DK1429992T3 - Fleksibel struktur med integreret detekterings-/aktiveringselement - Google Patents

Fleksibel struktur med integreret detekterings-/aktiveringselement

Info

Publication number
DK1429992T3
DK1429992T3 DK02776885T DK02776885T DK1429992T3 DK 1429992 T3 DK1429992 T3 DK 1429992T3 DK 02776885 T DK02776885 T DK 02776885T DK 02776885 T DK02776885 T DK 02776885T DK 1429992 T3 DK1429992 T3 DK 1429992T3
Authority
DK
Denmark
Prior art keywords
silicon
flexible structure
polymer
activation element
integrated detection
Prior art date
Application number
DK02776885T
Other languages
English (en)
Inventor
Ole Hansen
Aric Menon
Anja Boisen
Jacob Thaysen
Original Assignee
Univ Danmarks Tekniske
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Danmarks Tekniske filed Critical Univ Danmarks Tekniske
Application granted granted Critical
Publication of DK1429992T3 publication Critical patent/DK1429992T3/da

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors

Landscapes

  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Computer Hardware Design (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DK02776885T 2001-09-07 2002-09-06 Fleksibel struktur med integreret detekterings-/aktiveringselement DK1429992T3 (da)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US31748801P 2001-09-07 2001-09-07
US10/006,582 US20030062193A1 (en) 2001-09-07 2001-12-10 Flexible structure with integrated sensor/actuator
PCT/DK2002/000582 WO2003022731A1 (en) 2001-09-07 2002-09-06 Flexible structure with integrated sensor/actuator

Publications (1)

Publication Number Publication Date
DK1429992T3 true DK1429992T3 (da) 2007-03-19

Family

ID=26675817

Family Applications (1)

Application Number Title Priority Date Filing Date
DK02776885T DK1429992T3 (da) 2001-09-07 2002-09-06 Fleksibel struktur med integreret detekterings-/aktiveringselement

Country Status (6)

Country Link
US (2) US20030062193A1 (da)
EP (1) EP1429992B1 (da)
AT (1) ATE344783T1 (da)
DE (1) DE60215962T2 (da)
DK (1) DK1429992T3 (da)
WO (1) WO2003022731A1 (da)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080315092A1 (en) * 1994-07-28 2008-12-25 General Nanotechnology Llc Scanning probe microscopy inspection and modification system
US6337479B1 (en) * 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US6339217B1 (en) * 1995-07-28 2002-01-15 General Nanotechnology Llc Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
US5751683A (en) * 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
US6802646B1 (en) * 2001-04-30 2004-10-12 General Nanotechnology Llc Low-friction moving interfaces in micromachines and nanomachines
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
AU6061100A (en) * 1999-07-01 2001-01-22 General Nanotechnology, Llc Object inspection and/or modification system and method
US6813937B2 (en) * 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
WO2004023490A2 (en) * 2002-09-09 2004-03-18 General Nanotechnology Llc Fluid delivery for scanning probe microscopy
US6878643B2 (en) * 2002-12-18 2005-04-12 The Regents Of The University Of California Electronic unit integrated into a flexible polymer body
US7521257B2 (en) * 2003-02-11 2009-04-21 The Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada, Reno Chemical sensor with oscillating cantilevered probe and mechanical stop
US7260980B2 (en) 2003-03-11 2007-08-28 Adams Jesse D Liquid cell and passivated probe for atomic force microscopy and chemical sensing
US7552645B2 (en) * 2003-05-07 2009-06-30 California Institute Of Technology Detection of resonator motion using piezoresistive signal downmixing
US7302856B2 (en) * 2003-05-07 2007-12-04 California Institute Of Technology Strain sensors based on nanowire piezoresistor wires and arrays
US7434476B2 (en) * 2003-05-07 2008-10-14 Califronia Institute Of Technology Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes
KR20030066573A (ko) * 2003-07-25 2003-08-09 주식회사 화진테크 스티어링 휠 및 이의 제조방법
US6994441B2 (en) 2003-09-24 2006-02-07 The Boeing Company Adaptive reflecting system
US20060257286A1 (en) * 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection
GB0328054D0 (en) * 2003-12-04 2004-01-07 Council Cent Lab Res Councils Fluid probe
JP2005321758A (ja) * 2004-04-09 2005-11-17 Sii Nanotechnology Inc 走査型プローブ装置および走査型プローブ加工方法
WO2006073426A2 (en) * 2004-04-20 2006-07-13 California Institute Of Technology Microscale calorimeters
WO2005116621A2 (en) * 2004-05-25 2005-12-08 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Naval Research Laboratory Microelectro-mechanical chemical sensor
US8750957B2 (en) * 2004-06-01 2014-06-10 California Institute Of Technology Microfabricated neural probes and methods of making same
KR100643756B1 (ko) 2004-09-10 2006-11-10 삼성전자주식회사 유연소자, 유연압력센서, 및 이들의 제조방법
GB2437753B8 (en) 2004-10-01 2009-05-20 Nevada System Of Higher Education Cantilevered probe detector with piezoelectric element
US7546772B2 (en) * 2004-12-30 2009-06-16 Honeywell International Inc. Piezoresistive pressure sensor
US7401525B2 (en) * 2005-03-23 2008-07-22 Honeywell International Inc. Micro-machined pressure sensor with polymer diaphragm
US7313945B2 (en) * 2005-10-31 2008-01-01 Hewlett-Packard Development Company, L.P. Cantilevers for sensing fluid properties
GB0605273D0 (en) * 2006-03-16 2006-04-26 Council Cent Lab Res Councils Fluid robe
WO2008091294A2 (en) 2006-07-28 2008-07-31 California Institute Of Technology Polymer nems for cell physiology and microfabricated cell positioning system for micro-biocalorimeter
US7709264B2 (en) * 2006-09-21 2010-05-04 Philip Morris Usa Inc. Handheld microcantilever-based sensor for detecting tobacco-specific nitrosamines
DE102007031128A1 (de) * 2007-06-29 2009-01-02 IHP GmbH - Innovations for High Performance Microelectronics/Institut für innovative Mikroelektronik MEMS-Mikroviskosimeter und Verfahren zu seiner Herstellung
GB0716202D0 (en) 2007-08-11 2007-09-26 Microvisk Ltd Improved fluid probe
US8476005B2 (en) * 2008-02-05 2013-07-02 California Institute Of Technology Microfluidic embedded polymer NEMS force sensors
KR101096533B1 (ko) 2010-02-19 2011-12-20 전남대학교산학협력단 생체용 무선 유량센서 구조물 및 유량센서 제조방법
JP2011242386A (ja) * 2010-04-23 2011-12-01 Immersion Corp 接触センサと触覚アクチュエータとの透明複合圧電材結合体
US8394625B2 (en) * 2010-05-02 2013-03-12 Angelo Gaitas Lab-on-a-pipette
CN102249181A (zh) * 2011-03-28 2011-11-23 大连理工大学 一种su-8胶微力传感器的制作方法
US8857275B2 (en) 2011-05-02 2014-10-14 California Institute Of Technology NEMS sensors for cell force application and measurement
RU2481669C2 (ru) * 2011-08-02 2013-05-10 Федеральное государственное унитарное предприятие "Научно-производственное объединение им. С.А. Лавочкина" Наклеиваемый полупроводниковый тензорезистор
ITMI20112296A1 (it) 2011-12-16 2013-06-17 St Microelectronics Srl Dispositivo elettronico flessibile incapsulato e relativo metodo di fabbricazione
US20140037909A1 (en) * 2012-08-01 2014-02-06 Massachusetts Institute Of Technology Actuation and Control of Stamp Deformation in Microcontact Printing
US20150122531A1 (en) * 2013-11-01 2015-05-07 Carestream Health, Inc. Strain gauge
JP6869706B2 (ja) * 2015-12-11 2021-05-12 株式会社半導体エネルギー研究所 蓄電装置用負極、蓄電装置、および電気機器
CN105974104B (zh) * 2016-05-12 2017-12-15 南京信息工程大学 基于巨压阻结构的悬臂梁生化传感器及悬臂梁制作方法
CN107478148B (zh) * 2017-07-13 2020-03-17 中国科学院深圳先进技术研究院 一种柔性可穿戴式电子应变传感器及其制备方法
WO2019059326A1 (ja) * 2017-09-20 2019-03-28 旭化成株式会社 表面応力センサ、中空構造素子及びそれらの製造方法
US11650110B2 (en) * 2020-11-04 2023-05-16 Honeywell International Inc. Rosette piezo-resistive gauge circuit for thermally compensated measurement of full stress tensor
DE102021107254B4 (de) 2021-03-23 2024-06-27 digid GmbH Digitale Sensorvorrichtung zur Detektion eines Analyten in einer Probe
DE102021107255B4 (de) 2021-03-23 2024-06-27 digid GmbH Digitaler Sensor mit Referenzkantilever zur Umwandlung chemischer und/oder biochemischer Information
CN113520617B (zh) * 2021-07-21 2023-10-20 天津大学 一种无源式三维力传感测头及光学式力传感器
CN115178313A (zh) * 2022-08-05 2022-10-14 天津工业大学 一种用于生化分子检测的中空微纳复合梁的设计方法
DE102022121185B3 (de) 2022-08-22 2024-01-18 digid GmbH Vorrichtung zur Detektion mindestens eines Analyten in einer Probe
DE102022121187B3 (de) 2022-08-22 2024-01-18 digid GmbH Digitale Sensorvorrichtung zur Detektion von Analyten in einer Probe
DE102022005110B4 (de) 2022-08-22 2024-06-27 digid GmbH Digitale Sensorvorrichtung zur Detektion von Analyten in einer Probe

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5049775A (en) * 1988-09-30 1991-09-17 Boston University Integrated micromechanical piezoelectric motor
WO1994028372A1 (en) * 1993-05-25 1994-12-08 Rosemount Inc. Organic chemical sensor
WO1996026424A1 (en) * 1995-02-24 1996-08-29 Lucas Novasensor Pressure sensor with transducer mounted on a metal base
US6087638A (en) * 1997-07-15 2000-07-11 Silverbrook Research Pty Ltd Corrugated MEMS heater structure
JPH11304825A (ja) * 1997-09-30 1999-11-05 Seiko Instruments Inc 半導体歪センサおよびその製造方法ならびに走査型プローブ顕微鏡
JP3354506B2 (ja) * 1997-12-17 2002-12-09 アスモ株式会社 感圧センサ及び感圧センサの製造方法
US6229190B1 (en) * 1998-12-18 2001-05-08 Maxim Integrated Products, Inc. Compensated semiconductor pressure sensor
US6255728B1 (en) * 1999-01-15 2001-07-03 Maxim Integrated Products, Inc. Rigid encapsulation package for semiconductor devices
US6373944B1 (en) * 1999-03-01 2002-04-16 Abacon Telecommunications, Llc Multiple telephone outlet box with surge protection
US6289717B1 (en) * 1999-03-30 2001-09-18 U. T. Battelle, Llc Micromechanical antibody sensor
ATE309042T1 (de) * 1999-05-03 2005-11-15 Cantion As Sensor für ein mikrofluidisches bearbeitungssystem
US6236491B1 (en) * 1999-05-27 2001-05-22 Mcnc Micromachined electrostatic actuator with air gap
EP1139486A1 (en) * 2000-03-27 2001-10-04 Hitachi Metals, Ltd. Non-reciprocal circuit device and wireless communications equipment comprising the same

Also Published As

Publication number Publication date
US20030062193A1 (en) 2003-04-03
DE60215962T2 (de) 2007-09-13
US20030089182A1 (en) 2003-05-15
EP1429992B1 (en) 2006-11-08
EP1429992A1 (en) 2004-06-23
DE60215962D1 (de) 2006-12-21
ATE344783T1 (de) 2006-11-15
WO2003022731A1 (en) 2003-03-20

Similar Documents

Publication Publication Date Title
DK1429992T3 (da) Fleksibel struktur med integreret detekterings-/aktiveringselement
DE502004002214D1 (de) Dehnungsmessfühler mit resistiven und piezoelektrischen dehnungsempfindlichen Elementen
CN101936790B (zh) 一种脚底压力测量装置
WO2006138697A3 (en) Integrated displacement sensors for probe microscopy and force spectroscopy
KR20080031970A (ko) 두 배의 측정 스케일 및 높은 정밀도의 풀 스케일의 통합된압력 센서
ATE394682T1 (de) Kraftsensor
ATE501424T1 (de) Differenzdrucksensor
KR101840114B1 (ko) 크랙 함유 투명 전도성 박막을 구비하는 고감도 센서 및 그의 제조 방법
WO2006083566A3 (en) Biosensor based on polymer cantilevers
Shi et al. Artificial hair cell sensors using liquid metal alloy as piezoresistors
CN105890533A (zh) 一种材料表面应变光纤光栅反向差动检测传感器件
WO2003016848A8 (fr) Detecteur de contraintes
JP2654184B2 (ja) 半導体湿度センサ
US11079297B2 (en) Integrated force sensor
ATE312341T1 (de) Drucksensor
ITMO20050085A1 (it) Procedimento di misurazione della variazione di lunghezza di una molla e molla con relativo sensore.
Kim et al. Biomimetic skin-type shear sensor
ITRM20010540A1 (it) Dinamometro e relativo metodo di misura.
WO2007126422A3 (en) Pressure sensor system
CN211954514U (zh) 一种半桥半导体应变计
RU102813U1 (ru) Датчик магнитного поля
Gu et al. A novel silicon based tactile sensor on elastic steel sheet for prosthetic hand
ATE411521T1 (de) Mechanochemischer typensensor
JP2020020816A5 (da)
Juneau et al. New generation of Fabry-Perot fiber optic sensors for monitoring of structures