SK294892A3 - Method of manufacture of integrated optic components by use of silicon mask - Google Patents

Method of manufacture of integrated optic components by use of silicon mask Download PDF

Info

Publication number
SK294892A3
SK294892A3 SK2948-92A SK294892A SK294892A3 SK 294892 A3 SK294892 A3 SK 294892A3 SK 294892 A SK294892 A SK 294892A SK 294892 A3 SK294892 A3 SK 294892A3
Authority
SK
Slovakia
Prior art keywords
silicon
mask
layer
ion exchange
glass
Prior art date
Application number
SK2948-92A
Other languages
English (en)
Slovak (sk)
Inventor
Alain Beguin
Jean-Claude Presotto
Pascale Laborde
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of SK294892A3 publication Critical patent/SK294892A3/sk

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
    • C03C21/001—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
    • C03C21/002—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to perform ion-exchange between alkali ions
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Surface Treatment Of Glass (AREA)
SK2948-92A 1991-09-27 1992-09-25 Method of manufacture of integrated optic components by use of silicon mask SK294892A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9111923A FR2681855B1 (fr) 1991-09-27 1991-09-27 Procede de production de composants en optique integree par echange d'ions utilisant un masque en silicium, et procedes pour la realisation et l'elimination finale dudit masque.

Publications (1)

Publication Number Publication Date
SK294892A3 true SK294892A3 (en) 1995-03-08

Family

ID=9417366

Family Applications (1)

Application Number Title Priority Date Filing Date
SK2948-92A SK294892A3 (en) 1991-09-27 1992-09-25 Method of manufacture of integrated optic components by use of silicon mask

Country Status (14)

Country Link
US (1) US5281303A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0539711B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH05254892A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR930005929A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU (1) AU661029B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BR (1) BR9203676A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA2077984A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CZ (1) CZ294892A3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE69203324T2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2681855B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
HU (1) HUT64287A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
MX (1) MX9205500A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
SK (1) SK294892A3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW238414B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0619182B1 (en) * 1992-10-12 1999-03-31 Toray Industries, Inc. Water-proofing sheet having high hydraulic pressure resistance and high moisture permeability, and production thereof
FR2764309B1 (fr) * 1997-06-06 1999-08-27 Corning Inc Procede de creation d'une couche de silicium sur une surface
US8673163B2 (en) 2008-06-27 2014-03-18 Apple Inc. Method for fabricating thin sheets of glass
US7810355B2 (en) 2008-06-30 2010-10-12 Apple Inc. Full perimeter chemical strengthening of substrates
CN102388003B (zh) 2009-03-02 2014-11-19 苹果公司 用于强化用于便携式电子设备的玻璃盖的技术
US20110019354A1 (en) * 2009-03-02 2011-01-27 Christopher Prest Techniques for Strengthening Glass Covers for Portable Electronic Devices
US9778685B2 (en) 2011-05-04 2017-10-03 Apple Inc. Housing for portable electronic device with reduced border region
US9213451B2 (en) 2010-06-04 2015-12-15 Apple Inc. Thin glass for touch panel sensors and methods therefor
US10189743B2 (en) 2010-08-18 2019-01-29 Apple Inc. Enhanced strengthening of glass
US8873028B2 (en) 2010-08-26 2014-10-28 Apple Inc. Non-destructive stress profile determination in chemically tempered glass
US8824140B2 (en) 2010-09-17 2014-09-02 Apple Inc. Glass enclosure
US9725359B2 (en) 2011-03-16 2017-08-08 Apple Inc. Electronic device having selectively strengthened glass
US10781135B2 (en) * 2011-03-16 2020-09-22 Apple Inc. Strengthening variable thickness glass
US9128666B2 (en) 2011-05-04 2015-09-08 Apple Inc. Housing for portable electronic device with reduced border region
US9944554B2 (en) 2011-09-15 2018-04-17 Apple Inc. Perforated mother sheet for partial edge chemical strengthening and method therefor
US9516149B2 (en) 2011-09-29 2016-12-06 Apple Inc. Multi-layer transparent structures for electronic device housings
US10144669B2 (en) 2011-11-21 2018-12-04 Apple Inc. Self-optimizing chemical strengthening bath for glass
US8684613B2 (en) 2012-01-10 2014-04-01 Apple Inc. Integrated camera window
US10133156B2 (en) 2012-01-10 2018-11-20 Apple Inc. Fused opaque and clear glass for camera or display window
US8773848B2 (en) 2012-01-25 2014-07-08 Apple Inc. Fused glass device housings
US9946302B2 (en) 2012-09-19 2018-04-17 Apple Inc. Exposed glass article with inner recessed area for portable electronic device housing
US9459661B2 (en) 2013-06-19 2016-10-04 Apple Inc. Camouflaged openings in electronic device housings
US9886062B2 (en) 2014-02-28 2018-02-06 Apple Inc. Exposed glass article with enhanced stiffness for portable electronic device housing

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3575746A (en) * 1967-12-12 1971-04-20 Air Reduction Method for forming resistive and photoetched resistive and conductive glaze patterns
GB1279464A (en) * 1968-10-03 1972-06-28 Nippon Selfoc Co Ltd Production of light conducting glass fibres
US3857689A (en) * 1971-12-28 1974-12-31 Nippon Selfoc Co Ltd Ion exchange process for manufacturing integrated optical circuits
JPS5742547A (en) * 1980-08-25 1982-03-10 Nippon Telegr & Teleph Corp <Ntt> Preparation of optical glass part
CA1255382A (en) * 1984-08-10 1989-06-06 Masao Kawachi Hybrid optical integrated circuit with alignment guides
JPS6235524A (ja) * 1985-08-08 1987-02-16 Nec Corp 半導体装置の製造方法
JPH0727888B2 (ja) * 1985-10-22 1995-03-29 日本電信電話株式会社 ドライエツチング方法
US4842629A (en) * 1986-12-01 1989-06-27 Siemens Aktiengesellschaft Method for producing buried regions of raised refractive index in a glass member by ion exchange
JP2725319B2 (ja) * 1988-11-07 1998-03-11 富士通株式会社 荷電粒子線マスクの製造方法

Also Published As

Publication number Publication date
EP0539711A1 (en) 1993-05-05
AU661029B2 (en) 1995-07-13
EP0539711B1 (en) 1995-07-05
JPH05254892A (ja) 1993-10-05
KR930005929A (ko) 1993-04-20
AU2454192A (en) 1993-04-01
BR9203676A (pt) 1993-04-20
FR2681855A1 (fr) 1993-04-02
FR2681855B1 (fr) 1993-12-31
TW238414B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1995-01-11
DE69203324D1 (de) 1995-08-10
CZ294892A3 (en) 1993-04-14
DE69203324T2 (de) 1996-01-04
CA2077984A1 (en) 1993-03-28
MX9205500A (es) 1993-04-01
HU9203073D0 (en) 1992-12-28
HUT64287A (en) 1993-12-28
US5281303A (en) 1994-01-25

Similar Documents

Publication Publication Date Title
SK294892A3 (en) Method of manufacture of integrated optic components by use of silicon mask
US20060093833A1 (en) Components having crystalline coatings of the aluminum oxide/silicon oxide system and method for the production thereof
KR100294583B1 (ko) 전극패턴형성용 조성물
CN109065581A (zh) 一种柔性基板及其制备方法、阵列基板
US6171762B1 (en) Polarizing glasses having integral non-polarizing regions
KR100247819B1 (ko) 칼라필터의제조방법
RU2169713C2 (ru) Способ формирования удаляемого полиимидного покрытия для оптического волокна
US3711263A (en) Surface treatment of glass and similar materials
KR100568381B1 (ko) 반도체 처리장치 부품용 세정액 및 세정방법
JP2003014904A (ja) 撥水性薄膜を有する光学部材の製造方法
US5755947A (en) Adhesion enhancement for underplating problem
US4266008A (en) Method for etching thin films of niobium and niobium-containing compounds for preparing superconductive circuits
KR100388232B1 (ko) 유리기판상의 격자패턴 형성방법
RU2070616C1 (ru) Способ получения защитного покрытия на основе оксидов металлов на поверхности материалов и изделий
US12202007B2 (en) Transparent superhydrophobic composition
KR100463952B1 (ko) 완전한비-편광영역을갖는편광유리
JP2646979B2 (ja) ガラス基材上へのアルミナ膜形成方法
KR100510005B1 (ko) 유전체 보호층의 흡습 차단방법
JP2001510429A (ja) 一体形非偏光領域を有する偏光ガラス
Early et al. Repair of soft‐x‐ray optical elements by stripping and redeposition of Mo/Si reflective coatings
JPS5923106B2 (ja) 半導体装置の製造方法
US6458707B1 (en) Tool for semiconductor manufacturing apparatus and method for using the same
JPS62205267A (ja) 酸化アルミニウム膜の製造方法
JPH01251742A (ja) 表面処理方法
JPH0157884B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)