SU469163A1 - Электронно-лучева термическа установка - Google Patents

Электронно-лучева термическа установка

Info

Publication number
SU469163A1
SU469163A1 SU1247754A SU1247754A SU469163A1 SU 469163 A1 SU469163 A1 SU 469163A1 SU 1247754 A SU1247754 A SU 1247754A SU 1247754 A SU1247754 A SU 1247754A SU 469163 A1 SU469163 A1 SU 469163A1
Authority
SU
USSR - Soviet Union
Prior art keywords
sensors
installation
electron beam
energy loss
inputs
Prior art date
Application number
SU1247754A
Other languages
English (en)
Russian (ru)
Inventor
Игорь Павлович Бруковский
Original Assignee
Московский Ордена Ленина Энергетический Институт
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Московский Ордена Ленина Энергетический Институт filed Critical Московский Ордена Ленина Энергетический Институт
Priority to SU1247754A priority Critical patent/SU469163A1/ru
Priority to SE818069A priority patent/SE360539B/xx
Priority to CS408969A priority patent/CS162029B1/cs
Priority to FR6919174A priority patent/FR2010604A1/fr
Priority to AT550769A priority patent/AT304716B/de
Priority to GB2931769A priority patent/GB1263532A/en
Priority to BE734363D priority patent/BE734363A/xx
Priority to DE19691929446 priority patent/DE1929446C/de
Priority to US00256489A priority patent/US3812319A/en
Application granted granted Critical
Publication of SU469163A1 publication Critical patent/SU469163A1/ru

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/19Control of temperature characterised by the use of electric means
    • G05D23/27Control of temperature characterised by the use of electric means with sensing element responsive to radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Measuring Fluid Pressure (AREA)
SU1247754A 1968-06-10 1968-06-10 Электронно-лучева термическа установка SU469163A1 (ru)

Priority Applications (9)

Application Number Priority Date Filing Date Title
SU1247754A SU469163A1 (ru) 1968-06-10 1968-06-10 Электронно-лучева термическа установка
SE818069A SE360539B (de) 1968-06-10 1969-06-09
CS408969A CS162029B1 (de) 1968-06-10 1969-06-10
FR6919174A FR2010604A1 (de) 1968-06-10 1969-06-10
AT550769A AT304716B (de) 1968-06-10 1969-06-10 Verfahren zur automatischen Regelung einer thermischen Elektronenstrahlanlage und Einrichtung zur Durchführung dieses Verfahrens
GB2931769A GB1263532A (en) 1968-06-10 1969-06-10 Electron beam heating apparatus and method of control thereof
BE734363D BE734363A (de) 1968-06-10 1969-06-10
DE19691929446 DE1929446C (de) 1968-06-10 1969-06-10 Verfahren zum Regeln und Abschalten der Strahlleistung in einer Elektronen bestrahlungsanlage und Elektronenbe Strahlungsanlage zur Durchfuhrung dieses Verfahrens
US00256489A US3812319A (en) 1968-06-10 1972-05-24 Automatic control of the duty cycle of an electron beam heating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU1247754A SU469163A1 (ru) 1968-06-10 1968-06-10 Электронно-лучева термическа установка

Publications (1)

Publication Number Publication Date
SU469163A1 true SU469163A1 (ru) 1975-04-30

Family

ID=20442679

Family Applications (1)

Application Number Title Priority Date Filing Date
SU1247754A SU469163A1 (ru) 1968-06-10 1968-06-10 Электронно-лучева термическа установка

Country Status (7)

Country Link
AT (1) AT304716B (de)
BE (1) BE734363A (de)
CS (1) CS162029B1 (de)
FR (1) FR2010604A1 (de)
GB (1) GB1263532A (de)
SE (1) SE360539B (de)
SU (1) SU469163A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2192607A3 (de) * 2008-12-01 2013-09-04 United Technologies Corporation Steuerung des Elektronenstrahlstroms zur Dampfabscheidung

Also Published As

Publication number Publication date
SE360539B (de) 1973-09-24
CS162029B1 (de) 1975-07-15
DE1929446A1 (de) 1970-01-02
AT304716B (de) 1973-01-25
DE1929446B2 (de) 1972-07-27
FR2010604A1 (de) 1970-02-20
GB1263532A (en) 1972-02-09
BE734363A (de) 1969-12-10

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