KR101820242B1 - Water-cooled type surface wave plasma generating apparatus - Google Patents

Abstract

Disclosed is a water cooling surface wave plasma generating device. The device includes: a waveguide transmitting electromagnetic waves; a dielectric tube having a first end part coupled electromagnetically with the waveguide to enable the inflow of the electromagnetic waves from the waveguide; a cooling jacket formed into a hollow tube, surrounding a part or the whole of the length of the dielectric tube exposed outside the waveguide to make the inner surface of the hollow tube touch the outer surface of the dielectric tube, moving cooling fluids from the outside of the tube in longitudinal and circumferential directions of the tube, and located between the inner and outer surfaces of the tube; and a discharge gas injecting part connected to the dielectric tube to be communicable with fluids to inject discharge gas into the dielectric tube.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a water-cooled surface wave plasma generator,

TECHNICAL FIELD The present invention relates to a surface acoustic wave plasma generator, and more particularly, to an indirect cooling type water-cooled surface acoustic wave plasma generator in which leakage of a cooling fluid for cooling a dielectric tube is eliminated.

Since the surface wave plasma enables the over plasma to be generated by the surface waves propagated to the interface between the plasma and the dielectric, and has the structure in which the electromagnetic wave generator or the antenna is applied to the outside of the chamber, It has a very simple, efficient and flexible structure. In addition, it can operate in a very wide pressure range from tens of mTorr to atmospheric pressure, and the density can range from about 10E8 to 10E15 cm ^ -3. In addition, it has higher electron temperature and is more efficient than conventional DC / RF methods for molecular dissociation and radical generation. As a result, surface wave plasmas have been widely used in semiconductor processing fields such as remote cleaning, radical generation, decomposition / reduction of greenhouse gases (SF ₆ , CF ₄ , PFC, etc.), semiconductor passivation and film removal processes.

1, a waveguide 10 for transmitting an electromagnetic wave is connected to a discharge tube 20 perpendicular to the direction of electromagnetic wave transmission, as shown in FIG. 1, It is penetrating. The discharge tube (20) is made of a dielectric material through which the electromagnetic wave can pass, and the discharge gas is injected into the discharge tube (20). In this structure, the electromagnetic wave transmitted through the waveguide 10 is introduced to the inside of the discharge tube 20, and the electromagnetic wave introduced into the inside of the discharge tube 20 reacts with the discharge gas injected into the discharge tube 20, 20 to generate a plasma.

In order to generate a surface wave, the surface wave plasma apparatus shown in FIG. 1 must transmit electromagnetic waves to the plasma through the dielectric. Since the generated plasma has a very high thermal load, the discharge tube, which is a dielectric, Should be prevented. To this end, the surface wave plasma discharge tube has a dual tube structure for injecting a cooling fluid, and a cooling fluid flows between the inner tube and the outer tube.

Cooling of the dielectric discharge tube is usually cooled sufficiently by air cooling when the plasma density is low. However, when the density is high, direct cooling by the cooling fluid is used. In terms of electromagnetic wave propagation, the cooling fluid between the inner tube and the outer tube There is a low efficiency aspect due to existence.

The types of cooling fluid are mainly dielectric oil and non-ionic water (D.I water).

In the case of dielectric oil, there is no significant loss of electromagnetic wave transmission efficiency due to the low loss tangent of the dielectric, but due to the low cooling efficiency of the oil, high pressure and large flow rate cooling cycles are required and high power consumption is required for this An additional oil chiller is required. One of the biggest drawbacks is the fact that this oil cooling fluid can be a major source of contamination in semiconductor / display processes, where cleanliness is paramount, so it reluctantly uses oil as a cooling fluid. In order to improve this, non-ionized water is used. The non-ionized water has a high cooling efficiency, but it is difficult to obtain a dielectric characteristic of high purity such as dielectric oil, so that it experiences higher energy loss than using dielectric oil. Therefore, it is necessary to design a discharge tube that minimizes the electromagnetic wave loss when designing the discharge tube.

The biggest disadvantage of the cooling system using the refrigerant is that the cooling fluid can flow directly into the chamber during the cracking of the dielectric discharge tube, and a method that can fundamentally solve this problem is needed.

The structure of the discharge tube of such a surface wave plasma apparatus is limited in terms of its performance, operation range, application field, etc., such as limitation of applied electromagnetic wave power, restriction of the processable gas flow rate and reduction of the amount of radicals that can be generated. It has acted as a cause.

Therefore, a problem to be solved by the present invention is to reduce the size of the dielectric tube, to prevent the cooling fluid from flowing into the dielectric tube during the cracking of the dielectric tube, and to prevent the electromagnetic wave input into the dielectric tube from being lost by the cooling fluid The present invention provides a water-cooled surface wave plasma generator capable of efficiently transmitting electromagnetic waves into a dielectric tube without loss of electromagnetic waves.

The water-cooled surface wave plasma generator of the present invention comprises: a waveguide for transmitting an electromagnetic wave; A dielectric tube having a first end of the dielectric tube coupled with the waveguide so as to allow electromagnetic waves to be transmitted through the waveguide; A hollow tube type and enclosing the whole or a part of the length of a portion of the dielectric tube exposed to the outside of the wave tube so that the inner surface of the tube is in contact with the outer surface of the dielectric tube, A cooling jacket moving along the longitudinal and circumferential directions of the cooling jacket and positioned between the inner and outer surfaces of the tube; And a discharge gas injection unit connected in fluid communication with the dielectric tube to inject a discharge gas into the dielectric tube.

The discharge gas injection portion is fluidly connected to the dielectric tube at a location adjacent the first end of the dielectric tube coupled to the waveguide.

In one embodiment, the water-cooled surface wave plasma generator further comprises an antenna, the antenna protruding from the inner surface position of the waveguide towards the first end of the dielectric tube and facing the first end of the dielectric tube have.

Wherein a first end of the dielectric tube is located within the waveguide, either within the cooling jacket or through one surface of the waveguide opposite the antenna, and the protruding length of the antenna located within the waveguide is greater than the first length of the dielectric tube And may be a length that can be in contact with or spaced from the end.

Preferably, the protruding length of the antenna located in the waveguide is at least half the height C in the waveguide parallel to the protruding direction of the antenna, wherein the first end of the dielectric tube is connected to the cooling jacket Or may be located inside the waveguide as it passes through one surface of the waveguide facing the antenna, and may be in contact with or spaced from the antenna.

The thickness or diameter (A) of the antenna may be smaller than the inner diameter (B) of the dielectric tube.

In one embodiment, the water-cooled surface wave plasma generator further includes a cooling fluid circulation unit having a second cooling flow path through which a cooling fluid circulates, wherein the cooling fluid circulation unit is formed integrally with the antenna at a rear end of the antenna, May be coupled to the waveguide such that the waveguide passes through the waveguide and is located within the waveguide.

In one embodiment, the cooling system may further include a cooling fluid circulation pipe connected from the first cooling flow path to the second cooling flow path.

In one embodiment, the waveguide or the antenna and the dielectric tube are coupled to surround the first end of the antenna and the dielectric tube, or the waveguide or the antenna and the dielectric tube are arranged to surround the antenna and be in contact with or spaced from the first end of the dielectric tube. And a cover member made of a dielectric to be coupled.

According to the water-cooled surface wave plasma generator according to the present invention, the size of the dielectric tube is reduced, the cooling fluid does not flow into the dielectric tube when the dielectric tube is cracked, and the electromagnetic wave input into the dielectric tube is cooled by the cooling fluid There is an advantage that the electromagnetic wave can be efficiently transferred into the dielectric tube without loss of the electromagnetic wave.

1 is a diagram showing a configuration of a conventional surface wave plasma apparatus.
2 is a perspective view showing an appearance of a water-cooled surface wave plasma generator according to an embodiment of the present invention.
3 is a cross-sectional view of the water-cooled surface wave plasma generator shown in Fig.
FIG. 4 is a cross-sectional view showing another example of electromagnetic wave coupling state of a dielectric tube through an antenna of a water-cooled surface wave plasma generator according to an embodiment of the present invention.
5 is a cross-sectional view showing another example of electromagnetic wave coupling state of a dielectric tube through an antenna of a water-cooled surface wave plasma generator according to an embodiment of the present invention.

Hereinafter, a water-cooled surface wave plasma generator according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention in order to clarify the present invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a part or a combination thereof is described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

FIG. 2 is a perspective view showing an external appearance of a water-cooled surface wave plasma generator according to an embodiment of the present invention, and FIG. 3 is a cross-sectional view of the water-cooled surface wave plasma generator shown in FIG.

2 and 3, in an embodiment of the present invention, a water-cooled surface wave plasma generator includes a waveguide 100, a dielectric tube 200, a cooling jacket 300, and a discharge gas injection unit 400 .

The waveguide 100 receives an electromagnetic wave generated from an oscillator and transfers an electromagnetic wave along an internal transmission path. As an example, the waveguide 100 may be a waveguide having an impedance such that an electromagnetic wave in the frequency range of 2.45 GHz can be input.

The dielectric tube 200 is a discharge tube in which an electromagnetic wave and a discharge gas react in an inner space to generate a high-temperature plasma. The dielectric tube 200 is coupled to the waveguide 100 for input of electromagnetic waves into the inner space. 2, the first end 210 of the dielectric tube 200 may be inserted into one side of the waveguide 100 so that the first end 210 side may be inserted into the waveguide 100 have. In this case, the electromagnetic wave coupling state in which the power of the electromagnetic wave transmitted through the waveguide 100 through the portion inserted into the waveguide 100 can be inputted into the inner space of the dielectric tube 200 can be achieved. The shape of the dielectric tube 200 is not particularly limited. For example, the dielectric tube 200 may be cylindrical.

The cooling jacket 300 is provided to cool the dielectric tube 200. The cooling jacket 300 is formed in the shape of a hollow tube having an inner diameter capable of wrapping the dielectric tube 200 so that the inner surface of the cooling jacket 300 contacts the outer surface of the dielectric tube 200 to surround the dielectric tube 200. The length of the cooling jacket 300 is not particularly limited and may have a length that can cover the entire length or a part of the length of the dielectric tube 200 exposed to the outside of the waveguide 100. 3, the cooling jacket 300 may be positioned within the waveguide 100 when the first end 210 of the dielectric tube 200 is positioned within the waveguide 100 through one side of the waveguide 100. In one embodiment, The dielectric tube 200 may be formed of a metal such as aluminum or the like.

The cooling jacket 300 includes a first cooling channel 310 for cooling the dielectric tube 200 as described above, and circulating the cooling fluid. The first cooling passage 310 is formed to move the cooling fluid along the longitudinal and circumferential directions of the cooling jacket 300. For example, the first cooling channel 310 may have a circular ring shape and a circular annular shape extending in the longitudinal direction of the cooling jacket 300 when viewed in a section perpendicular to the axial direction of the cooling jacket 300 . The first cooling channel 310 is located between the inner surface and the outer surface of the cooling jacket 300 and is not in contact with the outer surface of the dielectric tube 200. Accordingly, the cooling fluid traveling along the first cooling channel 310 can move only within the cooling jacket 300 without contacting the dielectric tube 200. [ The first cooling passage 310 may include an inlet portion and an outlet portion so that the cooling fluid circulates in and out of the cooling jacket 300.

The cooling jacket 300 may be formed of a metal having high thermal conductivity for cooling the dielectric tube 200 by covering the dielectric tube 200. For example, the cooling jacket 300 may be made of aluminum.

The discharge gas injection unit 400 is fluidly connected to the dielectric tube 200 to inject the discharge gas into the dielectric tube 200. The discharge gas injection unit 400 includes a gas injection pipe 410 connected to the dielectric tube 200 through the cooling jacket 300 and a gas injection port 420 provided at an upper end of the gas injection pipe 410, . ≪ / RTI > In this case, the gas injection pipe 410 is passed through the cooling jacket 300 so as not to pass through the first cooling channel 310 formed in the cooling jacket 300. The position of the discharge gas injection unit 400 is disposed at a position where interference does not occur in the first cooling channel 310. Preferably, the discharge gas injects a discharge gas The portion 400 is disposed at a position adjacent to the first end 210 of the dielectric tube 200.

Meanwhile, the water-cooled surface wave plasma generator according to the present invention includes an antenna unit 500 and a lid member 600 for efficiently transmitting electromagnetic waves to the dielectric tube 200.

The antenna unit 500 includes an antenna 510 and a cooling fluid circulating unit 520.

The antenna 510 protrudes from the inner surface of one side of the waveguide 100 facing the longitudinal direction of the dielectric tube 200 in the direction of the dielectric tube 200 inside the waveguide 100. The antenna 510 has a columnar shape. For example, it may be a cylindrical shape. The antenna 510 radiates electromagnetic waves transmitted through the waveguide 100 toward the first end 210 of the dielectric tube 200 to input electromagnetic waves into the dielectric tube 200.

The protruding length of the antenna 510 may be long enough to be spaced apart from or in contact with the first end 210 of the dielectric tube 200. The protruded length of the antenna 510 may be a length equal to or longer than a half of the height C in the waveguide 100 parallel to the protruding direction of the antenna 510. [

FIG. 4 is a cross-sectional view illustrating another exemplary electromagnetic coupling state of a dielectric tube through an antenna of a water-cooled surface wave plasma generator according to an embodiment of the present invention. FIG. 5 is a cross- Sectional view showing another example of the electromagnetic wave coupling state of the dielectric tube through the antenna of the apparatus.

FIG. 3 shows an example of the electromagnetic wave coupling state of the dielectric tube through the antenna. 3, the protruded length of the antenna 510 may be set to have a length corresponding to a half of the height C in the waveguide 100 parallel to the protruding direction of the antenna 510 And the length inserted into the waveguide 100 of the first end 210 of the dielectric tube 200 may be a length that can be spaced apart from the antenna 510.

4, the protruding length of the antenna 510 may be a length that can pass through one side of the waveguide 100 adjacent to the dielectric tube 200, The first end 210 may be located within the cooling jacket 300 and may be proximate to the antenna 510.

5, the protruding length of the antenna 510 is a length that can be inserted into the cooling jacket 300 through the one side of the waveguide 100 adjacent to the dielectric tube 200. In other words, The first end 210 of the dielectric tube 200 may be located inside the cooling jacket 300 and be adjacent to the antenna 510 in close proximity.

In the examples of the electromagnetic coupling of the dielectric tube through the antenna in FIGS. 3 to 5, the columnar thickness or diameter A of the antenna 510 is greater than the inner diameter B of the dielectric tube 200 And is formed to have a small thickness or diameter. Since the thickness or the diameter A of the antenna 510 is formed to be smaller than the inner diameter B of the dielectric tube 200, the electromagnetic waves radiated from the antenna 510 can be uniformly radiated in the entire diametrical direction of the dielectric tube 200 .

The cooling fluid circulating unit 520 is integrally formed with the antenna 510 at the rear end of the antenna 510 and includes a second cooling flow path 521. For example, the cooling fluid circulating unit 520 may be in the form of a disk having a thickness allowing the circulation of the cooling fluid. The second cooling passage 521 may be formed in the interior of the disk. In this case, the second cooling passage 521 may be formed in a disk-like circular shape along a disk-shaped circumferential direction. The second cooling flow path 521 may include an inlet portion and an outlet portion such that the cooling fluid circulates inside and outside the cooling fluid circulating portion 520.

The antenna unit 500 may be made of a metal having high thermal conductivity. For example, it may be made of copper.

The lid member 600 connects the antenna 510 and the dielectric tube 200. 3, the lid member 600 is coupled to the waveguide 100 so as to enclose the antenna 510 and the first end 210 of the dielectric tube 200 inserted into the waveguide 100, . As another example, the lid member 600 may be combined with the waveguide 100 to surround the entirety of the antenna 510 and to be in contact with the dielectric tube 200, as shown in Fig. 5, the lid member 600 surrounds the entirety of the antenna 510 inserted into the cooling jacket 300 and partially covers the waveguide 100 so as to be in contact with the dielectric tube 200, Lt; / RTI >

The lid member 600 is made of a dielectric material. The electromagnetic wave transmitted from the inside of the waveguide 100 can be transmitted to the antenna 510 and the electromagnetic wave transmitted to the dielectric tube 200 through the antenna 510 can be blocked Do not. The lid member 600 serves as a connecting member for contacting the antenna 510 and the dielectric tube 200 so that the heat of the antenna 510 cooled through the second cooling channel 521 is transmitted to the dielectric tube 200, May be conducted to the first end 210 of the dielectric tube 200 to cool the first end 210 of the dielectric tube 200.

On the other hand, the first cooling flow path 310 of the cooling jacket 300 through which the cooling fluid circulates and the second cooling flow path 521 of the antenna section 500 may independently circulate the cooling fluid, The cooling fluid circulation pipe 700 is connected to the first cooling flow path 310 and the second cooling flow path 521 so that the cooling fluid flows from the first cooling flow path 310 to the second cooling flow path 521, 2 circulation from the cooling passage 521 to the first cooling passage 310.

The cooling fluid circulation pipe 700 may be connected between the outlet portion 521a of the second cooling flow path 521 and the inlet portion 310a of the first cooling flow path 310. [ In this case, the cooling fluid flows into the inlet portion 521b of the second cooling passage 521 and then flows along the second cooling passage 521, the cooling fluid circulation pipe 700 and the first cooling passage 310 sequentially The cooling fluid discharged to the outlet portion 310b of the first cooling flow path 310 can be discharged to the outlet portion 310b of the first cooling flow path 310 by storing and pumping the cooling fluid May be recovered by a cooling fluid supply unit (not shown), and then supplied to the inlet 521b of the second cooling channel 521 to be circulated.

Hereinafter, a process of generating plasma in the water-cooled surface wave plasma generator according to the embodiment of the present invention will be described.

First, an electromagnetic wave oscillated from the oscillator is input to the waveguide 100, and a discharge gas is injected through the discharge gas injection unit 400.

The electromagnetic wave transmitted from the waveguide 100 is radiated to the first end 210 of the dielectric tube 200 through the antenna 510 positioned in the waveguide 100. Since the first end 210 of the antenna 510 or the antenna 510 and the first end 210 of the dielectric tube 200 surrounds the lid member 600 which is a dielectric, electromagnetic waves transmitted through the waveguide 100 are transmitted to the antenna 510 So that the electromagnetic waves radiated from the antenna 510 are efficiently transmitted to the first end 210 of the dielectric tube 200 without loss and electromagnetic waves are input into the dielectric tube 200. [

The electromagnetic wave inputted into the dielectric tube 200 reacts with the discharge gas injected into the dielectric tube 200 from the discharge gas injection unit 400 to generate a high-temperature plasma.

The cooling water is cooled by the inlet 521b of the second cooling passage 521 in the cooling fluid circulating unit 520 of the antenna unit 500 to cool the dielectric tube 200 whose temperature has been raised through the generated high- Fluid can be injected. In this case, the cooling fluid injected into the second cooling flow path 521 moves along the second cooling flow path 521. As the cooling fluid moves along the second cooling flow path 521, the antenna 510 formed integrally with the cooling fluid circulating unit 520 and the cooling fluid circulating unit 520 of the antenna unit 500 is cooled. Since the antenna 510 is connected to the first end 210 of the dielectric tube 200 through the cover member 600 so that the heat of the cooled antenna 510 is transmitted to the cover member 600 To the first end 210 of the dielectric tube 200 so that the first end 210 side of the dielectric tube 200 can be cooled.

The cooling fluid flows along the cooling water circulation pipe 700 connected to the outlet part 521a of the second cooling flow path 521 and the inlet part 310a of the first cooling flow path 310 in the direction of the first cooling flow path 310 And flows into the interior of the first cooling channel 310. The cooling fluid flowing into the first cooling channel 310 moves along the first cooling channel 310 along the longitudinal and circumferential directions of the cooling jacket 300 so that the cooling jacket 300 is cooled , The heat of the cooled cooling jacket 300 is conducted to the dielectric tube 200 to cool the dielectric tube 200. The cooling fluid in the first cooling channel 310 is discharged to the outside of the cooling jacket 300 through the outlet 310b of the first cooling channel 310 and is recovered to the cooling fluid supply unit And then supplied again to the inlet 521b of the second cooling passage 521 to be circulated.

The water-cooled surface wave plasma generator according to the present invention has a structure in which electromagnetic waves are transmitted toward the end of the dielectric tube 200 through the antenna 510 located inside the waveguide 100, so that the discharge tube passes through the waveguide There is an advantage that the size of the conventional surface wave plasma generating apparatus is reduced.

The dielectric tube 200 is wrapped with a cooling jacket 300 so that the inner surface of the cooling jacket 300 contacts the outer surface of the dielectric tube 200 and the first cooling Since the dielectric tube 200 is indirectly cooled through the heat conduction of the cooling jacket 300 by allowing the cooling fluid to circulate through the flow path 310, the dielectric tube 200 continuously contacts the high temperature plasma for a long time, The problem of the cooling fluid flowing into the dielectric tube 200 can be prevented.

Since the electromagnetic wave is transmitted toward the end of the dielectric tube 200 through the antenna 510 located inside the waveguide 100 and the cooling fluid does not pass through the waveguide 100, There is an advantage that the problem of the loss of the power of the electromagnetic wave inputted to the heat exchanger 200 by the cooling fluid can be advantageously obtained.

The protruded length of the antenna 510 has a length corresponding to a height of at least 1/2 of the height C of the waveguide 100 parallel to the protruding direction of the antenna 510 in the waveguide 100, Since the thickness or diameter A of the dielectric tube 510 is formed to have a thickness or diameter smaller than the inner diameter B of the dielectric tube 200, the power of the electromagnetic wave is not lost inside the dielectric tube 200 through the antenna 510 There is an advantage that it can be transmitted efficiently.

Since the lid member 600 which is a dielectric is provided to enclose the antenna 510 in the waveguide 100, the electromagnetic wave transmitted through the waveguide 100 is efficiently transmitted to the antenna 510 through the lid member 600 And the lid member 600 functions as a connecting member for contacting the antenna 510 and the dielectric tube 200 so that the heat of the cooled antenna 510 through the cooling fluid circulating the second cooling channel 521 is transmitted to the dielectric There is an advantage that the inserted portion of the tube 200 can be cooled by being conducted to the portion of the tube 200 inserted into the waveguide 100.

The description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features presented herein.

Claims (9)

A waveguide for transmitting an electromagnetic wave;
A dielectric tube having a first end at one end of the dielectric tube coupled to the waveguide so as to allow electromagnetic waves to be transmitted through the waveguide;
A hollow tube type, enclosing all or part of the length of the dielectric tube such that the inner surface of the tube is in contact with the outer surface of the dielectric tube, and moving the cooling fluid injected from the outside of the tube along the longitudinal and circumferential directions of the tube A cooling jacket including a first cooling channel located between an inner surface and an outer surface of the tube; And
And a discharge gas injection unit connected in fluid communication with the dielectric tube to inject a discharge gas for plasma generation into the dielectric tube.
A water - cooled surface wave plasma generator. The method according to claim 1,
Wherein the discharge gas injection portion is fluidly connected to the dielectric tube at a location adjacent the first end of the dielectric tube coupled to the waveguide.
A water - cooled surface wave plasma generator. The method according to claim 1,
The water-cooled surface wave plasma generator further includes an antenna,
Characterized in that the antenna is protruded from the inner surface position of the waveguide toward the first end of the dielectric tube and faces the first end of the dielectric tube.
A water - cooled surface wave plasma generator. The method of claim 3,
Wherein the first end of the dielectric tube is located inside the waveguide through the one surface of the waveguide facing the antenna or inside the cooling jacket,
Wherein the protruding length of the antenna located in the waveguide is a length that is in contact with or spaced from the first end of the dielectric tube.
A water - cooled surface wave plasma generator. The method of claim 3,
The protruding length of the antenna located in the waveguide is at least 1/2 of the height C in the waveguide parallel to the protruding direction of the antenna,
Wherein the first end of the dielectric tube is located inside the waveguide and is in contact with or spaced from the antenna as the first end of the dielectric tube is positioned within the cooling jacket or through one surface of the waveguide facing the antenna.
A water - cooled surface wave plasma generator. The method of claim 3,
Characterized in that the thickness or diameter (A) of the antenna is smaller than the inner diameter (B) of the dielectric tube.
A water - cooled surface wave plasma generator. The method of claim 3,
Wherein the water-cooled surface wave plasma generator further comprises a cooling fluid circulating unit having a second cooling flow path through which a cooling fluid circulates,
Wherein the cooling fluid circulation unit is formed integrally with the antenna at a rear end of the antenna and is coupled to the waveguide so that the antenna passes through the waveguide and is positioned within the waveguide.
A water - cooled surface wave plasma generator. 5. The method of claim 4,
Wherein the water-cooled surface wave plasma generator further comprises a cooling fluid circulation pipe connected from the first cooling flow path to the second cooling flow path.
A water - cooled surface wave plasma generator. The method of claim 3,
The water-cooled surface wave plasma generator comprises:
A cover member made of a dielectric material coupled to the waveguide or the antenna and the dielectric tube so as to surround the first end of the antenna and the dielectric tube or to be coupled to the waveguide or antenna so as to surround the antenna and to contact the first end of the dielectric tube, Lt; RTI ID = 0.0 > 1, < / RTI &
A water - cooled surface wave plasma generator.

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