FR2993428B1 - SURFACE WAVE APPLICATOR FOR PLASMA PRODUCTION - Google Patents

SURFACE WAVE APPLICATOR FOR PLASMA PRODUCTION

Info

Publication number
FR2993428B1
FR2993428B1 FR1256673A FR1256673A FR2993428B1 FR 2993428 B1 FR2993428 B1 FR 2993428B1 FR 1256673 A FR1256673 A FR 1256673A FR 1256673 A FR1256673 A FR 1256673A FR 2993428 B1 FR2993428 B1 FR 2993428B1
Authority
FR
France
Prior art keywords
surface wave
plasma production
wave applicator
applicator
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1256673A
Other languages
French (fr)
Other versions
FR2993428A1 (en
Inventor
Ana Lacoste
Jacques Pelletier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jacques Pelletier Fr
Universite Joseph Fourier Grenoble 1
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Joseph Fourier Grenoble 1
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Joseph Fourier Grenoble 1 filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1256673A priority Critical patent/FR2993428B1/en
Priority to EP13735272.0A priority patent/EP2873307B1/en
Priority to JP2015520974A priority patent/JP6263175B2/en
Priority to CN201380036340.3A priority patent/CN104782235B/en
Priority to PCT/EP2013/064578 priority patent/WO2014009412A1/en
Publication of FR2993428A1 publication Critical patent/FR2993428A1/en
Application granted granted Critical
Publication of FR2993428B1 publication Critical patent/FR2993428B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/4615—Microwave discharges using surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
FR1256673A 2012-07-11 2012-07-11 SURFACE WAVE APPLICATOR FOR PLASMA PRODUCTION Expired - Fee Related FR2993428B1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1256673A FR2993428B1 (en) 2012-07-11 2012-07-11 SURFACE WAVE APPLICATOR FOR PLASMA PRODUCTION
EP13735272.0A EP2873307B1 (en) 2012-07-11 2013-07-10 Surface-wave applicator and method for plasma production
JP2015520974A JP6263175B2 (en) 2012-07-11 2013-07-10 Surface wave applicator for plasma generation
CN201380036340.3A CN104782235B (en) 2012-07-11 2013-07-10 For producing the surface wave applicator of plasma
PCT/EP2013/064578 WO2014009412A1 (en) 2012-07-11 2013-07-10 Surface-wave applicator for plasma production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1256673A FR2993428B1 (en) 2012-07-11 2012-07-11 SURFACE WAVE APPLICATOR FOR PLASMA PRODUCTION

Publications (2)

Publication Number Publication Date
FR2993428A1 FR2993428A1 (en) 2014-01-17
FR2993428B1 true FR2993428B1 (en) 2014-08-08

Family

ID=46963891

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1256673A Expired - Fee Related FR2993428B1 (en) 2012-07-11 2012-07-11 SURFACE WAVE APPLICATOR FOR PLASMA PRODUCTION

Country Status (5)

Country Link
EP (1) EP2873307B1 (en)
JP (1) JP6263175B2 (en)
CN (1) CN104782235B (en)
FR (1) FR2993428B1 (en)
WO (1) WO2014009412A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3042092B1 (en) 2015-10-05 2019-07-26 Sairem Societe Pour L'application Industrielle De La Recherche En Electronique Et Micro Ondes ELEMENTARY DEVICE FOR PRODUCING PLASMA WITH COAXIAL APPLICATOR
FR3052326B1 (en) * 2016-06-07 2018-06-29 Thales PLASMA GENERATOR
KR101820242B1 (en) * 2016-08-02 2018-01-18 한국기초과학지원연구원 Water-cooled type surface wave plasma generating apparatus
KR101830007B1 (en) * 2016-11-11 2018-02-19 한국기초과학지원연구원 COAXIAL CABLE COUPLED and WATER-COOLED TYPE SURFACE WAVE PLASMA GENERATING APPARATUS
US11564292B2 (en) * 2019-09-27 2023-01-24 Applied Materials, Inc. Monolithic modular microwave source with integrated temperature control

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS579868A (en) * 1980-06-18 1982-01-19 Toshiba Corp Surface treating apparatus with microwave plasma
FR2583250B1 (en) * 1985-06-07 1989-06-30 France Etat METHOD AND DEVICE FOR EXCITTING A MICROWAVE PLASMA WITH ELECTRONIC CYCLOTRONIC RESONANCE
JPH0594899A (en) * 1991-10-02 1993-04-16 Nippon Steel Corp Plasma processor
JPH0685525A (en) * 1992-08-31 1994-03-25 Kyocera Corp 1/2 wavelength antenna
JPH05347508A (en) * 1992-10-30 1993-12-27 Harada Ind Co Ltd Wide band microwave antenna
JPH0729889A (en) * 1993-07-08 1995-01-31 Anelva Corp Microwave plasma treatment processing equipment
JPH0821476B2 (en) * 1993-09-20 1996-03-04 ニチメン電子工研株式会社 ECR plasma generator
JPH07161491A (en) * 1993-12-02 1995-06-23 Daido Steel Co Ltd Microwave plasma processing device
JPH0935651A (en) * 1995-07-20 1997-02-07 Nissin Electric Co Ltd Ion source
JPH09245997A (en) * 1996-03-05 1997-09-19 Nissin Electric Co Ltd Plasma chamber having cover-enclosed inner wall and antenna
JPH1083895A (en) * 1996-09-06 1998-03-31 Hitachi Ltd Plasma processing device
JPH11102799A (en) * 1997-09-26 1999-04-13 Mitsubishi Electric Corp Plasma generator
JP4089022B2 (en) * 1998-07-22 2008-05-21 日新イオン機器株式会社 Self-electron emission type ECR ion plasma source
JP2000277295A (en) * 1999-03-25 2000-10-06 Toshiba Corp Plasma treatment apparatus
JP2002093597A (en) * 2000-09-14 2002-03-29 Miura Gakuen Plasma-generating antenna, plasma treatment apparatus, plasma treatment method, production method of object to be treated and production method of semiconductor device
FR2840451B1 (en) * 2002-06-04 2004-08-13 Centre Nat Rech Scient DEVICE FOR PRODUCING A PLASMA TABLECLOTH
JP5312411B2 (en) * 2003-02-14 2013-10-09 東京エレクトロン株式会社 Plasma generator and remote plasma processing apparatus
JP2005116362A (en) * 2003-10-08 2005-04-28 Toshiba Corp Plasma treatment device and plasma treatment method by microwave excitation
JP2005353364A (en) * 2004-06-09 2005-12-22 Shibaura Mechatronics Corp Plasma generator, plasma treatment device and plasma treatment method
JP4761244B2 (en) * 2005-10-20 2011-08-31 株式会社小糸製作所 Discharge lamp and light source device
JP4967107B2 (en) * 2006-02-20 2012-07-04 国立大学法人名古屋大学 Microwave introducer, plasma generator, and plasma processing apparatus
FR2904177B1 (en) * 2006-07-21 2008-11-07 Centre Nat Rech Scient DEVICE AND METHOD FOR PRODUCING AND CONTAINING PLASMA.
DE102006037144B4 (en) * 2006-08-09 2010-05-20 Roth & Rau Ag ECR plasma source
FR2938150B1 (en) * 2008-10-30 2010-12-17 Centre Nat Rech Scient DEVICE AND METHOD FOR PRODUCTION AND / OR CONTAINMENT OF PLASMA
TW201105183A (en) * 2009-07-21 2011-02-01 Delta Electronics Inc Plasma generating apparatus
FR2955451A1 (en) * 2010-05-25 2011-07-22 Centre Nat Rech Scient Device for producing i.e. gas plasma, to carry out e.g. surface treatment such as cleaning, has microwave energy propagation medium arranged between central core and external conductor and constituted of two longitudinal sections

Also Published As

Publication number Publication date
CN104782235A (en) 2015-07-15
JP6263175B2 (en) 2018-01-17
EP2873307A1 (en) 2015-05-20
EP2873307B1 (en) 2016-07-06
CN104782235B (en) 2017-03-08
JP2015530694A (en) 2015-10-15
WO2014009412A1 (en) 2014-01-16
FR2993428A1 (en) 2014-01-17

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Legal Events

Date Code Title Description
TQ Partial transmission of property

Owner name: UNIVERSITE JOSEPH FOURIER - GRENOBLE 1, FR

Effective date: 20140221

Owner name: JACQUES PELLETIER, FR

Effective date: 20140221

PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 5

ST Notification of lapse

Effective date: 20180330