SU847013A1

SU847013A1 - Interferometer for lens quality control

Info

Publication number: SU847013A1
Application number: SU792827072A
Authority: SU
Inventors: Даниил Трофимович Пуряев
Original assignee: Московское Ордена Ленина И Орденатрудового Красного Знамени Высшеетехническое Училище Им.H.Э.Баумана
Priority date: 1979-10-11
Filing date: 1979-10-11
Publication date: 1981-07-15

Description

1one

Изобретение относитс к измерительной технике, предназначено дл контрол качества линз и может бЕЛТь использовано в производстве, оптических систем.The invention relates to a measurement technique, is intended to control the quality of lenses, and may be used in the manufacture of optical systems.

Известен интерферометр дл контрол качества линз, содержащий источник света, расположенные последовательно по ходу его лучей светоделитель , объектив, компенсатор, эталонное сферическое зеркало и регистратор интерференционной картины 1 .A known interferometer for controlling the quality of lenses contains a light source arranged in series along its rays by a beam splitter, a lens, a compensator, a reference spherical mirror, and an interference pattern recorder 1.

Недостатком данного интерферометра вл етс сложность конструкции, обусд овленна необходимостью применени эталонного сферического зеркала , диаметр которого превышает Диаметр контролируемой линзы..The disadvantage of this interferometer is the complexity of the design, due to the need to use a reference spherical mirror, the diameter of which exceeds the diameter of the controlled lens ..

Наиболее близким по технической сущности и достигаемому эффекту к изобретению вл етс интерферометр дл контрол качества оптических деталей , например линз, содержгиций источник света, расположенные последовательно по ходу его лучей светоделитель , компенсатор и регистратор интерференционной картины 2.The closest in technical essence and the achieved effect to the invention is an interferometer for controlling the quality of optical components, for example lenses, contents of a light source arranged successively along its rays, a beam splitter, a compensator and an interference pattern recorder 2.

Недостатками этого интерферометра вл ютс сравнительно низка точность контрол , обусловленна тем, что компенсатор вносит дополнительные аберрации в волновой фронт, отраженный от поверхности контролируемой линзы, а также узкий диапазон параметров контролируемых линз, поскольку один компенсатор позвол ет контролировать , как правило, только одну линзу, а именно ту, дл которой он The disadvantages of this interferometer are relatively low control accuracy due to the fact that the compensator introduces additional aberrations to the wave front reflected from the surface of the controlled lens, as well as a narrow range of parameters of the controlled lenses, since one compensator allows you to control, as a rule, only one lens namely the one for which he

Id рассчитан.Id is calculated.

Цель изобретени - повышение точности контрол и расширение диапазона параметров контролируемых линз.The purpose of the invention is to improve the accuracy of control and expand the range of parameters of controlled lenses.

Указанна цель достигаетс тем, This goal is achieved by

15 что интерферометр снабжен эталонной линзой, установленной за компенсатором , плоскопараллельной светоделительной пластиной, установленной перпендикул рно оптической оси интерфе20 рометра за эталонной линзой так, что рассто ние от светоделительной поверхности пластины до эталонной ,и контролируемой линз равны между собой .15 that the interferometer is equipped with a reference lens mounted behind the compensator, a plane-parallel beam-splitting plate, installed perpendicular to the optical axis of the interferometer behind the reference lens so that the distance from the beam-splitting surface of the plate to the reference lens and the lens being controlled are equal to each other.

2525

На чертеже представлена принципиальна Ьхема одного из возможных вариантов интерферометра дл контрол качества линз.The drawing shows the principal principle of one of the possible variants of an interferometer for controlling the quality of lenses.

Интерферометр содержит источник The interferometer contains the source

Claims

30 1 light located in succession along its rays aperture 2, a beam splitter 3, a compensator 4, a reference liqueur 5, a plane-parallel beam-splitting plate 6 and an interference pattern recorder 7. The plate 6 is installed perpendicular to the optical axis of the interferometer so that the distances from its beam-splitting surface to the reference lens 5 and the controlled lens 8 are equal to each other. The interferometer works as follows o6j3a3OM. The beam of light from the source 1 passes the aperture 2, the beam splitter 3, the compensator 4, the reference lens 5 and falls on the plane-parallel beam splitting plate 6, which divides it into two parts. One part of the beam is refracted by the surface B of the reference lens 5, is reflected from its surface A and repeats its path in the opposite direction. The other part is refracted by the surface B of the controlled lens 8, is reflected from its surface A and repeats its path in the opposite direction. Having united on the beam-splitting plate 6, both parts interfere with each other and enter the recorder 7 of the interference pattern. Since both parts of the beam pass the same optical paths in the arms of the interferometer, it is not necessary to fully compensate for the beam beam aberrations that feed the beam-splitting plate 6, which significantly extends the range of parameters of the monitored lenses 8 and improves the accuracy of control by eliminating errors made by the compensator in the reverse course of the rays. Thus, the supply of the interferometer with a reference lens 5 and a plane-parallel beam-splitting plate makes it possible to increase the accuracy of control and expand the range of pairs of monitored lenses. An interferometer for controlling the quality of lenses, containing a light source arranged successively along its rays, a beam splitter, a compensator and an interference pattern recorder, characterized in that, in order to increase the accuracy of control and expand the range of parameters of controlled lenses, it is equipped with a reference lens koMneHcaTopOM, a plane-parallel beam-splitting plate mounted perpendicular to the optical axis of the interferometer behind the reference lens so that it is from the light-emitting diode The corresponding surface of the plate to the reference and controlled lenses are equal to each other. Sources of information taken into account during the examination 1. The author's certificate of the USSR 448347, cl. G 01 B 9/02.

2. USSR author's certificate No. 373519, cl. G 01 B 9/02, 12.03.73 (prototype).