FR2681855B1 - Procede de production de composants en optique integree par echange d'ions utilisant un masque en silicium, et procedes pour la realisation et l'elimination finale dudit masque. - Google Patents

Procede de production de composants en optique integree par echange d'ions utilisant un masque en silicium, et procedes pour la realisation et l'elimination finale dudit masque.

Info

Publication number
FR2681855B1
FR2681855B1 FR9111923A FR9111923A FR2681855B1 FR 2681855 B1 FR2681855 B1 FR 2681855B1 FR 9111923 A FR9111923 A FR 9111923A FR 9111923 A FR9111923 A FR 9111923A FR 2681855 B1 FR2681855 B1 FR 2681855B1
Authority
FR
France
Prior art keywords
mask
making
methods
ion exchange
integrated optics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9111923A
Other languages
English (en)
French (fr)
Other versions
FR2681855A1 (fr
Inventor
Alain Beguin
Jean-Claude Presetto
Pascale Laborde
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Priority to FR9111923A priority Critical patent/FR2681855B1/fr
Priority to US07/943,187 priority patent/US5281303A/en
Priority to CA002077984A priority patent/CA2077984A1/en
Priority to AU24541/92A priority patent/AU661029B2/en
Priority to DE69203324T priority patent/DE69203324T2/de
Priority to EP92115885A priority patent/EP0539711B1/en
Priority to BR929203676A priority patent/BR9203676A/pt
Priority to CS922948A priority patent/CZ294892A3/cs
Priority to HU9203073A priority patent/HUT64287A/hu
Priority to MX9205500A priority patent/MX9205500A/es
Priority to SK2948-92A priority patent/SK294892A3/sk
Priority to KR1019920017609A priority patent/KR930005929A/ko
Priority to JP4281103A priority patent/JPH05254892A/ja
Priority to TW081107959A priority patent/TW238414B/zh
Publication of FR2681855A1 publication Critical patent/FR2681855A1/fr
Application granted granted Critical
Publication of FR2681855B1 publication Critical patent/FR2681855B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
    • C03C21/001—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
    • C03C21/002—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to perform ion-exchange between alkali ions
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Surface Treatment Of Glass (AREA)
FR9111923A 1991-09-27 1991-09-27 Procede de production de composants en optique integree par echange d'ions utilisant un masque en silicium, et procedes pour la realisation et l'elimination finale dudit masque. Expired - Fee Related FR2681855B1 (fr)

Priority Applications (14)

Application Number Priority Date Filing Date Title
FR9111923A FR2681855B1 (fr) 1991-09-27 1991-09-27 Procede de production de composants en optique integree par echange d'ions utilisant un masque en silicium, et procedes pour la realisation et l'elimination finale dudit masque.
US07/943,187 US5281303A (en) 1991-09-27 1992-09-10 Process for manufacturing integrated optical components using silicon mask
CA002077984A CA2077984A1 (en) 1991-09-27 1992-09-10 Process for manufacturing integrated optical components using silicon mask
AU24541/92A AU661029B2 (en) 1991-09-27 1992-09-17 Process for manufacturing integrated optical components using silicon mask
DE69203324T DE69203324T2 (de) 1991-09-27 1992-09-17 Verfahren zur Herstellung integraler optischen Komponenten unter Verwendung einer Siliciummaske.
EP92115885A EP0539711B1 (en) 1991-09-27 1992-09-17 Process for manufacturing integrated optical components using silicon mask
BR929203676A BR9203676A (pt) 1991-09-27 1992-09-22 Processo para fabricacao de componentes oticos integrados usando mascara de silicio
HU9203073A HUT64287A (en) 1991-09-27 1992-09-25 Method for manufacturing integrated optical components using silicium mask
CS922948A CZ294892A3 (en) 1991-09-27 1992-09-25 Process for producing integrated optical components by making use of silicon mask
MX9205500A MX9205500A (es) 1991-09-27 1992-09-25 Procedimiento para fabricar componentes opticos integrados que utiliza una mascara de silicio
SK2948-92A SK294892A3 (en) 1991-09-27 1992-09-25 Method of manufacture of integrated optic components by use of silicon mask
KR1019920017609A KR930005929A (ko) 1991-09-27 1992-09-26 실리콘 마스크를 이용한 통합된 광부품의 제조방법
JP4281103A JPH05254892A (ja) 1991-09-27 1992-09-28 集積光回路の作成方法
TW081107959A TW238414B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-09-27 1992-10-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9111923A FR2681855B1 (fr) 1991-09-27 1991-09-27 Procede de production de composants en optique integree par echange d'ions utilisant un masque en silicium, et procedes pour la realisation et l'elimination finale dudit masque.

Publications (2)

Publication Number Publication Date
FR2681855A1 FR2681855A1 (fr) 1993-04-02
FR2681855B1 true FR2681855B1 (fr) 1993-12-31

Family

ID=9417366

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9111923A Expired - Fee Related FR2681855B1 (fr) 1991-09-27 1991-09-27 Procede de production de composants en optique integree par echange d'ions utilisant un masque en silicium, et procedes pour la realisation et l'elimination finale dudit masque.

Country Status (14)

Country Link
US (1) US5281303A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0539711B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH05254892A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR930005929A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU (1) AU661029B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BR (1) BR9203676A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA2077984A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CZ (1) CZ294892A3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE69203324T2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2681855B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
HU (1) HUT64287A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
MX (1) MX9205500A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
SK (1) SK294892A3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW238414B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE178265T1 (de) * 1992-10-12 1999-04-15 Toray Industries Wasserdichtes gewebe mit hohem wasserdruckwiderstand und hoher dampfdurchlässigkeit, sowie dessen herstellung
FR2764309B1 (fr) * 1997-06-06 1999-08-27 Corning Inc Procede de creation d'une couche de silicium sur une surface
US8673163B2 (en) 2008-06-27 2014-03-18 Apple Inc. Method for fabricating thin sheets of glass
US7810355B2 (en) 2008-06-30 2010-10-12 Apple Inc. Full perimeter chemical strengthening of substrates
WO2010101961A2 (en) 2009-03-02 2010-09-10 Apple Inc. Techniques for strengthening glass covers for portable electronic devices
US20110019354A1 (en) * 2009-03-02 2011-01-27 Christopher Prest Techniques for Strengthening Glass Covers for Portable Electronic Devices
US9778685B2 (en) 2011-05-04 2017-10-03 Apple Inc. Housing for portable electronic device with reduced border region
US9213451B2 (en) 2010-06-04 2015-12-15 Apple Inc. Thin glass for touch panel sensors and methods therefor
US10189743B2 (en) 2010-08-18 2019-01-29 Apple Inc. Enhanced strengthening of glass
US8873028B2 (en) 2010-08-26 2014-10-28 Apple Inc. Non-destructive stress profile determination in chemically tempered glass
US8824140B2 (en) 2010-09-17 2014-09-02 Apple Inc. Glass enclosure
US9725359B2 (en) 2011-03-16 2017-08-08 Apple Inc. Electronic device having selectively strengthened glass
US10781135B2 (en) * 2011-03-16 2020-09-22 Apple Inc. Strengthening variable thickness glass
US9128666B2 (en) 2011-05-04 2015-09-08 Apple Inc. Housing for portable electronic device with reduced border region
US9944554B2 (en) 2011-09-15 2018-04-17 Apple Inc. Perforated mother sheet for partial edge chemical strengthening and method therefor
US9516149B2 (en) 2011-09-29 2016-12-06 Apple Inc. Multi-layer transparent structures for electronic device housings
US10144669B2 (en) 2011-11-21 2018-12-04 Apple Inc. Self-optimizing chemical strengthening bath for glass
US8684613B2 (en) 2012-01-10 2014-04-01 Apple Inc. Integrated camera window
US10133156B2 (en) 2012-01-10 2018-11-20 Apple Inc. Fused opaque and clear glass for camera or display window
US8773848B2 (en) 2012-01-25 2014-07-08 Apple Inc. Fused glass device housings
US9946302B2 (en) 2012-09-19 2018-04-17 Apple Inc. Exposed glass article with inner recessed area for portable electronic device housing
US9459661B2 (en) 2013-06-19 2016-10-04 Apple Inc. Camouflaged openings in electronic device housings
US9886062B2 (en) 2014-02-28 2018-02-06 Apple Inc. Exposed glass article with enhanced stiffness for portable electronic device housing

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3575746A (en) * 1967-12-12 1971-04-20 Air Reduction Method for forming resistive and photoetched resistive and conductive glaze patterns
GB1279464A (en) * 1968-10-03 1972-06-28 Nippon Selfoc Co Ltd Production of light conducting glass fibres
US3857689A (en) * 1971-12-28 1974-12-31 Nippon Selfoc Co Ltd Ion exchange process for manufacturing integrated optical circuits
JPS5742547A (en) * 1980-08-25 1982-03-10 Nippon Telegr & Teleph Corp <Ntt> Preparation of optical glass part
CA1255382A (en) * 1984-08-10 1989-06-06 Masao Kawachi Hybrid optical integrated circuit with alignment guides
JPS6235524A (ja) * 1985-08-08 1987-02-16 Nec Corp 半導体装置の製造方法
JPH0727888B2 (ja) * 1985-10-22 1995-03-29 日本電信電話株式会社 ドライエツチング方法
US4842629A (en) * 1986-12-01 1989-06-27 Siemens Aktiengesellschaft Method for producing buried regions of raised refractive index in a glass member by ion exchange
JP2725319B2 (ja) * 1988-11-07 1998-03-11 富士通株式会社 荷電粒子線マスクの製造方法

Also Published As

Publication number Publication date
AU661029B2 (en) 1995-07-13
AU2454192A (en) 1993-04-01
TW238414B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1995-01-11
US5281303A (en) 1994-01-25
CZ294892A3 (en) 1993-04-14
JPH05254892A (ja) 1993-10-05
FR2681855A1 (fr) 1993-04-02
EP0539711B1 (en) 1995-07-05
BR9203676A (pt) 1993-04-20
HU9203073D0 (en) 1992-12-28
SK294892A3 (en) 1995-03-08
KR930005929A (ko) 1993-04-20
MX9205500A (es) 1993-04-01
HUT64287A (en) 1993-12-28
EP0539711A1 (en) 1993-05-05
DE69203324T2 (de) 1996-01-04
CA2077984A1 (en) 1993-03-28
DE69203324D1 (de) 1995-08-10

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Legal Events

Date Code Title Description
ST Notification of lapse