SU475003A3 - Тонкопленочна структура - Google Patents
Тонкопленочна структураInfo
- Publication number
- SU475003A3 SU475003A3 SU1685902A SU1685902A SU475003A3 SU 475003 A3 SU475003 A3 SU 475003A3 SU 1685902 A SU1685902 A SU 1685902A SU 1685902 A SU1685902 A SU 1685902A SU 475003 A3 SU475003 A3 SU 475003A3
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- layer
- electrodes
- film structure
- capacitor
- thin film
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title description 4
- 239000003990 capacitor Substances 0.000 description 11
- 239000000758 substrate Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000007743 anodising Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 241000158147 Sator Species 0.000 description 1
- 229910004479 Ta2N Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- AIRRSBIRSIPRGM-UHFFFAOYSA-N [N].[Hf] Chemical compound [N].[Hf] AIRRSBIRSIPRGM-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000011505 plaster Substances 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US5661070A | 1970-07-20 | 1970-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU475003A3 true SU475003A3 (ru) | 1975-06-25 |
Family
ID=22005551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU1685902A SU475003A3 (ru) | 1970-07-20 | 1971-07-20 | Тонкопленочна структура |
Country Status (8)
| Country | Link |
|---|---|
| CA (1) | CA970878A (enExample) |
| DE (1) | DE2135567B2 (enExample) |
| FR (1) | FR2103114A5 (enExample) |
| GB (2) | GB1358387A (enExample) |
| MY (2) | MY7500235A (enExample) |
| NL (1) | NL7109916A (enExample) |
| SE (1) | SE369659B (enExample) |
| SU (1) | SU475003A3 (enExample) |
-
1971
- 1971-06-25 CA CA116,636A patent/CA970878A/en not_active Expired
- 1971-07-16 DE DE2135567A patent/DE2135567B2/de active Pending
- 1971-07-19 NL NL7109916A patent/NL7109916A/xx unknown
- 1971-07-19 SE SE09274/71A patent/SE369659B/xx unknown
- 1971-07-20 GB GB3402771A patent/GB1358387A/en not_active Expired
- 1971-07-20 SU SU1685902A patent/SU475003A3/ru active
- 1971-07-20 GB GB4800473A patent/GB1358388A/en not_active Expired
- 1971-07-20 FR FR7126543A patent/FR2103114A5/fr not_active Expired
-
1975
- 1975-12-30 MY MY235/75A patent/MY7500235A/xx unknown
- 1975-12-30 MY MY222/75A patent/MY7500222A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CA970878A (en) | 1975-07-08 |
| SE369659B (enExample) | 1974-09-09 |
| FR2103114A5 (enExample) | 1972-04-07 |
| MY7500235A (en) | 1975-12-31 |
| DE2135567A1 (de) | 1972-01-27 |
| NL7109916A (enExample) | 1972-01-24 |
| GB1358388A (en) | 1974-07-03 |
| MY7500222A (en) | 1975-12-31 |
| GB1358387A (en) | 1974-07-03 |
| DE2135567B2 (de) | 1974-10-10 |
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