SG11202006479PA - Cantilever probe head and corresponding contact probe - Google Patents
Cantilever probe head and corresponding contact probeInfo
- Publication number
- SG11202006479PA SG11202006479PA SG11202006479PA SG11202006479PA SG11202006479PA SG 11202006479P A SG11202006479P A SG 11202006479PA SG 11202006479P A SG11202006479P A SG 11202006479PA SG 11202006479P A SG11202006479P A SG 11202006479PA SG 11202006479P A SG11202006479P A SG 11202006479PA
- Authority
- SG
- Singapore
- Prior art keywords
- probe
- corresponding contact
- cantilever
- head
- probe head
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06727—Cantilever beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT201800001170A IT201800001170A1 (en) | 2018-01-17 | 2018-01-17 | Cantilever-type measuring head and relative contact probe |
PCT/EP2019/050837 WO2019141633A1 (en) | 2018-01-17 | 2019-01-14 | Cantilever probe head and corresponding contact probe |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202006479PA true SG11202006479PA (en) | 2020-08-28 |
Family
ID=62044830
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202006479PA SG11202006479PA (en) | 2018-01-17 | 2019-01-14 | Cantilever probe head and corresponding contact probe |
Country Status (10)
Country | Link |
---|---|
US (1) | US11333681B2 (en) |
EP (1) | EP3740764B1 (en) |
JP (2) | JP2021512283A (en) |
KR (1) | KR20200109349A (en) |
CN (1) | CN111587377B (en) |
IT (1) | IT201800001170A1 (en) |
PH (1) | PH12020551091A1 (en) |
SG (1) | SG11202006479PA (en) |
TW (1) | TWI815846B (en) |
WO (1) | WO2019141633A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT201800001173A1 (en) * | 2018-01-17 | 2019-07-17 | Technoprobe Spa | Cantilever-type contact probe and relative measuring head |
US11719719B2 (en) * | 2021-06-16 | 2023-08-08 | Bruker Nano, Inc. | Metrology probe with built-in angle and method of fabrication thereof |
CN114324988B (en) * | 2021-07-28 | 2024-03-01 | 苏州联讯仪器股份有限公司 | Probe seat |
JP2023141024A (en) * | 2022-03-23 | 2023-10-05 | 株式会社日本マイクロニクス | Probe, probe holding device, and method for manufacturing probe |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3094007B2 (en) * | 1998-06-02 | 2000-10-03 | 日本電子材料株式会社 | Probe and probe card using this probe |
US6917525B2 (en) * | 2001-11-27 | 2005-07-12 | Nanonexus, Inc. | Construction structures and manufacturing processes for probe card assemblies and packages having wafer level springs |
JP3392079B2 (en) * | 1999-08-09 | 2003-03-31 | 日本電子材料株式会社 | Probe card |
JP2004294063A (en) * | 2003-03-25 | 2004-10-21 | Ngk Insulators Ltd | Probe and probe card |
US6956389B1 (en) * | 2004-08-16 | 2005-10-18 | Jem America Corporation | Highly resilient cantilever spring probe for testing ICs |
TWI263293B (en) * | 2005-09-28 | 2006-10-01 | Star Techn Inc | Probe card for integrated circuits |
JP2007218840A (en) * | 2006-02-20 | 2007-08-30 | Fujitsu Ltd | Probe, probe card, and inspecting device |
JP5113392B2 (en) * | 2007-01-22 | 2013-01-09 | 株式会社日本マイクロニクス | Probe and electrical connection device using the same |
JP5069542B2 (en) * | 2007-12-03 | 2012-11-07 | 株式会社日本マイクロニクス | Probe card |
TW201028695A (en) * | 2009-01-22 | 2010-08-01 | King Yuan Electronics Co Ltd | Probe card |
TWI388840B (en) * | 2009-02-26 | 2013-03-11 | Star Techn Inc | Probe card for integrated circuits |
TWI447397B (en) * | 2010-05-17 | 2014-08-01 | Star Techn Inc | Probe card |
CN102692528B (en) * | 2011-03-24 | 2015-05-13 | 旺矽科技股份有限公司 | Cantilever type probe card |
JP6103821B2 (en) * | 2012-05-29 | 2017-03-29 | 株式会社日本マイクロニクス | Probe for current test |
JP2014016204A (en) * | 2012-07-06 | 2014-01-30 | Micronics Japan Co Ltd | Electric contact and contact method of electric contact |
CN103543304B (en) * | 2012-07-13 | 2016-05-18 | 旺矽科技股份有限公司 | High-frequency probe card |
ITMI20122023A1 (en) * | 2012-11-28 | 2014-05-29 | Technoprobe Spa | SHIELD CONTACT PROBE [CANTILEVER] FOR A MEASURING HEAD |
JP6360502B2 (en) * | 2015-07-31 | 2018-07-18 | 日本電子材料株式会社 | Probe card |
IT201800001173A1 (en) * | 2018-01-17 | 2019-07-17 | Technoprobe Spa | Cantilever-type contact probe and relative measuring head |
-
2018
- 2018-01-17 IT IT201800001170A patent/IT201800001170A1/en unknown
-
2019
- 2019-01-14 WO PCT/EP2019/050837 patent/WO2019141633A1/en active Search and Examination
- 2019-01-14 EP EP19700314.8A patent/EP3740764B1/en active Active
- 2019-01-14 TW TW108101404A patent/TWI815846B/en active
- 2019-01-14 KR KR1020207023513A patent/KR20200109349A/en not_active Application Discontinuation
- 2019-01-14 CN CN201980008173.9A patent/CN111587377B/en active Active
- 2019-01-14 JP JP2020539201A patent/JP2021512283A/en active Pending
- 2019-01-14 SG SG11202006479PA patent/SG11202006479PA/en unknown
-
2020
- 2020-07-08 PH PH12020551091A patent/PH12020551091A1/en unknown
- 2020-07-16 US US16/931,183 patent/US11333681B2/en active Active
-
2023
- 2023-09-22 JP JP2023159086A patent/JP2023169352A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
US20200348336A1 (en) | 2020-11-05 |
CN111587377A (en) | 2020-08-25 |
JP2023169352A (en) | 2023-11-29 |
IT201800001170A1 (en) | 2019-07-17 |
TW201932848A (en) | 2019-08-16 |
PH12020551091A1 (en) | 2021-09-06 |
WO2019141633A1 (en) | 2019-07-25 |
KR20200109349A (en) | 2020-09-22 |
TWI815846B (en) | 2023-09-21 |
EP3740764A1 (en) | 2020-11-25 |
US11333681B2 (en) | 2022-05-17 |
JP2021512283A (en) | 2021-05-13 |
EP3740764B1 (en) | 2022-08-10 |
CN111587377B (en) | 2023-07-14 |
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