ATE394682T1 - Kraftsensor - Google Patents
KraftsensorInfo
- Publication number
- ATE394682T1 ATE394682T1 AT04804166T AT04804166T ATE394682T1 AT E394682 T1 ATE394682 T1 AT E394682T1 AT 04804166 T AT04804166 T AT 04804166T AT 04804166 T AT04804166 T AT 04804166T AT E394682 T1 ATE394682 T1 AT E394682T1
- Authority
- AT
- Austria
- Prior art keywords
- force sensors
- force
- carbon nanotube
- force sensor
- nanostructure
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/005—Measuring force or stress, in general by electrical means and not provided for in G01L1/06 - G01L1/22
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/025—Inertial sensors not provided for in B81B2201/0235 - B81B2201/0242
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/724—Devices having flexible or movable element
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/953—Detector using nanostructure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/953—Detector using nanostructure
- Y10S977/956—Of mechanical property
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Computer Hardware Design (AREA)
- Molecular Biology (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Carbon And Carbon Compounds (AREA)
- Pressure Sensors (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Control Of High-Frequency Heating Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04004883 | 2004-03-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE394682T1 true ATE394682T1 (de) | 2008-05-15 |
Family
ID=34959826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04804166T ATE394682T1 (de) | 2004-03-02 | 2004-12-22 | Kraftsensor |
Country Status (5)
Country | Link |
---|---|
US (1) | US7404338B2 (de) |
EP (1) | EP1721173B1 (de) |
AT (1) | ATE394682T1 (de) |
DE (1) | DE602004013641D1 (de) |
WO (1) | WO2005095997A1 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7439731B2 (en) | 2005-06-24 | 2008-10-21 | Crafts Douglas E | Temporary planar electrical contact device and method using vertically-compressible nanotube contact structures |
ITTO20050758A1 (it) * | 2005-10-26 | 2007-04-27 | Fiat Ricerche | Dispositivo di rilevazione di grandezze fisiche in particolare un campo magnetico a film sottile e relativo procedimento di rilevazione |
US7884525B2 (en) * | 2006-08-03 | 2011-02-08 | Massachusetts Institute Of Technology | Carbon nanotube based compliant mechanism |
US7731503B2 (en) * | 2006-08-21 | 2010-06-08 | Formfactor, Inc. | Carbon nanotube contact structures |
US8354855B2 (en) * | 2006-10-16 | 2013-01-15 | Formfactor, Inc. | Carbon nanotube columns and methods of making and using carbon nanotube columns as probes |
US8130007B2 (en) * | 2006-10-16 | 2012-03-06 | Formfactor, Inc. | Probe card assembly with carbon nanotube probes having a spring mechanism therein |
US7810373B2 (en) * | 2007-02-22 | 2010-10-12 | Seagate Technology Llc | MEMS shock sensors |
WO2009029043A1 (en) * | 2007-08-24 | 2009-03-05 | Quantum Precision Instruments Asia Private Limited | Quantum tunnelling sensor device and method |
US8149007B2 (en) * | 2007-10-13 | 2012-04-03 | Formfactor, Inc. | Carbon nanotube spring contact structures with mechanical and electrical components |
DE102008013624A1 (de) * | 2008-03-10 | 2009-09-24 | Siemens Aktiengesellschaft | Mikrosensor mit einem CNT-Sensorelement und Verfahren zu dessen Herstellung |
US8272124B2 (en) * | 2009-04-03 | 2012-09-25 | Formfactor, Inc. | Anchoring carbon nanotube columns |
US20100252317A1 (en) * | 2009-04-03 | 2010-10-07 | Formfactor, Inc. | Carbon nanotube contact structures for use with semiconductor dies and other electronic devices |
US8327715B2 (en) * | 2009-07-02 | 2012-12-11 | Honeywell International Inc. | Force sensor apparatus |
US8872176B2 (en) | 2010-10-06 | 2014-10-28 | Formfactor, Inc. | Elastic encapsulated carbon nanotube based electrical contacts |
US8316725B2 (en) | 2010-12-15 | 2012-11-27 | Honeywell International Inc. | Force sensor |
US9534972B2 (en) | 2012-02-16 | 2017-01-03 | 7-Sigma Inc. | Pressure sensor with a deformable electrically resistive membrane |
US8746075B2 (en) | 2012-02-16 | 2014-06-10 | 7-Sigma, Inc. | Flexible electrically conductive nanotube sensor for elastomeric devices |
US9003899B2 (en) | 2012-03-23 | 2015-04-14 | Honeywell International Inc. | Force sensor |
US8806964B2 (en) | 2012-03-23 | 2014-08-19 | Honeywell International Inc. | Force sensor |
US9003897B2 (en) | 2012-05-10 | 2015-04-14 | Honeywell International Inc. | Temperature compensated force sensor |
US20150064675A1 (en) * | 2013-08-30 | 2015-03-05 | 7-Sigma, Inc. | Responsive tool with sensors |
US10073522B2 (en) * | 2014-12-12 | 2018-09-11 | Regents Of The University Of Minnesota | Articles of handwear for sensing forces applied to medical devices |
CH713600A2 (de) * | 2017-03-21 | 2018-09-28 | Digi Sens Ag | Vorrichtung und Verfahren zum Messen einer Last. |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002080360A1 (en) * | 2001-03-30 | 2002-10-10 | California Institute Of Technology | Pattern-aligned carbon nanotube growth and tunable resonator apparatus |
-
2004
- 2004-12-22 DE DE602004013641T patent/DE602004013641D1/de active Active
- 2004-12-22 WO PCT/EP2004/014570 patent/WO2005095997A1/en active IP Right Grant
- 2004-12-22 EP EP04804166A patent/EP1721173B1/de not_active Not-in-force
- 2004-12-22 AT AT04804166T patent/ATE394682T1/de not_active IP Right Cessation
- 2004-12-22 US US10/591,879 patent/US7404338B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7404338B2 (en) | 2008-07-29 |
US20070186665A1 (en) | 2007-08-16 |
EP1721173A1 (de) | 2006-11-15 |
WO2005095997A1 (en) | 2005-10-13 |
DE602004013641D1 (de) | 2008-06-19 |
EP1721173B1 (de) | 2008-05-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |