WO2009043738A3 - Sensorelement - Google Patents

Sensorelement Download PDF

Info

Publication number
WO2009043738A3
WO2009043738A3 PCT/EP2008/062525 EP2008062525W WO2009043738A3 WO 2009043738 A3 WO2009043738 A3 WO 2009043738A3 EP 2008062525 W EP2008062525 W EP 2008062525W WO 2009043738 A3 WO2009043738 A3 WO 2009043738A3
Authority
WO
WIPO (PCT)
Prior art keywords
sensor element
membrane structure
seismic mass
spatial directions
measuring
Prior art date
Application number
PCT/EP2008/062525
Other languages
English (en)
French (fr)
Other versions
WO2009043738A2 (de
Inventor
Jochen Zoellin
Axel Franke
Kathrin Teeffelen
Christina Leinenbach
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to US12/678,669 priority Critical patent/US8353213B2/en
Publication of WO2009043738A2 publication Critical patent/WO2009043738A2/de
Publication of WO2009043738A3 publication Critical patent/WO2009043738A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

Mit der vorliegenden Erfindung wird ein Sensorelement zum Erfassen von Beschleunigungen in drei Raumrichtungen vorgeschlagen, das zuverlässige Messergebnisse liefert und sich zudem in kleiner Bauform und kostengünstig realisieren lässt. Das Sensorelement umfasst mindestens eine in drei Raumrichtungen auslenkbare seismischen Masse, eine Membranstruktur, die als Aufhängung für die seismische Masse fungiert, und mindestens eine feststehende Gegenelektrode zum kapazitiven Erfassen der Auslenkungen der Membranstruktur. Erfindungsgemäß umfasst die Membranstruktur mindestens vier elektrisch voneinander getrennte Elektrodenbereiche, die über die seismische Masse mechanisch gekoppelt sind.
PCT/EP2008/062525 2007-09-26 2008-09-19 Sensorelement WO2009043738A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/678,669 US8353213B2 (en) 2007-09-26 2008-09-19 Sensor element for sensing accelerations in three spatial directions

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007046017.3A DE102007046017B4 (de) 2007-09-26 2007-09-26 Sensorelement
DE102007046017.3 2007-09-26

Publications (2)

Publication Number Publication Date
WO2009043738A2 WO2009043738A2 (de) 2009-04-09
WO2009043738A3 true WO2009043738A3 (de) 2012-10-18

Family

ID=40384280

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/062525 WO2009043738A2 (de) 2007-09-26 2008-09-19 Sensorelement

Country Status (3)

Country Link
US (1) US8353213B2 (de)
DE (1) DE102007046017B4 (de)
WO (1) WO2009043738A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009045428B4 (de) 2009-10-07 2019-06-19 Robert Bosch Gmbh Herstellungsverfahren für ein mikromechanisches Bauteil und mikromechanisches Bauteil
US10469948B2 (en) * 2014-05-23 2019-11-05 Infineon Technologies Ag Method for manufacturing an opening structure and opening structure
US10554153B2 (en) * 2016-06-17 2020-02-04 Globalfoundries Singapore Pte. Ltd. MEMS device for harvesting sound energy and methods for fabricating same
DE102018218056B3 (de) 2018-10-22 2019-06-19 Robert Bosch Gmbh Stressentkoppeltes MEMS-Bauteil mit ringförmiger Membran

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030094046A1 (en) * 1993-03-30 2003-05-22 Kazuhiro Okada Angular velocity sensor
FR2885410A1 (fr) * 2005-05-04 2006-11-10 Commissariat Energie Atomique Dispositif de mesure de force par detection capacitive
US20070051182A1 (en) * 2005-09-06 2007-03-08 Akira Egawa Mechanical quantity sensor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
EP0537347B1 (de) * 1991-03-30 1997-01-22 OKADA, Kazuhiro Beschleunigungssensor mit Selbsttest
DE69333129T2 (de) * 1993-03-30 2004-04-15 Okada, Kazuhiro, Ageo Winkelgeschwindigkeitssensor
JPH09145740A (ja) * 1995-09-22 1997-06-06 Denso Corp 加速度センサ
JPH09119943A (ja) * 1995-10-24 1997-05-06 Wako:Kk 加速度センサ
JP4216525B2 (ja) * 2002-05-13 2009-01-28 株式会社ワコー 加速度センサおよびその製造方法
FI119159B (fi) * 2003-02-11 2008-08-15 Vti Technologies Oy Kapasitiivinen kiihtyvyysanturirakenne
DE102005004877A1 (de) * 2005-02-03 2006-08-10 Robert Bosch Gmbh Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren
DE102005004878B4 (de) * 2005-02-03 2015-01-08 Robert Bosch Gmbh Mikromechanischer kapazitiver Drucksensor und entsprechendes Herstellungsverfahren
US7578189B1 (en) * 2006-05-10 2009-08-25 Qualtre, Inc. Three-axis accelerometers
US7640805B2 (en) * 2006-12-18 2010-01-05 Akustica, Inc. Proof-mass with supporting structure on integrated circuit-MEMS platform

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030094046A1 (en) * 1993-03-30 2003-05-22 Kazuhiro Okada Angular velocity sensor
FR2885410A1 (fr) * 2005-05-04 2006-11-10 Commissariat Energie Atomique Dispositif de mesure de force par detection capacitive
US20070051182A1 (en) * 2005-09-06 2007-03-08 Akira Egawa Mechanical quantity sensor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
GANG LI ET AL: "Design and fabrication of a highly symmetrical capacitive triaxial accelerometer", JOURNAL OF MICROMECHANICS & MICROENGINEERING, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 11, no. 1, 1 January 2001 (2001-01-01), pages 48 - 54, XP020068614, ISSN: 0960-1317, DOI: 10.1088/0960-1317/11/1/308 *

Also Published As

Publication number Publication date
DE102007046017A1 (de) 2009-04-02
WO2009043738A2 (de) 2009-04-09
US8353213B2 (en) 2013-01-15
DE102007046017B4 (de) 2021-07-01
US20100206076A1 (en) 2010-08-19

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