SU1191980A1 - Растровый электронный микроскоп - Google Patents

Растровый электронный микроскоп Download PDF

Info

Publication number
SU1191980A1
SU1191980A1 SU762399525A SU2399525A SU1191980A1 SU 1191980 A1 SU1191980 A1 SU 1191980A1 SU 762399525 A SU762399525 A SU 762399525A SU 2399525 A SU2399525 A SU 2399525A SU 1191980 A1 SU1191980 A1 SU 1191980A1
Authority
SU
USSR - Soviet Union
Prior art keywords
specimen
measured
measuring system
grid
measuring
Prior art date
Application number
SU762399525A
Other languages
English (en)
Russian (ru)
Inventor
Хох Вольфганг
Вильд Герхард
Original Assignee
Volfgang Khokh
Gerkhard Vild
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Volfgang Khokh, Gerkhard Vild filed Critical Volfgang Khokh
Application granted granted Critical
Publication of SU1191980A1 publication Critical patent/SU1191980A1/ru

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
SU762399525A 1975-09-24 1976-09-20 Растровый электронный микроскоп SU1191980A1 (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18851275A DD124091A1 (forum.php) 1975-09-24 1975-09-24

Publications (1)

Publication Number Publication Date
SU1191980A1 true SU1191980A1 (ru) 1985-11-15

Family

ID=5501778

Family Applications (1)

Application Number Title Priority Date Filing Date
SU762399525A SU1191980A1 (ru) 1975-09-24 1976-09-20 Растровый электронный микроскоп

Country Status (5)

Country Link
DD (1) DD124091A1 (forum.php)
DE (1) DE2635356C2 (forum.php)
FR (1) FR2326030A1 (forum.php)
GB (1) GB1532862A (forum.php)
SU (1) SU1191980A1 (forum.php)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU534811B2 (en) * 1979-07-03 1984-02-16 Unisearch Limited Atmospheric scanning electron microscope
JPS5795056A (en) * 1980-12-05 1982-06-12 Hitachi Ltd Appearance inspecting process
JPS59112217A (ja) * 1982-11-29 1984-06-28 Toshiba Corp 寸法測定方法
JPS59163506A (ja) * 1983-03-09 1984-09-14 Hitachi Ltd 電子ビ−ム測長装置
WO1985004250A1 (en) * 1984-03-20 1985-09-26 Nixon, Larry, Sheldon Method and apparatus for precision sem measurements
US4677296A (en) * 1984-09-24 1987-06-30 Siemens Aktiengesellschaft Apparatus and method for measuring lengths in a scanning particle microscope
DE3802598C1 (forum.php) * 1988-01-29 1989-04-13 Karl Heinz 3057 Neustadt De Stellmann

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3876879A (en) * 1973-11-09 1975-04-08 Calspan Corp Method and apparatus for determining surface characteristics incorporating a scanning electron microscope

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Патент DE № 2236530, кл. Н 01 J 37/20, опублик. 1975. Патент US № 3648048, кл. Н 01 J 37/20, опублик. 1972.. *

Also Published As

Publication number Publication date
DE2635356C2 (de) 1984-08-16
DE2635356A1 (de) 1977-04-07
FR2326030A1 (fr) 1977-04-22
GB1532862A (en) 1978-11-22
DD124091A1 (forum.php) 1977-02-02
FR2326030B1 (forum.php) 1982-03-19

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