SG11202106419XA - Method of fabricating a device comprising a membrane overhanging a cavity - Google Patents

Method of fabricating a device comprising a membrane overhanging a cavity

Info

Publication number
SG11202106419XA
SG11202106419XA SG11202106419XA SG11202106419XA SG11202106419XA SG 11202106419X A SG11202106419X A SG 11202106419XA SG 11202106419X A SG11202106419X A SG 11202106419XA SG 11202106419X A SG11202106419X A SG 11202106419XA SG 11202106419X A SG11202106419X A SG 11202106419XA
Authority
SG
Singapore
Prior art keywords
fabricating
cavity
overhanging
membrane
membrane overhanging
Prior art date
Application number
SG11202106419XA
Other languages
English (en)
Inventor
Bruno Ghyselen
Original Assignee
Soitec Silicon On Insulator
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec Silicon On Insulator filed Critical Soitec Silicon On Insulator
Publication of SG11202106419XA publication Critical patent/SG11202106419XA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
SG11202106419XA 2018-12-20 2019-12-12 Method of fabricating a device comprising a membrane overhanging a cavity SG11202106419XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1873602A FR3090615B1 (fr) 2018-12-20 2018-12-20 Procédé de fabrication d’un dispositif comprenant une membrane surplombant une cavité
PCT/FR2019/053039 WO2020128245A1 (fr) 2018-12-20 2019-12-12 Procede de fabrication d'un dispositif comprenant une membrane surplombant une cavite

Publications (1)

Publication Number Publication Date
SG11202106419XA true SG11202106419XA (en) 2021-07-29

Family

ID=66676725

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202106419XA SG11202106419XA (en) 2018-12-20 2019-12-12 Method of fabricating a device comprising a membrane overhanging a cavity

Country Status (9)

Country Link
US (1) US11939214B2 (ja)
EP (1) EP3898503A1 (ja)
JP (1) JP7368057B2 (ja)
KR (1) KR20210104823A (ja)
CN (1) CN113226978A (ja)
FR (1) FR3090615B1 (ja)
SG (1) SG11202106419XA (ja)
TW (1) TWI800699B (ja)
WO (1) WO2020128245A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3111628B1 (fr) 2020-06-18 2022-06-17 Commissariat Energie Atomique Procédé de fabrication d’un dispositif microélectronique comprenant une membrane suspendue au-dessus d’une cavité
FR3138657A1 (fr) 2022-08-08 2024-02-09 Airmems Commutateur MEMS à multiples déformations et commutateur comprenant un ou plusieurs commutateurs MEMS

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4214567B2 (ja) * 1997-08-05 2009-01-28 株式会社デンソー 圧力センサ用半導体基板の製造方法
JP3435665B2 (ja) * 2000-06-23 2003-08-11 株式会社村田製作所 複合センサ素子およびその製造方法
JP3782095B2 (ja) * 2002-06-24 2006-06-07 松下電器産業株式会社 赤外線センサの製造方法
US6958255B2 (en) * 2002-08-08 2005-10-25 The Board Of Trustees Of The Leland Stanford Junior University Micromachined ultrasonic transducers and method of fabrication
DE102004027501A1 (de) * 2004-06-04 2005-12-22 Robert Bosch Gmbh Mikromechanisches Bauelement mit mehreren Kavernen und Herstellungsverfahren
US7998829B2 (en) * 2007-12-11 2011-08-16 Hvvi Semiconductors, Inc. Semiconductor structure and method of manufacture
US8429969B2 (en) * 2009-04-17 2013-04-30 Hitachi, Ltd. Inertial sensor and method of manufacturing the same
JP5732203B2 (ja) * 2010-05-21 2015-06-10 日立オートモティブシステムズ株式会社 複合センサの製造方法
JP5751332B2 (ja) * 2011-08-25 2015-07-22 株式会社ニコン 空間光変調素子の製造方法、空間光変調素子、空間光変調器および露光装置
CA2898453C (en) 2013-03-13 2021-07-27 Illumina, Inc. Multilayer fluidic devices and methods for their fabrication
US20160178467A1 (en) * 2014-07-29 2016-06-23 Silicon Microstructures, Inc. Pressure sensor having cap-defined membrane
JP2017106857A (ja) * 2015-12-11 2017-06-15 ローム株式会社 半導体式ガスセンサ、半導体式ガスセンサの製造方法、およびセンサネットワークシステム
DE102016113347A1 (de) * 2016-07-20 2018-01-25 Infineon Technologies Ag Verfahren zum produzieren eines halbleitermoduls
IT201600121533A1 (it) * 2016-11-30 2018-05-30 St Microelectronics Srl Trasduttore elettroacustico integrato mems con sensibilita' migliorata e relativo processo di fabbricazione
CA3046659A1 (en) * 2016-12-22 2018-06-28 Illumina, Inc. Flow cell package and method for making the same

Also Published As

Publication number Publication date
TWI800699B (zh) 2023-05-01
US11939214B2 (en) 2024-03-26
WO2020128245A1 (fr) 2020-06-25
CN113226978A (zh) 2021-08-06
FR3090615A1 (fr) 2020-06-26
FR3090615B1 (fr) 2020-12-11
JP2022513753A (ja) 2022-02-09
EP3898503A1 (fr) 2021-10-27
TW202029289A (zh) 2020-08-01
KR20210104823A (ko) 2021-08-25
JP7368057B2 (ja) 2023-10-24
US20210387853A1 (en) 2021-12-16

Similar Documents

Publication Publication Date Title
EP3761864C0 (en) METHOD FOR MANUFACTURING A MICRONEEDLE PLATFORM
EP3586905A4 (en) PROCESS FOR THE PRODUCTION OF A MICRO-NEEDLE DEVICE
PL3378434T3 (pl) Sposób wytwarzania struktury dentystycznej
IL251760B (en) A method for producing a diamond membrane
IL281657A (en) Membrane assembly manufacturing method
GB201804627D0 (en) A method of communicating
EP3345649A4 (en) METHOD FOR MANUFACTURING MICRO NEEDLE
IL283776A (en) Membrane assembly manufacturing method
SG10201912499PA (en) A method of forming a thin film through-hole membrane
SG11202106419XA (en) Method of fabricating a device comprising a membrane overhanging a cavity
EP3797010A4 (en) METHOD OF MAKING A MOLDING
PL3414051T3 (pl) Sposób wytwarzania kształtki ceramicznej
GB2566309B (en) A method for the manufacture of a MEMS device
DK3448063T3 (da) Fremgangsmåde til at tilpasse en høreindretning
GB201809783D0 (en) A method of producing a structure
SG11202011616PA (en) Method For Producing A Molded Body
ZA201900037B (en) Method for producing a membrane filter
GB201812846D0 (en) A semipermeable arrangement and method of manufacture
GB2594142B (en) A moulding method
EP3606718A4 (en) MANIFOLD MANUFACTURING PROCESS
DK3197179T3 (da) Mikrofon til et høreapparat
GB201613973D0 (en) Method of making a flexible membrane and mold therefor, membrane and variable focus lens
GB201809160D0 (en) Methods of manufacturing a graphene-based device
EP3534624C0 (de) Verfahren zum betrieb eines hörgerätes
IL277565A (en) A process for producing membrane protein