW 92135810 A TW92135810 A TW 92135810A TW 200501185 A TW200501185 A TW 200501185A
Authority
TW
Taiwan
Prior art keywords
substrate
fluid
producing
depositing
methods
Prior art date
Application number
TW092135810A
Other languages
English (en)
Chinese (zh)
Inventor
Marvin-Glenn Wong
Paul Carson
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of TW200501185A publication Critical patent/TW200501185A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Manufacture Of Switches (AREA)
  • Contacts (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
TW092135810A 2003-06-16 2003-12-17 Fluid-based switches and methods for producing the same TW200501185A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/462,472 US6759611B1 (en) 2003-06-16 2003-06-16 Fluid-based switches and methods for producing the same

Publications (1)

Publication Number Publication Date
TW200501185A true TW200501185A (en) 2005-01-01

Family

ID=32595400

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092135810A TW200501185A (en) 2003-06-16 2003-12-17 Fluid-based switches and methods for producing the same

Country Status (4)

Country Link
US (1) US6759611B1 (enExample)
JP (1) JP2005011807A (enExample)
SG (1) SG146430A1 (enExample)
TW (1) TW200501185A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004079288A (ja) * 2002-08-13 2004-03-11 Agilent Technol Inc 液体金属を用いた電気接点開閉装置
US6884951B1 (en) 2003-10-29 2005-04-26 Agilent Technologies, Inc. Fluid-based switches and methods for manufacturing and sealing fluid-based switches
US7449649B2 (en) * 2006-05-23 2008-11-11 Lucent Technologies Inc. Liquid switch

Family Cites Families (84)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2312672A (en) 1941-05-09 1943-03-02 Bell Telephone Labor Inc Switching device
US2564081A (en) 1946-05-23 1951-08-14 Babson Bros Co Mercury switch
GB1143822A (enExample) 1965-08-20
DE1614671B2 (de) 1967-12-04 1971-09-30 Siemens AG, 1000 Berlin u. 8000 München Lageunabhaengiges quecksilberrelais
US3639165A (en) 1968-06-20 1972-02-01 Gen Electric Resistor thin films formed by low-pressure deposition of molybdenum and tungsten
US3600537A (en) 1969-04-15 1971-08-17 Mechanical Enterprises Inc Switch
US3657647A (en) 1970-02-10 1972-04-18 Curtis Instr Variable bore mercury microcoulometer
US3955059A (en) * 1974-08-30 1976-05-04 Graf Ronald E Electrostatic switch
US4103135A (en) 1976-07-01 1978-07-25 International Business Machines Corporation Gas operated switches
FR2392485A1 (fr) 1977-05-27 1978-12-22 Orega Circuits & Commutation Interrupteur a contacts mouilles, et a commande magnetique
SU714533A2 (ru) 1977-09-06 1980-02-05 Московский Ордена Трудового Красного Знамени Инженерно-Физический Институт Переключающее устройство
FR2418539A1 (fr) 1978-02-24 1979-09-21 Orega Circuits & Commutation Commutateur a contact liquide
FR2458138A1 (fr) 1979-06-01 1980-12-26 Socapex Relais a contacts mouilles et circuit plan comportant un tel relais
US4419650A (en) 1979-08-23 1983-12-06 Georgina Chrystall Hirtle Liquid contact relay incorporating gas-containing finely reticular solid motor element for moving conductive liquid
US4245886A (en) 1979-09-10 1981-01-20 International Business Machines Corporation Fiber optics light switch
US4336570A (en) 1980-05-09 1982-06-22 Gte Products Corporation Radiation switch for photoflash unit
DE8016981U1 (de) 1980-06-26 1980-11-06 W. Guenther Gmbh, 8500 Nuernberg Quecksilber-Elektrodenschalter
DE3138968A1 (de) 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Optische steuervorrichtung zum steuern der in einem optischen wellenleiter gefuehrten strahlung, insbesondere optischer schalter
DE3206919A1 (de) 1982-02-26 1983-09-15 Philips Patentverwaltung Gmbh, 2000 Hamburg Vorrichtung zum optischen trennen und verbinden von lichtleitern
US4475033A (en) 1982-03-08 1984-10-02 Northern Telecom Limited Positioning device for optical system element
FR2524658A1 (fr) 1982-03-30 1983-10-07 Socapex Commutateur optique et matrice de commutation comprenant de tels commutateurs
US4628161A (en) 1985-05-15 1986-12-09 Thackrey James D Distorted-pool mercury switch
GB8513542D0 (en) 1985-05-29 1985-07-03 Gen Electric Co Plc Fibre optic coupler
US4652710A (en) 1986-04-09 1987-03-24 The United States Of America As Represented By The United States Department Of Energy Mercury switch with non-wettable electrodes
JPS62276838A (ja) 1986-05-26 1987-12-01 Hitachi Ltd 半導体装置
US4742263A (en) 1986-08-15 1988-05-03 Pacific Bell Piezoelectric switch
US4804932A (en) 1986-08-22 1989-02-14 Nec Corporation Mercury wetted contact switch
JPS63294317A (ja) 1987-01-26 1988-12-01 Shimizu Tekkosho:Goushi ボデイシ−ル機
US4797519A (en) 1987-04-17 1989-01-10 Elenbaas George H Mercury tilt switch and method of manufacture
US5278012A (en) 1989-03-29 1994-01-11 Hitachi, Ltd. Method for producing thin film multilayer substrate, and method and apparatus for detecting circuit conductor pattern of the substrate
US4988157A (en) 1990-03-08 1991-01-29 Bell Communications Research, Inc. Optical switch using bubbles
FR2667396A1 (fr) 1990-09-27 1992-04-03 Inst Nat Sante Rech Med Capteur pour mesure de pression en milieu liquide.
US5415026A (en) 1992-02-27 1995-05-16 Ford; David Vibration warning device including mercury wetted reed gauge switches
EP0593836B1 (en) 1992-10-22 1997-07-16 International Business Machines Corporation Near-field photon tunnelling devices
US5972737A (en) 1993-04-14 1999-10-26 Frank J. Polese Heat-dissipating package for microcircuit devices and process for manufacture
US5886407A (en) 1993-04-14 1999-03-23 Frank J. Polese Heat-dissipating package for microcircuit devices
GB9309327D0 (en) 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
JP2682392B2 (ja) 1993-09-01 1997-11-26 日本電気株式会社 薄膜キャパシタおよびその製造方法
GB9403122D0 (en) 1994-02-18 1994-04-06 Univ Southampton Acousto-optic device
JPH08125487A (ja) 1994-06-21 1996-05-17 Kinseki Ltd 圧電振動子
FI110727B (fi) 1994-06-23 2003-03-14 Vaisala Oyj Sähköisesti moduloitava terminen säteilylähde
JP3182301B2 (ja) 1994-11-07 2001-07-03 キヤノン株式会社 マイクロ構造体及びその形成法
US5675310A (en) 1994-12-05 1997-10-07 General Electric Company Thin film resistors on organic surfaces
US5502781A (en) 1995-01-25 1996-03-26 At&T Corp. Integrated optical devices utilizing magnetostrictively, electrostrictively or photostrictively induced stress
WO1996030916A2 (en) 1995-03-27 1996-10-03 Philips Electronics N.V. Method of manufacturing an electronic multilayer component
DE69603664T2 (de) 1995-05-30 2000-03-16 Motorola, Inc. Hybrid-Multichip-Modul und Verfahren zur seiner Herstellung
US5751074A (en) 1995-09-08 1998-05-12 Edward B. Prior & Associates Non-metallic liquid tilt switch and circuitry
US5732168A (en) 1995-10-31 1998-03-24 Hewlett Packard Company Thermal optical switches for light
KR0174871B1 (ko) 1995-12-13 1999-02-01 양승택 랫칭형 열구동 마이크로 릴레이 소자
US6023408A (en) 1996-04-09 2000-02-08 The Board Of Trustees Of The University Of Arkansas Floating plate capacitor with extremely wide band low impedance
JP2817717B2 (ja) 1996-07-25 1998-10-30 日本電気株式会社 半導体装置およびその製造方法
US5874770A (en) 1996-10-10 1999-02-23 General Electric Company Flexible interconnect film including resistor and capacitor layers
US5841686A (en) 1996-11-22 1998-11-24 Ma Laboratories, Inc. Dual-bank memory module with shared capacitors and R-C elements integrated into the module substrate
GB2321114B (en) 1997-01-10 2001-02-21 Lasor Ltd An optical modulator
US6180873B1 (en) 1997-10-02 2001-01-30 Polaron Engineering Limited Current conducting devices employing mesoscopically conductive liquids
TW405129B (en) 1997-12-19 2000-09-11 Koninkl Philips Electronics Nv Thin-film component
US6021048A (en) 1998-02-17 2000-02-01 Smith; Gary W. High speed memory module
US6351579B1 (en) 1998-02-27 2002-02-26 The Regents Of The University Of California Optical fiber switch
AU3409699A (en) 1998-03-09 1999-09-27 Bartels Mikrotechnik Gmbh Optical switch and modular switch system consisting of optical switching elements
US6207234B1 (en) 1998-06-24 2001-03-27 Vishay Vitramon Incorporated Via formation for multilayer inductive devices and other devices
US6212308B1 (en) 1998-08-03 2001-04-03 Agilent Technologies Inc. Thermal optical switches for light
US5912606A (en) 1998-08-18 1999-06-15 Northrop Grumman Corporation Mercury wetted switch
US6323447B1 (en) 1998-12-30 2001-11-27 Agilent Technologies, Inc. Electrical contact breaker switch, integrated electrical contact breaker switch, and electrical contact switching method
EP1050773A1 (en) 1999-05-04 2000-11-08 Corning Incorporated Piezoelectric optical switch device
US6373356B1 (en) 1999-05-21 2002-04-16 Interscience, Inc. Microelectromechanical liquid metal current carrying system, apparatus and method
US6396012B1 (en) 1999-06-14 2002-05-28 Rodger E. Bloomfield Attitude sensing electrical switch
US6304450B1 (en) 1999-07-15 2001-10-16 Incep Technologies, Inc. Inter-circuit encapsulated packaging
US6487333B2 (en) 1999-12-22 2002-11-26 Agilent Technologies, Inc. Total internal reflection optical switch
US6320994B1 (en) 1999-12-22 2001-11-20 Agilent Technolgies, Inc. Total internal reflection optical switch
CA2399096C (en) 2000-02-02 2011-10-11 Raytheon Company Microelectromechanical micro-relay with liquid metal contacts
US6356679B1 (en) 2000-03-30 2002-03-12 K2 Optronics, Inc. Optical routing element for use in fiber optic systems
US6446317B1 (en) 2000-03-31 2002-09-10 Intel Corporation Hybrid capacitor and method of fabrication therefor
NL1015131C1 (nl) 2000-04-16 2001-10-19 Tmp Total Micro Products B V Inrichting en werkwijze voor het schakelen van elektromagnetische signalen of bundels.
US6470106B2 (en) 2001-01-05 2002-10-22 Hewlett-Packard Company Thermally induced pressure pulse operated bi-stable optical switch
JP2002207181A (ja) 2001-01-09 2002-07-26 Minolta Co Ltd 光スイッチ
US6490384B2 (en) 2001-04-04 2002-12-03 Yoon-Joong Yong Light modulating system using deformable mirror arrays
JP4420581B2 (ja) 2001-05-09 2010-02-24 三菱電機株式会社 光スイッチおよび光導波路装置
US6647165B2 (en) * 2001-05-31 2003-11-11 Agilent Technologies, Inc. Total internal reflection optical switch utilizing a moving droplet
US20030035611A1 (en) 2001-08-15 2003-02-20 Youchun Shi Piezoelectric-optic switch and method of fabrication
US6512322B1 (en) 2001-10-31 2003-01-28 Agilent Technologies, Inc. Longitudinal piezoelectric latching relay
US6515404B1 (en) 2002-02-14 2003-02-04 Agilent Technologies, Inc. Bending piezoelectrically actuated liquid metal switch
US6633213B1 (en) 2002-04-24 2003-10-14 Agilent Technologies, Inc. Double sided liquid metal micro switch
US6646527B1 (en) * 2002-04-30 2003-11-11 Agilent Technologies, Inc. High frequency attenuator using liquid metal micro switches
US6559420B1 (en) 2002-07-10 2003-05-06 Agilent Technologies, Inc. Micro-switch heater with varying gas sub-channel cross-section

Also Published As

Publication number Publication date
US6759611B1 (en) 2004-07-06
JP2005011807A (ja) 2005-01-13
SG146430A1 (en) 2008-10-30

Similar Documents

Publication Publication Date Title
WO2006138457A3 (en) Isolating chip-to-chip contact
AU2002243735A1 (en) High performance silicon contact for flip chip
WO2003041133A3 (en) Electrothermal self-latching mems switch and method
TWI264756B (en) Semiconductor device
AU2001253142A1 (en) High speed flip chip assembly process
TW200739773A (en) Mounting method
WO2003083912A3 (en) Field-assisted fusion bonding
AU2003219723A1 (en) Method and apparatus for bond management according to hierarchy
AU2002368540A1 (en) Methods for forming tunable molecular gradients on substrates
SG117453A1 (en) Semiconductor circuit module and method for fabricating semiconductor circuit modules
MY140283A (en) Self-healing liquid contact switch
WO2007062279A3 (en) Pin clamp accessories
WO2003073773A3 (en) Mobile handoff between hybrid networks
MY136286A (en) Bump style mems switch
SG146430A1 (en) Fluid-based switches and methods for producing the same
WO2005015594A3 (fr) Commutateur micro-mecanique bistable, methode d’actionnement et procede de realisation correspondant
TW200629155A (en) Methods for manufacturing a sensor assembly
EP1513175A3 (de) Kippschalter und Verfahren zur Herstellung eines zweistufigen Kippschalters
WO2004095484A3 (en) Reducing oxides in a fluid-based switch
TW560622U (en) Display device, device provided with at least one flexible substrate, and method of mutually coupling layers
MY121477A (en) Spacer and parts attachment device.
TW200506992A (en) Gettering agent and method to prevent corrosion in a fluid switch
TW200504776A (en) Preventing corrosion degradation in a fluid-based switch
TW200702930A (en) Pattern forming material, pattern forming device and method for producing pattern
TW200705492A (en) Reduction of oxides in a fluid-based switch