FR2904177B1 - DEVICE AND METHOD FOR PRODUCING AND CONTAINING PLASMA. - Google Patents

DEVICE AND METHOD FOR PRODUCING AND CONTAINING PLASMA.

Info

Publication number
FR2904177B1
FR2904177B1 FR0606679A FR0606679A FR2904177B1 FR 2904177 B1 FR2904177 B1 FR 2904177B1 FR 0606679 A FR0606679 A FR 0606679A FR 0606679 A FR0606679 A FR 0606679A FR 2904177 B1 FR2904177 B1 FR 2904177B1
Authority
FR
France
Prior art keywords
producing
containing plasma
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0606679A
Other languages
French (fr)
Other versions
FR2904177A1 (en
Inventor
Jacques Henri Pelletier
Ana Lacoste
Stephane Bechu
Alexandre Bes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite Joseph Fourier Grenoble 1
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Joseph Fourier Grenoble 1
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Joseph Fourier Grenoble 1 filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0606679A priority Critical patent/FR2904177B1/en
Priority to PCT/EP2007/056754 priority patent/WO2008009558A1/en
Publication of FR2904177A1 publication Critical patent/FR2904177A1/en
Application granted granted Critical
Publication of FR2904177B1 publication Critical patent/FR2904177B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32688—Multi-cusp fields
FR0606679A 2006-07-21 2006-07-21 DEVICE AND METHOD FOR PRODUCING AND CONTAINING PLASMA. Expired - Fee Related FR2904177B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0606679A FR2904177B1 (en) 2006-07-21 2006-07-21 DEVICE AND METHOD FOR PRODUCING AND CONTAINING PLASMA.
PCT/EP2007/056754 WO2008009558A1 (en) 2006-07-21 2007-07-04 Device and method for producing and confining a plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0606679A FR2904177B1 (en) 2006-07-21 2006-07-21 DEVICE AND METHOD FOR PRODUCING AND CONTAINING PLASMA.

Publications (2)

Publication Number Publication Date
FR2904177A1 FR2904177A1 (en) 2008-01-25
FR2904177B1 true FR2904177B1 (en) 2008-11-07

Family

ID=37700820

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0606679A Expired - Fee Related FR2904177B1 (en) 2006-07-21 2006-07-21 DEVICE AND METHOD FOR PRODUCING AND CONTAINING PLASMA.

Country Status (2)

Country Link
FR (1) FR2904177B1 (en)
WO (1) WO2008009558A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2938150B1 (en) * 2008-10-30 2010-12-17 Centre Nat Rech Scient DEVICE AND METHOD FOR PRODUCTION AND / OR CONTAINMENT OF PLASMA
FR2993429B1 (en) 2012-07-11 2016-08-05 Centre Nat De La Rech Scient (Cnrs) COAXIAL MICROWAVE APPLICATOR FOR PLASMA PRODUCTION
FR2993428B1 (en) * 2012-07-11 2014-08-08 Centre Nat Rech Scient SURFACE WAVE APPLICATOR FOR PLASMA PRODUCTION
FR2995493B1 (en) 2012-09-11 2014-08-22 Hydromecanique & Frottement DEVICE FOR GENERATING A PLASMA HAVING A SIGNIFICANT EXTEND ALONG AN AXIS BY ELECTRONIC CYCLOTRONIC RESONANCE RCE FROM A GASEOUS MEDIUM
FR3042092B1 (en) * 2015-10-05 2019-07-26 Sairem Societe Pour L'application Industrielle De La Recherche En Electronique Et Micro Ondes ELEMENTARY DEVICE FOR PRODUCING PLASMA WITH COAXIAL APPLICATOR
FR3118280B1 (en) * 2020-12-18 2022-12-02 Commissariat Energie Atomique DEVICE FOR DEPOSITING THIN FILMS ASSISTED BY MICROWAVE PLASMA

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2671931A1 (en) * 1991-01-22 1992-07-24 Metal Process DEVICE FOR DISTRIBUTING MICROWAVE ENERGY FOR EXCITATION OF PLASMA
FR2715019B1 (en) * 1994-01-13 1996-04-05 Plasmion Device for forming a plasma by applying microwaves to produce an ion beam.
JPH09266096A (en) * 1996-03-28 1997-10-07 Hitachi Ltd Plasma treatment device, and plasma treatment method using it
FR2840451B1 (en) * 2002-06-04 2004-08-13 Centre Nat Rech Scient DEVICE FOR PRODUCING A PLASMA TABLECLOTH

Also Published As

Publication number Publication date
FR2904177A1 (en) 2008-01-25
WO2008009558A1 (en) 2008-01-24

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20100331