SG176121A1 - Compact electrooptic modulator - Google Patents
Compact electrooptic modulator Download PDFInfo
- Publication number
- SG176121A1 SG176121A1 SG2011084688A SG2011084688A SG176121A1 SG 176121 A1 SG176121 A1 SG 176121A1 SG 2011084688 A SG2011084688 A SG 2011084688A SG 2011084688 A SG2011084688 A SG 2011084688A SG 176121 A1 SG176121 A1 SG 176121A1
- Authority
- SG
- Singapore
- Prior art keywords
- substantially straight
- segment
- waveguide
- segments
- sald
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 104
- 239000000758 substrate Substances 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 230000001131 transforming effect Effects 0.000 claims description 6
- 230000008859 change Effects 0.000 description 11
- 230000005684 electric field Effects 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 230000004044 response Effects 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 241000206607 Porphyra umbilicalis Species 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 5
- 241000252067 Megalops atlanticus Species 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 241000282887 Suidae Species 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- XOFYZVNMUHMLCC-ZPOLXVRWSA-N prednisone Chemical compound O=C1C=C[C@]2(C)[C@H]3C(=O)C[C@](C)([C@@](CC4)(O)C(=O)CO)[C@@H]4[C@@H]3CCC2=C1 XOFYZVNMUHMLCC-ZPOLXVRWSA-N 0.000 description 2
- 241001363698 Batis <Aves> Species 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 235000019994 cava Nutrition 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000003370 grooming effect Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00663—Production of light guides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2257—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure the optical waveguides being made of semiconducting material
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
- G02F2201/066—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide channel; buried
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/127—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode travelling wave
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/10—Materials and properties semiconductor
- G02F2202/105—Materials and properties semiconductor single crystal Si
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ophthalmology & Optometry (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/467,867 US8346025B2 (en) | 2009-05-18 | 2009-05-18 | Compact electrooptic modulator |
| PCT/US2010/035075 WO2010135225A2 (fr) | 2009-05-18 | 2010-05-17 | Modulateur électro-optique compact |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG176121A1 true SG176121A1 (en) | 2011-12-29 |
Family
ID=43068561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG2011084688A SG176121A1 (en) | 2009-05-18 | 2010-05-17 | Compact electrooptic modulator |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8346025B2 (fr) |
| EP (1) | EP2433167A4 (fr) |
| KR (1) | KR20120025475A (fr) |
| CN (1) | CN102428399A (fr) |
| SG (1) | SG176121A1 (fr) |
| WO (1) | WO2010135225A2 (fr) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8842942B2 (en) * | 2010-02-08 | 2014-09-23 | Samsung Electronics Co., Ltd. | Optical modulator formed on bulk-silicon substrate |
| JP5720354B2 (ja) * | 2011-03-25 | 2015-05-20 | 富士通株式会社 | 光導波路素子及び光ハイブリッド回路 |
| US9036954B2 (en) * | 2011-04-01 | 2015-05-19 | Intel Corporation | Optical waveguide structure |
| US9151592B2 (en) | 2012-01-03 | 2015-10-06 | Skorpios Technologies, Inc. | Method and system for multiple resonance interferometer |
| WO2013155378A1 (fr) * | 2012-04-13 | 2013-10-17 | Skorpios Technologies, Inc. | Modulateur optique hybride |
| US10488682B2 (en) | 2013-08-31 | 2019-11-26 | Acacia Communications, Inc. | Distributed CMOS driver with enhanced drive voltage for silicon optical push-pull Mach-Zehnder modulators |
| US10928659B2 (en) | 2014-02-24 | 2021-02-23 | Rockley Photonics Limited | Optoelectronic device |
| GB2523383B (en) * | 2014-02-24 | 2016-09-14 | Rockley Photonics Ltd | Detector remodulator |
| GB2564158B (en) | 2017-07-05 | 2019-12-18 | Rockley Photonics Ltd | Optoelectronic device |
| WO2015124954A2 (fr) | 2014-02-24 | 2015-08-27 | Rockley Photonics Limited | Remodulateur à détecteur, et commutateur optoélectronique |
| US10222677B2 (en) | 2014-02-24 | 2019-03-05 | Rockley Photonics Limited | Optoelectronic device |
| US10678115B2 (en) | 2015-03-05 | 2020-06-09 | Rockley Photonics Limited | Waveguide modulator structures |
| US10216059B2 (en) | 2015-03-05 | 2019-02-26 | Rockley Photonics Limited | Waveguide modulator structures |
| GB2552618B (en) | 2015-03-05 | 2021-07-28 | Rockley Photonics Ltd | Waveguide modulator structures |
| US10921616B2 (en) | 2016-11-23 | 2021-02-16 | Rockley Photonics Limited | Optoelectronic device |
| US11150494B2 (en) | 2015-03-05 | 2021-10-19 | Rockley Photonics Limited | Waveguide modulator structures |
| JPWO2017038072A1 (ja) | 2015-08-28 | 2017-12-14 | 日本電信電話株式会社 | 光検出器 |
| JP6603571B2 (ja) * | 2015-12-17 | 2019-11-06 | 日本電信電話株式会社 | 光変調器 |
| US10037982B2 (en) * | 2016-01-04 | 2018-07-31 | Infinera Corporation | Photonic integrated circuit package |
| US10133142B2 (en) * | 2016-03-29 | 2018-11-20 | Acacia Communications, Inc. | Silicon modulators and related apparatus and methods |
| JP6581541B2 (ja) * | 2016-05-27 | 2019-09-25 | 日本電信電話株式会社 | 光変調器 |
| US10088733B2 (en) | 2016-08-08 | 2018-10-02 | Acacia Communications, Inc. | Segmented traveling wave optical modulators and related methods |
| US11101256B2 (en) | 2016-11-23 | 2021-08-24 | Rockley Photonics Limited | Optical modulators |
| US11036006B2 (en) | 2016-12-02 | 2021-06-15 | Rockley Photonics Limited | Waveguide device and method of doping a waveguide device |
| US11105975B2 (en) | 2016-12-02 | 2021-08-31 | Rockley Photonics Limited | Waveguide optoelectronic device |
| JP6781618B2 (ja) * | 2016-12-09 | 2020-11-04 | 日本電信電話株式会社 | 光変調器 |
| US10935869B2 (en) | 2018-07-02 | 2021-03-02 | Northrop Grumman Systems Corporation | Common drive electro-optic phase modulator array |
| JP2020134876A (ja) * | 2019-02-25 | 2020-08-31 | Tdk株式会社 | 電気光学素子 |
| JP7283180B2 (ja) | 2019-03-29 | 2023-05-30 | 住友大阪セメント株式会社 | 光変調器 |
| EP4028829A4 (fr) * | 2019-09-10 | 2023-09-27 | Hyperlight Corporation | Générateur intégré de peignes de fréquences électro-optiques |
| US20220291534A1 (en) * | 2019-11-29 | 2022-09-15 | Suzhou Lycore Technologies Co., Ltd. | Distributed optical phase modulator |
| US20220283453A1 (en) * | 2019-11-29 | 2022-09-08 | Suzhou Lycore Technologies Co., Ltd. | Distributed light intensity modulator |
| JP7454687B2 (ja) | 2020-01-29 | 2024-03-22 | サイカンタム・コーポレーション | デバイスおよび光スイッチ |
| US20210278738A1 (en) * | 2020-03-03 | 2021-09-09 | Psiquantum, Corp. | Phase shifter employing transparent electrodes |
| CA3170572A1 (fr) | 2020-03-03 | 2021-09-10 | Psiquantum, Corp. | Procede de fabrication de dispositifs photoniques |
| US11474384B2 (en) * | 2020-04-02 | 2022-10-18 | HyperLight Corporation | Velocity matched electro-optic devices |
| DE202020104362U1 (de) * | 2020-07-28 | 2021-10-29 | Gesellschaft für angewandte Mikro- und Optoelektronik mit beschränkter Haftung - AMO GmbH | Elektro-optische Einrichtung, Halbleitereinrichtung und Halbleitervorrichtung, elektro-optische Anordnung und Verwendung |
| WO2022197875A1 (fr) * | 2021-03-17 | 2022-09-22 | Ayar Labs, Inc. | Guides d'ondes en silicium à faible perte non linéaire dotés de diodes de balayage |
| JP2022177370A (ja) * | 2021-05-18 | 2022-12-01 | 富士通オプティカルコンポーネンツ株式会社 | 光デバイス及び光通信装置 |
| JP2022185695A (ja) * | 2021-06-03 | 2022-12-15 | 富士通オプティカルコンポーネンツ株式会社 | 光デバイス及び光通信装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6101296A (en) | 1998-07-31 | 2000-08-08 | Advanced Photonics Technology, Inc. | Linearized Y-fed directional coupler modulators |
| US7515775B1 (en) * | 2003-08-15 | 2009-04-07 | Luxtera, Inc. | Distributed amplifier optical modulator |
| JP4485218B2 (ja) | 2004-02-06 | 2010-06-16 | 富士通オプティカルコンポーネンツ株式会社 | 光変調器 |
| JP4555715B2 (ja) | 2005-03-18 | 2010-10-06 | 富士通株式会社 | 光デバイス |
| US7676121B2 (en) * | 2006-12-29 | 2010-03-09 | Alcatel-Lucent Usa Inc. | Thermo-optic tuning of a multi-directional optical waveguide |
| JP5092573B2 (ja) * | 2007-06-22 | 2012-12-05 | 富士通株式会社 | 光導波路デバイス |
| JP5076726B2 (ja) * | 2007-08-13 | 2012-11-21 | 富士通株式会社 | 光変調器および光送信器 |
-
2009
- 2009-05-18 US US12/467,867 patent/US8346025B2/en not_active Expired - Fee Related
-
2010
- 2010-05-17 WO PCT/US2010/035075 patent/WO2010135225A2/fr active Application Filing
- 2010-05-17 SG SG2011084688A patent/SG176121A1/en unknown
- 2010-05-17 EP EP10778193.2A patent/EP2433167A4/fr not_active Withdrawn
- 2010-05-17 CN CN2010800218073A patent/CN102428399A/zh not_active Withdrawn
- 2010-05-17 KR KR1020117027378A patent/KR20120025475A/ko not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| US20100290732A1 (en) | 2010-11-18 |
| CN102428399A (zh) | 2012-04-25 |
| EP2433167A2 (fr) | 2012-03-28 |
| EP2433167A4 (fr) | 2013-10-16 |
| WO2010135225A3 (fr) | 2011-02-03 |
| WO2010135225A2 (fr) | 2010-11-25 |
| KR20120025475A (ko) | 2012-03-15 |
| US8346025B2 (en) | 2013-01-01 |
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