SU1662294A1 - Donor center passivation method for semiconductor structures - Google Patents

Donor center passivation method for semiconductor structures

Info

Publication number
SU1662294A1
SU1662294A1 SU4726790/25A SU4726790A SU1662294A1 SU 1662294 A1 SU1662294 A1 SU 1662294A1 SU 4726790/25 A SU4726790/25 A SU 4726790/25A SU 4726790 A SU4726790 A SU 4726790A SU 1662294 A1 SU1662294 A1 SU 1662294A1
Authority
SU
USSR - Soviet Union
Prior art keywords
semiconductor structures
passivation method
donor center
donor
center
Prior art date
Application number
SU4726790/25A
Other languages
Russian (ru)
Inventor
Е.А. Алейникова
Ю.Г. Белых
Б.А. Малахов
В.М. Сутырин
Original Assignee
Е.А. Алейникова
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Е.А. Алейникова filed Critical Е.А. Алейникова
Priority to SU4726790/25A priority Critical patent/SU1662294A1/en
Application granted granted Critical
Publication of SU1662294A1 publication Critical patent/SU1662294A1/en

Links

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  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

FIELD: microelectronics. SUBSTANCE: upon formation of safety mask, semiconductor structure is coated with aluminium layer. EFFECT: improved quality of treated structure due to elimination of defective layer on semiconductor surface; improved plasma stability of safety mask. 1 tbl
SU4726790/25A 1989-06-27 1989-06-27 Donor center passivation method for semiconductor structures SU1662294A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU4726790/25A SU1662294A1 (en) 1989-06-27 1989-06-27 Donor center passivation method for semiconductor structures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU4726790/25A SU1662294A1 (en) 1989-06-27 1989-06-27 Donor center passivation method for semiconductor structures

Publications (1)

Publication Number Publication Date
SU1662294A1 true SU1662294A1 (en) 1996-01-27

Family

ID=60530306

Family Applications (1)

Application Number Title Priority Date Filing Date
SU4726790/25A SU1662294A1 (en) 1989-06-27 1989-06-27 Donor center passivation method for semiconductor structures

Country Status (1)

Country Link
SU (1) SU1662294A1 (en)

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