SG152187A1 - Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method - Google Patents
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodInfo
- Publication number
- SG152187A1 SG152187A1 SG200807879-2A SG2008078792A SG152187A1 SG 152187 A1 SG152187 A1 SG 152187A1 SG 2008078792 A SG2008078792 A SG 2008078792A SG 152187 A1 SG152187 A1 SG 152187A1
- Authority
- SG
- Singapore
- Prior art keywords
- lithographic
- beams
- device manufacturing
- processing cell
- substrate
- Prior art date
Links
- 238000007689 inspection Methods 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 3
- 230000005855 radiation Effects 0.000 abstract 2
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70566—Polarisation control
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/706843—Metrology apparatus
- G03F7/706847—Production of measurement radiation, e.g. synchrotron, free-electron laser, plasma source or higher harmonic generation [HHG]
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/706843—Metrology apparatus
- G03F7/706851—Detection branch, e.g. detector arrangements, polarisation control, wavelength control or dark/bright field detection
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US99602407P | 2007-10-25 | 2007-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG152187A1 true SG152187A1 (en) | 2009-05-29 |
Family
ID=40280773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG200807879-2A SG152187A1 (en) | 2007-10-25 | 2008-10-22 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8115926B2 (ja) |
| EP (1) | EP2053349A3 (ja) |
| JP (1) | JP4871943B2 (ja) |
| KR (1) | KR20090042195A (ja) |
| CN (1) | CN101482702A (ja) |
| IL (1) | IL194839A0 (ja) |
| SG (1) | SG152187A1 (ja) |
| TW (1) | TW200925794A (ja) |
Families Citing this family (67)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1036459A1 (nl) * | 2008-02-13 | 2009-08-14 | Asml Netherlands Bv | Method and apparatus for angular-resolved spectroscopic lithography characterization. |
| WO2011101192A1 (en) * | 2010-02-17 | 2011-08-25 | Asml Netherlands B.V. | Estimating substrate model parameters for lithographic apparatus control |
| NL2006229A (en) * | 2010-03-18 | 2011-09-20 | Asml Netherlands Bv | Inspection method and apparatus, and associated computer readable product. |
| WO2012010458A1 (en) * | 2010-07-19 | 2012-01-26 | Asml Netherlands B.V. | Method and apparatus for determining an overlay error |
| NL2009004A (en) * | 2011-07-20 | 2013-01-22 | Asml Netherlands Bv | Inspection method and apparatus, and lithographic apparatus. |
| US9213227B2 (en) * | 2011-08-18 | 2015-12-15 | Nikon Corporation | Custom color or polarization sensitive CCD for separating multiple signals in autofocus projection system |
| GB201115807D0 (en) | 2011-09-13 | 2011-10-26 | Univ St Andrews | Controlling light transmission through a medium |
| US9255887B2 (en) | 2013-06-19 | 2016-02-09 | Kla-Tencor Corporation | 2D programmable aperture mechanism |
| KR102060289B1 (ko) * | 2014-04-28 | 2019-12-27 | 가부시키가이샤 니콘 | 패턴 묘화 장치 |
| NL2017300A (en) * | 2015-08-27 | 2017-03-01 | Asml Netherlands Bv | Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method |
| NL2017881B1 (en) * | 2015-12-18 | 2017-10-17 | Ultratech Inc | Full-wafer inspection methods having selectable pixel density |
| WO2017153133A1 (en) * | 2016-03-08 | 2017-09-14 | Asml Netherlands B.V. | Inspection apparatus and method, lithographic apparatus, method of manufacturing devices and computer program |
| US10048132B2 (en) * | 2016-07-28 | 2018-08-14 | Kla-Tencor Corporation | Simultaneous capturing of overlay signals from multiple targets |
| CN110799903B (zh) | 2017-06-20 | 2021-11-16 | Asml荷兰有限公司 | 确定边缘粗糙度参数 |
| CN110945436B (zh) | 2017-07-25 | 2022-08-05 | Asml荷兰有限公司 | 用于参数确定的方法及其设备 |
| EP3451060A1 (en) | 2017-08-28 | 2019-03-06 | ASML Netherlands B.V. | Substrate, metrology apparatus and associated methods for a lithographic process |
| IL312300A (en) | 2017-09-01 | 2024-06-01 | Asml Netherlands Bv | Optical systems, metrology instruments and related methods |
| EP3454124A1 (en) * | 2017-09-07 | 2019-03-13 | ASML Netherlands B.V. | Method to determine a patterning process parameter |
| CN111095112B (zh) | 2017-09-11 | 2022-05-13 | Asml荷兰有限公司 | 光刻过程中的量测 |
| EP3457211A1 (en) | 2017-09-13 | 2019-03-20 | ASML Netherlands B.V. | A method of aligning a pair of complementary diffraction patterns and associated metrology method and apparatus |
| EP3474074A1 (en) | 2017-10-17 | 2019-04-24 | ASML Netherlands B.V. | Scatterometer and method of scatterometry using acoustic radiation |
| EP3480659A1 (en) | 2017-11-01 | 2019-05-08 | ASML Netherlands B.V. | Estimation of data in metrology |
| KR102529770B1 (ko) * | 2017-11-07 | 2023-05-04 | 에이에스엠엘 네델란즈 비.브이. | 관심 특성을 결정하는 계측 장치 및 방법 |
| WO2019129465A1 (en) | 2017-12-28 | 2019-07-04 | Asml Netherlands B.V. | A metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate |
| WO2019166190A1 (en) | 2018-02-27 | 2019-09-06 | Stichting Vu | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate |
| EP3570109A1 (en) | 2018-05-14 | 2019-11-20 | ASML Netherlands B.V. | Illumination source for an inspection apparatus, inspection apparatus and inspection method |
| CN118068655A (zh) | 2018-06-13 | 2024-05-24 | Asml荷兰有限公司 | 量测设备 |
| EP3582009A1 (en) | 2018-06-15 | 2019-12-18 | ASML Netherlands B.V. | Reflector and method of manufacturing a reflector |
| EP3611569A1 (en) | 2018-08-16 | 2020-02-19 | ASML Netherlands B.V. | Metrology apparatus and photonic crystal fiber |
| WO2020048692A1 (en) | 2018-09-04 | 2020-03-12 | Asml Netherlands B.V. | Metrology apparatus |
| EP3627226A1 (en) | 2018-09-20 | 2020-03-25 | ASML Netherlands B.V. | Optical system, metrology apparatus and associated method |
| EP3629086A1 (en) * | 2018-09-25 | 2020-04-01 | ASML Netherlands B.V. | Method and apparatus for determining a radiation beam intensity profile |
| US11087065B2 (en) | 2018-09-26 | 2021-08-10 | Asml Netherlands B.V. | Method of manufacturing devices |
| SG11202103803QA (en) | 2018-10-24 | 2021-05-28 | Asml Netherlands Bv | Optical fibers and production methods therefor |
| EP3650941A1 (en) | 2018-11-12 | 2020-05-13 | ASML Netherlands B.V. | Method of determining the contribution of a processing apparatus to a substrate parameter |
| CN113039487B (zh) | 2018-11-16 | 2024-05-14 | Asml荷兰有限公司 | 用于监测光刻装置的方法 |
| WO2020114684A1 (en) | 2018-12-03 | 2020-06-11 | Asml Netherlands B.V. | Method of manufacturing devices |
| EP3696606A1 (en) | 2019-02-15 | 2020-08-19 | ASML Netherlands B.V. | A metrology apparatus with radiation source having multiple broadband outputs |
| EP3702840A1 (en) | 2019-03-01 | 2020-09-02 | ASML Netherlands B.V. | Alignment method and associated metrology device |
| EP3705942A1 (en) | 2019-03-04 | 2020-09-09 | ASML Netherlands B.V. | Hollow-core photonic crystal fiber based optical component for broadband radiation generation |
| EP3715945A1 (en) | 2019-03-25 | 2020-09-30 | ASML Netherlands B.V. | Frequency broadening apparatus and method |
| CN113678037A (zh) | 2019-04-03 | 2021-11-19 | Asml荷兰有限公司 | 光纤 |
| EP3739389A1 (en) | 2019-05-17 | 2020-11-18 | ASML Netherlands B.V. | Metrology tools comprising aplanatic objective singlet |
| CN114008499A (zh) | 2019-06-21 | 2022-02-01 | Asml荷兰有限公司 | 安装式中空芯部光纤布置 |
| EP3758168A1 (en) | 2019-06-25 | 2020-12-30 | ASML Netherlands B.V. | Hollow-core photonic crystal fiber based optical component for broadband radiation generation |
| EP3611567A3 (en) | 2019-07-23 | 2020-05-13 | ASML Netherlands B.V. | Improvements in metrology targets |
| KR20220024908A (ko) | 2019-07-24 | 2022-03-03 | 에이에스엠엘 네델란즈 비.브이. | 방사선 소스 |
| EP3783439A1 (en) | 2019-08-22 | 2021-02-24 | ASML Netherlands B.V. | Metrology device and detection apparatus therefor |
| EP4224250A3 (en) | 2019-09-02 | 2023-09-06 | ASML Netherlands B.V. | Mode control of photonic crystal fiber based broadband light sources |
| EP3786713A1 (en) | 2019-09-02 | 2021-03-03 | ASML Netherlands B.V. | Metrology method and device for determining a complex-valued field |
| WO2021043516A1 (en) | 2019-09-03 | 2021-03-11 | Asml Netherlands B.V. | Assembly for collimating broadband radiation |
| WO2021052801A1 (en) | 2019-09-18 | 2021-03-25 | Asml Netherlands B.V. | Improved broadband radiation generation in hollow-core fibres |
| CN114830026A (zh) | 2019-10-17 | 2022-07-29 | Asml荷兰有限公司 | 照射源和相关的量测设备 |
| IL291957A (en) | 2019-10-24 | 2022-06-01 | Asml Netherlands Bv | An optical component based on photonic fibers with a hollow core to create broadband radiation |
| WO2021089360A1 (en) | 2019-11-07 | 2021-05-14 | Asml Netherlands B.V. | Method of manufacture of a capillary for a hollow-core photonic crystal fiber |
| EP3851904B1 (en) | 2020-01-15 | 2023-02-01 | ASML Netherlands B.V. | Method, assembly, and apparatus for improved control of broadband radiation generation |
| US11309202B2 (en) * | 2020-01-30 | 2022-04-19 | Kla Corporation | Overlay metrology on bonded wafers |
| EP3889681A1 (en) | 2020-03-31 | 2021-10-06 | ASML Netherlands B.V. | An assembly including a non-linear element and a method of use thereof |
| EP3913429A1 (en) | 2020-05-19 | 2021-11-24 | ASML Netherlands B.V. | A supercontinuum radiation source and associated metrology devices |
| EP3958052A1 (en) | 2020-08-20 | 2022-02-23 | ASML Netherlands B.V. | Metrology method for measuring an exposed pattern and associated metrology apparatus |
| IL300587A (en) | 2020-09-03 | 2023-04-01 | Asml Netherlands Bv | Photonic crystal radiation generator based on broadband hollow crystal fibers |
| KR20220032922A (ko) | 2020-09-08 | 2022-03-15 | 삼성전자주식회사 | 퓨필 타원 편광 계측 장치 및 방법, 및 그 방법을 이용한 반도체 소자 제조방법 |
| EP4012494A1 (en) | 2020-12-10 | 2022-06-15 | ASML Netherlands B.V. | Hollow-core photonic crystal fiber based broadband radiation generator |
| CN113091624B (zh) * | 2021-03-04 | 2022-08-16 | 上海精测半导体技术有限公司 | 一种探测反射光变化的装置及方法 |
| WO2023160924A1 (en) * | 2022-02-22 | 2023-08-31 | Asml Netherlands B.V. | Method and apparatus for reflecting pulsed radiation |
| JP2023142214A (ja) * | 2022-03-24 | 2023-10-05 | 株式会社Ｓｃｒｅｅｎホールディングス | 光学装置、露光装置および露光方法 |
| CN115407621B (zh) * | 2022-11-01 | 2023-03-24 | 合肥新晶集成电路有限公司 | 曝光套刻精度的控制方法、控制装置及套刻系统 |
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|---|---|---|---|---|
| US5166752A (en) * | 1990-01-11 | 1992-11-24 | Rudolph Research Corporation | Simultaneous multiple angle/multiple wavelength ellipsometer and method |
| JPH05157521A (ja) * | 1991-08-29 | 1993-06-22 | Nkk Corp | エリプソパラメータ測定方法及びエリプソメータ |
| US5880838A (en) * | 1996-06-05 | 1999-03-09 | California Institute Of California | System and method for optically measuring a structure |
| US6031615A (en) * | 1997-09-22 | 2000-02-29 | Candela Instruments | System and method for simultaneously measuring lubricant thickness and degradation, thin film thickness and wear, and surface roughness |
| US6757056B1 (en) * | 2001-03-26 | 2004-06-29 | Candela Instruments | Combined high speed optical profilometer and ellipsometer |
| US7068833B1 (en) * | 2000-08-30 | 2006-06-27 | Kla-Tencor Corporation | Overlay marks, methods of overlay mark design and methods of overlay measurements |
| EP1245922B1 (en) | 2001-03-26 | 2010-05-12 | Candela Instruments | System for measuring phase differences in reflected light signals |
| US6678046B2 (en) * | 2001-08-28 | 2004-01-13 | Therma-Wave, Inc. | Detector configurations for optical metrology |
| WO2004053426A1 (en) | 2002-12-05 | 2004-06-24 | Kla-Tencor Technologies Corporation | Apparatus and methods for detecting overlay errors using scatterometry |
| US6965431B2 (en) * | 2003-02-28 | 2005-11-15 | Ut-Battelle, Llc | Integrated tunable optical sensor (ITOS) system |
| IL162290A (en) * | 2004-06-01 | 2013-06-27 | Nova Measuring Instr Ltd | Optical measurement system |
| US7791727B2 (en) | 2004-08-16 | 2010-09-07 | Asml Netherlands B.V. | Method and apparatus for angular-resolved spectroscopic lithography characterization |
| US7161669B2 (en) * | 2005-05-06 | 2007-01-09 | Kla- Tencor Technologies Corporation | Wafer edge inspection |
| US7692792B2 (en) * | 2006-06-22 | 2010-04-06 | Asml Netherlands B.V. | Method and apparatus for angular-resolved spectroscopic lithography characterization |
| US7701577B2 (en) * | 2007-02-21 | 2010-04-20 | Asml Netherlands B.V. | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
-
2008
- 2008-10-22 IL IL194839A patent/IL194839A0/en unknown
- 2008-10-22 SG SG200807879-2A patent/SG152187A1/en unknown
- 2008-10-23 US US12/256,780 patent/US8115926B2/en not_active Expired - Fee Related
- 2008-10-24 TW TW097141105A patent/TW200925794A/zh unknown
- 2008-10-24 EP EP08253455A patent/EP2053349A3/en not_active Withdrawn
- 2008-10-24 CN CNA2008101887869A patent/CN101482702A/zh active Pending
- 2008-10-24 KR KR1020080104965A patent/KR20090042195A/ko not_active Application Discontinuation
- 2008-10-27 JP JP2008275692A patent/JP4871943B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR20090042195A (ko) | 2009-04-29 |
| US20090168062A1 (en) | 2009-07-02 |
| US8115926B2 (en) | 2012-02-14 |
| JP4871943B2 (ja) | 2012-02-08 |
| TW200925794A (en) | 2009-06-16 |
| EP2053349A3 (en) | 2009-06-24 |
| EP2053349A2 (en) | 2009-04-29 |
| IL194839A0 (en) | 2009-08-03 |
| JP2009177134A (ja) | 2009-08-06 |
| CN101482702A (zh) | 2009-07-15 |
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