DK2467684T3 - I en mikrofluidkanal indlejrbar, lateralt oscillerende gravimetrisk sensorindretning fabrikeret med mikro-elektro-mekaniske systemer (mems) teknologi - Google Patents

I en mikrofluidkanal indlejrbar, lateralt oscillerende gravimetrisk sensorindretning fabrikeret med mikro-elektro-mekaniske systemer (mems) teknologi

Info

Publication number
DK2467684T3
DK2467684T3 DK09752502.6T DK09752502T DK2467684T3 DK 2467684 T3 DK2467684 T3 DK 2467684T3 DK 09752502 T DK09752502 T DK 09752502T DK 2467684 T3 DK2467684 T3 DK 2467684T3
Authority
DK
Denmark
Prior art keywords
storable
mems
electro
micro
technology
Prior art date
Application number
DK09752502.6T
Other languages
English (en)
Inventor
Haluk Kulah
Ata Tuna Ciftlik
Original Assignee
Haluk Kulah
Ata Tuna Ciftlik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Haluk Kulah, Ata Tuna Ciftlik filed Critical Haluk Kulah
Application granted granted Critical
Publication of DK2467684T3 publication Critical patent/DK2467684T3/da

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01GWEIGHING
    • G01G3/00Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/16Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/022Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/036Analysing fluids by measuring frequency or resonance of acoustic waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/222Constructional or flow details for analysing fluids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/025Change of phase or condition
    • G01N2291/0256Adsorption, desorption, surface mass change, e.g. on biosensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/042Wave modes
    • G01N2291/0427Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00Chemistry: analytical and immunological testing
    • Y10T436/11Automated chemical analysis

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biomedical Technology (AREA)
  • Hematology (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
DK09752502.6T 2009-08-20 2009-08-20 I en mikrofluidkanal indlejrbar, lateralt oscillerende gravimetrisk sensorindretning fabrikeret med mikro-elektro-mekaniske systemer (mems) teknologi DK2467684T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/TR2009/000106 WO2011021984A1 (en) 2009-08-20 2009-08-20 A microfluidic-channel embeddable, laterally oscillating gravimetric sensor device fabricated with micro-electro-mechanical systems (mems) technology

Publications (1)

Publication Number Publication Date
DK2467684T3 true DK2467684T3 (da) 2013-11-11

Family

ID=42229300

Family Applications (1)

Application Number Title Priority Date Filing Date
DK09752502.6T DK2467684T3 (da) 2009-08-20 2009-08-20 I en mikrofluidkanal indlejrbar, lateralt oscillerende gravimetrisk sensorindretning fabrikeret med mikro-elektro-mekaniske systemer (mems) teknologi

Country Status (10)

Country Link
US (1) US8480956B2 (da)
EP (1) EP2467684B1 (da)
JP (1) JP5324706B2 (da)
KR (1) KR101369941B1 (da)
CA (1) CA2771155C (da)
DK (1) DK2467684T3 (da)
EA (1) EA021428B1 (da)
IL (1) IL218179A (da)
TR (1) TR201201780T2 (da)
WO (1) WO2011021984A1 (da)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120190131A1 (en) * 2011-01-21 2012-07-26 Vlad Joseph Novotny Biosensor Electronics
US20140287403A1 (en) 2011-10-14 2014-09-25 Ecole Polytechnique Federale De Lausanne (Epfl) Nanoscale motion detector
WO2013128322A1 (en) 2012-02-27 2013-09-06 Ecole Polytechnique Federale De Lausanne (Epfl) Sample processing device with detachable slide
US9423234B2 (en) 2012-11-05 2016-08-23 The Regents Of The University Of California Mechanical phenotyping of single cells: high throughput quantitative detection and sorting
TWI610880B (zh) * 2015-09-22 2018-01-11 村田製作所股份有限公司 半撓性的驗證質量
US20170089865A1 (en) * 2015-09-25 2017-03-30 Intel Corporation Integrated Molecular Sensor System
WO2018022758A1 (en) * 2016-07-26 2018-02-01 Qorvo Us, Inc. Microfluidic sensors using electrophoresis
WO2019026456A1 (ja) * 2017-08-01 2019-02-07 国立大学法人大阪大学 振動検出素子およびその製造方法
WO2022055480A1 (en) * 2020-09-09 2022-03-17 Hewlett-Packard Development Company, L.P. Particle detection via resonant frequencies
CN115824874B (zh) * 2022-09-26 2023-09-29 南京航空航天大学 直接光热重高精度分析仪及其工作方法
CN117269323B (zh) * 2023-11-23 2024-02-13 吉林大学 一种液体中磁性悬浮物微谐振式质量传感器及检测方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62176764U (da) * 1986-04-28 1987-11-10
JPS6383625U (da) * 1986-11-19 1988-06-01
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
DE10113254A1 (de) * 2001-03-19 2002-10-02 Infineon Technologies Ag Mikromechanik-Sensorelement und elektrische Schaltungsanordnung
JP4223997B2 (ja) * 2004-06-16 2009-02-12 セイコーインスツル株式会社 分析用マイクロセンサ
US7584649B2 (en) * 2006-06-02 2009-09-08 Board Of Trustees Of Michigan State University Sensor with microelectro-mechanical oscillators
JP4807632B2 (ja) * 2006-06-22 2011-11-02 独立行政法人産業技術総合研究所 検出センサ
CN101495655A (zh) * 2006-07-27 2009-07-29 皇家飞利浦电子股份有限公司 用于分子诊断的装置
EP2059811A2 (en) * 2006-08-18 2009-05-20 3M Innovative Properties Company Methods of detection using acousto-mechanical detection systems
US8409807B2 (en) * 2010-10-22 2013-04-02 T2 Biosystems, Inc. NMR systems and methods for the rapid detection of analytes

Also Published As

Publication number Publication date
TR201201780T2 (tr) 2012-03-21
US8480956B2 (en) 2013-07-09
IL218179A (en) 2015-10-29
IL218179A0 (en) 2012-06-28
CA2771155A1 (en) 2011-02-24
EA021428B1 (ru) 2015-06-30
EA201200231A1 (ru) 2012-10-30
EP2467684B1 (en) 2013-08-07
US20120148448A1 (en) 2012-06-14
JP5324706B2 (ja) 2013-10-23
WO2011021984A1 (en) 2011-02-24
EP2467684A1 (en) 2012-06-27
JP2013502577A (ja) 2013-01-24
KR101369941B1 (ko) 2014-03-06
CA2771155C (en) 2018-04-24
KR20120061900A (ko) 2012-06-13

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