SG11202006521VA - Cantilever contact probe and corresponding probe head - Google Patents

Cantilever contact probe and corresponding probe head

Info

Publication number
SG11202006521VA
SG11202006521VA SG11202006521VA SG11202006521VA SG11202006521VA SG 11202006521V A SG11202006521V A SG 11202006521VA SG 11202006521V A SG11202006521V A SG 11202006521VA SG 11202006521V A SG11202006521V A SG 11202006521VA SG 11202006521V A SG11202006521V A SG 11202006521VA
Authority
SG
Singapore
Prior art keywords
probe
cantilever contact
head
probe head
contact probe
Prior art date
Application number
SG11202006521VA
Inventor
Riccardo Vettori
Original Assignee
Technoprobe Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technoprobe Spa filed Critical Technoprobe Spa
Publication of SG11202006521VA publication Critical patent/SG11202006521VA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
SG11202006521VA 2018-01-17 2019-01-16 Cantilever contact probe and corresponding probe head SG11202006521VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT201800001173A IT201800001173A1 (en) 2018-01-17 2018-01-17 Cantilever-type contact probe and relative measuring head
PCT/EP2019/051024 WO2019141716A1 (en) 2018-01-17 2019-01-16 Cantilever contact probe and corresponding probe head

Publications (1)

Publication Number Publication Date
SG11202006521VA true SG11202006521VA (en) 2020-08-28

Family

ID=62002236

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202006521VA SG11202006521VA (en) 2018-01-17 2019-01-16 Cantilever contact probe and corresponding probe head

Country Status (10)

Country Link
US (1) US11307221B2 (en)
EP (1) EP3740765B1 (en)
JP (1) JP7361036B2 (en)
KR (1) KR20200110681A (en)
CN (1) CN111602063B (en)
IT (1) IT201800001173A1 (en)
PH (1) PH12020551056A1 (en)
SG (1) SG11202006521VA (en)
TW (1) TWI814768B (en)
WO (1) WO2019141716A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201800001170A1 (en) * 2018-01-17 2019-07-17 Technoprobe Spa Cantilever-type measuring head and relative contact probe
TWI718770B (en) * 2019-11-19 2021-02-11 松翰股份有限公司 Micro-electromechanical structure of probe card of image sensor chip
TWI745182B (en) * 2020-11-30 2021-11-01 中華精測科技股份有限公司 Probe card device and dual-arm probe
KR102235344B1 (en) 2020-12-31 2021-04-05 황동원 Contact pin, and a spring contact and test socket with the same for high speed signal ic test
TWI802876B (en) * 2021-04-29 2023-05-21 豪勉科技股份有限公司 Stacked needle point measuring device
JP2022187216A (en) * 2021-06-07 2022-12-19 株式会社日本マイクロニクス probe
KR20230032064A (en) 2021-08-30 2023-03-07 (주)포인트엔지니어링 The cantilever contact probe pin
US11959941B2 (en) 2021-12-27 2024-04-16 Industrial Technology Research Institute Probe card
TWI802178B (en) * 2021-12-27 2023-05-11 財團法人工業技術研究院 Probe card
CN115219750A (en) * 2022-07-07 2022-10-21 深圳市斯纳达科技有限公司 Three-dimensional electric probe base with force feedback

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002365308A (en) * 2001-06-08 2002-12-18 Japan Electronic Materials Corp Vertical blade type probe, vertical blade type probe unit and vertical blade type probe card using the same
DE102004036407A1 (en) * 2003-08-27 2005-06-09 Japan Electronic Materials Corp., Amagasaki Probe card and connector for this
JP2005069712A (en) 2003-08-27 2005-03-17 Japan Electronic Materials Corp Probe card and contact used for the same
KR100687027B1 (en) * 2005-02-22 2007-02-26 세크론 주식회사 Structure and method for manufacturing probe and prob card
KR200411355Y1 (en) * 2005-12-26 2006-03-15 송광석 Probe card for semiconductor test
JP2007303826A (en) 2006-05-08 2007-11-22 Tokyo Electron Ltd Probe
JP5113392B2 (en) * 2007-01-22 2013-01-09 株式会社日本マイクロニクス Probe and electrical connection device using the same
US7823216B2 (en) * 2007-08-02 2010-10-26 Veeco Instruments Inc. Probe device for a metrology instrument and method of fabricating the same
JP2011043377A (en) 2009-08-20 2011-03-03 Tokyo Electron Ltd Contact structure for inspection
CN102062794B (en) * 2009-11-13 2014-05-14 旺矽科技股份有限公司 Vertical probe card
KR101278713B1 (en) * 2011-03-08 2013-06-25 (주)엠투엔 Probe card and method of manufacture
CN202004570U (en) * 2011-04-01 2011-10-05 中山大洋电机制造有限公司 Novel waterproof structure of motor
TWI428607B (en) * 2011-07-12 2014-03-01 Chipmos Technologies Inc Probe card
WO2016087369A2 (en) * 2014-12-04 2016-06-09 Technoprobe S.P.A. Testing head comprising vertical probes
CN105467174B (en) * 2015-11-23 2018-11-09 上海华岭集成电路技术股份有限公司 A method of obtaining the cantalever type probe system maintenance period
CN206652220U (en) * 2017-04-21 2017-11-21 明君 A kind of sports equipment storage device
IT201800001170A1 (en) * 2018-01-17 2019-07-17 Technoprobe Spa Cantilever-type measuring head and relative contact probe

Also Published As

Publication number Publication date
JP2021511502A (en) 2021-05-06
CN111602063B (en) 2023-11-07
IT201800001173A1 (en) 2019-07-17
PH12020551056A1 (en) 2021-08-23
TWI814768B (en) 2023-09-11
EP3740765B1 (en) 2022-08-03
JP7361036B2 (en) 2023-10-13
US20200348337A1 (en) 2020-11-05
CN111602063A (en) 2020-08-28
EP3740765A1 (en) 2020-11-25
WO2019141716A1 (en) 2019-07-25
US11307221B2 (en) 2022-04-19
KR20200110681A (en) 2020-09-24
TW201932845A (en) 2019-08-16

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