WO2009043738A3 - Sensorelement - Google Patents
Sensorelement Download PDFInfo
- Publication number
- WO2009043738A3 WO2009043738A3 PCT/EP2008/062525 EP2008062525W WO2009043738A3 WO 2009043738 A3 WO2009043738 A3 WO 2009043738A3 EP 2008062525 W EP2008062525 W EP 2008062525W WO 2009043738 A3 WO2009043738 A3 WO 2009043738A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sensor element
- membrane structure
- seismic mass
- spatial directions
- measuring
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Abstract
Mit der vorliegenden Erfindung wird ein Sensorelement zum Erfassen von Beschleunigungen in drei Raumrichtungen vorgeschlagen, das zuverlässige Messergebnisse liefert und sich zudem in kleiner Bauform und kostengünstig realisieren lässt. Das Sensorelement umfasst mindestens eine in drei Raumrichtungen auslenkbare seismischen Masse, eine Membranstruktur, die als Aufhängung für die seismische Masse fungiert, und mindestens eine feststehende Gegenelektrode zum kapazitiven Erfassen der Auslenkungen der Membranstruktur. Erfindungsgemäß umfasst die Membranstruktur mindestens vier elektrisch voneinander getrennte Elektrodenbereiche, die über die seismische Masse mechanisch gekoppelt sind.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/678,669 US8353213B2 (en) | 2007-09-26 | 2008-09-19 | Sensor element for sensing accelerations in three spatial directions |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007046017.3A DE102007046017B4 (de) | 2007-09-26 | 2007-09-26 | Sensorelement |
DE102007046017.3 | 2007-09-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009043738A2 WO2009043738A2 (de) | 2009-04-09 |
WO2009043738A3 true WO2009043738A3 (de) | 2012-10-18 |
Family
ID=40384280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2008/062525 WO2009043738A2 (de) | 2007-09-26 | 2008-09-19 | Sensorelement |
Country Status (3)
Country | Link |
---|---|
US (1) | US8353213B2 (de) |
DE (1) | DE102007046017B4 (de) |
WO (1) | WO2009043738A2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009045428B4 (de) | 2009-10-07 | 2019-06-19 | Robert Bosch Gmbh | Herstellungsverfahren für ein mikromechanisches Bauteil und mikromechanisches Bauteil |
US10469948B2 (en) * | 2014-05-23 | 2019-11-05 | Infineon Technologies Ag | Method for manufacturing an opening structure and opening structure |
US10554153B2 (en) * | 2016-06-17 | 2020-02-04 | Globalfoundries Singapore Pte. Ltd. | MEMS device for harvesting sound energy and methods for fabricating same |
DE102018218056B3 (de) | 2018-10-22 | 2019-06-19 | Robert Bosch Gmbh | Stressentkoppeltes MEMS-Bauteil mit ringförmiger Membran |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030094046A1 (en) * | 1993-03-30 | 2003-05-22 | Kazuhiro Okada | Angular velocity sensor |
FR2885410A1 (fr) * | 2005-05-04 | 2006-11-10 | Commissariat Energie Atomique | Dispositif de mesure de force par detection capacitive |
US20070051182A1 (en) * | 2005-09-06 | 2007-03-08 | Akira Egawa | Mechanical quantity sensor |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5421213A (en) * | 1990-10-12 | 1995-06-06 | Okada; Kazuhiro | Multi-dimensional force detector |
DE69124377T2 (de) * | 1991-03-30 | 1997-06-12 | Kazuhiro Okada | Beschleunigungssensor mit Selbsttest |
DE69333129T2 (de) * | 1993-03-30 | 2004-04-15 | Okada, Kazuhiro, Ageo | Winkelgeschwindigkeitssensor |
JPH09145740A (ja) * | 1995-09-22 | 1997-06-06 | Denso Corp | 加速度センサ |
JPH09119943A (ja) * | 1995-10-24 | 1997-05-06 | Wako:Kk | 加速度センサ |
JP4216525B2 (ja) * | 2002-05-13 | 2009-01-28 | 株式会社ワコー | 加速度センサおよびその製造方法 |
FI119159B (fi) * | 2003-02-11 | 2008-08-15 | Vti Technologies Oy | Kapasitiivinen kiihtyvyysanturirakenne |
DE102005004878B4 (de) * | 2005-02-03 | 2015-01-08 | Robert Bosch Gmbh | Mikromechanischer kapazitiver Drucksensor und entsprechendes Herstellungsverfahren |
DE102005004877A1 (de) * | 2005-02-03 | 2006-08-10 | Robert Bosch Gmbh | Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren |
US7578189B1 (en) * | 2006-05-10 | 2009-08-25 | Qualtre, Inc. | Three-axis accelerometers |
US7640805B2 (en) * | 2006-12-18 | 2010-01-05 | Akustica, Inc. | Proof-mass with supporting structure on integrated circuit-MEMS platform |
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2007
- 2007-09-26 DE DE102007046017.3A patent/DE102007046017B4/de active Active
-
2008
- 2008-09-19 WO PCT/EP2008/062525 patent/WO2009043738A2/de active Application Filing
- 2008-09-19 US US12/678,669 patent/US8353213B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030094046A1 (en) * | 1993-03-30 | 2003-05-22 | Kazuhiro Okada | Angular velocity sensor |
FR2885410A1 (fr) * | 2005-05-04 | 2006-11-10 | Commissariat Energie Atomique | Dispositif de mesure de force par detection capacitive |
US20070051182A1 (en) * | 2005-09-06 | 2007-03-08 | Akira Egawa | Mechanical quantity sensor |
Non-Patent Citations (1)
Title |
---|
GANG LI ET AL: "Design and fabrication of a highly symmetrical capacitive triaxial accelerometer", JOURNAL OF MICROMECHANICS & MICROENGINEERING, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 11, no. 1, 1 January 2001 (2001-01-01), pages 48 - 54, XP020068614, ISSN: 0960-1317, DOI: 10.1088/0960-1317/11/1/308 * |
Also Published As
Publication number | Publication date |
---|---|
WO2009043738A2 (de) | 2009-04-09 |
US20100206076A1 (en) | 2010-08-19 |
DE102007046017B4 (de) | 2021-07-01 |
DE102007046017A1 (de) | 2009-04-02 |
US8353213B2 (en) | 2013-01-15 |
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