SG76546A1 - Nozzle-injector for arc plasma deposition apparatus - Google Patents

Nozzle-injector for arc plasma deposition apparatus

Info

Publication number
SG76546A1
SG76546A1 SG1998001462A SG1998001462A SG76546A1 SG 76546 A1 SG76546 A1 SG 76546A1 SG 1998001462 A SG1998001462 A SG 1998001462A SG 1998001462 A SG1998001462 A SG 1998001462A SG 76546 A1 SG76546 A1 SG 76546A1
Authority
SG
Singapore
Prior art keywords
injector
nozzle
deposition apparatus
plasma deposition
arc plasma
Prior art date
Application number
SG1998001462A
Other languages
English (en)
Inventor
Barry Lee-Mean Yang
Original Assignee
Gen Electric
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Electric filed Critical Gen Electric
Publication of SG76546A1 publication Critical patent/SG76546A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
    • B05B7/22—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc
    • B05B7/222—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc
    • B05B7/226—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc the material being originally a particulate material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B05B12/12—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to conditions of ambient medium or target, e.g. humidity, temperature position or movement of the target relative to the spray apparatus
SG1998001462A 1997-06-26 1998-06-18 Nozzle-injector for arc plasma deposition apparatus SG76546A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US5083797P 1997-06-26 1997-06-26
US09/033,862 US6213049B1 (en) 1997-06-26 1998-03-03 Nozzle-injector for arc plasma deposition apparatus

Publications (1)

Publication Number Publication Date
SG76546A1 true SG76546A1 (en) 2000-11-21

Family

ID=26710231

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1998001462A SG76546A1 (en) 1997-06-26 1998-06-18 Nozzle-injector for arc plasma deposition apparatus

Country Status (7)

Country Link
US (1) US6213049B1 (zh)
EP (1) EP0887110B1 (zh)
JP (1) JPH1180963A (zh)
CN (1) CN1117890C (zh)
CA (1) CA2238158A1 (zh)
DE (1) DE69826183T2 (zh)
SG (1) SG76546A1 (zh)

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6015595A (en) * 1998-05-28 2000-01-18 Felts; John T. Multiple source deposition plasma apparatus
US6365016B1 (en) 1999-03-17 2002-04-02 General Electric Company Method and apparatus for arc plasma deposition with evaporation of reagents
US7091605B2 (en) * 2001-09-21 2006-08-15 Eastman Kodak Company Highly moisture-sensitive electronic device element and method for fabrication
TW588222B (en) * 2000-02-10 2004-05-21 Asml Netherlands Bv Cooling of voice coil motors in lithographic projection apparatus
JP4553471B2 (ja) * 2000-09-19 2010-09-29 東京エレクトロン株式会社 処理装置及び処理システム
US6641673B2 (en) * 2000-12-20 2003-11-04 General Electric Company Fluid injector for and method of prolonged delivery and distribution of reagents into plasma
US6397776B1 (en) * 2001-06-11 2002-06-04 General Electric Company Apparatus for large area chemical vapor deposition using multiple expanding thermal plasma generators
US6681716B2 (en) 2001-11-27 2004-01-27 General Electric Company Apparatus and method for depositing large area coatings on non-planar surfaces
US6948448B2 (en) * 2001-11-27 2005-09-27 General Electric Company Apparatus and method for depositing large area coatings on planar surfaces
NL1020634C2 (nl) * 2002-05-21 2003-11-24 Otb Group Bv Werkwijze voor het passiveren van een halfgeleider substraat.
US7282244B2 (en) * 2003-09-05 2007-10-16 General Electric Company Replaceable plate expanded thermal plasma apparatus and method
CN1965104A (zh) * 2004-03-09 2007-05-16 埃克阿泰克有限责任公司 膨胀式热等离子沉积系统
US7442271B2 (en) * 2004-04-07 2008-10-28 Board Of Trustees Of Michigan State University Miniature microwave plasma torch application and method of use thereof
SI1924387T1 (sl) * 2005-09-07 2012-03-30 Purratio Ag Postopek za proizvodnjo toplotne energije
DE102006038780A1 (de) * 2006-08-18 2008-02-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Herstellen einer Beschichtung
KR101448447B1 (ko) * 2006-10-24 2014-10-13 어플라이드 머티어리얼스, 인코포레이티드 원자 층 증착을 위한 보텍스 챔버 리드
US8945219B1 (en) 2007-05-11 2015-02-03 SDCmaterials, Inc. System for and method of introducing additives to biological materials using supercritical fluids
US8481449B1 (en) 2007-10-15 2013-07-09 SDCmaterials, Inc. Method and system for forming plug and play oxide catalysts
CA2658210A1 (en) * 2008-04-04 2009-10-04 Sulzer Metco Ag Method and apparatus for the coating and for the surface treatment of substrates by means of a plasma beam
CN102388680B (zh) * 2009-02-05 2015-07-08 苏舍美特科公司 等离子体涂覆设备和基材表面的涂覆或处理方法
US8803025B2 (en) * 2009-12-15 2014-08-12 SDCmaterials, Inc. Non-plugging D.C. plasma gun
US9126191B2 (en) 2009-12-15 2015-09-08 SDCmaterials, Inc. Advanced catalysts for automotive applications
US8652992B2 (en) 2009-12-15 2014-02-18 SDCmaterials, Inc. Pinning and affixing nano-active material
US8557727B2 (en) 2009-12-15 2013-10-15 SDCmaterials, Inc. Method of forming a catalyst with inhibited mobility of nano-active material
US8545652B1 (en) 2009-12-15 2013-10-01 SDCmaterials, Inc. Impact resistant material
US8470112B1 (en) 2009-12-15 2013-06-25 SDCmaterials, Inc. Workflow for novel composite materials
US9149797B2 (en) 2009-12-15 2015-10-06 SDCmaterials, Inc. Catalyst production method and system
US9119309B1 (en) 2009-12-15 2015-08-25 SDCmaterials, Inc. In situ oxide removal, dispersal and drying
WO2011108671A1 (ja) * 2010-03-04 2011-09-09 イマジニアリング株式会社 被膜形成装置、及び被膜形成物の製造方法
US8669202B2 (en) 2011-02-23 2014-03-11 SDCmaterials, Inc. Wet chemical and plasma methods of forming stable PtPd catalysts
US8361607B2 (en) 2011-04-14 2013-01-29 Exatec Llc Organic resin laminate
WO2012141708A1 (en) 2011-04-14 2012-10-18 Exatec Llc Organic resin laminate
KR20140071364A (ko) 2011-08-19 2014-06-11 에스디씨머티리얼스, 인코포레이티드 촉매작용에 사용하기 위한 코팅 기판 및 촉매 변환기 및 기판을 워시코트 조성물로 코팅하는 방법
KR101702471B1 (ko) 2011-08-26 2017-02-03 엑사테크 엘.엘.씨. 유기 수지 라미네이트, 이의 제조 및 이용 방법, 및 이를 포함하는 제품
US9156025B2 (en) 2012-11-21 2015-10-13 SDCmaterials, Inc. Three-way catalytic converter using nanoparticles
US9511352B2 (en) 2012-11-21 2016-12-06 SDCmaterials, Inc. Three-way catalytic converter using nanoparticles
EP3024571B1 (en) 2013-07-25 2020-05-27 Umicore AG & Co. KG Washcoats and coated substrates for catalytic converters
RU2541349C1 (ru) * 2013-10-11 2015-02-10 Федеральное государственное бюджетное учреждение науки Институт физического материаловедения Сибирского отделения Российской академии наук (ИФМ СО РАН) Высокоресурсный электродуговой генератор низкотемпературной плазмы с защитным наноструктурированным углеродным покрытием электродов
CA2926135A1 (en) 2013-10-22 2015-04-30 SDCmaterials, Inc. Compositions of lean nox trap
MX2016004991A (es) 2013-10-22 2016-08-01 Sdcmaterials Inc Diseño de catalizador para motores de combustion diesel de servicio pesado.
EP3060693B1 (en) * 2013-10-25 2018-06-27 United Technologies Corporation Plasma spraying system with adjustable coating medium nozzle
EP3119500A4 (en) 2014-03-21 2017-12-13 SDC Materials, Inc. Compositions for passive nox adsorption (pna) systems
US10657999B2 (en) * 2014-06-20 2020-05-19 Advanced Material Technologies, Inc. Plasma CVD device and method of manufacturing magnetic recording medium
CN104046946A (zh) * 2014-07-04 2014-09-17 苏州普京真空技术有限公司 真空电离镀膜机
JP6545053B2 (ja) * 2015-03-30 2019-07-17 東京エレクトロン株式会社 処理装置および処理方法、ならびにガスクラスター発生装置および発生方法
WO2016158054A1 (ja) * 2015-03-30 2016-10-06 東京エレクトロン株式会社 処理装置および処理方法、ならびにガスクラスター発生装置および発生方法
DE102016104863B4 (de) * 2016-03-16 2023-11-02 Lisa Dräxlmaier GmbH Vorrichtung zum Bedampfen eines Bauteils

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3892882A (en) 1973-05-25 1975-07-01 Union Carbide Corp Process for plasma flame spray coating in a sub-atmospheric pressure environment
DE3538390A1 (de) 1985-10-29 1987-04-30 Deutsche Forsch Luft Raumfahrt Beschichtung fuer ein substrat und verfahren zu dessen herstellung
GB8713986D0 (en) 1987-06-16 1987-07-22 Shell Int Research Apparatus for plasma surface treating
NL8701530A (nl) 1987-06-30 1989-01-16 Stichting Fund Ond Material Werkwijze voor het behandelen van oppervlakken van substraten met behulp van een plasma en reactor voor het uitvoeren van die werkwijze.
US4882465A (en) * 1987-10-01 1989-11-21 Olin Corporation Arcjet thruster with improved arc attachment for enhancement of efficiency
US4948485A (en) 1988-11-23 1990-08-14 Plasmacarb Inc. Cascade arc plasma torch and a process for plasma polymerization
US5104634A (en) 1989-04-20 1992-04-14 Hercules Incorporated Process for forming diamond coating using a silent discharge plasma jet process
US5356674A (en) 1989-05-04 1994-10-18 Deutsche Forschungsanstalt Fuer Luft-Raumfahrt E.V. Process for applying ceramic coatings using a plasma jet carrying a free form non-metallic element
US5358596A (en) 1992-07-02 1994-10-25 The Board Of Trustees Of The Leland Stanford Junior University Method and apparatus for growing diamond films
DE9215133U1 (zh) 1992-11-06 1993-01-28 Plasma-Technik Ag, Wohlen, Ch
US5278384A (en) 1992-12-03 1994-01-11 Plasmacarb Inc. Apparatus and process for the treatment of powder particles for modifying the surface properties of the individual particles
US5679167A (en) 1994-08-18 1997-10-21 Sulzer Metco Ag Plasma gun apparatus for forming dense, uniform coatings on large substrates

Also Published As

Publication number Publication date
JPH1180963A (ja) 1999-03-26
EP0887110A1 (en) 1998-12-30
DE69826183D1 (de) 2004-10-21
US6213049B1 (en) 2001-04-10
DE69826183T2 (de) 2005-11-17
EP0887110B1 (en) 2004-09-15
CA2238158A1 (en) 1998-12-26
CN1117890C (zh) 2003-08-13
CN1210902A (zh) 1999-03-17

Similar Documents

Publication Publication Date Title
SG76546A1 (en) Nozzle-injector for arc plasma deposition apparatus
SG93269A1 (en) Plasma arc torch
SG67546A1 (en) Cathodic arc vapor deposition apparatus
AU7828298A (en) Plasma torch
EP0706425A4 (en) SELECTIVE PLASMA DEPOSIT
AU5840798A (en) Drag cup for plasma arc torch
GB2311298B (en) Inductively coupled plasma chemical vapor deposition apparatus
SG68057A1 (en) Protective coating by high rate arc plasma deposition
SG63778A1 (en) Plasma processing apparatus
EP1096554A4 (en) PLASMIC TREATMENT APPARATUS
GB9620151D0 (en) Plasma processing apparatus
TW479915U (en) Plasma treatment apparatus
EP0822736A4 (en) ELECTRODE FOR ARC PLASMA TORCHERS
SG67548A1 (en) Cathodic arc vapor deposition apparatus (annular cathode)
GB2319941B (en) Plasma gas processing
SG66424A1 (en) Plasma processing apparatus
ZA988196B (en) Controlled plasma arc cutting
EP0875329A4 (en) CARTRIDGE-LIKE PLASMA BURNER
EP0810053A4 (en) PLASMA TORCH
EP1009199A4 (en) METHOD FOR REGULATING A PLASMA TREATMENT DEVICE
EP1023155A4 (en) DEVICE FOR CONTINUOUS VACUUM FORMING
GB9722408D0 (en) Plasma processing apparatus
AU1026897A (en) Torch for inductively coupled plasma spectrometry
GB2298084B (en) Fluid-cooled plasma applicator for plasma systems
EP1035569A4 (en) PLASMA DEPOSITION OF FILMS