CN103346057A - Microwave energy transmission window - Google Patents
Microwave energy transmission window Download PDFInfo
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- CN103346057A CN103346057A CN2013102083254A CN201310208325A CN103346057A CN 103346057 A CN103346057 A CN 103346057A CN 2013102083254 A CN2013102083254 A CN 2013102083254A CN 201310208325 A CN201310208325 A CN 201310208325A CN 103346057 A CN103346057 A CN 103346057A
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Abstract
The invention provides a microwave energy transmission window. The microwave energy transmission window comprises a window frame and two parallel medium window sheets. The window frame is of a hollow barrel-shaped structure, the two ends of the window frame are connected with a microwave electrical vacuum device and a load through waveguides respectively, the two parallel medium window sheets are fixed on the window frame respectively, the central axes of the parallel medium window sheets coincide with the central axis of the window frame, the first medium window sheet, close to the microwave electrical vacuum device, of the two parallel medium window sheets is connected with the window frame in a sealing mode, and an cross-ventilation space is formed between the two parallel medium window sheets. According to the microwave energy transmission window, air cooling on the surfaces of the medium window sheets is more effective than cooling on the periphery of the window frame, so that the temperatures of the centers of the medium window sheets are basically consistent with the temperatures on the peripheries of the medium window sheets, and the medium window sheets are effectively prevented from cracking.
Description
Technical field
The present invention relates to electron trade electron tube and High Power Microwave System technical field, relate in particular to a kind of microwave delivery of energy window.
Background technology
The electrovacuum microwave device be a class in vacuum or gas medium, utilize electronics to annotate to realize with the high-frequency electromagnetic field interactions microwave power to amplify active electronic device with translation function.The microwave vacuum electronic device mainly comprises: klystron, travelling wave tube, magnetron, gyrotron and crossed-field amplifier etc. are widely used as the high-power emission source of systems such as radar, accelerator, remote sensing, communication, navigation, radio and television.And microwave delivery of energy window especially comes into one's own in design, manufacturing, seasoned test link as the core component of electrovacuum microwave device.
The major function of microwave delivery of energy window is that the microwave power that the microwave electron tube produces is arrived the antenna even load by transmission line such as rectangular waveguides, keeps the vacuum seal performance of microwave electron tube simultaneously.For gas molecule, the delivery of energy window can not pass through; And for microwave energy, the delivery of energy window is again transparent.
Microwave delivery of energy window includes a slice media ceramic sheet, the media ceramic sheet is originally lossy when microwave energy flows through, and the media ceramic sheet adsorbs the free carbon element easily at the inner surface of vacuum one side, and latter's loss under the high-average power microwave action is big and produce heat.If accumulation of heat and can't effectively conducting can cause that media ceramic sheet thermal stress increases, sealing place that shows as media ceramic sheet and metal is sometimes leaked gas, and shows as ceramic window under the more susceptible condition and bursts along the strongest direction of microwave field density.In the high-average power klystron, the damage of delivery of energy window is the one of the main reasons that causes that klystron lost efficacy.The damage of delivery of energy window often is accompanied by in the microwave device negative electrode and exposes atmosphere and then produce at hot state and poison, and gently then electron gun, these critical components of delivery of energy window lost efficacy, and heavy then entire device is scrapped.
In order to solve the delivery of energy problem of this class high-average power microwave, prior art has been taked following several measures: one, the window frame water flowing of microwave delivery of energy window cooling; Two, the media ceramic sheet is selected the splendid beryllium oxide ceramics of thermal conductivity for use.
Yet in realizing process of the present invention, the applicant finds to adopt the microwave delivery of energy window of said method to have following defective:
(1) the window frame water flowing of microwave delivery of energy window cooling, though taken away the part heat that forms produce, but the heat flow that the dielectric disk in window center produces is still very slow, can't effectively conduct, the temperature at dielectric disk in window center is higher than the temperature around the dielectric disk in window, the formation temperature gradient, when the temperature difference at center and edge surpassed certain limit, dielectric disk in window will break;
(2) to select the room temperature thermal conductivity for use be the beryllium oxide ceramics of 250W/ (mK) to dielectric disk in window, heat conductivility increases greatly, and be not difficult to guarantee that microwave transmission voltage standing wave ratio (VSWR) characteristic is good in the bandwidth, but because the high-temperature dust of beryllium oxide material is poisonous, greatly hindered popularizing of it.
Summary of the invention
(1) technical problem that will solve
In view of above-mentioned technical problem, the invention provides a kind of microwave delivery of energy window, to avoid breaking of dielectric disk in window.
(2) technical scheme
According to an aspect of the present invention, provide a kind of microwave delivery of energy window.This microwave delivery of energy window comprises: window frame, be the hollow tube-shape structure, and its two ends are connected with load with the microwave electron tube by waveguide respectively; Two parallel dielectric disk in window, be individually fixed on the window frame, the central axes of its central axis and window frame, first dielectric disk in window and window frame near the microwave electron tube in this two parallel dielectric disk in window are tightly connected, and form the cross-ventilation space between this two parallel dielectric disk in window.
(3) beneficial effect
From technique scheme as can be seen, microwave delivery of energy window of the present invention has following beneficial effect:
(1) two parallel dielectric disk in window of soldering and sealing in microwave delivery of energy window, form the cross-ventilation space between two dielectric disk in window, dielectric disk in window surface air-cooled more much effective than the cooling around the window frame, thereby the temperature around the temperature at dielectric disk in window center and the dielectric disk in window is consistent substantially, has effectively prevented breaking of dielectric disk in window;
(2) under the prerequisite that guarantees good microwave transmission standing-wave ratio, internal layer beryllium oxide window plays vacuum insulation and conduction heat, outer oxide aluminum window sheet works to intercept poisonous beryllium oxide dust, thereby give full play to the characteristic of beryllium oxide high thermal conductivity, and the shortcoming that its high-temperature dust is poisonous control is without fear of an attack from the rear the user within enclosure space;
(3) entrance outlet in cross-ventilation space arranges temperature sensor between two dielectric disk in window, monitoring dielectric disk in window surface temperature changes in real time, judge whether dielectric disk in window is in the dangerous edge that heat bursts, and can study the air-flow size for the influence of dielectric disk in window surface temperature;
(4) can open air-cooled as required or water-cooled, perhaps open air-cooled and water-cooled simultaneously, thereby can be applicable to the microwave delivery of energy window of different microwave energy streams.
Description of drawings
Fig. 1 is the structural representation of embodiment of the invention microwave delivery of energy window;
Fig. 2 A and Fig. 2 B respectively embodiment of the invention microwave delivery of energy window microwave peak power greater than with less than the connection diagram during waveguide sparking power under the atmospheric pressure.
[main element symbol description of the present invention]
The 1-window frame; The 2-water collar;
3,4-dielectric disk in window; The 5-water-supply-pipe;
S
3, S
5-waveguide; S
1, S
2Water inlet/the outlet pipe of-water circulation path;
S
4-sealing tracheae; S
6, S
7The outlet of-appendix and entrance
S
9-air cooling the circulatory system; S
10-air pump;
S
8, S
11-contaminant filter net.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Need to prove that in accompanying drawing or specification description, similar or identical part is all used identical figure number.The implementation that does not illustrate in the accompanying drawing or describe is the form known to the those of ordinary skill in the affiliated technical field.In addition, though this paper can provide the demonstration of the parameter that comprises particular value, should be appreciated that parameter need not definitely to equal corresponding value, but can in acceptable error margin or design constraint, be similar to corresponding value.In addition, the direction term of mentioning in following examples, for example " on ", D score, " preceding ", " back ", " left side ", " right side " etc., only be direction with reference to the accompanying drawings.Therefore, the direction term of use is to illustrate not to be to limit the present invention.
Adopt two medium window film magazine type windows in the microwave delivery of energy window of the present invention, the space between two dielectric disk in window forms compact air channel, thereby has promoted the cooling effect of microwave delivery of energy window greatly.In addition, bear vacuum seal and inner surface carbon-coating by the beryllium oxide window and produce the outwards important task of conduction of heat, and the aluminium oxide window is used for preventing that poisonous high-temperature oxydation beryllium dust is outwards propagated when the former is cracked.
In one exemplary embodiment of the present invention, provide a kind of microwave delivery of energy window.Fig. 1 is the structural representation of embodiment of the invention microwave delivery of energy window.As shown in Figure 1, this microwave delivery of energy window comprises: window frame 1, be the hollow tube-shape structure, and its two ends are connected with load with the microwave electron tube by waveguide (S3, S5) respectively; Water collar 2 is sheathed on the periphery of window frame, closely contacts with window frame 1, is hollow structure, and its export and import is connected with the water-cooled peripheral passage by water-supply-pipe 5 respectively; Two parallel dielectric disk in window (3,4), be individually fixed on the window frame, the central axes of its central axis and window frame 1, the dielectric disk in window 3 near the microwave electron tube in this two parallel dielectric disk in window (3,4) is tightly connected with window frame, forms the cross-ventilation space between the two parallel dielectric disk in window.The above and below in this cross-ventilation space links to each other with air-cooled peripheral passage with air stream outlet by the airflow inlet that is opened on the window frame respectively; Two temperature sensors are arranged at the position of the import of cross-ventilation space and outlet, are used for the variations in temperature in the monitoring cross-ventilation space.The existence in above-mentioned cross-ventilation space can effectively keep the temperature at dielectric disk in window center and the temperature around the dielectric disk in window unanimous on the whole, reduces the probability that dielectric disk in window breaks greatly, does not influence the normal transmission of microwave energy simultaneously.
Below each part of present embodiment microwave delivery of energy window is elaborated respectively.
In the present embodiment, window frame 1 is the hollow cylindrical structure.Wherein, the structure of this window frame should satisfy corresponding size, and this size can design according to high-frequency electromagnetic software, is not described in detail herein.
Fig. 2 A and Fig. 2 B respectively embodiment of the invention microwave delivery of energy window microwave peak power greater than with less than the connection diagram during waveguide sparking power under the atmospheric pressure.Please refer to Fig. 1, Fig. 2 A and Fig. 2 B, when the microwave transmission window uses, when High-Power Microwave energy flow transmission is come, by waveguide S
3Enter in the window frame, earlier through the beryllium oxide window, by peroxidating aluminum window sheet, at last from waveguide S
5Flow out, and microwave energy stream was exactly in electron tube inside before reaching the beryllium oxide window, can not cause sparking, will be described in more detail below as for the microwave energy peroxidating beryllium window situation afterwards of flowing through.
Please refer to Fig. 2 A and Fig. 2 B, the export and import of the water flow space that forms between water collar 2 and the window frame 1 respectively with the water inlet pipe S of water circulation path
1With outlet pipe S
2Be connected.When the microwave transmission window is worked, water circulation path startup work, normal-temperature water flows into water pipe water inlet pipe S
1, intensification water is from plumbing outlet pipe S
2Flow out.
In the present embodiment, two dielectric disk in window are respectively beryllium oxide window and aluminium oxide window, wherein, internal layer beryllium oxide window plays vacuum insulation and conduction heat, outer oxide aluminum window sheet works the prevention effect that intercepts the high temperature toxic dust, thereby give full play to the characteristic of beryllium oxide high thermal conductivity, again that its high-temperature dust is poisonous shortcoming control is within enclosure space.
The beryllium oxide window of internal layer and window frame adopt method for welding to weld and guarantee that this weld seam does not leak.And outer field aluminium oxide window according to microwave peak power whether greater than waveguide sparking power under the atmospheric pressure, with the fixed relationship of window frame following two kinds of situations are arranged:
First kind of situation, microwave peak power is greater than waveguide sparking power under the atmospheric pressure, be that microwave is under atmospheric pressure struck sparks, then aluminium oxide window and window frame adopt the method for welding welding, by reducing the method for scolder or destruction localized metallic layer, perhaps the method with reference to the manufacturer's standard small opening produces little small opening between the two; Simultaneously, the air channel in the middle of two dielectric disk in window is closed, usually with appendix entrance S
7With outlet S
6Weld and guarantee not leak S with the silver soldering method
4It is exactly one section closing pipe line.
Shown in Fig. 2 A, because microwave peak power under atmospheric pressure can cause sparking in the waveguide, can flow to when reaching beyond the beryllium oxide window, then need inflation or vacuumize to prevent sparking.Because there is little leakage in the aluminium oxide window, these dielectric disk in window both sides are in inflation and vacuumize Shi Douhui and reach automatically all and press.Can deposit carbon-coating at beryllium oxide window inner surface this moment, and the heat of its generation mainly conducts by the high thermal conductivity of beryllium oxide.The aluminium oxide window is mainly used to prevent that the beryllium oxide window is overheated when bursting that dust is overflowed, and does not have carbon-coating on it, and heat conduction burden is little, even own generation heat bursts the work that also do not influence.
In addition, the little leakage for the aluminium oxide window needs to consider in detail.Desirable air pipe sees Table 1 (selecting from " vacuum equipment manufacturing process technology standard criterion pandect ") to the leak rate of air:
The desirable air pipe of table 1 is to the leak rate (p of air
1=100kPa, p
1＞＞p
2)
In the last table, d is the diameter of desirable pipe, and L is the length of pipe, p
1Be the gas pressure intensity of pipe arrival end, p
2Be the gas pressure intensity of the pipe port of export, Q
ALeak rate for this pipe.
If the microwave delivery of energy adopts modes of inflation outside window, gases at high pressure flow into the middle space of two dielectric disk in window from little leak of aluminium oxide window, even the beryllium oxide dust is arranged, also can't adverse current ooze out from small opening; After the air pressure equilibrium of aluminium oxide window both sides, do not have air pressure to drive, even the beryllium oxide dust is arranged, can't spontaneously from little small opening, diffuse out yet.
If the microwave delivery of energy adopts the pattern of vacuumizing outside window, before air pressure balance, standard atmosphere flows to the outside from little leak of aluminium oxide window, has only the leakage that at this moment the beryllium oxide dust just may take place, and has also just in time reached p in the table 1
1=100kPa, p
1＞＞p
2Condition.If the diameter of little leakage pipe is elected 1 μ m as, beryllium oxide then can't pass through from this pipe at all, because the mass median aerodynamic diameter d of beryllium oxide is (referring to Li Mingjun " beryllium of suction high-temperature roasting and the oxide of plutonium is to the carcinogenesis of lung ") about 1.10 μ m.The thickness of selective oxidation aluminum window sheet is (the common thickness of aluminium oxide window in the microwave current delivery of energy window just) between 0.1～1cm again, then according to the leak rate Q of this little leakage pipe of table 1
A＞10
-6Pam
3S
-1Say it on the contrary, as long as the leak rate of aluminium oxide window reaches following condition: 10
-8Pam
3S
-1＜Q
A＜10
-6Pam
3S
-1, then the beryllium oxide molecule definitely can't ooze out the aluminium oxide window and air pressure can reach balance on its both sides in theory.In fact, by the method for manufacturer's standard small opening, this leak rate can reach.
Second kind of situation, microwave peak power is less than waveguide sparking power under the atmospheric pressure, be that microwave is not under atmospheric pressure struck sparks, aluminium oxide window and window frame weld with method for welding so, needn't produce little small opening (also not influencing air-flow flowing in the air channel even produce little small opening) again, the appendix of burn-oning simultaneously.Usually at appendix entrance S
7With outlet S
6Between seal in air pump S
10, contaminant filter net (S
8, S
11) and gas system S
9
Can deposit carbon-coating at beryllium oxide window inner surface this moment, and the heat of its generation mainly conducts by the high thermal conductivity of beryllium oxide and the flowing gas in the air channel.The aluminium oxide window is mainly used to prevent that the beryllium oxide window is overheated when bursting that dust is overflowed, and assists to form the air channel, and himself produces heat and is mainly taken away by flowing gas, even aluminium oxide window generation heat bursts the work that also do not influence.
Two dielectric disk in window surfaces have or not gas flow, without any influence, and have reduced the temperature difference at dielectric disk in window edge and center for the transmission of microwave.In order to make provision against emergencies, whole current path need guarantee certain air-tightness, and the beryllium oxide dust that may occur is controlled in enclosure space fully, and regularly cleans.
In above-mentioned two kinds of situations, judge that according to following formula microwave peak power is whether greater than waveguide sparking power under atmospheric pressure volumes such as (draw from " microwave technology ") Wuzhong are virtuous:
P＝(1/3～1/5)P
br (1)
P
br＝abE
br 2[1-(λ/2a)
2]
1/2/(480π)(MW) (2)
In formula (1) and formula (2), a, b are respectively waveguide width limit (be unit with cm), E
BrBe the breakdown field strength (breakdown strength of atmosphere air is 30kV/cm) of medium, λ is the wavelength of transmission microwave in free space, P
BrBe the power of striking sparks in the theoretic waveguide, P is the empirical value (influenced by other factorses such as temperature, humidity) of the interior sparking of the waveguide power during real atmosphere is pressed.
Therefore, by the above and below difference temperature sensor in cross-ventilation space between two dielectric disk in window, monitor the dielectric disk in window surface temperature in real time and change, judge whether dielectric disk in window is in the dangerous edge that heat bursts, and then alleviate by adding air flow.In addition, can also study the air-flow size for the influence of dielectric disk in window surface temperature by temperature sensor.
So far, by reference to the accompanying drawings present embodiment microwave delivery of energy window is described in detail.According to above description, those skilled in the art should have clearly understanding to microwave delivery of energy window of the present invention.
In addition, above-mentioned definition to each element is not limited in various concrete structures or the shape of mentioning in the execution mode, and those of ordinary skill in the art can replace simply to it with knowing, for example:
(1) as long as there is the cross-ventilation space, even at the window frame opening that connects of the cold peripheral passage of air feed not, can realize that also dielectric disk in window center and temperature all around tend to consistent, thereby avoid dielectric disk in window to break because temperature gradient is excessive;
(2) can save complicated gas cooled parts, as long as by pipeline air inlet and gas outlet are communicated with, and increase suitable air pump and filter screen in the centre and get final product;
(3) can select the material of two dielectric disk in window flexibly for use according to the average power magnitude of device or system.For example, when average power is higher, can all elect two dielectric disk in window as thermal conductivity higher diamond;
(4) when operative scenario be high-peak power requirement waveguide inflation, and average power is high to must have flowing gas to flow through the dielectric disk in window surface time, can change gas circuit and is outlet pressure and be higher than an atmospheric circulation and seal gas circuit; When operative scenario for requiring waveguide inflation or vacuumize, and average power is also during low situation, both also not water flowings of stuffiness, the cooling of giving free rein to.
In sum, microwave delivery of energy window of the present invention is by arranging two dielectric disk in window, thereby between forms the cross-ventilation space, thereby avoided wherein the dielectric disk in window temperature gradient excessive and dielectric disk in window that cause breaks, and provide another kind of air cooling path, improve the radiating efficiency of microwave delivery of energy window, can be widely used in various high-average power microwave devices: klystron, inductive output tube, magnetron, gyrotron and power synthetic system etc.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (11)
1. a microwave delivery of energy window is characterized in that, comprising:
Window frame is the hollow tube-shape structure, and its two ends are connected with load with the microwave electron tube by waveguide respectively;
Two parallel dielectric disk in window, be individually fixed on the described window frame, the central axes of its central axis and described window frame, first dielectric disk in window and described window frame near described microwave electron tube in this two parallel dielectric disk in window are tightly connected, and form the cross-ventilation space between this two parallel dielectric disk in window.
2. microwave delivery of energy window according to claim 1, it is characterized in that: the above and below in described cross-ventilation space links to each other with air-cooled peripheral passage by the opening that is opened on the window frame respectively.
3. microwave delivery of energy window according to claim 2 is characterized in that, described air-cooled peripheral passage is for connecting the closing pipe line of described airflow inlet and air stream outlet.
4. microwave delivery of energy window according to claim 2 is characterized in that, described air-cooled peripheral passage comprises: air pump, contaminant filter net and gas system.
5. microwave delivery of energy window according to claim 2 is characterized in that, also comprises:
Two temperature sensors are arranged at the above and below in cross-ventilation space respectively, are used for the variations in temperature in the monitoring cross-ventilation space.
6. microwave delivery of energy window according to claim 1 is characterized in that, away from having little small opening between second dielectric disk in window of microwave electron tube and the described window frame.
7. microwave delivery of energy window according to claim 6 is characterized in that, the leak rate Q of described second dielectric disk in window
ASatisfy: 10
-8Pam
3S
-1＜Q
A＜10
-6Pam
3S
-1
8. microwave delivery of energy window according to claim 1 is characterized in that, is tightly connected with described window frame away from described second dielectric disk in window of microwave electron tube is same.
9. according to each described microwave delivery of energy window in the claim 6 to 8, it is characterized in that described first dielectric disk in window and second dielectric disk in window and described window frame weld by brazing mode.
10. according to each described microwave delivery of energy window in the claim 1 to 8, it is characterized in that, in the described two parallel dielectric disk in window:
First dielectric disk in window near described microwave electron tube is the beryllium oxide window;
Second dielectric disk in window away from described microwave electron tube is the aluminium oxide window.
11. according to each described microwave delivery of energy window in the claim 1 to 8, it is characterized in that, also comprise:
Water collar is placed between the described window frame and forms water flow space, and its export and import is connected with the water-cooled peripheral passage by water-supply-pipe respectively.
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| CN2013102083254A CN103346057A (en) | 2013-05-30 | 2013-05-30 | Microwave energy transmission window |
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|---|---|---|---|
| CN2013102083254A CN103346057A (en) | 2013-05-30 | 2013-05-30 | Microwave energy transmission window |
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ID=49280845
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107949145A (en) * | 2017-12-27 | 2018-04-20 | 长沙新材料产业研究院有限公司 | A kind of microwave-excited plasma device |
| CN108156744A (en) * | 2018-01-18 | 2018-06-12 | 中国科学院近代物理研究所 | The power input coupler of double hot window types |
| CN108963393A (en) * | 2018-07-18 | 2018-12-07 | 合肥聚能电物理高技术开发有限公司 | The double cold High-Power Microwave feed-in windows of aqueous vapor |
| CN109712856A (en) * | 2018-12-29 | 2019-05-03 | 电子科技大学 | A kind of electrovacuum delivery of energy window construction |
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| JPH01130449A (en) * | 1987-11-16 | 1989-05-23 | Toshiba Corp | Air-tight window structure of wave guide |
| US4965541A (en) * | 1988-05-23 | 1990-10-23 | Kabushiki Kaisha Toshiba | Waveguide provided with double disk window assembly having dielectric disks |
| CN101478066A (en) * | 2009-01-21 | 2009-07-08 | 电子科技大学 | Wide-band micro-wave kit shaped energy delivery window |
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2013
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4458223A (en) * | 1980-07-26 | 1984-07-03 | U.S. Philips Corporation | Microwave window assembly having cooling means |
| JPH01130449A (en) * | 1987-11-16 | 1989-05-23 | Toshiba Corp | Air-tight window structure of wave guide |
| US4965541A (en) * | 1988-05-23 | 1990-10-23 | Kabushiki Kaisha Toshiba | Waveguide provided with double disk window assembly having dielectric disks |
| CN101478066A (en) * | 2009-01-21 | 2009-07-08 | 电子科技大学 | Wide-band micro-wave kit shaped energy delivery window |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107949145A (en) * | 2017-12-27 | 2018-04-20 | 长沙新材料产业研究院有限公司 | A kind of microwave-excited plasma device |
| CN108156744A (en) * | 2018-01-18 | 2018-06-12 | 中国科学院近代物理研究所 | The power input coupler of double hot window types |
| CN108963393A (en) * | 2018-07-18 | 2018-12-07 | 合肥聚能电物理高技术开发有限公司 | The double cold High-Power Microwave feed-in windows of aqueous vapor |
| CN108963393B (en) * | 2018-07-18 | 2021-08-03 | 合肥聚能电物理高技术开发有限公司 | Water-air double-cooling high-power microwave feed-in window |
| CN109712856A (en) * | 2018-12-29 | 2019-05-03 | 电子科技大学 | A kind of electrovacuum delivery of energy window construction |
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Application publication date: 20131009 |