SG193070A1 - Current insulated bearing components and bearings - Google Patents

Current insulated bearing components and bearings Download PDF

Info

Publication number
SG193070A1
SG193070A1 SG2012096566A SG2012096566A SG193070A1 SG 193070 A1 SG193070 A1 SG 193070A1 SG 2012096566 A SG2012096566 A SG 2012096566A SG 2012096566 A SG2012096566 A SG 2012096566A SG 193070 A1 SG193070 A1 SG 193070A1
Authority
SG
Singapore
Prior art keywords
layer
bearing
ald
vapor deposition
chemical vapor
Prior art date
Application number
SG2012096566A
Other languages
English (en)
Inventor
Ivan Kolev Dr
Paul Peeters Dr
Roland Tap Dr
Haag Bertram
Yashar Musayev Dr
Serge Kursawe Dr
Tim Matthias Hosenfeldt Dr
Juergen Gierl Dr
Kostamo Juhana
Original Assignee
Hauzer Techno Coating Bv
Schaeffler Ag
Picosun Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hauzer Techno Coating Bv, Schaeffler Ag, Picosun Oy filed Critical Hauzer Techno Coating Bv
Publication of SG193070A1 publication Critical patent/SG193070A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/12—Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
    • C23C16/45546—Atomic layer deposition [ALD] characterized by the apparatus specially adapted for a substrate stack in the ALD reactor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C23C16/45555—Atomic layer deposition [ALD] applied in non-semiconductor technology
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/38—Ball cages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/46—Cages for rollers or needles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/62—Selection of substances
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/64—Special methods of manufacture
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C41/00—Other accessories, e.g. devices integrated in the bearing not relating to the bearing function as such
    • F16C41/008—Identification means, e.g. markings, RFID-tags; Data transfer means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/16—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2202/00—Solid materials defined by their properties
    • F16C2202/30—Electric properties; Magnetic properties
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
    • F16C2206/02—Carbon based material
    • F16C2206/04—Diamond like carbon [DLC]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
    • F16C2206/40—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal
    • F16C2206/42—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal based on ceramic oxides
    • F16C2206/44—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal based on ceramic oxides based on aluminium oxide (Al2O3)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2223/00—Surface treatments; Hardening; Coating
    • F16C2223/30—Coating surfaces
    • F16C2223/60—Coating surfaces by vapour deposition, e.g. PVD, CVD
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/60—Thickness, e.g. thickness of coatings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/60—Thickness, e.g. thickness of coatings
    • F16C2240/64—Thickness, e.g. thickness of coatings in the nanometer range
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2380/00—Electrical apparatus
    • F16C2380/26—Dynamo-electric machines or combinations therewith, e.g. electro-motors and generators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/043—Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/32—Balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/34—Rollers; Needles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/38—Ball cages
    • F16C33/44—Selection of substances
    • F16C33/445—Coatings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/46—Cages for rollers or needles
    • F16C33/56—Selection of substances
    • F16C33/565—Coatings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Rolling Contact Bearings (AREA)
SG2012096566A 2012-02-15 2012-12-28 Current insulated bearing components and bearings SG193070A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20120000975 EP2628822B1 (en) 2012-02-15 2012-02-15 Current insulated bearing components and bearings

Publications (1)

Publication Number Publication Date
SG193070A1 true SG193070A1 (en) 2013-09-30

Family

ID=45655019

Family Applications (1)

Application Number Title Priority Date Filing Date
SG2012096566A SG193070A1 (en) 2012-02-15 2012-12-28 Current insulated bearing components and bearings

Country Status (9)

Country Link
US (1) US9115755B2 (enExample)
EP (1) EP2628822B1 (enExample)
JP (1) JP6190590B2 (enExample)
KR (1) KR101948013B1 (enExample)
CN (1) CN103256306B (enExample)
ES (1) ES2543579T3 (enExample)
PL (1) PL2628822T3 (enExample)
SG (1) SG193070A1 (enExample)
TW (1) TWI577814B (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3460093A3 (en) * 2015-02-13 2019-06-19 Entegris, Inc. Coatings for enhancement of properties and performance of substrate articles and apparatus
CN105132888B (zh) * 2015-09-11 2019-02-19 兰州空间技术物理研究所 一种高温抗氧化涂层的复合沉积方法
JP6672812B2 (ja) * 2016-01-14 2020-03-25 三菱電機株式会社 半導体装置及びその製造方法
US10190640B2 (en) 2016-03-23 2019-01-29 Schaeffler Technologies AG & Co. KG Bearing with integrated shunt
US10794427B2 (en) 2016-04-05 2020-10-06 Schaeffler Technologies AG & Co. KG Bearing ring with insulating coating
US10858727B2 (en) * 2016-08-19 2020-12-08 Applied Materials, Inc. High density, low stress amorphous carbon film, and process and equipment for its deposition
WO2018056584A1 (ko) 2016-09-21 2018-03-29 삼성전자 주식회사 피부 상태 측정 방법 및 이를 위한 전자 장치
JP6729437B2 (ja) * 2017-02-08 2020-07-22 株式会社デンソー 金属構造体およびその製造方法
JP7134639B2 (ja) 2017-03-24 2022-09-12 アクティエボラゲット・エスコーエッフ 電気絶縁層を含む転がり軸受
US10539178B2 (en) 2017-05-18 2020-01-21 Schaeffler Technologies AG & Co. KG Vapor deposition bearing coating
KR102019057B1 (ko) 2018-01-31 2019-09-06 셰플러코리아(유) 구름 베어링 전식 시험 장치
CA3076368C (en) * 2018-02-13 2024-01-02 Schaeffler Technologies AG & Co. KG Coated bearing components
US11015252B2 (en) * 2018-04-27 2021-05-25 Applied Materials, Inc. Protection of components from corrosion
US11560808B2 (en) * 2018-09-19 2023-01-24 Raytheon Technologies Corporation Seal assembly for gas turbine engine
CN109576679B (zh) * 2018-12-24 2022-03-22 上海治臻新能源股份有限公司 一种燃料电池双极板碳涂层连续沉积系统及其应用
WO2020225385A1 (en) * 2019-05-07 2020-11-12 Oerlikon Surface Solutions Ag, Pfäffikon Movable work piece carrier device for holding work pieces to be treated
CN111876754A (zh) * 2020-08-04 2020-11-03 中国科学院兰州化学物理研究所 通过纳米金属镀膜钢球与含氢碳薄膜配副实现宏观超滑的方法
EP4225963A1 (en) * 2020-10-06 2023-08-16 Oerlikon Surface Solutions AG, Pfäffikon Hard carbon coatings with improved adhesion strength by means of hipims and method thereof
CN113564552A (zh) * 2021-07-29 2021-10-29 中国科学院兰州化学物理研究所 一种电磁分离式镀膜装置及方法
CN114150282B (zh) * 2021-11-22 2022-08-09 苏州大学 一种纳米刀具涂层及其制备方法
CN115087184B (zh) * 2022-07-27 2024-08-09 电子科技大学 一种等离子体射流发生装置
KR102811239B1 (ko) 2022-12-19 2025-05-26 지엠비코리아 주식회사 와류억제용 전도성 그리스 조성물 및 그 제조방법
EP4467700B1 (de) * 2023-05-24 2026-01-14 KARL MAYER STOLL R&D GmbH Textilwerkzeug, textilwerkzeugverbund und textilmaschine zur herstellung eines textilen flächengebildes
CN117309062A (zh) * 2023-10-27 2023-12-29 清华大学 一种基于一体化轴承薄膜应变计和薄膜热电偶阵列监测多维力和温度的装置
CN117888073A (zh) * 2023-12-11 2024-04-16 天津大学 卫星太阳翼铰链中展开及锁定机构关键部件表面膜层的制备方法
CN118725620B (zh) * 2024-08-15 2025-01-24 中机凯博表面技术江苏有限公司 一种小电容绝缘涂层及其制备方法和用途
CN119615079B (zh) * 2024-12-02 2025-11-14 洛阳船舶材料研究所(中国船舶集团有限公司第七二五研究所) 一种高致密强绝缘的超厚碳掺杂陶瓷涂层及其制备方法

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3421739C2 (de) 1984-06-12 1987-01-02 Battelle-Institut E.V., 6000 Frankfurt Verfahren zur Herstellung von diamantartigen Kohlenstoffschichten
US5067826A (en) * 1987-03-31 1991-11-26 Lemelson Jerome H Ball and roller bearings and bearing components
BE1006711A3 (nl) 1992-12-02 1994-11-22 Vito Werkwijze voor het aanbrengen van een diamantachtige koolstoflaag op staal, ijzer of legeringen daarvan.
BE1008229A3 (nl) 1993-10-29 1996-02-20 Vito Werkwijze voor het aanbrengen van een tegen slijtage beschermende laag op een substraat.
DE19513614C1 (de) 1995-04-10 1996-10-02 Fraunhofer Ges Forschung Verfahren zur Abscheidung von Kohlenstoffschichten, Kohlenstoffschichten auf Substraten und deren Verwendung
US5593234A (en) * 1995-05-16 1997-01-14 Ntn Corporation Bearing assembly with polycrystalline superlattice coating
EP0791760A3 (en) * 1996-02-20 1997-09-10 Ebara Corporation Water lubricated bearing or water lubricated seal
DE19631988A1 (de) * 1996-08-08 1998-02-12 Dieter Westerhoff Kugel- bzw. wälzgelagerter Großelektromotor
DE19826259A1 (de) 1997-06-16 1998-12-17 Bosch Gmbh Robert Verfahren und Einrichtung zum Vakuumbeschichten eines Substrates
NL1009170C2 (nl) * 1998-05-14 1999-11-16 Skf Eng & Res Centre Bv Bekleed wentellager.
US6357923B1 (en) * 1999-02-19 2002-03-19 Nsk Ltd. Rolling bearing and bearing device
DE10018143C5 (de) 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems
US6482733B2 (en) 2000-05-15 2002-11-19 Asm Microchemistry Oy Protective layers prior to alternating layer deposition
US6497772B1 (en) 2000-09-27 2002-12-24 Molecular Metallurgy, Inc. Surface treatment for improved hardness and corrosion resistance
JP2002276679A (ja) * 2001-03-15 2002-09-25 Daido Metal Co Ltd すべり軸受装置
ITMO20010080A1 (it) 2001-05-03 2002-11-03 Franco Berselli Realizzazione di piastrelle contenenti decoro costituito da elementi organici ed inorganici cristallizzati
DE10124749A1 (de) 2001-05-21 2002-11-28 Wolf-Dieter Muenz Kombiniertes Beschichtungs Verfahren magnetfeldunterstützte Hochleistungs-Impuls-Kathodenzerstäubung und Unbalanziertes Magnetron
KR100466309B1 (ko) 2002-05-21 2005-01-13 삼성전자주식회사 반도체 장치의 금속층 형성 방법 및 장치
US6936906B2 (en) 2001-09-26 2005-08-30 Applied Materials, Inc. Integration of barrier layer and seed layer
US7049226B2 (en) 2001-09-26 2006-05-23 Applied Materials, Inc. Integration of ALD tantalum nitride for copper metallization
US6921702B2 (en) 2002-07-30 2005-07-26 Micron Technology Inc. Atomic layer deposited nanolaminates of HfO2/ZrO2 films as gate dielectrics
US6904935B2 (en) * 2002-12-18 2005-06-14 Masco Corporation Of Indiana Valve component with multiple surface layers
JP2005032346A (ja) * 2003-07-14 2005-02-03 Tdk Corp 磁気ヘッドスライダ、ヘッドジンバルアセンブリおよびハードディスク装置
JP2005133876A (ja) * 2003-10-31 2005-05-26 Ntn Corp 電食防止型転がり軸受
US7285312B2 (en) * 2004-01-16 2007-10-23 Honeywell International, Inc. Atomic layer deposition for turbine components
KR100636325B1 (ko) 2004-12-14 2006-10-18 삼성전자주식회사 프린터의 미싱 노즐 보상 방법 및 이를 이용하는 프린터
JP2006226500A (ja) * 2005-02-21 2006-08-31 Nsk Ltd 転がり軸受
SE529051C2 (sv) * 2005-09-27 2007-04-17 Seco Tools Ab Skärverktygsskär belagt med aluminiumoxid
US20070116888A1 (en) 2005-11-18 2007-05-24 Tokyo Electron Limited Method and system for performing different deposition processes within a single chamber
US20070116872A1 (en) 2005-11-18 2007-05-24 Tokyo Electron Limited Apparatus for thermal and plasma enhanced vapor deposition and method of operating
GB2437080B (en) 2006-04-11 2011-10-12 Hauzer Techno Coating Bv A vacuum treatment apparatus, a bias power supply and a method of operating a vacuum treatment apparatus
GB2445218B (en) 2006-09-21 2011-05-25 Smith International Atomic layer deposition nanocoating on cutting tool powder materials
EP2076916B1 (en) 2006-10-26 2014-12-10 IHI Hauzer Techno Coating B.V. Dual magnetron sputtering power supply and magnetron sputtering apparatus
DE102007035342A1 (de) 2007-07-27 2009-01-29 Schaeffler Kg Verfahren zum Herstellen einer Gleitschicht auf einer Gleitlagerkomponente sowie Gleitlagerkomponente
GB2455993B (en) * 2007-12-28 2012-09-05 Hauzer Techno Coating Bv A corrosion resistant coated article
DE102008045381A1 (de) 2008-09-02 2010-03-04 Schaeffler Kg Verschleiß- und korrosionshemmender Schichtverbund
FI20095630A0 (fi) * 2009-06-05 2009-06-05 Beneq Oy Suojapinnoitus, menetelmä alustan suojaamiseksi ja menetelmän käyttö

Also Published As

Publication number Publication date
TW201402842A (zh) 2014-01-16
JP2013167353A (ja) 2013-08-29
PL2628822T3 (pl) 2016-04-29
JP6190590B2 (ja) 2017-08-30
KR20130094226A (ko) 2013-08-23
US20130209006A1 (en) 2013-08-15
CN103256306A (zh) 2013-08-21
EP2628822B1 (en) 2015-05-20
TWI577814B (zh) 2017-04-11
ES2543579T3 (es) 2015-08-20
EP2628822A1 (en) 2013-08-21
CN103256306B (zh) 2017-03-08
KR101948013B1 (ko) 2019-02-14
US9115755B2 (en) 2015-08-25

Similar Documents

Publication Publication Date Title
EP2628822B1 (en) Current insulated bearing components and bearings
EP2628817B1 (en) A coated article of martensitic steel and a method of forming a coated article of steel
EP2963145B1 (en) Coating and method for its deposition to operate in boundary lubrication conditions and at elevated temperatures
US7601405B2 (en) DLC coating system and process and apparatus for making coating system
AU734809B2 (en) Method and device for vacuum-coating a substrate
Ghantasala et al. Magnetron sputtered thin films based on transition metal nitride: structure and properties
US7169473B2 (en) Carbon film-coated article and method of producing the same
JP4365501B2 (ja) 硬質炭素積層膜とその形成方法
WO2014103318A1 (ja) プラズマcvd法による保護膜の形成方法
KR100732198B1 (ko) Dlc 코팅장치