(1) (1)200304543 玖、發明說明 【發明所屬之技術領域】 本發明爲用來檢查形成於帶（tape )表面之圖型的外 觀檢查裝置，特別是與利用TAB ( Tape Automated Bonding)方式形成之積體電路的輸出入端子（引線）形 成連接之膠膜帶上所設置的圖型。 【先前技術】 有鑑於高積體化與高密度安裝化的要求，半導體裝置 已朝引線多針化及微小化的方向發展。爲了有助於多針化 及微小化的發展，乃大量採用與設置於膠膜帶上之半導體 晶片的複數引線形成連接的TAB帶子。 通常，TAB帶子是在聚酯薄膜等絕緣性薄膜基板上設 置由銅箔所形成的導電性薄膜，該導電性薄膜在利用光刻 蝕法形成圖型化後，形成薄膜電路基板的引線，使該引線 與半導體晶片形成接著。 在形成多針化之TAB方式的1C中，其連接部的可靠 度極重要，故將半導體晶片接著於TAB帶子的引線之前 ，必須對引線進行外觀檢查以確認是否產生撓曲或彎折等 現象。 第6圖的內容是顯示習知外觀檢查裝置之其中一例。 在該外觀檢查裝置中，T AB帶子是由驅動滾子以間歇 性的方式運送到檢測台上。雖然在該圖中並未繪出，但該 檢測台預先設有用來吸附保持被運送之TAB帶子的真空 吸著機構，被吸附保持之TAB帶子的表面則利用具備 -5- (2) (2)200304543 CCD相機的攝影裝置加以拍攝，接著利用影像處理裝置對 所拍攝之引線圖型的外觀影像資訊進行影像處理，以進行 引線圖型是否有缺陷的檢查。 [發明欲解決之課題] 但是，在上述習知技術的外觀檢查裝置中，當利用攝 影裝置對TAB帶子上的引線圖型進行拍攝之際，每一次 將TAB吸附保持於檢測台時，導致TAB帶子形成靜止的 狀態。使TAB帶子靜止後再進行檢查的做法，雖然可以 高倍率進行高精密度的檢查，相反地卻導致產量的惡化， 造成每一次運送損失大約3秒的間歇時間。 相反地，倘若爲了加速檢查的進行而在運送的狀態下 進行檢查，縮短檢查時間的結果將產生以下的問題。 在運送的過程中，TAB帶子會因爲振動產生上下的晃 動。基本上，當利用攝影裝置對TAB帶子上的引線進行 拍攝時，必須將TAB帶子上欲進行檢查之部分的平面控 制在指定的位置。一旦TAB帶子因爲振動所引發的上下 晃動導致欲檢查的平面偏離了指定的位置，將使TAB帶 子偏離拍攝時的對焦位置，以致所拍攝的外觀影像模糊， 無法進行後續的影像處理。 爲了防止TAB帶子的上下晃動，設置了平面檢測台 ，雖然該檢測台可供TAB帶子在其上方運行，但在這種 狀態下TAB帶子的背面將與檢測台的表面產生摩擦，引 發TAB帶子背面受損的問題產生。 有鑑於上述習知技術的種種問題，本發明的目的乃是 -6- (3) (3)200304543 提供一種：可控制檢查過程中TAB帶子平面位置，並可 在TAB帶子的運送過程中，不會引發TAB帶子背面與檢 測台間的摩擦地，於運送的狀態下快速地對引線圖型進行 外觀檢查的外觀檢查裝置。 【發明內容】 爲解決上述的問題，本發明採取以下的手段。 第1手段，是將形成有圖型的帶保持於檢測台上，利 用攝影裝置對被保持的帶子表面進行拍攝，再藉由影像處 理裝置對所拍攝的影像進行影像處理後，以檢查形成於帶 子上的圖型是否有缺陷的外觀檢查裝置，其特徵爲：上述 檢測台呈圓筒狀，是由在其內部的局部備有減壓室，其側 邊的表面備有複數個真空吸著孔，並以其底面的中心軸作 爲旋轉軸產生旋轉的滾筒所形成，藉由透過前述真空吸著 孔傳遞前述減壓室與前述減壓室外的壓力差，可將前述的 帶子吸著保持於前述的側邊表面，並且使前述滾筒隨著帶 子的運送進行旋轉，再由前述的攝影裝置對吸附於前述側 邊表面的帶子表面進行拍攝。 【實施方式】 接下來，以第1〜5圖說明本發明的其中一種實施形態 〇 第1圖是本發明之外觀檢查裝置的結構圖。 在該圖中，1是由欲進行引線圖型之外觀檢查的TAB 帶子等所構成的帶子，2是可同時吸著保持帶子1並產生 (4) (4)200304543 旋轉以進行運送的檢測台，3是對吸著保持於檢測台2且 處於運送狀態下之引線圖型進行拍攝的攝影裝置’ 4則是 在對所拍攝之影像資訊進行影像處理後檢查引線圖型是否 有缺陷的影像資訊處理裝置。 在此，攝影裝置3是由：成像透鏡3 1 ;及用來偵測 帶子1之影像資訊，本身具備影像資訊偵測用CCD感應 器等的影像資訊處理裝置32。而影像資訊處理裝置4則 是由：預先記憶帶子1之標準引線圖型的標準引線圖型記 憶裝置4 1 ;對由影像資訊偵測裝置3 2所測得之帶子1的 引線圖型與記憶於標準引線記憶裝置41之標準引線圖型 進行比較，以判斷引線圖型是否有缺陷的影像資訊比較裝 置42 ;及記憶判定結果的影像資訊記憶裝置43所構成。 其次，利用第2〜4圖來對可一邊吸著保持帶子1，一 邊進行運送的檢測台2作詳細的說明。 第2、3圖分別是第1圖中檢測台2放大後的剖面正 視圖及剖面側視圖，第4圖則是第1圖中檢測台2的斜視 圖。 如上述圖面所示地，檢測台2是由圓筒形的旋轉滾筒 5所形成’該旋轉滾筒5具有側邊表面部5 1及底面部5 2 ，且其內部形成空洞狀。 底面部5 2如第3圖所示地，是使用磁屏嵌入側邊表 面部51的兩側開口部，側邊表面部1可面對底面部5 2形 成獨立旋轉’且旋轉滾筒5的內部係保持氣密狀態。此外 ’亦可使用拽漏量極低的精密軸承來取代磁屏。 在旋轉滾筒5的側邊表面部51處，以節距3Omm的 -8- (5) (5)200304543 間隔設有複數個孔徑0 · 1 m m左右的微孔1 1。 如第4圖所示，減壓室9是由與帶子1形成接觸之側 邊表面部5 1的局部、和底面部5 2的局部及剖面略呈v型 或U型之減壓室壁91包圍的空間所形成。該減壓室9， 是透過連接於減壓室壁91的真空配管1〇與真空系統或者 排氣鼓風機等形成連接後，保持長時間的減壓狀態。 旋轉滾筒5的側邊表面部5 1，是以圓板狀之底面部 5 2的圓心作爲旋轉中心，並藉由組裝於馬達的旋轉滾子6 形成只有側邊表面部5 1旋轉的構造。由於底面部5 2不會 旋轉，故真空配管10不會產生扭曲現象。 此外，上述減壓室9是形成：即使旋轉滾筒5的側邊 表面部5 1旋轉，也不會改變減壓室9之位置的結構。 帶子1雖然是由運送導引滾子7所運送，但是以不會 產生皺折及鬆弛程度的張力繞掛於運送導引滾子7與制動 滾子8之間。 當帶子1被運送到位於旋轉滾筒5之減壓室9側邊表 面部51的頂端附近時，由於側邊表面部51之頂端外側與 減壓室9之間的壓力差，將使帶子1被吸著保持於設在側 邊表面部51的微孔11，並朝運送方向運送。 當帶子1脫離形成減壓室9之側邊表面部5 1的範圍 時，帶子1將由被吸著保持於側邊表面部51的狀態下被 釋放並繼續進行運送。 如第1圖所示地，攝影裝置3是配置於側邊表面部 5 1頂端正上方的位置，而帶子1是在被吸著保持於旋轉 滾筒5之側邊表面部5 1的狀態下’由攝影裝置3進行拍 -9- (6) (6)200304543 攝。 接下來’採用第5圖來說明旋轉滾筒5之側邊表面部 51於運送方向上的真直度。 當帶子1被吸著保持於側邊表面部51時，側邊表面 部5 1上可供攝影裝置3對帶子1的引線圖型進行拍攝之 部分的平坦度，有必要加工至攝影裝置3的對焦深度範圍 內。 舉例來說，當攝影裝置3中採用一般的C CD感應器 作爲攝影元件時，如該圖所示，將攝影元件的偵測位置的 偏移値設爲± 1 mm，而偵測位置也形成± 1 mm的偏移的狀 況下，欲使帶子1的表面位置落入攝影元件之1 0 // m的對 焦深度範圍內時，旋轉滾筒5的半徑r則成爲100mm。而 在外觀檢查裝置內的檢查部份中設置上述半徑100mm大 小的旋轉滾筒5的做法是沒問題的。 〔發明的效果〕 根據申請專利範圍第丨項，由於檢測台呈圓筒狀，是 由在其內部的局部備有減壓室，其側邊的表面備有複數個 真空吸著孔，並以其底面的中心軸作爲旋轉軸產生旋轉的 滾筒所形成，藉由透過真空吸著孔傳遞減壓室與減壓室外 的壓力差，可將帶子吸著保持於前述的側邊表面，並且使 滾筒隨著帶子的運送產生旋轉，再由的攝影裝置對吸附於 側邊表面的帶子表面進行拍攝，且帶子的平面位置是由圓 筒形表面的真直度所限制，因此，由攝影裝置所拍攝的外 觀影像不會產生模糊的現象，可防止因影像模糊導致無法 -10 - (7) 200304543 進行影像處理的問題產生。 此外，由於旋轉滾筒隨著帶子的運送產 帶子的背面不會與旋轉滾筒的表面形成摩擦 上的引線圖型產生破損。 其次，由於可在連續運送的狀態下進行 可以縮短檢查所需的時間。 再者，因爲運送的緣故使帶子產生移動 不須在帶子的運送方向上進行掃描，因此， 產生移動的裝置中，不需具備朝帶子運送方 【圖式簡單說明】 第1圖：本發明之外觀檢查裝置的結構 第2圖：第1圖中檢測台2放大後的剖 第3圖：第1圖中檢測台2放大後的剖 第4圖：第1圖中檢測台2的斜視圖。 第5圖：滾筒5之側邊表面部51搬運 說明圖。 第6圖：外觀檢查裝置之習知技術的其 【圖號說明】 1 : TAB帶子之類的帶子 2 :檢測台 3 :攝影裝置 31 :成像透鏡 生旋轉，所以 ，可防止帶子 檢查，因此， ，故攝影裝置 在使攝影裝置 向移動的手段 圖。 面正視圖。 面側視圖。。 方向的真直度 中一例。 -11 - (8) :影像資訊偵測裝置 :影像資訊處理裝置 :標準影像資訊記憶裝置 :影像資訊比較裝置 :影像資訊記憶裝置 :滾筒 :側邊表面部 :底面部 :馬達•旋轉滾子 :運送導引滾子 :制動滾子 :減壓室 :減壓室壁 :真空配管 :微孔 -12-(1) (1) 200304543 发明 Description of the invention [Technical field to which the invention belongs] The present invention is an appearance inspection device for inspecting patterns formed on a tape surface, and is particularly related to the use of TAB (Tape Automated Bonding) method. The input and output terminals (leads) of the formed integrated circuit form a pattern set on the connected adhesive film tape. [Prior art] In view of the requirements of high integration and high-density mounting, semiconductor devices have been developed in the direction of multi-pin and miniaturization of leads. In order to facilitate the development of multi-pin and miniaturization, a large number of TAB tapes are used to form a plurality of leads connected to a semiconductor wafer provided on an adhesive tape. Generally, a TAB tape is a conductive film formed of a copper foil on an insulating film substrate such as a polyester film. After the conductive film is patterned by a photolithography method, a lead of a thin film circuit board is formed, This lead is formed on the semiconductor wafer. In the 1C of the multi-needle TAB method, the reliability of the connection part is extremely important. Therefore, before the semiconductor wafer is connected to the TAB tape lead, the lead must be visually inspected to confirm whether there is a phenomenon such as bending or bending. . FIG. 6 shows an example of a conventional appearance inspection device. In this visual inspection device, the TAB tape is intermittently transported to the inspection table by a driving roller. Although it is not shown in the figure, the detection table is provided with a vacuum suction mechanism for sucking and holding the TAB tape being transported in advance. The surface of the TAB tape being sucked and held is provided with -5- (2) (2 ) 200304543 CCD camera to take a picture, and then use the image processing device to image processing the appearance of the lead pattern captured image information to check whether the lead pattern is defective. [Problems to be Solved by the Invention] However, in the conventional appearance inspection device of the prior art, when the lead pattern on the TAB tape is photographed with a photographing device, each time TAB is adsorbed and held on the inspection table, it results in TAB. The straps form a stationary state. The method of inspecting the TAB tape after it is stationary, although high-precision inspection can be performed at a high magnification, on the contrary, it results in deterioration of the yield, resulting in an intermittent time of about 3 seconds per transport loss. On the contrary, if the inspection is carried out in a state of being transported in order to speed up the inspection, the following problems will occur as a result of shortening the inspection time. During the transportation process, the TAB belt will shake up and down due to vibration. Basically, when the lead of the TAB tape is photographed by a photographing device, the plane of the part to be inspected on the TAB tape must be controlled at a specified position. Once the TAB tape is shaken up and down due to vibration, the plane to be inspected deviates from the specified position, the TAB tape will deviate from the focus position at the time of shooting, so that the appearance of the captured image is blurred, and subsequent image processing cannot be performed. In order to prevent the TAB tape from swaying up and down, a flat inspection table is provided. Although the inspection table can be used for the TAB tape to run above it, in this state, the back of the TAB tape will rub against the surface of the inspection table, causing the back of the TAB tape. Damage issues arise. In view of the various problems of the above-mentioned conventional technologies, the object of the present invention is to provide a method for controlling the plane position of the TAB tape during the inspection process, and during the transportation process of the TAB tape. Appearance inspection device that can cause friction between the back of the TAB tape and the inspection table to quickly perform an appearance inspection of the lead pattern while being transported. SUMMARY OF THE INVENTION In order to solve the above problems, the present invention takes the following measures. The first means is to hold the patterned belt on the inspection table, use an imaging device to photograph the surface of the held belt, and then perform image processing on the captured image by an image processing device to check the formation of the The appearance inspection device for whether the pattern on the belt is defective is characterized in that the above-mentioned inspection table is cylindrical, and a decompression chamber is partially provided in the inside of the inspection table, and a plurality of vacuum suctions are provided on the surface of the side. The hole is formed by a drum that rotates with the central axis of the bottom surface as a rotation axis. By transmitting the pressure difference between the decompression chamber and the decompression chamber through the vacuum suction hole, the tape can be sucked and held at The side surface is rotated, and the drum is rotated as the belt is conveyed, and the belt surface adsorbed on the side surface is photographed by the photographing device. [Embodiment] Next, one embodiment of the present invention will be described with reference to Figs. 1 to 5. Fig. 1 is a configuration diagram of an appearance inspection device of the present invention. In the figure, 1 is a tape composed of a TAB tape or the like for visual inspection of a lead pattern, and 2 is a testing table capable of holding and holding the tape 1 at the same time and generating (4) (4) 200304543 rotation for transportation 3 is a photographing device for photographing the lead pattern sucked and held on the inspection table 2 and in a transport state. 4 is image information for checking whether the lead pattern is defective after image processing of the captured image information Processing device. Here, the photographing device 3 is composed of: an imaging lens 3 1; and an image information processing device 32 such as a CCD sensor for image information detection for detecting image information of the tape 1 itself. The image information processing device 4 is composed of: a standard lead pattern memory device 4 1 that memorizes the standard lead pattern of the tape 1 in advance; and a lead pattern and memory of the tape 1 measured by the image information detection device 32 The standard lead pattern of the standard lead memory device 41 is compared to form an image information comparison device 42 for determining whether the lead pattern is defective; and an image information memory device 43 for storing the determination result. Next, a detailed description will be given of the inspection table 2 that can be transported while holding the holding tape 1 while using the drawings 2 to 4. Figs. 2 and 3 are an enlarged sectional front view and a sectional side view of the inspection table 2 in Fig. 1, respectively, and Fig. 4 is a perspective view of the inspection table 2 in Fig. 1. As shown in the above figure, the detection table 2 is formed by a cylindrical rotating drum 5 'which has a side surface portion 51 and a bottom surface portion 5 2 and has a hollow shape inside. As shown in FIG. 3, the bottom surface portion 52 is embedded in the openings on both sides of the side surface portion 51 using a magnetic screen, and the side surface portion 1 can face the bottom surface portion 5 to form independent rotation 'and the inside of the rotating drum 5 Keep airtight. In addition, it is also possible to use a precision bearing with extremely low drag to replace the magnetic screen. At the side surface portion 51 of the rotating drum 5, a plurality of micro holes 11 having a diameter of about 0 · 1 mm are provided at intervals of -8- (5) (5) 200304543 with a pitch of 30 mm. As shown in FIG. 4, the decompression chamber 9 is a decompression chamber wall 91 having a v-shaped or U-shaped section with a part and a section of the bottom surface part 52 that are in contact with the side surface portion 51 that comes into contact with the belt 1. Surrounded by space. The decompression chamber 9 is maintained in a decompressed state for a long time after being connected to a vacuum system or an exhaust blower through a vacuum pipe 10 connected to the decompression chamber wall 91. The side surface portion 51 of the rotary drum 5 has a center of rotation of a circular plate-shaped bottom surface portion 52 as a center of rotation, and a structure in which only the side surface portion 51 is rotated by a rotation roller 6 assembled to a motor. Since the bottom surface portion 52 does not rotate, the vacuum pipe 10 is not twisted. In addition, the above-mentioned decompression chamber 9 has a structure in which the position of the decompression chamber 9 is not changed even if the side surface portion 51 of the rotary drum 5 is rotated. Although the belt 1 is transported by the transport guide roller 7, it is hung between the transport guide roller 7 and the brake roller 8 with tension that does not cause wrinkles and slack. When the belt 1 is transported near the top end of the side surface portion 51 of the decompression chamber 9 of the rotating drum 5, the pressure difference between the outer side of the top surface of the side surface portion 51 and the decompression chamber 9 will cause the belt 1 to be The micropores 11 provided in the side surface portion 51 are held by suction, and are transported in the transport direction. When the belt 1 is out of the range of the side surface portion 51 forming the decompression chamber 9, the belt 1 is released while being held on the side surface portion 51 by suction, and the transportation is continued. As shown in FIG. 1, the photographing device 3 is disposed directly above the top end of the side surface portion 51, and the belt 1 is held in a state of being sucked and held on the side surface portion 51 of the rotary drum 5 ′ Taken by camera 3-9- (6) (6) 200304543. Next, the straightness of the side surface portion 51 of the rotary drum 5 in the conveying direction will be described with reference to Fig. 5. When the tape 1 is held on the side surface portion 51 by suction, the flatness of the portion of the side surface portion 51 where the photographing device 3 can photograph the lead pattern of the tape 1 needs to be processed to the Focus depth range. For example, when a general C CD sensor is used as a photographing element in the photographing device 3, as shown in the figure, the offset 的 of the detection position of the photographing element is set to ± 1 mm, and the detection position is also formed. When the position of the surface of the belt 1 falls within the focus depth range of 1 0 // m of the photographic element under the deviation of ± 1 mm, the radius r of the rotating drum 5 becomes 100 mm. It is not a problem to provide the rotating drum 5 having a radius of 100 mm in the inspection portion in the visual inspection device. [Effects of the invention] According to item 丨 of the scope of the patent application, since the detection table is cylindrical, a decompression chamber is partially provided in the inside, and a plurality of vacuum suction holes are provided on the surface of the side, and The central axis of the bottom surface is formed as a rotating drum that rotates. By transmitting the pressure difference between the decompression chamber and the decompression chamber through the vacuum suction hole, the tape can be sucked and held on the side surface and the drum can be held. With the rotation of the belt, the photographing device photographs the surface of the tape that is adsorbed on the side surface, and the plane position of the tape is limited by the straightness of the cylindrical surface. Therefore, the photographing by the photographing device The appearance of the image will not be blurred, which can prevent the problem that the image cannot be processed due to image blur. -10-(7) 200304543 In addition, since the rotary drum is produced as the tape is transported, the back surface of the tape does not rub against the surface of the rotary drum, and the lead pattern is not damaged. Second, because it can be carried out continuously, the time required for inspection can be shortened. In addition, because the belt is moved due to transportation, it is not necessary to scan in the belt's transportation direction. Therefore, the device that generates the movement does not need to be transported toward the belt. [Simplified illustration of the drawing] FIG. Structure of the visual inspection device Fig. 2: Enlarged section of the inspection table 2 in Fig. 1 Fig. 3: Enlarged section of the inspection table 2 in Fig. 1 Fig. 4: An oblique view of the inspection table 2 in Fig. 1 Fig. 5 is an explanatory diagram of the side surface portion 51 of the drum 5. Fig. 6: Conventional technology of appearance inspection device [Illustration of drawing number] 1: TAB tape or the like 2: Inspection table 3: Photographing device 31: Imaging lens rotates, so the tape inspection can be prevented. Therefore, Therefore, the photographing device is a diagram of the means for moving the photographing device toward. Face front view. Side view. . Directional straightness. -11-(8): Image information detection device: Image information processing device: Standard image information memory device: Image information comparison device: Image information memory device: Drum: Side surface part: Bottom surface part: MotorRotary roller: Transport guide roller: Brake roller: Decompression chamber: Decompression chamber wall: Vacuum piping: Micro hole -12-