SG11202106774PA - Vertical probe head having an improved contact with a device under test - Google Patents
Vertical probe head having an improved contact with a device under testInfo
- Publication number
- SG11202106774PA SG11202106774PA SG11202106774PA SG11202106774PA SG11202106774PA SG 11202106774P A SG11202106774P A SG 11202106774PA SG 11202106774P A SG11202106774P A SG 11202106774PA SG 11202106774P A SG11202106774P A SG 11202106774PA SG 11202106774P A SG11202106774P A SG 11202106774PA
- Authority
- SG
- Singapore
- Prior art keywords
- under test
- device under
- probe head
- improved contact
- vertical probe
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT102018000021253A IT201800021253A1 (it) | 2018-12-27 | 2018-12-27 | Testa di misura a sonde verticali avente un contatto perfezionato con un dispositivo da testare |
PCT/EP2019/085709 WO2020136045A1 (en) | 2018-12-27 | 2019-12-17 | Vertical probe head having an improved contact with a device under test |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202106774PA true SG11202106774PA (en) | 2021-07-29 |
Family
ID=66049576
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202106774PA SG11202106774PA (en) | 2018-12-27 | 2019-12-17 | Vertical probe head having an improved contact with a device under test |
Country Status (8)
Country | Link |
---|---|
US (1) | US11867723B2 (it) |
EP (1) | EP3903111A1 (it) |
JP (1) | JP2022515457A (it) |
KR (1) | KR20210108436A (it) |
CN (1) | CN113272661A (it) |
IT (1) | IT201800021253A1 (it) |
SG (1) | SG11202106774PA (it) |
WO (1) | WO2020136045A1 (it) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4261547A1 (en) * | 2022-04-12 | 2023-10-18 | Microtest S.p.A. | Testing head with vertical probes for a probe card and corresponding method of assembly |
KR102475883B1 (ko) * | 2022-11-09 | 2022-12-08 | 윌테크놀러지(주) | 니들 팁의 길이조절을 위한 가변형 스페이서를 갖는 니들블럭 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4506215A (en) * | 1981-06-30 | 1985-03-19 | International Business Machines Corporation | Modular test probe |
US4622514A (en) * | 1984-06-15 | 1986-11-11 | Ibm | Multiple mode buckling beam probe assembly |
US5367254A (en) * | 1993-02-01 | 1994-11-22 | International Business Machines Corporation | Test probe assembly using buckling wire probes within tubes having opposed overlapping slots |
DE69326609T2 (de) * | 1993-07-23 | 2000-04-27 | Ibm | Testsondenanordnung mit Knicknadeln |
US6404211B2 (en) * | 1999-02-11 | 2002-06-11 | International Business Machines Corporation | Metal buckling beam probe |
IT1317517B1 (it) * | 2000-05-11 | 2003-07-09 | Technoprobe S R L | Testa di misura per microstrutture |
ITMI20012574A1 (it) * | 2001-12-06 | 2003-06-06 | Technoprobe S R L | Sonda di contattatura per una testa di misura |
PL1580562T3 (pl) * | 2004-03-24 | 2008-02-29 | Technoprobe Spa | Sonda kontaktowa do głowicy testującej |
US7180318B1 (en) * | 2004-10-15 | 2007-02-20 | Xilinx, Inc. | Multi-pitch test probe assembly for testing semiconductor dies having contact pads |
JP5337341B2 (ja) * | 2006-11-30 | 2013-11-06 | 株式会社日本マイクロニクス | 電気的接続装置およびその組み立て方法 |
JP4539681B2 (ja) * | 2007-06-04 | 2010-09-08 | 三菱電機株式会社 | ウエハテスト用プローブカード |
WO2016108520A1 (ko) * | 2015-01-04 | 2016-07-07 | 김일 | 검사접촉장치 |
KR20170125070A (ko) * | 2015-03-13 | 2017-11-13 | 테크노프로브 에스.피.에이. | 상이한 작동 조건 하에서 각각의 가이드 구멍 내에서 개선된 슬라이드 이동을 하고 테스트 헤드 내에서 프로브를 정확히 유지하는 수직형 프로브를 구비한 테스트 헤드 |
IT201700017061A1 (it) * | 2017-02-15 | 2018-08-15 | Technoprobe Spa | Scheda di misura perfezionata per applicazioni ad alta frequenza |
-
2018
- 2018-12-27 IT IT102018000021253A patent/IT201800021253A1/it unknown
-
2019
- 2019-12-17 JP JP2021537176A patent/JP2022515457A/ja active Pending
- 2019-12-17 CN CN201980086156.7A patent/CN113272661A/zh active Pending
- 2019-12-17 KR KR1020217023265A patent/KR20210108436A/ko unknown
- 2019-12-17 SG SG11202106774PA patent/SG11202106774PA/en unknown
- 2019-12-17 EP EP19818146.3A patent/EP3903111A1/en active Pending
- 2019-12-17 WO PCT/EP2019/085709 patent/WO2020136045A1/en unknown
-
2021
- 2021-06-24 US US17/357,833 patent/US11867723B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
IT201800021253A1 (it) | 2020-06-27 |
WO2020136045A1 (en) | 2020-07-02 |
CN113272661A (zh) | 2021-08-17 |
US20210318355A1 (en) | 2021-10-14 |
TW202024647A (zh) | 2020-07-01 |
US11867723B2 (en) | 2024-01-09 |
KR20210108436A (ko) | 2021-09-02 |
JP2022515457A (ja) | 2022-02-18 |
EP3903111A1 (en) | 2021-11-03 |
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