TR201201780T2 - Mikroelektromekanik sistem (MEMS) teknolojisi ile üretilmiş, mikroakışkan-kanal içine gömülebilir, yatay eksende salınan gravimetrik sensör aygıtı. - Google Patents

Mikroelektromekanik sistem (MEMS) teknolojisi ile üretilmiş, mikroakışkan-kanal içine gömülebilir, yatay eksende salınan gravimetrik sensör aygıtı.

Info

Publication number
TR201201780T2
TR201201780T2 TR2012/01780T TR201201780T TR201201780T2 TR 201201780 T2 TR201201780 T2 TR 201201780T2 TR 2012/01780 T TR2012/01780 T TR 2012/01780T TR 201201780 T TR201201780 T TR 201201780T TR 201201780 T2 TR201201780 T2 TR 201201780T2
Authority
TR
Turkey
Prior art keywords
channel
microfluidic
mems
horizontal axis
sensor device
Prior art date
Application number
TR2012/01780T
Other languages
English (en)
Inventor
Tuna ��Ftl�K Ata
K�Lah Haluk
Original Assignee
K�Lah Haluk
Tuna ��Ftl�K Ata
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by K�Lah Haluk, Tuna ��Ftl�K Ata filed Critical K�Lah Haluk
Publication of TR201201780T2 publication Critical patent/TR201201780T2/tr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/16—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/11—Automated chemical analysis

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biomedical Technology (AREA)
  • Hematology (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analysing Biological Materials (AREA)

Abstract

Mikroelektromekanik sistem (MEMS) teknolojisi ile üretilmiş, mikroakışkan-kanal içine gömülebilir, yatay eksende salınan, yüzeyine tutunan kütle değişimini ölçerek biyolojik hücre ve analitleri algılayan bir kütle sensör aygıtı dört ana gruptan oluşmaktadır: kanal tabanına yerieştirilebilen bir rezonatör, rezonatörü biyo-aktifleştiren bileşenler, mikro-akışkan kanal, ve mikroüretim teknikleri, ve bunun ana bileşenleri ataletsel kütle (1), ataletsel kütleye bağlı tarak yapılan (2), katlanmış yay kolları (3), kanal tabanı ve mekanik toprak (4), sabit elektrotlar (5), sabit elektrotlara bağlı tarak yapılan (6), ataletsel kütle üzerine serilmiş altın film (7), tutundurulmuş biyolojik algılama molekülleri (8), ve rezonatör yapısının üzerine yerleştirilmiş mikroakışkan kanal (9).
TR2012/01780T 2009-08-20 2009-08-20 Mikroelektromekanik sistem (MEMS) teknolojisi ile üretilmiş, mikroakışkan-kanal içine gömülebilir, yatay eksende salınan gravimetrik sensör aygıtı. TR201201780T2 (tr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/TR2009/000106 WO2011021984A1 (en) 2009-08-20 2009-08-20 A microfluidic-channel embeddable, laterally oscillating gravimetric sensor device fabricated with micro-electro-mechanical systems (mems) technology

Publications (1)

Publication Number Publication Date
TR201201780T2 true TR201201780T2 (tr) 2012-03-21

Family

ID=42229300

Family Applications (1)

Application Number Title Priority Date Filing Date
TR2012/01780T TR201201780T2 (tr) 2009-08-20 2009-08-20 Mikroelektromekanik sistem (MEMS) teknolojisi ile üretilmiş, mikroakışkan-kanal içine gömülebilir, yatay eksende salınan gravimetrik sensör aygıtı.

Country Status (10)

Country Link
US (1) US8480956B2 (tr)
EP (1) EP2467684B1 (tr)
JP (1) JP5324706B2 (tr)
KR (1) KR101369941B1 (tr)
CA (1) CA2771155C (tr)
DK (1) DK2467684T3 (tr)
EA (1) EA021428B1 (tr)
IL (1) IL218179A (tr)
TR (1) TR201201780T2 (tr)
WO (1) WO2011021984A1 (tr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120190131A1 (en) * 2011-01-21 2012-07-26 Vlad Joseph Novotny Biosensor Electronics
EP2766722B1 (en) 2011-10-14 2018-12-26 Ecole Polytechnique Fédérale de Lausanne (EPFL) Nanoscale motion detector
CA2902127C (en) 2012-02-27 2021-08-10 Ecole Polytechnique Federale De Lausanne (Epfl) Sample processing device with detachable slide
US9423234B2 (en) 2012-11-05 2016-08-23 The Regents Of The University Of California Mechanical phenotyping of single cells: high throughput quantitative detection and sorting
US10190938B2 (en) 2015-09-22 2019-01-29 Murata Manufacturing Co., Ltd. Semi-flexible proof-mass
US20170089865A1 (en) * 2015-09-25 2017-03-30 Intel Corporation Integrated Molecular Sensor System
US10974243B2 (en) * 2016-07-26 2021-04-13 Qorvo Us, Inc. Microfluidic sensors using electrophoresis
WO2019026456A1 (ja) * 2017-08-01 2019-02-07 国立大学法人大阪大学 振動検出素子およびその製造方法
WO2022055480A1 (en) * 2020-09-09 2022-03-17 Hewlett-Packard Development Company, L.P. Particle detection via resonant frequencies
CN115824874B (zh) * 2022-09-26 2023-09-29 南京航空航天大学 直接光热重高精度分析仪及其工作方法
CN117269323B (zh) * 2023-11-23 2024-02-13 吉林大学 一种液体中磁性悬浮物微谐振式质量传感器及检测方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62176764U (tr) * 1986-04-28 1987-11-10
JPS6383625U (tr) * 1986-11-19 1988-06-01
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
DE10113254A1 (de) * 2001-03-19 2002-10-02 Infineon Technologies Ag Mikromechanik-Sensorelement und elektrische Schaltungsanordnung
JP4223997B2 (ja) * 2004-06-16 2009-02-12 セイコーインスツル株式会社 分析用マイクロセンサ
US7584649B2 (en) * 2006-06-02 2009-09-08 Board Of Trustees Of Michigan State University Sensor with microelectro-mechanical oscillators
JP4807632B2 (ja) * 2006-06-22 2011-11-02 独立行政法人産業技術総合研究所 検出センサ
JP2009544307A (ja) * 2006-07-27 2009-12-17 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 分子診断装置
WO2008105918A2 (en) * 2006-08-18 2008-09-04 3M Innovative Properties Company Methods of detection using acousto-mechanical detection systems
US8409807B2 (en) * 2010-10-22 2013-04-02 T2 Biosystems, Inc. NMR systems and methods for the rapid detection of analytes

Also Published As

Publication number Publication date
CA2771155A1 (en) 2011-02-24
EP2467684B1 (en) 2013-08-07
IL218179A0 (en) 2012-06-28
EA021428B1 (ru) 2015-06-30
JP2013502577A (ja) 2013-01-24
IL218179A (en) 2015-10-29
EA201200231A1 (ru) 2012-10-30
KR101369941B1 (ko) 2014-03-06
DK2467684T3 (da) 2013-11-11
CA2771155C (en) 2018-04-24
US8480956B2 (en) 2013-07-09
EP2467684A1 (en) 2012-06-27
KR20120061900A (ko) 2012-06-13
US20120148448A1 (en) 2012-06-14
JP5324706B2 (ja) 2013-10-23
WO2011021984A1 (en) 2011-02-24

Similar Documents

Publication Publication Date Title
TR201201780T2 (tr) Mikroelektromekanik sistem (MEMS) teknolojisi ile üretilmiş, mikroakışkan-kanal içine gömülebilir, yatay eksende salınan gravimetrik sensör aygıtı.
Ejeian et al. Design and applications of MEMS flow sensors: A review
EP2105707A3 (en) Systems and methods for determining acceleration and rotation by using an out-of-plane mems device
DE602007005036D1 (de) Dreiachsiger Beschleunigungsmesser mit Membran
EP2108964A3 (en) Systems and methods for acceleration and rotational determination from an in-plane and out-of-plane mems device
EP2431722A3 (en) Mems sensor capable of sensing acceleration and pressure
EP2053412A3 (en) Pendulous accelerometer with balanced gas damping
WO2010027600A3 (en) Mems sensor with movable z-axis sensing element
EP2518441A3 (en) Calibration of a MEMS gyroscope so as to reduce thermal bias
WO2008133942A3 (en) Suspended membrane pressure sensing array
Song et al. Exploitation of aeroelastic effects for drift reduction, in an all-polymer air flow sensor
WO2007096873A3 (en) Accelerometer
WO2008055082A3 (en) Polyaniline nanofiber hydrogen sensors
GB2520457A (en) Molecular thermal analysis using micro electro-mechanical sensor devices
ATE534023T1 (de) Integrierte gesamtlufttemperatursonde und elektronik
WO2010128280A3 (en) Ph measurement device
ATE394682T1 (de) Kraftsensor
FR2885409B1 (fr) Dispositif de mesure de force a tige rigide
DE602008001728D1 (de) Rotierbare MEMS-Vorrichtung mit Sensor aus Piezoresistoren
US20170199216A1 (en) Mems chip for wind speed measurements
FR3052765B1 (fr) Dispositif microelectromecanique et/ou nanoelectromecanique a deplacement hors-plan comportant des moyens capacitifs a variation de surface
EP2199807A3 (en) Sensor device
WO2009043738A3 (de) Sensorelement
CN102252588A (zh) 传感器的弹簧片
Wang et al. P2EM. 4-Novel Flexible Self-Powered Humidity Detection enabled by Triboelectric Effect