CN107949145A - A kind of microwave-excited plasma device - Google Patents
A kind of microwave-excited plasma device Download PDFInfo
- Publication number
- CN107949145A CN107949145A CN201711439606.5A CN201711439606A CN107949145A CN 107949145 A CN107949145 A CN 107949145A CN 201711439606 A CN201711439606 A CN 201711439606A CN 107949145 A CN107949145 A CN 107949145A
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- Prior art keywords
- microwave
- transmission mechanism
- magnetron
- converter
- cooling liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000005540 biological transmission Effects 0.000 claims abstract description 41
- 230000007246 mechanism Effects 0.000 claims abstract description 40
- 239000000110 cooling liquid Substances 0.000 claims abstract description 36
- 238000001816 cooling Methods 0.000 claims abstract description 27
- 239000002826 coolant Substances 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 6
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 239000012809 cooling fluid Substances 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000003032 molecular docking Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 7
- 230000002045 lasting effect Effects 0.000 abstract description 2
- 239000000498 cooling water Substances 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000861 Mg alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/461—Microwave discharges
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
The present invention relates to a kind of microwave-excited plasma device, including magnetron, converter, microwave window and cavity, the output terminal of the magnetron and the input terminal of converter pass through the first microwave transmission mechanism connection, the output terminal of the converter is docked by the second microwave transmission mechanism with microwave window, the microwave window is placed on cavity, and the bottom side of the second microwave transmission mechanism is equipped with air outlet；Air cooling system is further included, gas is oriented to magnetron by air cooling system, and the gas flows out after flowing successively through magnetron, the first microwave transmission mechanism, converter and the second microwave transmission mechanism from air outlet.Good cooling results of the present invention, integrally cool down device by air cooling system, while each position of device is cooled down, and are conducive to the lifting of device precision and the lasting normal work of device；Corresponding cooling liquid flowing channel is additionally arranged in the heat concentrated position such as magnetron, converter and microwave window, can further lift cooling-down effect, lifts service life.
Description
Technical field
The present invention relates to a kind of microwave-excited plasma device, more particularly to a kind of microwave-excited plasma device
Cooling system.
Background technology
Microwave heating, excite and have that speed is fast, uniformity is good, easy to operate, clean compared to other heating, mode of excitation
Property the advantage such as good, energy conservation and environmental protection, therefore microwave system is widely used in heating, ion excitation equipment.Usually, microwave system
Including microwave source, microwave transmission system, the components such as coupled antenna system, microwave window are further comprises in equipment component.Microwave
The components such as magnetron, transformer in system are main heat generating components, and the temperature in use of microwave magnetron is excessive can be significantly
The service life of magnetron is reduced, in the prior art, often using single water cooling or the air-cooled type of cooling, and water cooling will reach
To cooling effect good enough, it is necessary to be laid with the cooling water flow conduits of a large amount of/large area, the cooling water flow conduits of a large amount of/large area
It is laid with the design of the use to equipment and causes larger limitation, and single water cooling less effective, it is impossible to meets that cooling requires.Together
When, the service life of the components such as microwave transmission system, microwave window can be also greatly shortened in single water-cooling pattern.
In the prior art, the cooling at microwave window is typically only cooled down using cooling water, but microwave window
Area is larger, and window material（Such as quartz）Often thermal conductivity factor is not high, so that it is tired to cause microwave window central temperature to reduce
Difficulty, material temperature skewness, so that the problems such as causing material internal stress, burn into volume change, to the service life of material
Deleterious effect is produced with sealing effect.
The content of the invention
In view of the deficiencies of the prior art, the present invention provides a kind of microwave-excited plasma device, to solve existing microwave
The problem of cooling effect is undesirable in the excitation device course of work.
In order to solve the above-mentioned technical problem, technical scheme is as follows：A kind of microwave-excited plasma device, bag
Magnetron, converter, microwave window and cavity are included, the output terminal of the magnetron and the input terminal of converter pass through the first microwave
Transmission mechanism connects, and the output terminal of the converter is docked by the second microwave transmission mechanism with microwave window, the microwave window
Mouth is placed on cavity, and the bottom side of the second microwave transmission mechanism is equipped with air outlet；Further include air cooling system, air cooling system is by gas
Body imports magnetron, and the gas flows successively through magnetron, the first microwave transmission mechanism, converter and the second microwave transmission mechanism
Flowed out afterwards from air outlet.
As one embodiment of the present invention, the air cooling system includes air blower and gas flow, the air blower
Air outlet connected by gas flow with magnetron.
As another embodiment of the invention, the air cooling system includes compression gas tank and gas flow, described
The gas outlet of compression gas tank is connected by gas flow with magnetron.
Further, fan is equipped with around the magnetron, gas is directly blowed to magnetron by the fan, to promote
Magnetron cools down.
Further, the first cooling liquid flowing channel, first cooling liquid flowing channel and cooling are equipped with around the magnetron
Liquid organization of supply connects.
Further, first cooling liquid flowing channel in the shape of a spiral, and is wound on the outside of magnetron.
Further, first cooling liquid flowing channel includes more straight tubes, binds in outside magnetron.
Further, the cooling fluid supply mechanism includes coolant holding vessel, one kind in coolant accumulator tank or more
Kind.
Further, the cooling liquid includes water, ethylene glycol type coolant, glycerol type coolant, alcohol type coolant
In one or more.Further, the coolant is alternatively other commercial cooling liquids.
Further, the 3rd cooling liquid flowing channel is equipped with around the converter, converter is equipped with and the 3rd cooling liquid stream
The first inlet and the first liquid outlet of road connection.
Further, the second microwave transmission mechanism is mainly made from a material that be thermally conductive, to accelerate the heat dissipation of microwave window.
Preferably, the Heat Conduction Material is metal material, such as copper, aluminium, iron, titanium, magnesium alloy.
Preferably, it is in spoke centered on the central axis of the second microwave transmission mechanism that the quantity of the air outlet, which is multiple,
Shape distribution is penetrated, is removed with accelerating the second microwave transmission mechanism with heat near microwave window contact site, and ensure microwave window
Temperature is uniformly distributed mouth everywhere.Further, the base end wall of the second microwave transmission mechanism can be designed to thicker, with increase and microwave
The contact area of window, further improving radiating effect.
Further, the second microwave transmission mechanism includes microwave transmission pipeline.
Further, the second cooling liquid flowing channel is equipped with around the microwave window, the wall of second cooling liquid flowing channel is straight
Connect or contacted indirectly with microwave window.So coolant can be being injected into the second cooling liquid flowing channel, by the heat at microwave window
Amount is taken out of, to reduce temperature.The side wall that the direct contact includes runner is directly contacted with microwave window, and described connects indirectly
Touching includes further including the components such as packing ring, fluid sealant between runner side wall and microwave window, either directly or indirectly contact, it is most
The effect realized eventually is that the partial heat on microwave window can be delivered in the coolant in the second coolant flow channel.
As one embodiment of the present invention, second cooling liquid flowing channel is arranged at the second microwave transmission mechanism side wall
Interior, the second microwave transmission mechanism is equipped with the second inlet and the second liquid outlet connected with the second cooling liquid flowing channel.Microwave window
The heat of mouth is by the second microwave transmission transfer mechanism such as coolant of the second cooling liquid flowing channel, accelerating heat at microwave window
Transmission, so as to accelerate to cool down.Preferably, the second inlet is arranged at the lower section of the second liquid outlet.
As a kind of scheme of the present invention, first cooling liquid flowing channel, the second cooling liquid flowing channel, the 3rd cooling liquid flowing channel
It is parallel in same cooling fluid supply mechanism.
The microwave-excited plasma device good cooling results of the present invention, integrally carry out device by air cooling system cold
But, while to each position of device cool down, be conducive to the lifting of device precision and the lasting normal work of device；Separately
Outside, corresponding cooling liquid flowing channel is additionally arranged in the heat concentrated position such as magnetron, converter and microwave window, can further lifts cooling
Effect, is beneficial to be maintained at relatively low temperature during each device work, lifts service life.
Brief description of the drawings
Fig. 1 is the structure diagram of the microwave-excited plasma device of the first embodiment of the invention.
Fig. 2 is the microwave window of the present invention and the structure diagram of the second microwave transmission mechanism joint.
Fig. 3 is the transverse cross sectional schematic top plan view of the converter of the first embodiment of the invention.
Embodiment
Come that the present invention will be described in detail below with reference to attached drawing and in conjunction with the embodiments.It should be noted that in the feelings not conflicted
Under condition, the feature in embodiment and embodiment in the present invention can be mutually combined.For sake of convenience, hereinafter as occurred
" on ", " under ", "left", "right" printed words, only represent that the upper and lower, left and right direction with attached drawing in itself is consistent, do not act limiting to structure
It is set for using.
As shown in Figure 1, a kind of microwave-excited plasma device, including magnetron 2, converter 6, microwave window 14 and chamber
Body 7, the output terminal of the magnetron 2 are connected with the input terminal of converter 6 by the first microwave transmission mechanism 3, the converter 6
Output terminal docked by the second microwave transmission mechanism 13 with microwave window 14, the microwave window 14 is placed on cavity 7, described
The bottom side of second microwave transmission mechanism 13 is equipped with air outlet 9；Air cooling system 1 is further included, air cooling system 1 introduces gas into magnetron
2, the gas is flowed successively through after magnetron 2, the first microwave transmission mechanism 3,6 and second microwave transmission mechanism 13 of converter from going out
Flow out in air port 9.
Wherein, be equipped with the first cooling liquid flowing channel around the magnetron 2, first cooling liquid flowing channel by the 3rd into
Liquid mouth 11 and cooling fluid supply mechanism connection, and discharged the coolant after heat exchange by the 3rd liquid outlet 12.
The cooling liquid is alcohol type coolant.
The second microwave transmission mechanism 13 is mainly made from a material that be thermally conductive.The quantity of the air outlet is multiple, with the
Radially it is distributed centered on the central axis of two microwave transmission mechanisms.
It is equipped with the second cooling liquid flowing channel around the microwave window, the wall of second cooling liquid flowing channel is indirectly and microwave window
Mouth contact.
Second cooling liquid flowing channel is arranged in 13 side wall of the second microwave transmission mechanism, in the second microwave transmission mechanism 13
Equipped with the second inlet 8 and the second liquid outlet 10 connected with the second cooling liquid flowing channel（See Fig. 2）.
The first embodiment is repeated, microwave converting antenna 15 is included in converter 6,6 surrounding of converter sets the 3rd
Cooling liquid flowing channel, converter 6 are equipped with the first inlet 4 and the first liquid outlet 5 connected with the 3rd cooling liquid flowing channel（See figure
3）.
The content that above-described embodiment illustrates should be understood to that these embodiments are only used for being illustrated more clearly that the present invention, without
For limiting the scope of the invention, after the present invention has been read, various equivalent forms of the those skilled in the art to the present invention
Modification each fall within the application appended claims limited range.
Claims (8)
1. a kind of microwave-excited plasma device, including magnetron（2）, converter（6）, microwave window（14）And cavity（7）,
The magnetron（2）Output terminal and converter（6）Input terminal pass through the first microwave transmission mechanism（3）Connection, the conversion
Device（6）Output terminal pass through the second microwave transmission mechanism（13）With microwave window（14）Docking, the microwave window（14）It is placed in
Cavity（7）On, it is characterised in that the second microwave transmission mechanism（13）Bottom side be equipped with air outlet（9）；Further include air cooling system
System（1）, air cooling system（1）Gas is oriented to magnetron（2）, the gas flows successively through magnetron（2）, the first microwave transmission machine
Structure（3）, converter（6）With the second microwave transmission mechanism（13）, microwave window（14）Afterwards from air outlet（9）Outflow.
2. microwave-excited plasma device according to claim 1, it is characterised in that the magnetron（2）Around
Equipped with the first cooling liquid flowing channel, first cooling liquid flowing channel and cooling fluid supply mechanism connection.
3. microwave-excited plasma device according to claim 2, it is characterised in that the cooling liquid include water,
One or more in ethylene glycol type coolant, glycerol type coolant, alcohol type coolant.
4. microwave-excited plasma device according to claim 1, it is characterised in that the converter（6）Surrounding is set
There are the 3rd cooling liquid flowing channel, converter（6）It is equipped with the first inlet connected with the 3rd cooling liquid flowing channel（4）Go out liquid with first
Mouthful（5）.
5. microwave-excited plasma device according to claim 1, it is characterised in that the second microwave transmission mechanism
（13）Mainly it is made from a material that be thermally conductive.
6. microwave-excited plasma device according to claim 1, it is characterised in that the air outlet（9）Quantity
To be multiple, with the second microwave transmission mechanism（13）Central axis centered on be radially distributed.
7. microwave-excited plasma device according to claim 1, it is characterised in that be equipped with around the microwave window
Second cooling liquid flowing channel, the wall of second cooling liquid flowing channel are directly or indirectly contacted with microwave window.
8. microwave-excited plasma device according to claim 7, it is characterised in that second cooling liquid flowing channel is set
It is placed in the second microwave transmission mechanism（13）In side wall, the second microwave transmission mechanism（13）It is equipped with and is connected with the second cooling liquid flowing channel
The second inlet（8）With the second liquid outlet（10）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711439606.5A CN107949145A (en) | 2017-12-27 | 2017-12-27 | A kind of microwave-excited plasma device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711439606.5A CN107949145A (en) | 2017-12-27 | 2017-12-27 | A kind of microwave-excited plasma device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107949145A true CN107949145A (en) | 2018-04-20 |
Family
ID=61940383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711439606.5A Pending CN107949145A (en) | 2017-12-27 | 2017-12-27 | A kind of microwave-excited plasma device |
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| DE3028461A1 (en) * | 1980-07-26 | 1982-04-08 | Philips Patentverwaltung Gmbh, 2000 Hamburg | HIGH-STRENGTH HF WINDOW, ESPECIALLY FOR LARGE KLYSTRONS |
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| JPH1060657A (en) * | 1996-06-12 | 1998-03-03 | Toshiba Corp | Microwave excited plasma treating apparatus |
| US20040182834A1 (en) * | 2003-01-30 | 2004-09-23 | Mohammad Kamarehi | Helix coupled remote plasma source |
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| CN103346057A (en) * | 2013-05-30 | 2013-10-09 | 中国科学院电子学研究所 | Microwave energy transmission window |
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| CN107230815A (en) * | 2017-05-27 | 2017-10-03 | 电子科技大学 | A kind of design method of the broadband high-average power medium microwave window with cooling layer |
| CN107508016A (en) * | 2017-08-22 | 2017-12-22 | 电子科技大学 | A kind of novel porous ventilation circular waveguide for being used to transmit High-Power Microwave and millimeter wave |
| CN207766634U (en) * | 2017-12-27 | 2018-08-24 | 长沙新材料产业研究院有限公司 | A kind of microwave-excited plasma device |
-
2017
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| DE3028461A1 (en) * | 1980-07-26 | 1982-04-08 | Philips Patentverwaltung Gmbh, 2000 Hamburg | HIGH-STRENGTH HF WINDOW, ESPECIALLY FOR LARGE KLYSTRONS |
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| US5568015A (en) * | 1995-02-16 | 1996-10-22 | Applied Science And Technology, Inc. | Fluid-cooled dielectric window for a plasma system |
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| CN101144155A (en) * | 2007-08-21 | 2008-03-19 | 西安电子科技大学 | Microwave electron cyclotron resonance plasma chemistry gas phase sedimentation device |
| JP2009245593A (en) * | 2008-03-28 | 2009-10-22 | National Institute Of Advanced Industrial & Technology | Microwave plasma processing device |
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| PB01 | Publication | ||
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180420 |
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