SG52999A1 - Disk cleaning and polishing apparatus - Google Patents

Disk cleaning and polishing apparatus

Info

Publication number
SG52999A1
SG52999A1 SG1997002210A SG1997002210A SG52999A1 SG 52999 A1 SG52999 A1 SG 52999A1 SG 1997002210 A SG1997002210 A SG 1997002210A SG 1997002210 A SG1997002210 A SG 1997002210A SG 52999 A1 SG52999 A1 SG 52999A1
Authority
SG
Singapore
Prior art keywords
polishing apparatus
disk cleaning
cleaning
disk
polishing
Prior art date
Application number
SG1997002210A
Other languages
English (en)
Inventor
Kiyoshi Ikemoto
Original Assignee
Speedfam Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam Co Ltd filed Critical Speedfam Co Ltd
Publication of SG52999A1 publication Critical patent/SG52999A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/02—Devices for holding articles during cleaning
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
    • G11B23/50—Reconditioning of record carriers; Cleaning of record carriers ; Carrying-off electrostatic charges
    • G11B23/505—Reconditioning of record carriers; Cleaning of record carriers ; Carrying-off electrostatic charges of disk carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
SG1997002210A 1996-06-27 1997-06-26 Disk cleaning and polishing apparatus SG52999A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8185344A JPH1011749A (ja) 1996-06-27 1996-06-27 ディスクの洗浄及び乾燥装置

Publications (1)

Publication Number Publication Date
SG52999A1 true SG52999A1 (en) 1998-09-28

Family

ID=16169154

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1997002210A SG52999A1 (en) 1996-06-27 1997-06-26 Disk cleaning and polishing apparatus

Country Status (4)

Country Link
US (1) US5826292A (ja)
JP (1) JPH1011749A (ja)
MY (1) MY114583A (ja)
SG (1) SG52999A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5966766A (en) * 1997-10-06 1999-10-19 Advanced Micro Devices, Inc. Apparatus and method for cleaning semiconductor wafer
US6991524B1 (en) * 2000-07-07 2006-01-31 Disc Go Technologies Inc. Method and apparatus for reconditioning digital discs
JP2009283056A (ja) * 2008-05-21 2009-12-03 Fujitsu Ltd ディスク加工方法
JP2011008876A (ja) * 2009-06-26 2011-01-13 Disco Abrasive Syst Ltd 研削装置
CN102363150B (zh) * 2011-10-28 2014-05-28 厦门美硕美机电工程有限公司 全自动卡片清洗机

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6282513A (ja) * 1985-10-05 1987-04-16 Hitachi Electronics Eng Co Ltd デイスク部材の洗浄装置
JPS6284970A (ja) * 1985-10-09 1987-04-18 Hitachi Electronics Eng Co Ltd ディスク部材の洗浄装置
US5357645A (en) * 1989-04-09 1994-10-25 System Seiko Co., Ltd. Apparatus for cleaning and drying hard disk substrates
JP2802783B2 (ja) * 1989-09-04 1998-09-24 システム精工株式会社 ハードディスク基板の洗浄・乾燥装置
KR0134962B1 (ko) * 1989-07-13 1998-04-22 나까다 구스오 디스크 세척장치
JP2830102B2 (ja) * 1989-07-13 1998-12-02 日立電子エンジニアリング株式会社 ディスク洗浄装置

Also Published As

Publication number Publication date
US5826292A (en) 1998-10-27
MY114583A (en) 2002-11-30
JPH1011749A (ja) 1998-01-16

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