GB2298084B - Fluid-cooled plasma applicator for plasma systems - Google Patents

Fluid-cooled plasma applicator for plasma systems

Info

Publication number
GB2298084B
GB2298084B GB9524898A GB9524898A GB2298084B GB 2298084 B GB2298084 B GB 2298084B GB 9524898 A GB9524898 A GB 9524898A GB 9524898 A GB9524898 A GB 9524898A GB 2298084 B GB2298084 B GB 2298084B
Authority
GB
United Kingdom
Prior art keywords
plasma
fluid
cooled
systems
applicator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB9524898A
Other versions
GB9524898D0 (en
GB2298084A (en
Inventor
William M Holber
Donald K Smith
Matthew M Besen
Matthew P Fitzner
Eric J Georgelis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Science and Technology Inc
Original Assignee
Applied Science and Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/389,243 external-priority patent/US5625259A/en
Priority claimed from US08/389,250 external-priority patent/US5568015A/en
Application filed by Applied Science and Technology Inc filed Critical Applied Science and Technology Inc
Publication of GB9524898D0 publication Critical patent/GB9524898D0/en
Publication of GB2298084A publication Critical patent/GB2298084A/en
Application granted granted Critical
Publication of GB2298084B publication Critical patent/GB2298084B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
GB9524898A 1995-02-16 1995-12-05 Fluid-cooled plasma applicator for plasma systems Expired - Lifetime GB2298084B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/389,243 US5625259A (en) 1995-02-16 1995-02-16 Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube
US08/389,250 US5568015A (en) 1995-02-16 1995-02-16 Fluid-cooled dielectric window for a plasma system

Publications (3)

Publication Number Publication Date
GB9524898D0 GB9524898D0 (en) 1996-02-07
GB2298084A GB2298084A (en) 1996-08-21
GB2298084B true GB2298084B (en) 1999-08-25

Family

ID=27012612

Family Applications (2)

Application Number Title Priority Date Filing Date
GB9524898A Expired - Lifetime GB2298084B (en) 1995-02-16 1995-12-05 Fluid-cooled plasma applicator for plasma systems
GBGB9910653.6A Ceased GB9910653D0 (en) 1995-02-16 1999-05-07 Microwave plasma systems

Family Applications After (1)

Application Number Title Priority Date Filing Date
GBGB9910653.6A Ceased GB9910653D0 (en) 1995-02-16 1999-05-07 Microwave plasma systems

Country Status (2)

Country Link
JP (3) JPH08222397A (en)
GB (2) GB2298084B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7183514B2 (en) * 2003-01-30 2007-02-27 Axcelis Technologies, Inc. Helix coupled remote plasma source
JP4735095B2 (en) * 2005-07-15 2011-07-27 東京エレクトロン株式会社 Apparatus for measuring electric field distribution of remote plasma generation unit, remote plasma generation unit, processing apparatus, and method for adjusting characteristics of remote plasma generation unit
KR100725105B1 (en) * 2006-07-12 2007-06-04 삼성전자주식회사 Appilicator semiconductor manufacture device
US9653266B2 (en) * 2014-03-27 2017-05-16 Mks Instruments, Inc. Microwave plasma applicator with improved power uniformity
KR101734900B1 (en) 2015-09-14 2017-05-24 한국기초과학지원연구원 Surface wave plasma applicator for efficient electromagnetic wave propagation
KR101820242B1 (en) * 2016-08-02 2018-01-18 한국기초과학지원연구원 Water-cooled type surface wave plasma generating apparatus
KR101830007B1 (en) * 2016-11-11 2018-02-19 한국기초과학지원연구원 COAXIAL CABLE COUPLED and WATER-COOLED TYPE SURFACE WAVE PLASMA GENERATING APPARATUS
CN107949145A (en) * 2017-12-27 2018-04-20 长沙新材料产业研究院有限公司 A kind of microwave-excited plasma device
CN111741582A (en) * 2020-07-02 2020-10-02 安徽纯源镀膜科技有限公司 Transmission channel device for plasma transmission and coating equipment

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4431901A (en) * 1982-07-02 1984-02-14 The United States Of America As Represented By The United States Department Of Energy Induction plasma tube
US5262610A (en) * 1991-03-29 1993-11-16 The United States Of America As Represented By The Air Force Low particulate reliability enhanced remote microwave plasma discharge device
WO1994006263A1 (en) * 1992-09-01 1994-03-17 The University Of North Carolina At Chapel Hill High pressure magnetically assisted inductively coupled plasma

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013740B2 (en) * 1976-11-15 1985-04-09 株式会社東芝 Activated gas generator
JPH048429A (en) * 1990-04-24 1992-01-13 Matsushita Electric Ind Co Ltd Screw floating detector

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4431901A (en) * 1982-07-02 1984-02-14 The United States Of America As Represented By The United States Department Of Energy Induction plasma tube
US5262610A (en) * 1991-03-29 1993-11-16 The United States Of America As Represented By The Air Force Low particulate reliability enhanced remote microwave plasma discharge device
WO1994006263A1 (en) * 1992-09-01 1994-03-17 The University Of North Carolina At Chapel Hill High pressure magnetically assisted inductively coupled plasma

Also Published As

Publication number Publication date
GB9524898D0 (en) 1996-02-07
GB9910653D0 (en) 1999-07-07
JP2010103121A (en) 2010-05-06
JP2006164991A (en) 2006-06-22
JPH08222397A (en) 1996-08-30
GB2298084A (en) 1996-08-21

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Expiry date: 20151204