SG52770A1 - Metal ion reduction in top anti-reflective coatings for photoresists - Google Patents

Metal ion reduction in top anti-reflective coatings for photoresists

Info

Publication number
SG52770A1
SG52770A1 SG1996009254A SG1996009254A SG52770A1 SG 52770 A1 SG52770 A1 SG 52770A1 SG 1996009254 A SG1996009254 A SG 1996009254A SG 1996009254 A SG1996009254 A SG 1996009254A SG 52770 A1 SG52770 A1 SG 52770A1
Authority
SG
Singapore
Prior art keywords
photoresists
metal ion
reflective coatings
ion reduction
top anti
Prior art date
Application number
SG1996009254A
Other languages
English (en)
Inventor
Dana L Durham
M Dalil Rahman
Original Assignee
Hoechst Celanese Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoechst Celanese Corp filed Critical Hoechst Celanese Corp
Publication of SG52770A1 publication Critical patent/SG52770A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Paints Or Removers (AREA)
SG1996009254A 1992-07-10 1992-07-10 Metal ion reduction in top anti-reflective coatings for photoresists SG52770A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US91160492A 1992-07-10 1992-07-10
US98465592A 1992-12-02 1992-12-02

Publications (1)

Publication Number Publication Date
SG52770A1 true SG52770A1 (en) 1998-09-28

Family

ID=27129575

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996009254A SG52770A1 (en) 1992-07-10 1992-07-10 Metal ion reduction in top anti-reflective coatings for photoresists

Country Status (7)

Country Link
US (2) US5516886A (de)
EP (1) EP0648350B1 (de)
JP (1) JP3287569B2 (de)
DE (1) DE69310736T2 (de)
HK (1) HK117497A (de)
SG (1) SG52770A1 (de)
WO (1) WO1994001807A1 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5580949A (en) * 1991-12-18 1996-12-03 Hoechst Celanese Corporation Metal ion reduction in novolak resins and photoresists
SG48902A1 (en) * 1991-12-18 1998-05-18 Hoechst Celanese Corp Metal ion reduction in novolak resins
JP3184530B2 (ja) * 1992-03-06 2001-07-09 クラリアント・ファイナンス・（ビーブイアイ）・リミテッド 金属イオンレベルが低いフォトレジスト
US5830990A (en) * 1992-07-10 1998-11-03 Clariant Finance (Bvi) Limited Low metals perfluorooctanoic acid and top anti-reflective coatings for photoresists
SG52770A1 (en) * 1992-07-10 1998-09-28 Hoechst Celanese Corp Metal ion reduction in top anti-reflective coatings for photoresists
JP3727335B2 (ja) * 1992-11-25 2005-12-14 Ａｚエレクトロニックマテリアルズ株式会社 フォトレジスト用底部反射防止塗料における金属イオンの低減
US5476750A (en) * 1992-12-29 1995-12-19 Hoechst Celanese Corporation Metal ion reduction in the raw materials and using a Lewis base to control molecular weight of novolak resin to be used in positive photoresists
US5614349A (en) * 1992-12-29 1997-03-25 Hoechst Celanese Corporation Using a Lewis base to control molecular weight of novolak resins
US5731385A (en) * 1993-12-16 1998-03-24 International Business Machines Corporation Polymeric dyes for antireflective coatings
US5521052A (en) * 1994-12-30 1996-05-28 Hoechst Celanese Corporation Metal ion reduction in novolak resin using an ion exchange catalyst in a polar solvent and photoresists compositions therefrom
US5837417A (en) * 1994-12-30 1998-11-17 Clariant Finance (Bvi) Limited Quinone diazide compositions containing low metals p-cresol oligomers and process of producing the composition
US5614352A (en) * 1994-12-30 1997-03-25 Hoechst Celanese Corporation Metal ion reduction in novolak resins solution in PGMEA by chelating ion exchange resin
US5750031A (en) * 1995-09-26 1998-05-12 Clariant Finance (Bvi) Limited Process for producing surfactant having a low metal ion level and developer produced therefrom
US5656413A (en) * 1995-09-28 1997-08-12 Hoechst Celanese Corporation Low metal ion containing 4,4'-[1-[4-[1-(4-Hydroxyphenyl)-1-methylethyl]phenyl]ethylidene]bisphe nol and photoresist compositions therefrom
US5962183A (en) * 1995-11-27 1999-10-05 Clariant Finance (Bvi) Limited Metal ion reduction in photoresist compositions by chelating ion exchange resin
US5665517A (en) * 1996-01-11 1997-09-09 Hoechst Celanese Corporation Acidic ion exchange resin as a catalyst to synthesize a novolak resin and photoresist composition therefrom
US6190839B1 (en) 1998-01-15 2001-02-20 Shipley Company, L.L.C. High conformality antireflective coating compositions
US5936071A (en) * 1998-02-02 1999-08-10 Clariant Finance (Bvi) Limited Process for making a photoactive compound and photoresist therefrom
US6228279B1 (en) * 1998-09-17 2001-05-08 International Business Machines Corporation High-density plasma, organic anti-reflective coating etch system compatible with sensitive photoresist materials
US6316165B1 (en) 1999-03-08 2001-11-13 Shipley Company, L.L.C. Planarizing antireflective coating compositions
US6984482B2 (en) 1999-06-03 2006-01-10 Hynix Semiconductor Inc. Top-coating composition for photoresist and process for forming fine pattern using the same
KR100401116B1 (ko) * 1999-06-03 2003-10-10 주식회사 하이닉스반도체 아민오염방지 물질 및 이를 이용한 미세패턴 형성방법
US6106995A (en) * 1999-08-12 2000-08-22 Clariant Finance (Bvi) Limited Antireflective coating material for photoresists
US7030469B2 (en) 2003-09-25 2006-04-18 Freescale Semiconductor, Inc. Method of forming a semiconductor package and structure thereof
US7473512B2 (en) * 2004-03-09 2009-01-06 Az Electronic Materials Usa Corp. Process of imaging a deep ultraviolet photoresist with a top coating and materials thereof
US7384878B2 (en) * 2004-05-20 2008-06-10 International Business Machines Corporation Method for applying a layer to a hydrophobic surface
JP4551706B2 (ja) * 2004-07-16 2010-09-29 富士フイルム株式会社 液浸露光用保護膜形成組成物及びそれを用いたパターン形成方法
US20060199111A1 (en) * 2005-03-01 2006-09-07 Taiwan Semiconductor Manufacturing Company, Ltd. Method for manufacturing semiconductor devices using a photo acid generator
US20070172965A1 (en) * 2006-01-23 2007-07-26 Kangguo Cheng Non-destructive trench volume determination and trench capacitance projection
JP2010039148A (ja) * 2008-08-05 2010-02-18 Jsr Corp 液浸上層膜形成用組成物の製造方法
JP5541766B2 (ja) * 2009-05-19 2014-07-09 株式会社ダイセル フォトレジスト用高分子化合物の製造方法
US10347486B1 (en) 2017-12-19 2019-07-09 International Business Machines Corporation Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography

Family Cites Families (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2929808A (en) * 1956-04-04 1960-03-22 Exxon Research Engineering Co Removal of metal contaminants in polymerization processes
US4033909A (en) * 1974-08-13 1977-07-05 Union Carbide Corporation Stable phenolic resoles
US4033910A (en) * 1975-09-26 1977-07-05 Union Carbide Corporation Methyl formate as an adjuvant in phenolic foam formation
GB1509354A (en) * 1976-04-24 1978-05-04 Maruzen Oil Co Ltd Process for purifying halogenated alkenyl-phenol polymers
US4250031A (en) * 1977-03-01 1981-02-10 Unitika Ltd. Phenolic chelate resin and method of adsorption treatment
US4195138A (en) * 1978-06-26 1980-03-25 The Dow Chemical Company Chelate resins prepared from the cured reaction product of a polyalkylenepolyamine and epoxide
JPS5624042A (en) * 1979-08-03 1981-03-07 Japan Organo Co Ltd Preparation of drying agent by utilizing used cation exchange resin
US4452883A (en) * 1983-05-17 1984-06-05 Minnesota Mining And Manufacturing Company Barrier resin for photothermographic color separation
US4567130A (en) * 1984-07-27 1986-01-28 E. I. Du Pont De Nemours And Company Process for etching single photopolymer layer utilizing chemically soluble pigments
US4584261A (en) * 1984-07-27 1986-04-22 E. I. Du Pont De Nemours And Company Process for etching nonphotosensitive layer under washoff photopolymer layer
JPH063549B2 (ja) * 1984-12-25 1994-01-12 株式会社東芝 ポジ型フォトレジスト現像液組成物
US4636540A (en) * 1985-07-08 1987-01-13 Atlantic Richfield Company Purification of polymer solutions
US4784937A (en) * 1985-08-06 1988-11-15 Tokyo Ohka Kogyo Co., Ltd. Developing solution for positive-working photoresist comprising a metal ion free organic base and an anionic surfactant
JPS6232453A (ja) * 1985-08-06 1987-02-12 Tokyo Ohka Kogyo Co Ltd ポジ型ホトレジスト用現像液
US4747954A (en) * 1985-09-16 1988-05-31 The Dow Chemical Company Removal of metals from solutions
JPH0737486B2 (ja) * 1986-11-18 1995-04-26 日本ゼオン株式会社 半導体基板塗布材料用ポリマ−の精製方法
US4721665A (en) * 1986-09-29 1988-01-26 Polychrome Corporation Method for neutralizing acidic novolak resin in a lithographic coating composition
JPS6472155A (en) * 1987-09-12 1989-03-17 Tama Kagaku Kogyo Kk Developing solution for positive type photoresist
GB8729510D0 (en) * 1987-12-18 1988-02-03 Ucb Sa Photosensitive compositions containing phenolic resins & diazoquinone compounds
JPH01228560A (ja) * 1988-03-08 1989-09-12 Hitachi Chem Co Ltd 不純金属成分の低減された溶液の製造法
JP2640545B2 (ja) * 1988-08-10 1997-08-13 ヘキスト セラニーズ コーポレーション 感光性ノボラック樹脂
US5212044A (en) * 1988-09-08 1993-05-18 The Mead Corporation Photoresist composition including polyphenol and sensitizer
US5175078A (en) * 1988-10-20 1992-12-29 Mitsubishi Gas Chemical Company, Inc. Positive type photoresist developer
JPH03128903A (ja) * 1989-07-13 1991-05-31 Fine Kurei:Kk 合成樹脂の改質方法および改質合成樹脂
DE3923426A1 (de) * 1989-07-15 1991-01-17 Hoechst Ag Verfahren zur herstellung von novolak-harzen mit geringem metallionengehalt
JPH0465415A (ja) * 1990-07-04 1992-03-02 Hitachi Chem Co Ltd 不純金属成分の低減されたノボラツク樹脂の製造法
US5446125A (en) * 1991-04-01 1995-08-29 Ocg Microelectronic Materials, Inc. Method for removing metal impurities from resist components
US5378802A (en) * 1991-09-03 1995-01-03 Ocg Microelectronic Materials, Inc. Method for removing impurities from resist components and novolak resins
JPH0768297B2 (ja) * 1991-11-28 1995-07-26 丸善石油化学株式会社 フォトレジスト用ビニルフェノール系重合体の精製方法
JPH0768296B2 (ja) * 1991-11-28 1995-07-26 丸善石油化学株式会社 ビニルフェノール系重合体の金属除去方法
SG48902A1 (en) * 1991-12-18 1998-05-18 Hoechst Celanese Corp Metal ion reduction in novolak resins
JP3184530B2 (ja) * 1992-03-06 2001-07-09 クラリアント・ファイナンス・（ビーブイアイ）・リミテッド 金属イオンレベルが低いフォトレジスト
US5300628A (en) * 1992-06-29 1994-04-05 Ocg Microelectronic Materials, Inc. Selected chelate resins and their use to remove multivalent metal impurities from resist components
SG52770A1 (en) * 1992-07-10 1998-09-28 Hoechst Celanese Corp Metal ion reduction in top anti-reflective coatings for photoresists
CA2097791A1 (en) * 1992-08-28 1994-03-01 Sunit S. Dixit High aspect ratio, flexible thick film positive photoresist
JP3727335B2 (ja) * 1992-11-25 2005-12-14 Ａｚエレクトロニックマテリアルズ株式会社 フォトレジスト用底部反射防止塗料における金属イオンの低減
WO1994014858A1 (en) * 1992-12-29 1994-07-07 Hoechst Celanese Corporation Metal ion reduction in polyhydroxystyrene and photoresists
US5476750A (en) * 1992-12-29 1995-12-19 Hoechst Celanese Corporation Metal ion reduction in the raw materials and using a Lewis base to control molecular weight of novolak resin to be used in positive photoresists
US5286606A (en) * 1992-12-29 1994-02-15 Hoechst Celanese Corporation Process for producing a developer having a low metal ion level
US5472616A (en) * 1993-10-27 1995-12-05 Shipley Company, Inc. Modified anion exchange process
US5350714A (en) * 1993-11-08 1994-09-27 Shipley Company Inc. Point-of-use purification
US5500127A (en) * 1994-03-14 1996-03-19 Rohm And Haas Company Purification process
WO1996012214A1 (en) * 1994-10-12 1996-04-25 Hoechst Celanese Corporation Low metal ion photoactive compounds and photoresists compositions produced therefrom
US5521052A (en) * 1994-12-30 1996-05-28 Hoechst Celanese Corporation Metal ion reduction in novolak resin using an ion exchange catalyst in a polar solvent and photoresists compositions therefrom
US5837417A (en) * 1994-12-30 1998-11-17 Clariant Finance (Bvi) Limited Quinone diazide compositions containing low metals p-cresol oligomers and process of producing the composition
US5614352A (en) * 1994-12-30 1997-03-25 Hoechst Celanese Corporation Metal ion reduction in novolak resins solution in PGMEA by chelating ion exchange resin

Also Published As

Publication number Publication date
EP0648350A1 (de) 1995-04-19
WO1994001807A1 (en) 1994-01-20
DE69310736D1 (de) 1997-06-19
DE69310736T2 (de) 1997-10-30
EP0648350B1 (de) 1997-05-14
JP3287569B2 (ja) 2002-06-04
US5516886A (en) 1996-05-14
JPH08504279A (ja) 1996-05-07
US5624789A (en) 1997-04-29
HK117497A (en) 1997-09-05

Similar Documents

Publication Publication Date Title
SG52770A1 (en) Metal ion reduction in top anti-reflective coatings for photoresists
HK1001101A1 (en) Metal ion reduction in bottom anti-reflective coatings for photoresists
AU5005393A (en) Antireflection coatings
EP0723603A4 (de) Konversionsbeschichtung für metalloberflächen
SG48944A1 (en) Photoresists having a low level of metal ions
SG52630A1 (en) Top anti-reflective coating films
GB9405510D0 (en) Coated metal
GB9218859D0 (en) Aluminide-silicide coatings
AU3617293A (en) Method and compositions for inhibiting tumor cell metabolism
AU4644693A (en) Hydrophilicizing treatment for metal objects
EP0534260A3 (en) Method for obtaining anti-reflective surfaces
ZA948642B (en) Process for coating metal surfaces
GB9304340D0 (en) Metal casting
GB9425873D0 (en) Metal structures
HK1008057A1 (en) Process for treating metal
GB2263429B (en) Liquid metal processing
AU4171893A (en) Process for obtaining tin metal from tin compounds RSn in gaseous form
GB9211977D0 (en) Formed metal slate
EP0696625A3 (de) Verfahren zur Reduzierung der Bildungsneigung von Beschichtungen
AU672432B2 (en) Sheet metal tank
GB9224031D0 (en) Metal coatings
GB9214516D0 (en) Coating process
GB9207876D0 (en) Corrosion reduction process
GB9201278D0 (en) Surface phase transformation in metal alloys
GB9124073D0 (en) Metal coatings