SU991150A1

SU991150A1 - Interferometer for optical system quality control

Info

Publication number: SU991150A1
Application number: SU802974206A
Authority: SU
Inventors: Алексей Иванович Кузнецов
Original assignee: Предприятие П/Я Р-6681
Priority date: 1980-08-15
Filing date: 1980-08-15
Publication date: 1983-01-23

Description

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Изобретение относитс к контрольно-измерительной технике, предназначено дл контрол качества оптических систем и может быть использовано преимущественно в производстве , зан том изготовлением крупногабаритных оптических деталей и систем высокого качества.The invention relates to instrumentation engineering, is intended to control the quality of optical systems and can be used mainly in production, engaged in the manufacture of large-sized optical components and high-quality systems.

Известен интерферометр дл контрол качества оптических систем, содержащий источник света, куб-призму, эталонное сферическое зеркало и регистратор интерференционной картины 1 .A known interferometer for monitoring the quality of optical systems, comprising a light source, a cube-prism, a reference spherical mirror, and an interference pattern recorder 1.

Недостатком интерферометра вл етс ограниченный диапазон параметров контролируемых систем, а именно максимальное относительное отверстие равно 1:2,5. При этом необходимо принимать специальные меры дл компенсации сферической аберрации; вносимой в .интерферирующие пучки куб-призмой .The disadvantage of the interferometer is a limited range of parameters of the monitored systems, namely the maximum relative aperture is 1: 2.5. It is necessary to take special measures to compensate for spherical aberration; a cube-prism inserted into interfering beams.

Наиболее близким к изобретению по технической сущности вл етс интерферометрThe closest to the invention to the technical essence is the interferometer

ДЛЯ контрол качества оптическиз( систем, содержащий расположенные последовательно осветительную систему с лазерным источником излучени , светоделитёльный блок и эталонное сферическое зеркало, регистратор интерференционной картины, расположенный в обратном ходе излучени за светоделктельным блоком, выполненным так, что он представл ет собой в Двух взаимно перпендикул рных направлени х идентичные концентрические менисковые лиизы, оптическа ось каждой из которых составл ет угол 45° со светоделительной поверхностью блока, и установленным так, что центры кривизны сферичеЬких поверхностей менисковых линз опртчески сопр жены с фокусом осветительной си( темы 2.For quality control of optical systems (systems containing a sequential illumination system with a laser radiation source, a beam separation unit and a reference spherical mirror, an interference pattern recorder located in the reverse direction of the radiation behind a light-selective unit designed so that it is in two mutually perpendicular the directions are identical concentric meniscus lyses, the optical axis of each of which makes an angle of 45 ° with the beam-splitting surface of the block, and the mouth tained so that the centers of curvature sferichekih meniscus lens surfaces oprtcheski conjugated to focus illumination in B (2 threads.

Claims

The disadvantage of the interferometer is a relatively low range of parameters of the monitored systems, which is determined, in particular, by the capabilities of the beam-splitting unit, related to the choice of meniscus lens thickness, therefore the maximum value of the relative aperture of the monitored systems is 1: 1.15. The purpose of the invention is to expand the range of parameters of monitored optical systems. This goal is achieved by the fact that in an interferometer for monitoring the quality of optical systems, comprising a sequential illumination system with a laser radiation source, a beam-splitting unit and a reference spherical mirror, an interference pattern recorder located in the reverse direction of the radiation behind the beam-splitting unit, designed to represents in two mutually perpendicular directions identical concentric meniscus lenses, the optical axis of each of which is an angle of 45 ° with the beam-splitting surface of the block, and installed so that the centers of curvature of the spherical surfaces of the meniscus lenses are optically coupled to the foci of the lighting system, the beam-splitting unit is oriented so that the convex surfaces of the meniscus lenses face the lighting system and the interference pattern recorder, respectively, and the thickness the optical axis of each meniscus lens of the beam-splitting unit is not less than 1.15 times the light diameter of its convex surface. The diagram shows a schematic diagram of one of the possible variants of an interferometer for controlling the quality of optical systems, in the case of controlling a concave spherical surface. The interferometer contains successively the lighting system consisting of laser 1, flat mirrors 2 and 3, telescopic system 4 and micro-object 5, beam-splitting unit 6 made in the form of two prisms 7 and 8 with lenses 9-12 pasted on their face and a spherical mirror 13 and a registrar 14 of the interference pattern located in the reverse course of the radiation behind the beam-splitting unit 6. The beam splitting surface of block 6 is formed by glued edges of prism 7 and 8. On the face of prisms 7 and 8 are lenses 9–12, respectively. The radii of curvature of the lenses are chosen so that the beam splitting unit represents in two mutually perpendicular directions identical concentric meniscus lenses, the optical axis of each of which makes an angle of 45 ° with the beam-splitting surface of the unit 6. The beam splitting unit 6 is oriented so that the convex surfaces of the meniscus The lenses 4 face the illumination system and the regulator 14 of the interference pattern coot vetvietinos, and the curvature centers of the spherical surfaces of the lenses 9-12 are optically coupled to the focus of the illumination system. The edges of the beam-splitting unit 6 are made with a break, so that the thickness along the optical axis of each of the meniscus lenses of the unit 6 is smaller than the light diameter. The edges of the beam-splitting unit 6, on which the lenses 11 and 12 are glued, are made with a break, so that the thickness along the optical axis of each of the meniscus lenses of the unit 6 is less than the light diameter of its convex surface not less than 1.15 times. The interferometer works as follows. The radiation from laser 1 is directed by mirrors 2 and 3 to the telescopic system 4, which expands it to the required diameter. The planar wave front, emanating from the telescopic system 4, is converted by the micro-lens 5 into a spherical wave front, falling normal along the convex spherical surface of the lens 9 of the beam-splitting unit 6. The beam-splitting surface of the block 6 divides the spherical wave front into two parts, one of which falls on the reference spherical mirror 13 along the normal to it, and the Friend - extends in the direction of the normals to the test surface 15. Reflected from mirrors 13 and 15, the wave fronts interfere at the beam-splitting screen audio block 6 and fed to the recorder 14, the interference pattern. The resulting interference pattern carries information about the shape errors of the monitored surface 15. The range of parameters of monitored optical systems is broadened by the fact that the thickness along the optical axis of each meniscus lens of the beam-splitting unit 6 is less than the luminous diameter of its convex surface not less than 1, 15 times, and also due to the fact that the objective point (focus of the lighting system) is brought into space in front of the interferometer. The maximum relative aperture of optical systems that can be monitored by the proposed interferometer is 1: 0.8. DETAILED DESCRIPTION An interferometer for monitoring the quality of optical systems, comprising a sequential illumination system with a laser radiation source, a light-emitting unit and a reference spherical mirror.